Before revision: (2003), "Microfabricated adhesive mimicking gecko foot-hair", Nature Materials, v.2, pp.461–3 The group prepared flexible fibers of polyimide as the synthetic setae structures on the surface of a 5m thick film of the same material using electron beam lithography and dry etching in an oxygen plasma.
After revision: (2003), "Microfabricated adhesive mimicking gecko foot-hair", Nature Materials, v.2, pp.461–3 The group prepared flexible fibers of polyimide as the synthetic setae structures on the surface of a 5 μm thick film of the same material using electron beam lithography and dry etching in an oxygen plasma.