Before revision: MEMS (microelectromechanical systems) for in situ mechanical characterization refers to microfabricated systems (lab-on-a-chip ) used to measure the mechanical properties ( Young’s modulus , fracture strength) of nanoscale specimens such as nanowires, nanorods, whiskers, nanotubes and thin films.
After revision: MEMS (microelectromechanical systems) for in situ mechanical characterization refers to microelectromechanical systems (MEMS ) used to measure the mechanical properties ( Young’s modulus andsuch as the fracture strength) of nanoscale specimens such as nanowires, nanorods, whiskers, nanotubes and thin films.