Reference number : GC-2017-Q2-00075, amendment number : , agreement type : G, recipient legal name : Ahamed, Mohammed (University of Windsor), recipient country : CA, recipient province : nan, recipient city : Ontario, recipient postal code : nan, program name english : Engage Grants for Universities, program name french : Subventions d'engagement partenarial pour les universités, program purpose english : MEMS (Microelectromechanical Systems) based resonating inertial sensing elements such as gyroscopes are_x000D_
widely used in many consumer, industrial, automotive and biomedical applications. A resonator is an_x000D_
oscillating mass that acts as the sensing element in vibratory gyroscopes. The resonator needs to be in_x000D_
oscillation during device operation. Energy lost due to damping (internal/external) can degrade resonator's_x000D_
oscillation thus performance. Minimizing damping during oscillation is therefore crucial for achieving higher_x000D_
sensitivity. Different types of energy losses influence damping including anchor loss, squeeze-film effect, and_x000D_
Thermo-Elastic Damping (TED). In particular, the current problem relates to design considerations to reduce_x000D_
damping, and specifically, TED. One performance parameter that quantifies resonators damping is called_x000D_
Quality factor (Q), which provides a measure of the efficiency of a resonator in retaining energy during_x000D_
oscillations. Inertial sensors used in high performance motion sensing applications require maximizing its Q by_x000D_
minimizing energy loss. A firm understanding of the Q loss mechanisms is therefore key for maximizing Q_x000D_
(reaching 1 Million). Recently, Nxtsens Microsystems has developed prototypes with Q on the order of 100k._x000D_
Nxtsens is now aiming for high sensitivity devices that require Q reaching 1 Million for high performance_x000D_
resonant gyroscopes. In order to design such devices different loss mechanisms on their design have to be_x000D_
analyzed and optimized. This NSERC Engage project will be the first collaborative effort between Nxtsens and_x000D_
Dr. Jalal Ahamed of the University of Windsor to develop optimization methods that will systematically_x000D_
provide improved geometries for resonant gyroscopes with high Q. The approach will provide Nxtsens with_x000D_
valuable knowledge and feedback showing a path to modify their design to reach high end applications. It_x000D_
would also provide greater scientific insights to the academic and industry community by showing relationships_x000D_
between design and material parameters that effect performance in resonant gyroscopes. It would facilitate_x000D_
further development of MEMS based high precision resonant gyroscopes., program purpose french : MEMS (Microelectromechanical Systems) based resonating inertial sensing elements such as gyroscopes are_x000D_
widely used in many consumer, industrial, automotive and biomedical applications. A resonator is an_x000D_
oscillating mass that acts as the sensing element in vibratory gyroscopes. The resonator needs to be in_x000D_
oscillation during device operation. Energy lost due to damping (internal/external) can degrade resonator's_x000D_
oscillation thus performance. Minimizing damping during oscillation is therefore crucial for achieving higher_x000D_
sensitivity. Different types of energy losses influence damping including anchor loss, squeeze-film effect, and_x000D_
Thermo-Elastic Damping (TED). In particular, the current problem relates to design considerations to reduce_x000D_
damping, and specifically, TED. One performance parameter that quantifies resonators damping is called_x000D_
Quality factor (Q), which provides a measure of the efficiency of a resonator in retaining energy during_x000D_
oscillations. Inertial sensors used in high performance motion sensing applications require maximizing its Q by_x000D_
minimizing energy loss. A firm understanding of the Q loss mechanisms is therefore key for maximizing Q_x000D_
(reaching 1 Million). Recently, Nxtsens Microsystems has developed prototypes with Q on the order of 100k._x000D_
Nxtsens is now aiming for high sensitivity devices that require Q reaching 1 Million for high performance_x000D_
resonant gyroscopes. In order to design such devices different loss mechanisms on their design have to be_x000D_
analyzed and optimized. This NSERC Engage project will be the first collaborative effort between Nxtsens and_x000D_
Dr. Jalal Ahamed of the University of Windsor to develop optimization methods that will systematically_x000D_
provide improved geometries for resonant gyroscopes with high Q. The approach will provide Nxtsens with_x000D_
valuable knowledge and feedback showing a path to modify their design to reach high end applications. It_x000D_
would also provide greater scientific insights to the academic and industry community by showing relationships_x000D_
between design and material parameters that effect performance in resonant gyroscopes. It would facilitate_x000D_
further development of MEMS based high precision resonant gyroscopes., agreement title english : High Sensitivity MEMS based Resonant Gyroscopes, agreement title french : High Sensitivity MEMS based Resonant Gyroscopes, agreement number : EGP, agreement value : 24500.0, agreement start date : 2017-07-12, agreement end date : nan, description english : nan, description french : nan, expected results english : nan, expected results french : nan, additional information english : Grant or Award spanning more than one fiscal year (2017-2018 to 2018-2019)., additional information french : Subvention ou bourse octroyée s'appliquant à plus d'un exercice financier (2017-2018 à 2018-2019)., owner organization : nserc-crsng, owner organization title : Natural Sciences and Engineering Research Council of Canada | Conseil de recherches en sciences naturelles et en génie du Canada