Before revision: Solid-state polymer electrolytes have also been employed in processing of gallium nitride wafers by providing a liquid- and radiation-free method of oxidizing the surface of the gallium nitide wafer to enable easier polishing of the wafer than previous methods.
After revision: Solid-state polymer electrolytes have also been employed in processing of gallium nitride wafers by providing a liquid- and radiation-free method of oxidizing the surface of the gallium nitride wafer to enable easier polishing of the wafer than previous methods.