Before revision: Through a specialized chamber design, the excess ions ( these are detrimental to process control) are reduced, leaving a uniform distribution of fluorine free-radicals at a higher density than that available from the conventional ICP sources.
After revision: Through a specialized chamber design, the excess ions ( which negatively affect process control) are reduced, leaving a uniform distribution of fluorine free-radicals at a higher density than that available from the conventional ICP sources.