First Demonstration of a CMOS-Compatible Tactile Sensor Array with Record-High Density of 444,000 pixels/cm <sup>2</sup> for Precise Tactile Perception
Year: 2025
Type: article
Topic: Advanced Sensor and Energy Harvesting Materials
Authors and affiliations:
raw_author_name: Yingjie Tang
raw_affiliation_strings: Westlake University,Zhejiang Key Laboratory of 3D Micro/Nano Fabrication and Characterization,Department of Electronic and Information Engineering, School of Engineering,Hangzhou,China,310030
raw_author_name: Lang Wang
raw_affiliation_strings: Westlake University,Zhejiang Key Laboratory of 3D Micro/Nano Fabrication and Characterization,Department of Electronic and Information Engineering, School of Engineering,Hangzhou,China,310030
raw_author_name: Siyu Zhang
raw_affiliation_strings: Westlake University,Zhejiang Key Laboratory of 3D Micro/Nano Fabrication and Characterization,Department of Electronic and Information Engineering, School of Engineering,Hangzhou,China,310030
raw_author_name: Hui Zhang
raw_affiliation_strings: Westlake University,Zhejiang Key Laboratory of 3D Micro/Nano Fabrication and Characterization,Department of Electronic and Information Engineering, School of Engineering,Hangzhou,China,310030
raw_author_name: Yan Wang
raw_affiliation_strings: Westlake University,Zhejiang Key Laboratory of 3D Micro/Nano Fabrication and Characterization,Department of Electronic and Information Engineering, School of Engineering,Hangzhou,China,310030
raw_author_name: Chenbo Wu
raw_affiliation_strings: Westlake University,Zhejiang Key Laboratory of 3D Micro/Nano Fabrication and Characterization,Department of Electronic and Information Engineering, School of Engineering,Hangzhou,China,310030
raw_author_name: Yitong Chen
raw_affiliation_strings: Westlake University,Zhejiang Key Laboratory of 3D Micro/Nano Fabrication and Characterization,Department of Electronic and Information Engineering, School of Engineering,Hangzhou,China,310030
raw_author_name: Guolei Liu
raw_affiliation_strings: Westlake University,Zhejiang Key Laboratory of 3D Micro/Nano Fabrication and Characterization,Department of Electronic and Information Engineering, School of Engineering,Hangzhou,China,310030
raw_author_name: Chen Liu
raw_affiliation_strings: Westlake University,Zhejiang Key Laboratory of 3D Micro/Nano Fabrication and Characterization,Department of Electronic and Information Engineering, School of Engineering,Hangzhou,China,310030
raw_author_name: Fanfan Li
raw_affiliation_strings: Westlake University,Zhejiang Key Laboratory of 3D Micro/Nano Fabrication and Characterization,Department of Electronic and Information Engineering, School of Engineering,Hangzhou,China,310030
raw_author_name: Dingwei Li
raw_affiliation_strings: Westlake University,Zhejiang Key Laboratory of 3D Micro/Nano Fabrication and Characterization,Department of Electronic and Information Engineering, School of Engineering,Hangzhou,China,310030
raw_author_name: Huihui Ren
raw_affiliation_strings: Westlake University,Zhejiang Key Laboratory of 3D Micro/Nano Fabrication and Characterization,Department of Electronic and Information Engineering, School of Engineering,Hangzhou,China,310030
raw_author_name: Qi Huang
raw_affiliation_strings: Westlake Institute for Optoelectronics,Hangzhou,China,311421
raw_author_name: Liaoyong Wen
raw_affiliation_strings: Westlake University,Zhejiang Key Laboratory of 3D Micro/Nano Fabrication and Characterization,Department of Electronic and Information Engineering, School of Engineering,Hangzhou,China,310030
raw_author_name: Bowen Zhu
raw_affiliation_strings: Westlake University,Zhejiang Key Laboratory of 3D Micro/Nano Fabrication and Characterization,Department of Electronic and Information Engineering, School of Engineering,Hangzhou,China,310030