I want to know the answer to the following question:
Along with critical dimension and depth, what can the infrared light reflectance be used to determine in regard to high aspect ratio trench structures?
All the background I'm provided with is that "The reflectance from the infrared light can also be used to determine the critical dimension, depth, and sidewall angle of high aspect ratio trench structures.". Is that enough to answer the question?
Answer: yes