Before revision: 5th International Conference on, 2008, page 135-139 MEMS Scanning Micromirror A MEMS scanning micromirror consists of a silicon device with a millimeter-scale mirror that are too small for the consideration that has a specific task to perform at the center.
After revision: 5th International Conference on, 2008, page 135-139 MEMS Scanning Micromirror A MEMS scanning micromirror consists of a silicon device with a millimeter-scale mirror at the center.