The certification of 100 mm diameter silicon resistivity SRMs 2541 through 2547 using dual-configuration four-point probe measurements, 1999 edition /
Ehrstein, James R.
Croarkin, M. C.(Mary Carroll),1934-
National Institute of Standards and Technology (U.S.)
Gaithersburg, MD : U.S. Department of Commerce, Technology Administration, National Institute of Standards and Technology,
1999.
"Issued June 1999."
Includes bibliographical references.
Silicon.
Silicon