Copper-fundamental mechanisms for microelectronic applications /
Murarka, S. P.
Verner, Igor V.,1955-
Gutmann, Ronald J.
New York, N.Y. ; Chichester : John Wiley,
c2000.
"A Wiley-Interscience publication."
Includes bibliographical references and index.
Semiconductors
Copper.
Metallizing.
Semiconductors
Microelectronics.
Copper-fundamental mechanisms for microelectronic applications.