Before revision: Below is a list with all major and some minor technologies employed in MEMS testing: Atomic force microscopy (AFM) Cnfocal microscopy (CM) Digital holographic microscopy (DHM) Laser Doppler vibrometer (LDV) Optical microscopy (OM) Scanning electron microscopy (SEM) Strobe video microscopy (SVM) White light interferometry (WLI) Following technologies were experimented with but are no longer considered for MEMS testing: Beam deflection Electronic speckle pattern interferometry (ESPI) Ellipsometry Light scattering Spectroscopy All these technologies have strengths and weaknesses, so in order to maximize the effectiveness of test equipment researchers combined technologies.
After revision: Below is a list with all major and some minor technologies employed in MEMS testing: Atomic force microscopy (AFM) Confocal microscopy (CM) Digital holographic microscopy (DHM) Laser Doppler vibrometer (LDV) Optical microscopy (OM) Scanning electron microscopy (SEM) Strobe video microscopy (SVM) White light interferometry (WLI) Following technologies were experimented with but are no longer considered for MEMS testing: Beam deflection Electronic speckle pattern interferometry (ESPI) Ellipsometry Light scattering Spectroscopy All these technologies have strengths and weaknesses, so in order to maximize the effectiveness of test equipment researchers combined technologies.