Before revision: [polymerization] { { [slow~fracture] { After the pre-bonding in air, in a special gaseous atmosphere or vacuum, the wafers have to pass an annealing process for increasing the bonding strength.
After revision: Si-OH+ OH-Si ->Si-O-Si+ H2OSi-OH+ OH-Si ->Si-O-Si+ H2O[polymerization] { { [slow~fracture] { After the pre-bonding in air, in a special gaseous atmosphere or vacuum, the wafers have to pass an annealing process for increasing the bonding strength.