Integration of ferroelectric and piezoelectric thin films : concepts and applications for microsystems /
Defaÿ, Emmanuel.
London : ISTE/Wiley,
2011.
Includes bibliographical references and index.
Dielectric, piezoelectric, pyroelectric, and ferroelectric -- Thermodynamic study : a structuring approach -- Ferroelectric-paraelectric phase transition thermodynamic modelling -- Mechanical formalism -- Dielectric formalism -- Piezoelectric formalism -- Acoustic formalism -- Electrostrictive formalism -- Electric characterization -- Piezoelectric resonators and filters -- High overtone bulk acoustic resonator (HBAR) -- Electrostrictive resonators -- Thin film piezoelectric transducers.
Piezoelectric devices
Ferroelectric thin films.
Miniature electronic equipment