Research on the thermal expansion mechanism of self-traceable grating pitch based on thermo-mechanical coupling modeling and finite element simulation analysis
Year: 2025
Type: article
Topic: Optical Coatings and Gratings
Authors and affiliations:
raw_author_name: Yao Li
raw_affiliation_strings: Institute of Precision Optical Engineering, Tongji University, Shanghai 200092, People’s Republic of China
National Metrology and Testing Center for Integrated Circuit Measurement and Inspection Equipment Industry (Shanghai), Tongji University, Shanghai 200092, People’s Republic of China
School of Physics Science and Engineering, Tongji University, Shanghai 200092, People’s Republic of China
Shanghai Frontiers Science Center of Digital Optics, Tongji University, Shanghai 200092, People’s Republic of China
raw_author_name: Guangxu Xiao
raw_affiliation_strings: Institute of Precision Optical Engineering, Tongji University, Shanghai 200092, People’s Republic of China
National Metrology and Testing Center for Integrated Circuit Measurement and Inspection Equipment Industry (Shanghai), Tongji University, Shanghai 200092, People’s Republic of China
School of Physics Science and Engineering, Tongji University, Shanghai 200092, People’s Republic of China
Shanghai Frontiers Science Center of Digital Optics, Tongji University, Shanghai 200092, People’s Republic of China
raw_author_name: Dongbai Xue
raw_affiliation_strings: Institute of Precision Optical Engineering, Tongji University, Shanghai 200092, People’s Republic of China
National Metrology and Testing Center for Integrated Circuit Measurement and Inspection Equipment Industry (Shanghai), Tongji University, Shanghai 200092, People’s Republic of China
School of Physics Science and Engineering, Tongji University, Shanghai 200092, People’s Republic of China
Shanghai Frontiers Science Center of Digital Optics, Tongji University, Shanghai 200092, People’s Republic of China
raw_author_name: Yuying Xie
raw_affiliation_strings: Institute of Precision Optical Engineering, Tongji University, Shanghai 200092, People’s Republic of China
National Metrology and Testing Center for Integrated Circuit Measurement and Inspection Equipment Industry (Shanghai), Tongji University, Shanghai 200092, People’s Republic of China
School of Physics Science and Engineering, Tongji University, Shanghai 200092, People’s Republic of China
Shanghai Frontiers Science Center of Digital Optics, Tongji University, Shanghai 200092, People’s Republic of China
raw_author_name: Senlin Jin
raw_affiliation_strings: Technology Innovation Center of Graphene Metrology and Standardization of State Administration for Market Regulation, National Institute of Metrology of China, Beijing 100029, People’s Republic of China
raw_author_name: Lingling Ren
raw_affiliation_strings: Technology Innovation Center of Graphene Metrology and Standardization of State Administration for Market Regulation, National Institute of Metrology of China, Beijing 100029, People’s Republic of China
raw_author_name: Chunling He
raw_affiliation_strings: Institute of Precision Optical Engineering, Tongji University, Shanghai 200092, People’s Republic of China
National Metrology and Testing Center for Integrated Circuit Measurement and Inspection Equipment Industry (Shanghai), Tongji University, Shanghai 200092, People’s Republic of China
School of Physics Science and Engineering, Tongji University, Shanghai 200092, People’s Republic of China
Shanghai Frontiers Science Center of Digital Optics, Tongji University, Shanghai 200092, People’s Republic of China
raw_author_name: Xiao Deng
raw_affiliation_strings: Institute of Precision Optical Engineering, Tongji University, Shanghai 200092, People’s Republic of China
National Metrology and Testing Center for Integrated Circuit Measurement and Inspection Equipment Industry (Shanghai), Tongji University, Shanghai 200092, People’s Republic of China
School of Physics Science and Engineering, Tongji University, Shanghai 200092, People’s Republic of China
Shanghai Frontiers Science Center of Digital Optics, Tongji University, Shanghai 200092, People’s Republic of China
raw_author_name: Xinbin Cheng
raw_affiliation_strings: Institute of Precision Optical Engineering, Tongji University, Shanghai 200092, People’s Republic of China
National Metrology and Testing Center for Integrated Circuit Measurement and Inspection Equipment Industry (Shanghai), Tongji University, Shanghai 200092, People’s Republic of China
School of Physics Science and Engineering, Tongji University, Shanghai 200092, People’s Republic of China
Shanghai Frontiers Science Center of Digital Optics, Tongji University, Shanghai 200092, People’s Republic of China
raw_author_name: Tongbao Li
raw_affiliation_strings: Institute of Precision Optical Engineering, Tongji University, Shanghai 200092, People’s Republic of China
National Metrology and Testing Center for Integrated Circuit Measurement and Inspection Equipment Industry (Shanghai), Tongji University, Shanghai 200092, People’s Republic of China
School of Physics Science and Engineering, Tongji University, Shanghai 200092, People’s Republic of China
Shanghai Frontiers Science Center of Digital Optics, Tongji University, Shanghai 200092, People’s Republic of China