Multi-scale computational approach to understand plasma assisted sulfidation for growth mechanism of MoS2
Year: 2025
Type: article
Language: en
Topic: 2D Materials and Applications
Authors and affiliations:
raw_author_name: Jinill Cho
raw_affiliation_strings: Department of Mechanical Engineering, Sungkyunkwan University, Suwon, 16419, Republic of Korea
raw_author_name: Tae-Hyun Kim
raw_affiliation_strings: Department of Mechanical Engineering, Sungkyunkwan University, Suwon, 16419, Republic of Korea
Department of Semiconductor and Display Engineering, Sungkyunkwan University, Suwon, 16419, Republic of Korea
Department of Smart Fab. Technology, Sungkyunkwan University, Suwon, 16419, Republic of Korea
SKKU Advanced Institute of Nanotechnology (SAINT), Sungkyunkwan University, Suwon, 16419, Republic of Korea
Semiconductor Convergence Engineering, Sungkyunkwan University, Suwon, 16419, Republic of Korea
raw_author_name: Tae-Hyun Kim
raw_affiliation_strings: Department of Mechanical Engineering, Sungkyunkwan University, Suwon, 16419, Republic of Korea
Department of Semiconductor and Display Engineering, Sungkyunkwan University, Suwon, 16419, Republic of Korea
Department of Smart Fab. Technology, Sungkyunkwan University, Suwon, 16419, Republic of Korea
SKKU Advanced Institute of Nanotechnology (SAINT), Sungkyunkwan University, Suwon, 16419, Republic of Korea
Semiconductor Convergence Engineering, Sungkyunkwan University, Suwon, 16419, Republic of Korea
raw_author_name: Nayoon Kang
raw_affiliation_strings: Etch Production Group, SEMES, 77, 4sandan 5-gil, Jiksan-eup, Seobuk-gu, Cheonan-si, Chungcheongnam-do, Republic of Korea
raw_author_name: Jinhyoung Lee
raw_affiliation_strings: Department of Mechanical Engineering, Sungkyunkwan University, Suwon, 16419, Republic of Korea
raw_author_name: Gunhoo Woo
raw_affiliation_strings: SKKU Advanced Institute of Nanotechnology (SAINT), Sungkyunkwan University, Suwon, 16419, Republic of Korea
raw_author_name: Hyelim Shin
raw_affiliation_strings: Semiconductor Convergence Engineering, Sungkyunkwan University, Suwon, 16419, Republic of Korea
raw_author_name: Sujeong Han
raw_affiliation_strings: Semiconductor Convergence Engineering, Sungkyunkwan University, Suwon, 16419, Republic of Korea
raw_author_name: Geon Woong Eom
raw_affiliation_strings: Semiconductor Manufacturing Research Center, Korea Institute of Machinery and Materials (KIMM), Daejeon, 34103, Republic of Korea
raw_author_name: Hyeong-U Kim
raw_affiliation_strings: Department of Mechanical Engineering, Sungkyunkwan University, Suwon, 16419, Republic of Korea
Nano-Mechatronics, KIMM Campus, University of Science & Technology (UST), 34113, Daejeon, Republic of Korea
Semiconductor Manufacturing Research Center, Korea Institute of Machinery and Materials (KIMM), Daejeon, 34103, Republic of Korea
raw_author_name: Chanho Park
raw_affiliation_strings: Department of Semiconductor and Display Engineering, Sungkyunkwan University, Suwon, 16419, Republic of Korea
raw_author_name: Hyunbin Choi
raw_affiliation_strings: Semiconductor Convergence Engineering, Sungkyunkwan University, Suwon, 16419, Republic of Korea
raw_author_name: Keunseok Kim
raw_affiliation_strings: Department of Mechanical Engineering, Sungkyunkwan University, Suwon, 16419, Republic of Korea
raw_author_name: Eun-Ho Lee
raw_affiliation_strings: Department of Intelligent Robotics, Sungkyunkwan University, Suwon, 16419, Republic of Korea
Department of Mechanical Engineering, Sungkyunkwan University, Suwon, 16419, Republic of Korea
Department of Smart Fab. Technology, Sungkyunkwan University, Suwon, 16419, Republic of Korea
raw_author_name: Taesung Kim
raw_affiliation_strings: Department of Mechanical Engineering, Sungkyunkwan University, Suwon, 16419, Republic of Korea
Department of Semiconductor and Display Engineering, Sungkyunkwan University, Suwon, 16419, Republic of Korea
Department of Smart Fab. Technology, Sungkyunkwan University, Suwon, 16419, Republic of Korea
SKKU Advanced Institute of Nanotechnology (SAINT), Sungkyunkwan University, Suwon, 16419, Republic of Korea
Semiconductor Convergence Engineering, Sungkyunkwan University, Suwon, 16419, Republic of Korea
raw_author_name: Taesung Kim
raw_affiliation_strings: Department of Mechanical Engineering, Sungkyunkwan University, Suwon, 16419, Republic of Korea
Department of Semiconductor and Display Engineering, Sungkyunkwan University, Suwon, 16419, Republic of Korea
Department of Smart Fab. Technology, Sungkyunkwan University, Suwon, 16419, Republic of Korea
SKKU Advanced Institute of Nanotechnology (SAINT), Sungkyunkwan University, Suwon, 16419, Republic of Korea
Semiconductor Convergence Engineering, Sungkyunkwan University, Suwon, 16419, Republic of Korea