Before revision: Proposal submitted to DARPA in 1986 first introducing the term "microelectromechanical systems" MEMS microcantilever resonating inside a scanning electron microscope MEMS (micro-electromechanical systems) is the technlogy of microscopic devices incorporating both electronic and moving parts.
After revision: Proposal submitted to DARPA in 1986 first introducing the term "microelectromechanical systems" MEMS microcantilever resonating inside a scanning electron microscope MEMS (micro-electromechanical systems) is the technology of microscopic devices incorporating both electronic and moving parts.