Before revision: Typically designed for out-of-plane actuation due to the planar deposition of layers, innovative designs such as the "vertical bimorph" and lateral actuators have been developed to achieve in-plane actuation using techniques like angled electron-beam evaporation and post-CMOS micromachining.
After revision: Bimorph actuators are typically designed for out-of-plane actuation due to the planar deposition of layers, innovative designs such as the "vertical bimorph" and lateral actuators have been developed to achieve in-plane actuation using techniques like angled electron-beam evaporation and post-CMOS micromachining.