Before revision: Bosch process alt=A silicon pillar fabricated using the Bosch process|A silicon micro-pillar fabricated using the Bosch process The Bosch process, named after the German company Robert Bosch GmbH which patented the process,Basic Bosch process patent applicationImproved Bosch process patent applicationBosch process "Parameter Ramping" patent application also known as pulsed or time-multiplexed etching, alternates repeatedly between two modes to achieve nearly vertical structures: A standard, nearly isotropic plasma etch.
After revision: Bosch process alt=A silicon pillar fabricated using the Bosch process|A silicon micro-pillar fabricated using the Bosch process The Bosch process, named after the German company Robert Bosch GmbH which patented the process,Basic Bosch process patent applicationMethod of anisotropically etching siliconMethod for anisotropic etching of siliconMethod of anisotropic etching of siliconImproved Bosch process patent applicationBosch process "Parameter Ramping" patent application also known as pulsed or time-multiplexed etching, alternates repeatedly between two modes to achieve nearly vertical structures: A standard, nearly isotropic plasma etch.