Before revision: For the CMOS process, FEOL contains all fabrication steps needed to form fully isolated CMOS elements: Selecting the type of wafer to be used; Chemical-mechanical planarization and cleaning of the wafer.
After revision: For the CMOS process, FEOL contains all fabrication steps needed to form isolated CMOS elements: Selecting the type of wafer to be used; Chemical-mechanical planarization and cleaning of the wafer.