Before revision: Hoerni's invention was built on Mohamed M. Atalla 's work on surface passivation , as well as Fuller and Ditzenberger's work on the diffusion of boron and phosphorus impurities into silicon , Carl Frosch and Lincoln Derick's work on surface protection, and Chih-Tang Sah's work on diffusion masking by the oxide .
After revision: Hoerni's invention was built on Carl Frosch and Lincoln Derick 's work on surface protection and passivation by silicon dioxide masking and predeposition , as well as Fuller and Ditzenberger's work on the diffusion of impurities into silicon .