Before revision: History Microelectromechanical systems chip, sometimes called "lab on a chip" After the invention of microtechnology ( ~ 1954) for realizing integrated semiconductor structures for microelectronic chips, these lithography-based technologies were soon applied in pressure sensor manufacturing (1966) as well.
After revision: History Microelectromechanical systems chip, sometimes called "lab on a chip" After the invention of microtechnology ( ≈ 1954) for realizing integrated semiconductor structures for microelectronic chips, these lithography-based technologies were soon applied in pressure sensor manufacturing (1966) as well.