Thin film reference materials development [microform] : final report for CRADA CN-1364 /
Belzer, Barbara J.
National Institute of Standards and Technology (U.S.)
Gaithersburg, MD : U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology ; Washington, DC : For sale by the Supt. of Docs., U.S. G.P.O.,
1998.
"April 1998."
Shipping list no.: 99-0049-M.
Includes bibliographical references (p. 26-27).
Microfiche.
Silica
Thin-film circuits.