Handbook of Silicon Based MEMS Materials and Technologies (Micro and Nano Technologies)
Categories: Books, Engineering & Transportation, Engineering

Handbook of Silicon Based MEMS Materials and Technologies, Third Edition is a comprehensive guide to MEMS materials, technologies, and manufacturing with a particular emphasis on silicon as the most important starting material used in MEMS. The book explains the fundamentals, properties (mechanical, electrostatic, optical, etc.), materials selection, preparation, modeling, manufacturing, processing, system integration, measurement, and materials characterization techniques of MEMS structures. The third edition of this book provides an important up-to-date overview of the current and emerging technologies in MEMS making it a key reference for MEMS professionals, engineers, and researchers alike, and at the same time an essential education material for undergraduate and graduate students. Provides comprehensive overview of leading-edge MEMS manufacturing technologies through the supply chain from silicon ingot growth to device fabrication and integration with sensor/actuator controlling circuits Explains the properties, manufacturing, processing, measuring and modeling methods of MEMS structures Reviews the current and future options for hermetic encapsulation and introduces how to utilize wafer level packaging and 3D integration technologies for package cost reduction and performance improvements Geared towards practical applications presenting several modern MEMS devices including inertial sensors, microphones, pressure sensors and micromirrors


Sticky notes: Not Enabled
Language: English
File size: 133842 KB
Publisher: Elsevier
Publication date: April 17, 2020
ISBN-13: 978-0128177860
Edition: 3rd
Part of series: Micro and Nano Technologies
subtitle: 3rd Edition, Kindle Edition
author: Markku Tilli Mervi Paulasto-Krockel Matthias Petzold Horst Theuss Teruaki Motooka Veikko Lindroos