P‐Type Electrical Activation in GaN by Mg Ion Implantation for PN Junctions
Year: 2025
Type: article
Language: en
Topic: GaN-based semiconductor devices and materials
Authors and affiliations:
raw_author_name: Zheming Wang
raw_affiliation_strings: School of Nano Technology and Nano Bionics University of Science and Technology of China  Hefei P. R. China
raw_author_name: Zengyuan Wu
raw_affiliation_strings: School of Nano Technology and Nano Bionics University of Science and Technology of China  Hefei P. R. China
raw_author_name: Fangzhi Li
raw_affiliation_strings: School of Nano Technology and Nano Bionics University of Science and Technology of China  Hefei P. R. China
raw_author_name: Xi Tang
raw_affiliation_strings: Institute of Physical Science and Information Technology Anhui University  Hefei P. R. China
raw_author_name: Yulian Yin
raw_affiliation_strings: Institute of Physical Science and Information Technology Anhui University  Hefei P. R. China
raw_author_name: Li Zhang
raw_affiliation_strings: Nanofabrication Facility of Suzhou Institute of Nano‐Tech and Nano‐Bionics Chinese Academy of Sciences (CAS)  Suzhou P. R. China
School of Nano Technology and Nano Bionics University of Science and Technology of China  Hefei P. R. China
raw_author_name: Xuan Zhang
raw_affiliation_strings: Nanofabrication Facility of Suzhou Institute of Nano‐Tech and Nano‐Bionics Chinese Academy of Sciences (CAS)  Suzhou P. R. China
School of Nano Technology and Nano Bionics University of Science and Technology of China  Hefei P. R. China
raw_author_name: Guohao Yu
raw_affiliation_strings: Nanofabrication Facility of Suzhou Institute of Nano‐Tech and Nano‐Bionics Chinese Academy of Sciences (CAS)  Suzhou P. R. China
School of Nano Technology and Nano Bionics University of Science and Technology of China  Hefei P. R. China
raw_author_name: Zhongming Zeng
raw_affiliation_strings: Nanofabrication Facility of Suzhou Institute of Nano‐Tech and Nano‐Bionics Chinese Academy of Sciences (CAS)  Suzhou P. R. China
School of Nano Technology and Nano Bionics University of Science and Technology of China  Hefei P. R. China
raw_author_name: Chunyu Zhang
raw_affiliation_strings: Nanofabrication Facility of Suzhou Institute of Nano‐Tech and Nano‐Bionics Chinese Academy of Sciences (CAS)  Suzhou P. R. China
School of Nano Technology and Nano Bionics University of Science and Technology of China  Hefei P. R. China
raw_author_name: Jianping Liu
raw_affiliation_strings: Nanofabrication Facility of Suzhou Institute of Nano‐Tech and Nano‐Bionics Chinese Academy of Sciences (CAS)  Suzhou P. R. China
School of Nano Technology and Nano Bionics University of Science and Technology of China  Hefei P. R. China
raw_author_name: Yong Cai
raw_affiliation_strings: Division of Nano‐Devices and Technologies &amp; Nanchang Key Laboratory of Advanced Packaging Jiangxi Institute of Nanotechonology  Nanchang China
Nanofabrication Facility of Suzhou Institute of Nano‐Tech and Nano‐Bionics Chinese Academy of Sciences (CAS)  Suzhou P. R. China
School of Nano Technology and Nano Bionics University of Science and Technology of China  Hefei P. R. China
raw_author_name: Baoshun Zhang
raw_affiliation_strings: Nanofabrication Facility of Suzhou Institute of Nano‐Tech and Nano‐Bionics Chinese Academy of Sciences (CAS)  Suzhou P. R. China
School of Nano Technology and Nano Bionics University of Science and Technology of China  Hefei P. R. China