Improved Reliability of Short-Channel IGZO TFTs With Hydrogen Scavenger Gate Metal
Year: 2025
Type: article
Topic: Thin-Film Transistor Technologies
Authors and affiliations:
raw_author_name: Zihan Li
raw_affiliation_strings: State Key Laboratory of Fabrication Technologies for Integrated Circuits, Institute of Microelectronics of Chinese Academy of Sciences, Beijing, China
raw_author_name: Menggan Liu
raw_affiliation_strings: State Key Laboratory of Fabrication Technologies for Integrated Circuits, Institute of Microelectronics of Chinese Academy of Sciences, Beijing, China
raw_author_name: Guanhua Yang
raw_affiliation_strings: State Key Laboratory of Fabrication Technologies for Integrated Circuits, Institute of Microelectronics of Chinese Academy of Sciences, Beijing, China
raw_author_name: Fuxi Liao
raw_affiliation_strings: State Key Laboratory of Fabrication Technologies for Integrated Circuits, Institute of Microelectronics of Chinese Academy of Sciences, Beijing, China
raw_author_name: Kaifei Chen
raw_affiliation_strings: State Key Laboratory of Fabrication Technologies for Integrated Circuits, Institute of Microelectronics of Chinese Academy of Sciences, Beijing, China
raw_author_name: Xuanming Zhang
raw_affiliation_strings: State Key Laboratory of Fabrication Technologies for Integrated Circuits, Institute of Microelectronics of Chinese Academy of Sciences, Beijing, China
raw_author_name: Naide Mao
raw_affiliation_strings: State Key Laboratory of Fabrication Technologies for Integrated Circuits, Institute of Microelectronics of Chinese Academy of Sciences, Beijing, China
raw_author_name: Congyan Lu
raw_affiliation_strings: State Key Laboratory of Fabrication Technologies for Integrated Circuits, Institute of Microelectronics of Chinese Academy of Sciences, Beijing, China
raw_author_name: Jiebin Niu
raw_affiliation_strings: State Key Laboratory of Fabrication Technologies for Integrated Circuits, Institute of Microelectronics of Chinese Academy of Sciences, Beijing, China
raw_author_name: Jinshan Yue
raw_affiliation_strings: State Key Laboratory of Fabrication Technologies for Integrated Circuits, Institute of Microelectronics of Chinese Academy of Sciences, Beijing, China
raw_author_name: Zhicheng Wu
raw_affiliation_strings: State Key Laboratory of Fabrication Technologies for Integrated Circuits, Institute of Microelectronics of Chinese Academy of Sciences, Beijing, China
raw_author_name: Jiawei Wang
raw_affiliation_strings: State Key Laboratory of Fabrication Technologies for Integrated Circuits, Institute of Microelectronics of Chinese Academy of Sciences, Beijing, China
raw_author_name: Lingfei Wang
raw_affiliation_strings: State Key Laboratory of Fabrication Technologies for Integrated Circuits, Institute of Microelectronics of Chinese Academy of Sciences, Beijing, China
raw_author_name: Di Geng
raw_affiliation_strings: State Key Laboratory of Fabrication Technologies for Integrated Circuits, Institute of Microelectronics of Chinese Academy of Sciences, Beijing, China
raw_author_name: Nianduan Lu
raw_affiliation_strings: State Key Laboratory of Fabrication Technologies for Integrated Circuits, Institute of Microelectronics of Chinese Academy of Sciences, Beijing, China
raw_author_name: Arokia Nathan
raw_affiliation_strings: School of Information Science and Engineering, Shandong University, Qingdao, China
Darwin College, Cambridge University, Silver Street, Cambridge, UK
raw_author_name: Ling Li
raw_affiliation_strings: State Key Laboratory of Fabrication Technologies for Integrated Circuits, Institute of Microelectronics of Chinese Academy of Sciences, Beijing, China