Before revision: Examples Surface Micro-machining can be seen in action in the following MEMS (Microelectromechanical) products: Surface Micro-machined Accelerometers 3D Flexible Multichannel Neural Probe Array Nanoelectromechanical relay
After revision: Examples Surface Micro-machining can be seen in action in the following MEMS (Microelectromechanical) products: Surface Micro-machined accelerometers 3D Flexible Multichannel Neural Probe array Nanoelectromechanical relay