Characterization of Charge Trapping Phenomena in GaN-based HEMTs

This dissertation reports on charge-trapping phenomena and related parasitic effects in AlGaN/GaN high electron mobility transistors. By means of static and pulsed I-V measurements and deep-level transient spectroscopy, the main charge-trapping mechanisms affecting the dynamic performance of GaN-based HEMTs devoted to microwave and power switching applications have been comprehensively characterized, identifying the nature and the localization of the deep-levels responsible for the electrically active trap-states. A high-voltage measurement system capable for double-pulsed ID-VD, ID-VG and drain-current transient spectroscopy has been successfully designed and implemented. A characterization methodology, including the analysis of static I-V measurements, pulsed I-V measurements, and deep-level transient spectroscopy, has been developed to investigate the impact of voltage, current, and temperature on the parasitic effects of charge-trapping (threshold voltage instabilities, dynamic on-resistance increase, and transconductance reduction), and on trapping/detrapping kinetics. Experimental results gathered on transistor structures are supported by complementary capacitance deep-level transient spectroscopy (C-DLTS) performed on 2-terminal diode (FATFET) structures. Two main case-studies have been investigated. Schottky-gated AlGaN/GaN HEMTs grown on silicon carbide substrate employing iron and/or carbon doped buffers devoted to microwave applications, and MIS-gated double-heterostructure AlGaN/GaN/AlGaN HEMTs grown on silicon substrate devoted to power switching applications. The devices under test have been exposed to the complete set of current-voltage regimes experienced during the real life operations, including off-state, semi-on-state, and on-state. The main novel results are reported in the following: • Identification of a charge-trapping mechanism promoted by hot-electrons. This mechanism is critical in semi-on-state, with the combination of relatively high electric-field and relatively high drain-source current. • Identification of a positive temperature-dependent charge-trapping mechanism localized in the buffer-layer, potentially promoted by the vertical drain to substrate potential. This mechanism is critical in high drain-voltage off-state bias in high temperature operations. • Identification of deep-levels and charge-trapping related to the presence of doping compensation agents (iron and carbon) within the GaN buffer layer. • Identification of charge-trapping mechanism ascribed to the SiNX and/or Al2O3 insulating layers of MIS-gated HEMTs. This mechanism is promoted in the on-state with positive gate-voltage and positive gate leakage current. • Identification of a potential charge-trapping mechanism ascribed to reverse gate leakage current in Schottky-gate HEMTs exposed to high-voltage off-state. • The characterization of surface-traps in ungated and unpassivated devices by means of drain-current transient spectroscopy reveals a non-exponential and weakly thermally-activated detrapping behaviour. • Preliminary synthesis of a degradation mechanism characterized by the generation of defect-states, the worsening of parasitic charge-trapping effects, and the degradation of rf performance of AlGaN/GaN HEMTs devoted to microwave operations. The evidence of this degradation mechanism is appreciable only by means of rf or pulsed I-V measurements: no apparent degradation is found by means of DC analysis.