Atomic layer deposition : principles, characteristics, and nanotechnology applications /
Kääriäinen, Tommi.
Cameron, David,1949-
Kääriäinen, Marja-Leena.
Sherman, Arthur,1931-
Includes bibliographical references and index.
Chemical vapor deposition.
Epitaxy.
Microelectronics.
Nanotechnology.
Atomic layer deposition