Before revision: Micro x-ray fluorescence using x-ray optics has been used in applications such as forensics, small feature evaluations, elemental mapping, multi-layered coating analysis, micro-contamination detection, and film and plating thickness.Micro X-ray Fluorescence (µXRF)
After revision: Micro x-ray fluorescence using x-ray optics has been used in applications such as forensics, small feature evaluations, elemental mapping, multi-layered coating analysis, micro-contamination detection, and film and plating thicknessMicromineralogy, electronics,, biology and environment. X-ray Fluorescence (µXRF)