Before revision: Comb-drive vibrating in-plane measured by digital holographic microscope Comb-drives are actuators, often used as linear actuators electrostatic forces that act between two electrically conductive combs.
After revision: microelectromechanical, which utilizeComb-drive vibrating in-plane measured by digital holographic microscope Comb-drives are actuators, often used as linear actuators electrostatic forces that act between two electrically conductive combs.