High-density three-dimensional integration of dynamic random-access memory using vertical dual-gate IGZO TFTs
Year: 2025
Type: article
Language: en
Topic: Thin-Film Transistor Technologies
Authors and affiliations:
raw_author_name: Fuxi Liao
raw_affiliation_strings: State Key Lab of Fabrication Technologies for Integrated Circuits, Institute of Microelectronics, Chinese Academy of Sciences, Beijing, China
raw_author_name: Zhengyong Zhu
raw_affiliation_strings: Bejing Superstring Academy of Memory Technology, Beijing, China
raw_author_name: Zihan Li
raw_affiliation_strings: State Key Lab of Fabrication Technologies for Integrated Circuits, Institute of Microelectronics, Chinese Academy of Sciences, Beijing, China
raw_author_name: Guanhua Yang
raw_affiliation_strings: State Key Lab of Fabrication Technologies for Integrated Circuits, Institute of Microelectronics, Chinese Academy of Sciences, Beijing, China. yangguanhua@ime.ac.cn
raw_author_name: Menggan Liu
raw_affiliation_strings: State Key Lab of Fabrication Technologies for Integrated Circuits, Institute of Microelectronics, Chinese Academy of Sciences, Beijing, China
raw_author_name: Kaifei Chen
raw_affiliation_strings: State Key Lab of Fabrication Technologies for Integrated Circuits, Institute of Microelectronics, Chinese Academy of Sciences, Beijing, China
raw_author_name: Wendong Lu
raw_affiliation_strings: State Key Lab of Fabrication Technologies for Integrated Circuits, Institute of Microelectronics, Chinese Academy of Sciences, Beijing, China
raw_author_name: Zijing Wu
raw_affiliation_strings: State Key Lab of Fabrication Technologies for Integrated Circuits, Institute of Microelectronics, Chinese Academy of Sciences, Beijing, China
raw_author_name: Xuanming Zhang
raw_affiliation_strings: State Key Lab of Fabrication Technologies for Integrated Circuits, Institute of Microelectronics, Chinese Academy of Sciences, Beijing, China
raw_author_name: Naide Mao
raw_affiliation_strings: State Key Lab of Fabrication Technologies for Integrated Circuits, Institute of Microelectronics, Chinese Academy of Sciences, Beijing, China
raw_author_name: Bok-Moon Kang
raw_affiliation_strings: Bejing Superstring Academy of Memory Technology, Beijing, China
raw_author_name: Jinghong Shi
raw_affiliation_strings: Bejing Superstring Academy of Memory Technology, Beijing, China
raw_author_name: Xie-Shuai Wu
raw_affiliation_strings: Bejing Superstring Academy of Memory Technology, Beijing, China
raw_author_name: Meichen Jin
raw_affiliation_strings: Bejing Superstring Academy of Memory Technology, Beijing, China
raw_author_name: Chang liu
raw_affiliation_strings: Bejing Superstring Academy of Memory Technology, Beijing, China
raw_author_name: Jing Zhang
raw_affiliation_strings: Bejing Superstring Academy of Memory Technology, Beijing, China
raw_author_name: Yong Yu
raw_affiliation_strings: Bejing Superstring Academy of Memory Technology, Beijing, China
raw_author_name: Gui-Lei Wang
raw_affiliation_strings: Bejing Superstring Academy of Memory Technology, Beijing, China
raw_author_name: Congyan Lu
raw_affiliation_strings: State Key Lab of Fabrication Technologies for Integrated Circuits, Institute of Microelectronics, Chinese Academy of Sciences, Beijing, China
raw_author_name: Jinshan Yue
raw_affiliation_strings: State Key Lab of Fabrication Technologies for Integrated Circuits, Institute of Microelectronics, Chinese Academy of Sciences, Beijing, China
raw_author_name: Lingfei Wang
raw_affiliation_strings: State Key Lab of Fabrication Technologies for Integrated Circuits, Institute of Microelectronics, Chinese Academy of Sciences, Beijing, China
raw_author_name: Jiawei Wang
raw_affiliation_strings: State Key Lab of Fabrication Technologies for Integrated Circuits, Institute of Microelectronics, Chinese Academy of Sciences, Beijing, China
raw_author_name: Di Geng
raw_affiliation_strings: State Key Lab of Fabrication Technologies for Integrated Circuits, Institute of Microelectronics, Chinese Academy of Sciences, Beijing, China
raw_author_name: Nianduan Lu
raw_affiliation_strings: State Key Lab of Fabrication Technologies for Integrated Circuits, Institute of Microelectronics, Chinese Academy of Sciences, Beijing, China
raw_author_name: Chao Zhao
raw_affiliation_strings: Bejing Superstring Academy of Memory Technology, Beijing, China. Chao.Zhao@bjsamt.org.cn
raw_author_name: Arokia Nathan
raw_affiliation_strings: Darwin College, Cambridge University, Cambridge, UK. an299@cam.ac.uk
School of Information Science and Engineering, Shandong University, Qingdao, China. an299@cam.ac.uk
raw_author_name: Ling Li
raw_affiliation_strings: State Key Lab of Fabrication Technologies for Integrated Circuits, Institute of Microelectronics, Chinese Academy of Sciences, Beijing, China. lingli@ime.ac.cn
raw_author_name: Ming Liu
raw_affiliation_strings: State Key Lab of Fabrication Technologies for Integrated Circuits, Institute of Microelectronics, Chinese Academy of Sciences, Beijing, China