Handbook of microlithography, mircomachining, and microfabrication /
Rai-Choudhury, P.
International Society for Optical Engineering.
Institution of Electrical Engineers.
Bellingham, Wash. : SPIE ; London : IEE,
c1997.
v. 1. Microlithography -- v. 2. Micromachining and microfabrication.