Before revision: Microoptoelectromechanical systems (MOEMS), also written as micro-opto-electro-mechanical systems or micro-optoelectromechanical systems, also known as optical microelectromechanical systems or optical MEMS, are not a special class of microelectromechanical systems (MEMS) but rather the combination of MEMS merged with micro-optics; this involves sensing or manipulating optical signals on a very small size scale using integrated mechanical, optical, and electrical systems .
After revision: Microoptoelectromechanical systems (MOEMS), also written as micro-opto-electro-mechanical systems or micro-optoelectromechanical systems, also known as optical microelectromechanical systems or optical MEMS, are integrations of mechanical, optical, and electrical systems that involve sensing or manipulating optical signals at a very small size .