Micro- and nanopatterning polymers /
Itō, Hiroshi.
American Chemical Society.Division of Polymeric Materials: Science and Engineering.
American Chemical Society.Meeting(214th :1997 :Las Vegas, Nev.)
Washington, DC : American Chemical Society,
c1998.
"Developed from a symposium sponsored by the Division of Polymeric Materials: Science and Engineering at the 214th ACS National Meeting, Las Vegas, Nevada, September 7-11, 1997.".
Includes bibliographical references and indexes.
Microelectronics
Polymeric composites
Photoresists