Reference number : GC-2017-Q3-00365, amendment number : , agreement type : G, recipient legal name : Sun, Yu (University of Toronto), recipient country : CA, recipient province : nan, recipient city : Ontario, recipient postal code : nan, program name english : Collaborative Research and Development Grants - Project, program name french : Subventions de recherche et développement coopérative - projet, program purpose english : The nanotechnology sector demands advanced capabilities for measuring physical properties of nanomaterials_x000D_
and nanostructures. For instance, the semiconductor industry requires the probing of nanometer-sized_x000D_
transistors for failure analysis, and lithium ion battery development requires characterization of_x000D_
nanomaterials-based electrode property changes during electrochemical cycles. Our research group previously_x000D_
developed a closed-loop operated nanomanipulation system for use inside scanning electron microscope (SEM)_x000D_
to perform the manipulation of nanomaterials under SEM's nanometer resolution imaging. Building upon the_x000D_
previous work, we will collaborate with Hitachi High-Technologies Canada (HHTC) in this project to develop_x000D_
a new instrument and a number of nano characterization techniques, which will, for the first time, enable_x000D_
comprehensive physical (electrical, mechanical, and thermal) measurements on nano structures/materials under_x000D_
SEM imaging._x000D_
The goal of the project is to develop a new instrument capable of multi-modal imaging and nano_x000D_
characterization techniques for operation inside the high vacuum chamber of SEM. Specific objectives include:_x000D_
(1) To develop a nanomanipulation instrument with low sensor heat generation and low drift; (2) To develop_x000D_
techniques for automated electrical probing of nanoelectronic structures; (3) To equip the instrument with the_x000D_
capability of thermal mapping on nanomaterials; (4) To apply the instrument to perform integrated circuit (IC)_x000D_
probing and thermal measurement on 1D and 2D nanomaterials inside SEM; (5) To develop an AFM module_x000D_
for the instrument to enable in-situ AFM imaging, including both contact and tapping mode scanning; (6) To_x000D_
enable AFM-SEM correlative imaging and mechanical nanoindentation inside the high vacuum chamber of_x000D_
SEM. This powerful nano instrument will find important applications in such industries as nano electronics,_x000D_
precision instrumentation, batteries etc, program purpose french : The nanotechnology sector demands advanced capabilities for measuring physical properties of nanomaterials_x000D_
and nanostructures. For instance, the semiconductor industry requires the probing of nanometer-sized_x000D_
transistors for failure analysis, and lithium ion battery development requires characterization of_x000D_
nanomaterials-based electrode property changes during electrochemical cycles. Our research group previously_x000D_
developed a closed-loop operated nanomanipulation system for use inside scanning electron microscope (SEM)_x000D_
to perform the manipulation of nanomaterials under SEM's nanometer resolution imaging. Building upon the_x000D_
previous work, we will collaborate with Hitachi High-Technologies Canada (HHTC) in this project to develop_x000D_
a new instrument and a number of nano characterization techniques, which will, for the first time, enable_x000D_
comprehensive physical (electrical, mechanical, and thermal) measurements on nano structures/materials under_x000D_
SEM imaging._x000D_
The goal of the project is to develop a new instrument capable of multi-modal imaging and nano_x000D_
characterization techniques for operation inside the high vacuum chamber of SEM. Specific objectives include:_x000D_
(1) To develop a nanomanipulation instrument with low sensor heat generation and low drift; (2) To develop_x000D_
techniques for automated electrical probing of nanoelectronic structures; (3) To equip the instrument with the_x000D_
capability of thermal mapping on nanomaterials; (4) To apply the instrument to perform integrated circuit (IC)_x000D_
probing and thermal measurement on 1D and 2D nanomaterials inside SEM; (5) To develop an AFM module_x000D_
for the instrument to enable in-situ AFM imaging, including both contact and tapping mode scanning; (6) To_x000D_
enable AFM-SEM correlative imaging and mechanical nanoindentation inside the high vacuum chamber of_x000D_
SEM. This powerful nano instrument will find important applications in such industries as nano electronics,_x000D_
precision instrumentation, batteries etc, agreement title english : Advanced instrumentation for multi-modal nanometric measurement inside SEM, agreement title french : Advanced instrumentation for multi-modal nanometric measurement inside SEM, agreement number : CRDPJ, agreement value : 321387.0, agreement start date : 2017-11-08, agreement end date : nan, description english : nan, description french : nan, expected results english : nan, expected results french : nan, additional information english : Grant or Award spanning more than one fiscal year (2017-2018 to 2020-2021)., additional information french : Subvention ou bourse octroyée s'appliquant à plus d'un exercice financier (2017-2018 à 2020-2021)., owner organization : nserc-crsng, owner organization title : Natural Sciences and Engineering Research Council of Canada | Conseil de recherches en sciences naturelles et en génie du Canada