Mechanistic study of the atomic layer deposition of cobalt: a combined mass spectrometric and computational approach.
Donnecke, Sofia; Paul, Mathias; Williams, Peter J. H.; Chan, Serena; Tse, Veronica; Sachdeva, Jigyasa; Oliver, Allen G.; McIndoe, J. Scott; Paci, Irina; Physical chemistry chemical physics : PCCP 26 (2024) 14448–14455; doi:10.1039/d4cp00093e

data_7248549
_publ_section_title
;
 Mechanistic study of the atomic layer deposition of cobalt: a combined
 mass spectrometric and computational approach.
;
_journal_issue                   19
_journal_name_full               'Physical chemistry chemical physics : PCCP'
_journal_page_first              14448
_journal_page_last               14455
_journal_paper_doi               10.1039/d4cp00093e
_journal_volume                  26
_journal_year                    2024
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;
2023-12-15 deposited with the CCDC.	2024-04-16 downloaded from the CCDC.
;
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'w=1/[\s^2^(Fo^2^)+(0.0184P)^2^+1.0327P] where P=(Fo^2^+2Fc^2^)/3'
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'Adding full bibliography for 7248549--7248550.cif.'
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