Plasma Electronics: Applications in Microelectronic Device Fabrication

Introduction Plasma and Its Classification Application of Low Temperature Plasma Academic Fusion References Phenomenological Description of the Charged Particle Transport Transport in Real (Configuration) Space Momentum Balance of Electrons Energy Balance of Electrons Transport in Velocity Space Electron Velocity Distribution and Swarm Parameters Ion Velocity Distribution and Mean Energy Thermal Equilibrium and its Governing Relations Boltzmann Distribution in Real Space Maxwell Distribution in Velocity Space References Macroscopic Plasma Characteristics Introduction Quasi Neutrality Charge separation In Plasmas Spatial Scale of Charge-Separation Time Scale for Charge-Separation Plasma Shielding Debye Shielding Metal Probe in a Plasma Particle Diffusion Ambipolar Diffusion Spatial and Time Scale of Diffusion Bohm Sheath Criterion Bohm Velocity Floating Potential References Elementary Processes in Gas Phase and on Surfaces Particles and Waves Particle Representation in Classical and Quantum Mechanics Locally Isolated Particle Group and Wave Packets Collisions and Cross Sections Conservation Laws in Collisions Definition of Collision Cross Sections The Distribution of Free Paths Representation of Collisions in Laboratory and CM Reference Frames Classical Collision Theory Scattering in Classical Mechanics Conditions for the Applicability of the Classical Scattering Theory Quantum Theory Of Scattering Differential Scattering Cross Section sigma(theta) Modified Effective Range Theory in Electron Scattering Collisions Between Electrons And Neutral Atoms/Molecules Resonant Scattering Electron-Atom Collisions Energy Levels of Atoms Electron-Atom Scattering Cross Sections Electron-Molecule Collisions Rotational, Vibrational, and Electronic Energy Levels of Molecules Rotational Excitation Rotational Energy Levels Rotational Excitation Cross Sections Vibrational Excitation Vibrational Energy Levels Vibrational Cross Sections Electronic Excitation and Dissociation Electronic States of Molecules Cross Sections for Electronic Excitation of Molecules Electron Collisions with Excited Atoms and Molecules Nonconservative Collisions of Electrons With Atoms and Molecules Electron-Induced Ionization Electron Attachment Dissociative Electron Attachment Nondissociative Electron Attachment Ion Pair Formation Electron Attachment to Excited Molecules Rate Coefficients for Attachment Electron-Ion and Ion-Ion Recombination Electron-Ion and Electron-Electron Collisions Heavy Particle Collisions Ion-Molecule Collisions Charge Transfer, Elastic, and Inelastic Scattering of Ions Ion-Molecule Reactions Collisions of Fast Neutrals Collisions of Excited Particles Chemi-Ionization and Penning Ionization Collisions of Slow Neutrals and Rate Coefficients Quenching and Transport of Excited States Kinetics of Rotational and Vibrational Levels Photons in Ionized Gases Emission and Absorption of Line Radiation Resonant Radiation Trapping Elementary Processes at Surfaces Energy Levels of Electrons in Solids Emission of Electrons from Surfaces Photo-Emission Thermionic Emission Field-Induced Emission Potential Ejection of Electrons from Surfaces by Ions and Excited Atoms Emission of Ions and Neutrals from Surfaces Surface Neutralization Surface Ionization Adsorption References The Boltzmann Equation and Transport Equations of Charged Particles Introduction The Boltzmann Equation Transport in Phase Space and Derivation of the Boltzmann Equation Transport Coefficients The Transport Equation Conservation of Number Density Conservation of Momentum Conservation of Energy Collision Term In The Boltzmann Equation Collision Integral Collision Integral between an Electron and a Gas Molecule Elastic Collision Term Jelas Excitation Collision Term Jex Ionization Collision Term Jion Electron Attachment Collision Term Jatt Boltzmann