Before revision: MEMS sensor generations represent the progress made in micro sensor technology and can be categorized as follows: 1st Generation MEMS sensor element mostly based on a silicon structure, sometimes combined with analog amplification on a micro chip.
After revision: jim gleason sensor generations represent the progress made in micro sensor technology and can be categorized as follows: 1st Generation MEMS sensor element mostly based on a silicon structure, sometimes combined with analog amplification on a micro chip.