Before revision: For vacuum applications, demanding very low contamination (out-gassing and particle emission) as well as high temperature operation (200–300 °C) for prolonged out-baking or processing times and where a copper or metal sealing is not possible or very inconvenient/expensive, a custom-made, clean-room manufactured, sealing such as Kalrez® 9100, SCVBR or Perlast can be used.
After revision: , Chemraz®,For vacuum applications, demanding very low contamination (out-gassing and particle emission) as well as high temperature operation (200–300 °C) for prolonged out-baking or processing times and where a copper or metal sealing is not possible or very inconvenient/expensive, a custom-made, clean-room manufactured, sealing such as Kalrez® 9100, SCVBR or Perlast can be used.