Before revision: To control the surface interactions enabling sub-10 nm resolution, a team of Massachusetts Institute of Technology, University of Chicago, and Argonne National Laboratory developed a way to use vapor-phase deposited polymeric top layer on the block co-polymer film in 2017.
After revision: consistingTo control the surface interactions enabling sub-10 nm resolution, a team of Massachusetts Institute of Technology, University of Chicago, and Argonne National Laboratory developed a way to use vapor-phase deposited polymeric top layer on the block co-polymer film in 2017.