Mechanistic study of the atomic layer deposition of cobalt: a combined mass spectrometric and computational approach.
Donnecke, Sofia; Paul, Mathias; Williams, Peter J. H.; Chan, Serena; Tse, Veronica; Sachdeva, Jigyasa; Oliver, Allen G.; McIndoe, J. Scott; Paci, Irina; Physical chemistry chemical physics : PCCP 26 (2024) 14448–14455; doi:10.1039/d4cp00093e

data_7248550
_publ_section_title
;
 Mechanistic study of the atomic layer deposition of cobalt: a combined
 mass spectrometric and computational approach.
;
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_journal_name_full               'Physical chemistry chemical physics : PCCP'
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_journal_page_last               14455
_journal_paper_doi               10.1039/d4cp00093e
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_journal_year                    2024
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'pent-3-yn-1-yltriphenylphosphonium hexafluorophosphate'
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;
2023-12-15 deposited with the CCDC.	2024-04-16 downloaded from the CCDC.
;
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