Thin Ga2O3 insertion layer for phase structure and electrical property evolutions in ferroelectric Hf0.5Zr0.5O2 capacitors
Year: 2025
Type: article
Language: en
Topic: Ga2O3 and related materials
Authors and affiliations:
raw_author_name: Chi Xie
raw_affiliation_strings: Jiashan Fudan Institute 1 , Shanghai 200433, ; , Shanghai 201203, ; and , Jiaxing, Zhejiang Province 314100,
National Integrated Circuit Innovation Center 1 , Shanghai 200433, ; , Shanghai 201203, ; and , Jiaxing, Zhejiang Province 314100,
School of Microelectronics, College of Integrated Circuits and Micro-Nano Electronics, Fudan University 1 , Shanghai 200433, ; , Shanghai 201203, ; and , Jiaxing, Zhejiang Province 314100,
raw_author_name: Zi-Ying Huang
raw_affiliation_strings: Jiashan Fudan Institute 1 , Shanghai 200433, ; , Shanghai 201203, ; and , Jiaxing, Zhejiang Province 314100,
National Integrated Circuit Innovation Center 1 , Shanghai 200433, ; , Shanghai 201203, ; and , Jiaxing, Zhejiang Province 314100,
School of Microelectronics, College of Integrated Circuits and Micro-Nano Electronics, Fudan University 1 , Shanghai 200433, ; , Shanghai 201203, ; and , Jiaxing, Zhejiang Province 314100,
raw_author_name: Zhan-Yuan Huang
raw_affiliation_strings: Jiashan Fudan Institute 1 , Shanghai 200433, ; , Shanghai 201203, ; and , Jiaxing, Zhejiang Province 314100,
National Integrated Circuit Innovation Center 1 , Shanghai 200433, ; , Shanghai 201203, ; and , Jiaxing, Zhejiang Province 314100,
School of Microelectronics, College of Integrated Circuits and Micro-Nano Electronics, Fudan University 1 , Shanghai 200433, ; , Shanghai 201203, ; and , Jiaxing, Zhejiang Province 314100,
raw_author_name: Ying-Guo Yang
raw_affiliation_strings: Jiashan Fudan Institute 1 , Shanghai 200433, ; , Shanghai 201203, ; and , Jiaxing, Zhejiang Province 314100,
National Integrated Circuit Innovation Center 1 , Shanghai 200433, ; , Shanghai 201203, ; and , Jiaxing, Zhejiang Province 314100,
School of Microelectronics, College of Integrated Circuits and Micro-Nano Electronics, Fudan University 1 , Shanghai 200433, ; , Shanghai 201203, ; and , Jiaxing, Zhejiang Province 314100,
raw_author_name: Chao Xu
raw_affiliation_strings: Department of Applied Physics, Research Institute for Smart Energy, The Hong Kong Polytechnic University 2 , Hong Kong 999077,
raw_author_name: Ye Zhu
raw_affiliation_strings: Department of Applied Physics, Research Institute for Smart Energy, The Hong Kong Polytechnic University 2 , Hong Kong 999077,
raw_author_name: Zhiming Wu
raw_affiliation_strings: Hunan Red Solar Photoelectricity Science and Technology Co. Ltd 3 ., Changsha, Hunan Province 410017,
raw_author_name: Ming Li
raw_affiliation_strings: Institute of Microelectronics, School of Integrated Circuits, Peking University 4 , Beijing 100871,
raw_author_name: David Wei Zhang
raw_affiliation_strings: Jiashan Fudan Institute 1 , Shanghai 200433, ; , Shanghai 201203, ; and , Jiaxing, Zhejiang Province 314100,
National Integrated Circuit Innovation Center 1 , Shanghai 200433, ; , Shanghai 201203, ; and , Jiaxing, Zhejiang Province 314100,
School of Microelectronics, College of Integrated Circuits and Micro-Nano Electronics, Fudan University 1 , Shanghai 200433, ; , Shanghai 201203, ; and , Jiaxing, Zhejiang Province 314100,
raw_author_name: Hong-Liang Lu
raw_affiliation_strings: Jiashan Fudan Institute 1 , Shanghai 200433, ; , Shanghai 201203, ; and , Jiaxing, Zhejiang Province 314100,
National Integrated Circuit Innovation Center 1 , Shanghai 200433, ; , Shanghai 201203, ; and , Jiaxing, Zhejiang Province 314100,
School of Microelectronics, College of Integrated Circuits and Micro-Nano Electronics, Fudan University 1 , Shanghai 200433, ; , Shanghai 201203, ; and , Jiaxing, Zhejiang Province 314100,