軟微影技術

200px | right | thumb | Figure 1 - " Inking " a stamp. PDMS stamp with pattern is placed in Ethanol and ODT solution 200px | right | thumb | Figure 2 - ODT from the solution settles down onto the PDMS stamp. Stamp now has ODT attached to it which acts as the ink. 200px | right | thumb | Figure 3 - The PDMS stamp with the ODT is placed on the gold substrate. When the stamp is removed, the ODT in contact with the gold stays stuck to the gold. Thus the pattern from the stamp is transferred to the gold via the ODT " ink. " 軟微影技術 ( soft lithography ) ， 又稱軟微影製程 、 可撓性奈米轉印 、 軟蝕刻技術或軟光刻技術 ， 是一種用軟性高分子材質做成的可撓性刻印的模具 ， 在模具上面塗布具有自我組合性能的單元分子 ( SAM ， Self - Assembly Monomer ) 後 ， 像印章一樣 ， 在鍍金的薄膜基板上微壓 ， 把奈米圖形模子上面凸出部分的自我組合性能的單元分子 ( SAM ) 像油墨一樣的印在金薄膜上 。