Stress-induced phenomena in metallization : second international workshop, Austin, TX, March 1993 /
Ho, P. S.
Li, Che-Yu.
Totta, Paul.
New York : American Institute of Physics,
c1994.
"DOE CONF-9303142"--T.p. verso.
Includes bibliographical references and index.
Semiconductors
Metallic films
Thin film devices
Aluminum films