Introduction to microlithography /
Thompson, L. F.,1944-
Willson, C. G.(C. Grant),1939-
Bowden, M. J.,1943-
Washington, DC : American Chemical Society,
1994.
Includes bibliographical references and index.
An introduction to lithography / Larry F. Thompson -- The lithographic process / Murrae J. Bowden -- Organic resist materials / C. Grant Willson -- Resist processing / Larry Thompson -- Plasma etching / J.A. Mucha, D.W. Hess, and E.S. Aydil.
Microlithography
Photoresists
Plasma etching
Semiconductors