Equation For Electrons Spherical Harmonics and Their Properties Velocity Distribution of Electrons Velocity Distribution under Uniform Number Density: g0 Velocity Distribution Proportional to rn(r, t): g1 Electron Transport Parameters References General Properties of Charged Particle Transport in Gases Introduction Electron Transport In DC Electric Fields Electron Drift Velocity Diffusion Coefficients Mean Energy of Electrons Excitation, Ionization, and Electron Attachment Rates Electron Transport in Radio Frequency Electric Fields Relaxation Time Constants Effective Field Approximation Expansion Procedure Direct Numerical Procedure Time-Varying Swarm Parameters Ion Transport In Dc Electric Fields References Modeling of Nonequilibrium (Low Temperature) Plasmas Introduction Continuum Models Governing Equations of a Continuum Model Local Field Approximation (LFA) Quasi-Thermal Equilibrium (QTE) Model Relaxation Continuum (RCT) Model Phase Space Kinetic Model Particle Models Monte Carlo Simulations (MCSs) Particle-in-Cell (PIC) and Particle-in-Cell/Monte Carlo Simulation (PIC/MCS) Models Hybrid Models Circuit Model Equivalent Circuit Model in CCP Equivalent Circuit Model in ICP Transmission-Line Model (TLM) Electromagnetic Fields and Maxwell's Equations Coulomb's Law, Gauss's Law, and Poisson's Equation Faraday's Law Ampere's Law Maxwell's Equations References Numerical Procedure of Modeling Time Constant of the System Collision-Oriented Relaxation Time Plasma Species-Oriented Time Constant Plasma-Oriented Time Constant/Dielectric Relaxation Time Numerical Techniques To Solve The Time Dependent Drift Diffusion Equation Time-Evolution Method Finite Difference Digitalization and Stabilization Time Discretization and Accuracy Scharfetter-Gummel Method Cubic Interpolated Pseudoparticle Method Semi-Implicit Method for Solving Poisson's Equation Boundary Conditions Ideal Boundary - Without Surface Interactions Dirichlet Condition Neumann Condition Periodicity Condition Electrode Surface Metallic Electrode Dielectric Electrode Boundary Conditions with Charge Exchange Boundary Conditions with Mass Transport Plasma Etching Plasma Deposition Plasma Sputtering Moving Boundary under Processing References Capacitively Coupled Plasma Radio Frequency Capacitive Coupling Mechanism of Plasma Maintenance Low-Frequency Plasma High-Frequency Plasma Electronegative Plasma Very High-Frequency Plasma Two-Frequency Plasma Pulsed Two-Frequency Plasma References Inductively Coupled Plasma Radio Frequency Inductive Coupling Mechanism of Plasma Maintenance E-mode and H-mode Mechanism of Plasma Maintenance Effect of Metastables Function of ICP Phase Transition Between E-Mode and H-Mode in an ICP Wave Propagation in Plasmas Plasma and Skin Depth ICP and the Skin Depth References Magnetically Enhanced Plasma Direct Current Magnetron Plasma Unbalanced Magnetron Plasma Radio Frequency Magnetron Plasma Magnetic Confinements Of Plasmas Magnetically Resonant Plasmas References Plasma Processing and Related Topics Introduction Physical Sputtering Target Erosion Sputtered Particle Transport Plasma Chemical Vapor Deposition Plasma CVD Large-Area Deposition with High Rate Plasma Etching Wafer Bias On Electrically Isolated Wafers (without Radio-Frequency Bias) On Wafers with Radio-Frequency Bias Selection of Feed Gas Si or Poly-Si Etching Al Etching SiO2 Etching Feature Profile Evolution Plasma Bosch Process Charging Damage Surface Continuity and Conductivity Charging Damage to Lower Thin Elements in ULSI Thermal Damage Specific Fabrication of MOS Transistor Gate Etching Contact Hole Etching Low-K Etching MEMS Fabrication References Atmospheric Pressure, Low Temperature Plasma High Pressure, Low Temperature Plasma Fundamental Process Historical Development Micro Plasma Radiofrequency Atmospheric Micro-Plasma Source Gas Heating in a Plasma Effect of Local Gas Heating References Index