Fluorinated Aminoalkoxide and Ketoiminate Indium Complexes as MOCVD Precursors for In2O3 Thin Film Deposition
Tsung-Yi Chou; Yun Chi; Shu-Fen Huang; Chao-Shiuan Liu; Arthur J. Carty; Ludmila Scoles; Konstantin A. Udachin; Inorganic Chemistry 42 (2003) 6041–6049; doi:10.1021/ic034588x

data_4314281
_publ_section_title
;
 Fluorinated Aminoalkoxide and Ketoiminate Indium Complexes as MOCVD
 Precursors for In2O3 Thin Film Deposition
;
_journal_name_full               'Inorganic Chemistry'
_journal_page_first              6041
_journal_page_last               6049
_journal_paper_doi               10.1021/ic034588x
_journal_volume                  42
_journal_year                    2003
_chemical_formula_sum            'C11 H17 F6 In N2 O'
_chemical_formula_weight         422.09
_chemical_name_systematic
; 
 ? 
;
_space_group_IT_number           14
_symmetry_cell_setting           monoclinic
_symmetry_space_group_name_Hall  '-P 2yn'
_symmetry_space_group_name_H-M   'P 1 21/n 1'
_atom_sites_solution_hydrogens   geom
_atom_sites_solution_primary     direct
_atom_sites_solution_secondary   difmap
_audit_creation_method           SHELXL-97
_cell_angle_alpha                90.00
_cell_angle_beta                 99.1790(10)
_cell_angle_gamma                90.00
_cell_formula_units_Z            4
_cell_length_a                   10.7743(6)
_cell_length_b                   11.1724(6)
_cell_length_c                   13.3760(7)
_cell_measurement_temperature    173(2)
_cell_volume                     1589.52(15)
_computing_structure_refinement  'SHELXL-97 (Sheldrick, 1997)'
_computing_structure_solution    'SHELXS-97 (Sheldrick, 1990)'
_diffrn_ambient_temperature      173(2)
_diffrn_measured_fraction_theta_full 0.999
_diffrn_measured_fraction_theta_max 0.999
_diffrn_radiation_monochromator  graphite
_diffrn_radiation_source         'fine-focus sealed tube'
_diffrn_radiation_type           MoK\a
_diffrn_radiation_wavelength     0.71070
_diffrn_reflns_av_R_equivalents  0.0232
_diffrn_reflns_av_sigmaI/netI    0.0135
_diffrn_reflns_limit_h_max       14
_diffrn_reflns_limit_h_min       -14
_diffrn_reflns_limit_k_max       15
_diffrn_reflns_limit_k_min       -15
_diffrn_reflns_limit_l_max       17
_diffrn_reflns_limit_l_min       -18
_diffrn_reflns_number            18452
_diffrn_reflns_theta_full        28.73
_diffrn_reflns_theta_max         28.73
_diffrn_reflns_theta_min         2.26
_exptl_absorpt_coefficient_mu    1.547
_exptl_crystal_density_diffrn    1.764
_exptl_crystal_density_method    'not measured'
_exptl_crystal_F_000             832
_refine_diff_density_max         0.483
_refine_diff_density_min         -0.653
_refine_diff_density_rms         0.053
_refine_ls_extinction_method     none
_refine_ls_goodness_of_fit_ref   1.016
_refine_ls_hydrogen_treatment    mixed
_refine_ls_matrix_type           full
_refine_ls_number_parameters     327
_refine_ls_number_reflns         4105
_refine_ls_number_restraints     0
_refine_ls_restrained_S_all      1.016
_refine_ls_R_factor_all          0.0229
_refine_ls_R_factor_gt           0.0193
_refine_ls_shift/su_max          0.232
_refine_ls_shift/su_mean         0.023
_refine_ls_structure_factor_coef Fsqd
_refine_ls_weighting_details
'calc w=1/[\s^2^(Fo^2^)+(0.0258P)^2^+0.7711P] where P=(Fo^2^+2Fc^2^)/3'
_refine_ls_weighting_scheme      calc
_refine_ls_wR_factor_gt          0.0482
_refine_ls_wR_factor_ref         0.0508
_reflns_number_gt                3691
_reflns_number_total             4105
_reflns_threshold_expression     >2sigma(I)
_cod_data_source_file            ic034588xsi20030729_122934_2.cif
_cod_data_source_block           complex5
_cod_original_cell_volume        1589.51(15)
_cod_database_code               4314281