Before revision: Moulds for polymer microreplication in general and in particular for microthermoforming can be fabricated by various methods such as mechanical micromachining, lithographic based methods in combination with electroplating (see also the so-called ‘LIGA’ process) and wet or dry etching.
After revision: Moulds for polymer microreplication in general and in particular for microthermoforming can be fabricated by various methods such as mechanical micromachining, lithographic based methods in combination with electroplating (see also the so-called 'LIGA' process) and wet or dry etching.