Microsystem technologies [electronic resource] : sensors, actuators, systems integration.
Berlin : Springer
Description based on: Vol. 7, no. 2 (Feb. 1997); title from journal home page (SpringerLink, viewed July 17, 2009).
Latest issue consulted: Vol. 15, no. 8 (Aug. 2009) (SpringerLink, viewed July 17, 2009).
Several nos. combined.
Microelectronics
Detectors
Actuators
Miniature electronic equipment
Also issued in print.
Microsystem technologies
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