Versatile Reactive Gradient Block Copolymer System for Highly Robust Nanopatterns With Spontaneous Vertical Orientation
Year: 2025
Type: article
Language: en
Topic: Block Copolymer Self-Assembly
Authors and affiliations:
raw_author_name: Jeehyun Hong
raw_affiliation_strings: Department of Materials Science and Engineering Korea Advanced Institute of Science and Technology  291 Daehak‐ro, Yuseong‐gu Daejeon 34141 Republic of Korea
Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology, 291 Daehak-ro, Yuseong-gu, Daejeon, 34141, Republic of Korea
raw_author_name: Yemin Park
raw_affiliation_strings: Department of Materials Science and Engineering Korea Advanced Institute of Science and Technology  291 Daehak‐ro, Yuseong‐gu Daejeon 34141 Republic of Korea
Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology, 291 Daehak-ro, Yuseong-gu, Daejeon, 34141, Republic of Korea
raw_author_name: Gyu Rac Lee
raw_affiliation_strings: Department of Materials Science and Engineering Korea Advanced Institute of Science and Technology  291 Daehak‐ro, Yuseong‐gu Daejeon 34141 Republic of Korea
Department of Materials Science and Engineering Massachusetts Institute of Technology  Cambridge MA 02139 USA
Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology, 291 Daehak-ro, Yuseong-gu, Daejeon, 34141, Republic of Korea
Department of Materials Science and Engineering, Massachusetts Institute of Technology, Cambridge, MA, 02139, USA
raw_author_name: Jinseong Gwak
raw_affiliation_strings: Foundry Process Development Team Semiconductor Research Institute Samsung Electronics  1‐1, Samsungjeonja‐ro Hwaseongsi Gyeonggi‐do 18448 Republic of Korea
Foundry Process Development Team, Semiconductor Research Institute, Samsung Electronics, 1-1, Samsungjeonja-ro, Hwaseongsi, Gyeonggi-do, 18448, Republic of Korea
raw_author_name: Kyu Hyo Han
raw_affiliation_strings: Foundry Process Development Team Semiconductor Research Institute Samsung Electronics  1‐1, Samsungjeonja‐ro Hwaseongsi Gyeonggi‐do 18448 Republic of Korea
Foundry Process Development Team, Semiconductor Research Institute, Samsung Electronics, 1-1, Samsungjeonja-ro, Hwaseongsi, Gyeonggi-do, 18448, Republic of Korea
raw_author_name: Jongsu Kim
raw_affiliation_strings: Foundry Process Development Team Semiconductor Research Institute Samsung Electronics  1‐1, Samsungjeonja‐ro Hwaseongsi Gyeonggi‐do 18448 Republic of Korea
Foundry Process Development Team, Semiconductor Research Institute, Samsung Electronics, 1-1, Samsungjeonja-ro, Hwaseongsi, Gyeonggi-do, 18448, Republic of Korea
raw_author_name: Changmin Park
raw_affiliation_strings: Foundry Process Development Team Semiconductor Research Institute Samsung Electronics  1‐1, Samsungjeonja‐ro Hwaseongsi Gyeonggi‐do 18448 Republic of Korea
Foundry Process Development Team, Semiconductor Research Institute, Samsung Electronics, 1-1, Samsungjeonja-ro, Hwaseongsi, Gyeonggi-do, 18448, Republic of Korea
raw_author_name: Sang Ho Lee
raw_affiliation_strings: Neutron Science Research Division Korea Atomic Energy Research Institute  111 Daedeok‐daero 989 beon‐gil Yuseong‐gu Daejeon 34057 Republic of Korea
Neutron Science Research Division, Korea Atomic Energy Research Institute, 111 Daedeok-daero 989 beon-gil, Yuseong-gu, Daejeon, 34057, Republic of Korea
raw_author_name: Jong Dae Jang
raw_affiliation_strings: Neutron Science Research Division Korea Atomic Energy Research Institute  111 Daedeok‐daero 989 beon‐gil Yuseong‐gu Daejeon 34057 Republic of Korea
Neutron Science Research Division, Korea Atomic Energy Research Institute, 111 Daedeok-daero 989 beon-gil, Yuseong-gu, Daejeon, 34057, Republic of Korea
raw_author_name: Yeon Sik Jung
raw_affiliation_strings: Department of Materials Science and Engineering Korea Advanced Institute of Science and Technology  291 Daehak‐ro, Yuseong‐gu Daejeon 34141 Republic of Korea
Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology, 291 Daehak-ro, Yuseong-gu, Daejeon, 34141, Republic of Korea