Glow Discharge Processes: Sputtering and Plasma Etching
Brand: Wiley
Categories: Books, Engineering & Transportation, Engineering



Publisher: Wiley-Interscience; 1st edition (September 25, 1980)
Language: English
Hardcover: 432 pages
ISBN 10: 047107828X
ISBN 13: 978-0471078289
Item Weight: 1.87 pounds
Dimensions: 6.44 x 1.29 x 9.47 inches