Nondestructive detection and identification of electrically active threading dislocations in n <sup>+</sup> -SiC substrates
Year: 2025
Type: article
Language: en
Topic: Silicon Carbide Semiconductor Technologies
Authors and affiliations:
raw_author_name: Irwan Saleh Kurniawan
raw_affiliation_strings: Department of Physics, Chung Yuan Christian University, Taoyuan, Taiwan
Research Center for Semiconductor Materials and Advanced Optics, Chung Yuan Christian University, Taoyuan, Taiwan
Department of Physics, Chung Yuan Christian University Taoyuan Taiwan estion53@yahoo.com.tw ctyuan@cycu.edu.tw
raw_author_name: Russel Cruz Sevilla
raw_affiliation_strings: Department of Physics, Chung Yuan Christian University, Taoyuan, Taiwan
Research Center for Semiconductor Materials and Advanced Optics, Chung Yuan Christian University, Taoyuan, Taiwan
Department of Physics, Chung Yuan Christian University Taoyuan Taiwan estion53@yahoo.com.tw ctyuan@cycu.edu.tw
raw_author_name: Hsiu-Ming Hsu
raw_affiliation_strings: Department of Physics, Chung Yuan Christian University, Taoyuan, Taiwan
Research Center for Semiconductor Materials and Advanced Optics, Chung Yuan Christian University, Taoyuan, Taiwan
Department of Physics, Chung Yuan Christian University Taoyuan Taiwan estion53@yahoo.com.tw ctyuan@cycu.edu.tw
raw_author_name: Ruth Jeane Soebroto
raw_affiliation_strings: Department of Physics, Chung Yuan Christian University, Taoyuan, Taiwan
Research Center for Semiconductor Materials and Advanced Optics, Chung Yuan Christian University, Taoyuan, Taiwan
Department of Physics, Chung Yuan Christian University Taoyuan Taiwan estion53@yahoo.com.tw ctyuan@cycu.edu.tw
raw_author_name: Chii-Bin Wu
raw_affiliation_strings: Department of Physics, Chung Yuan Christian University, Taoyuan, Taiwan
Research Center for Semiconductor Materials and Advanced Optics, Chung Yuan Christian University, Taoyuan, Taiwan
Department of Physics, Chung Yuan Christian University Taoyuan Taiwan estion53@yahoo.com.tw ctyuan@cycu.edu.tw
raw_author_name: Ji-Lin Shen
raw_affiliation_strings: Department of Physics, Chung Yuan Christian University, Taoyuan, Taiwan
Research Center for Semiconductor Materials and Advanced Optics, Chung Yuan Christian University, Taoyuan, Taiwan
Department of Physics, Chung Yuan Christian University Taoyuan Taiwan estion53@yahoo.com.tw ctyuan@cycu.edu.tw
raw_author_name: Hsiu-Ying Huang
raw_affiliation_strings: Department of Physics, Chung Yuan Christian University, Taoyuan, Taiwan
Research Center for Semiconductor Materials and Advanced Optics, Chung Yuan Christian University, Taoyuan, Taiwan
Department of Physics, Chung Yuan Christian University Taoyuan Taiwan estion53@yahoo.com.tw ctyuan@cycu.edu.tw
raw_author_name: Wen-Chung Li
raw_affiliation_strings: Department of Physics, Chung Yuan Christian University, Taoyuan, Taiwan
LEAP Semiconductor Corporation, Taoyuan, Taiwan
Research Center for Semiconductor Materials and Advanced Optics, Chung Yuan Christian University, Taoyuan, Taiwan
LEAP Semiconductor Corporation Taoyuan Taiwan wenchunglee@leap-semi.com
Department of Physics, Chung Yuan Christian University Taoyuan Taiwan estion53@yahoo.com.tw ctyuan@cycu.edu.tw
raw_author_name: Chi-Tsu Yuan
raw_affiliation_strings: Department of Physics, Chung Yuan Christian University, Taoyuan, Taiwan
Research Center for Semiconductor Materials and Advanced Optics, Chung Yuan Christian University, Taoyuan, Taiwan
Department of Physics, Chung Yuan Christian University Taoyuan Taiwan estion53@yahoo.com.tw ctyuan@cycu.edu.tw