Before revision: Based on cyclized polyisoprene (rubber) variety of sensitizers (only a few % by weight) free radical initiated photo cross-linking of polymers Issues: potential oxygen inhibition swelling during development long narrow lines can become wavy swelling is an issue for high resolution patterning Example: SU-8 (epoxy-based polymer), good adhesion) Modulation transfer function MTF (modulation transfer function is the ratio of image intensity modulation and object intensity modulation and it is a parameter that indicates the capability of an optical system 346x346px|A crosslinking of a polyisoprene rubber by a photoreactive biazide as negative photoresist 333x333px|A radical induced polymerization and crosslinking of an acrylate monomer as negative photoresist Differences between positive and negative resist The following table is based on generalizations which are generally accepted in the microelectromechanical systems (MEMS) fabrication industry.
After revision: , Kodak Photoresist (KPR)Based on cyclized polyisoprene (rubber) variety of sensitizers (only a few % by weight) free radical initiated photo cross-linking of polymers Issues: potential oxygen inhibition swelling during development long narrow lines can become wavy swelling is an issue for high resolution patterning Example: SU-8 (epoxy-based polymer), good adhesion) Modulation transfer function MTF (modulation transfer function is the ratio of image intensity modulation and object intensity modulation and it is a parameter that indicates the capability of an optical system 346x346px|A crosslinking of a polyisoprene rubber by a photoreactive biazide as negative photoresist 333x333px|A radical induced polymerization and crosslinking of an acrylate monomer as negative photoresist Differences between positive and negative resist The following table is based on generalizations which are generally accepted in the microelectromechanical systems (MEMS) fabrication industry.