Reference number : GC-2017-Q4-01555, amendment number : , agreement type : G, recipient legal name : Rosei, Federico (Institut national de la recherche scientifique), recipient country : CA, recipient province : nan, recipient city : Quebec|Québec, recipient postal code : nan, program name english : Engage Grants for universities, program name french : Subventions d'engagement partenarial pour les universités, program purpose english : This six month project aims to achieve standard NbN and NbTiN thin films of 100-200 nm thickness on_x000D_
sapphire substrates using nitrogen ion implantation, and compare their physical properties to similar films_x000D_
prepared by sputter deposition for quality control and process optimization. These features address a problem_x000D_
of critical importance for Angstrom Engineering Inc., our industrial partner, who develops advanced deposition_x000D_
systems and implements fabrication processes for basic and applied research, related to sensing technology,_x000D_
superconductive electronic devices and nanomaterials engineering. The company will provide pure deposited_x000D_
Nb and NbTi films that will be implanted by N+ ion and annealed at INRS, as well as NbN and NbTiN_x000D_
samples synthesized under different deposition parameters using Angstrom's commercial instruments. The_x000D_
energy and dose of implanted nitrogen ions will be set to enable a relevant comparison between the different_x000D_
samples, using Monte-Carlo simulations supported by advanced characterization tools, such as SE, SEM, EDX,_x000D_
Raman, and XRD analyses. Both NbN and NbTiN films prepared by sputter deposition and processed by ion_x000D_
implantation will be then investigated at low-temperatures, to measurement their electrical resistivity and_x000D_
critical temperatures. Our research will be mainly conducted in the Montréal Area, where facilities for ion_x000D_
implantation and advanced characterization are available. To achieve our objectives, which include the_x000D_
processing of several ion-implanted prototypes to be used as reference specimens by the company and extend_x000D_
both the know-how and the expertise of Angstrom's scientific staff, Prof. Rosei will be assisted by a research_x000D_
associate during the whole duration of the project. The expected impact will result in advancing knowledge on_x000D_
Nb-based superconductive films and their synthesis, for future work in the areas of non-destructive metrology,_x000D_
advanced manufacturing and materials engineering., program purpose french : This six month project aims to achieve standard NbN and NbTiN thin films of 100-200 nm thickness on_x000D_
sapphire substrates using nitrogen ion implantation, and compare their physical properties to similar films_x000D_
prepared by sputter deposition for quality control and process optimization. These features address a problem_x000D_
of critical importance for Angstrom Engineering Inc., our industrial partner, who develops advanced deposition_x000D_
systems and implements fabrication processes for basic and applied research, related to sensing technology,_x000D_
superconductive electronic devices and nanomaterials engineering. The company will provide pure deposited_x000D_
Nb and NbTi films that will be implanted by N+ ion and annealed at INRS, as well as NbN and NbTiN_x000D_
samples synthesized under different deposition parameters using Angstrom's commercial instruments. The_x000D_
energy and dose of implanted nitrogen ions will be set to enable a relevant comparison between the different_x000D_
samples, using Monte-Carlo simulations supported by advanced characterization tools, such as SE, SEM, EDX,_x000D_
Raman, and XRD analyses. Both NbN and NbTiN films prepared by sputter deposition and processed by ion_x000D_
implantation will be then investigated at low-temperatures, to measurement their electrical resistivity and_x000D_
critical temperatures. Our research will be mainly conducted in the Montréal Area, where facilities for ion_x000D_
implantation and advanced characterization are available. To achieve our objectives, which include the_x000D_
processing of several ion-implanted prototypes to be used as reference specimens by the company and extend_x000D_
both the know-how and the expertise of Angstrom's scientific staff, Prof. Rosei will be assisted by a research_x000D_
associate during the whole duration of the project. The expected impact will result in advancing knowledge on_x000D_
Nb-based superconductive films and their synthesis, for future work in the areas of non-destructive metrology,_x000D_
advanced manufacturing and materials engineering., agreement title english : Standard NbN and NbTiN films prepared by nitrogen implantation for process characterization and optimization, agreement title french : Standard NbN and NbTiN films prepared by nitrogen implantation for process characterization and optimization, agreement number : EGP, agreement value : 25000.0, agreement start date : 2018-03-07, agreement end date : nan, description english : nan, description french : nan, expected results english : nan, expected results french : nan, additional information english : Grant or Award spanning more than one fiscal year (2017-2018 to 2018-2019)., additional information french : Subvention ou bourse octroyée s'appliquant à plus d'un exercice financier (2017-2018 à 2018-2019)., owner organization : nserc-crsng, owner organization title : Natural Sciences and Engineering Research Council of Canada | Conseil de recherches en sciences naturelles et en génie du Canada