Before revision: Additionally, dry etch equipment tends to be an order of magnitude cheaper than photolithography equipment, so many manufacturers rely on dry etching strategies such as double or quadruple pitching to gain advanced resolutions (14nm+) while needing less photolithography tools.
After revision: Additionally, dry etch equipment tends to be an order of magnitude cheaper than photolithography equipment, so many manufacturers rely on dry etching strategies such as pitch doubling or quartering to gain advanced resolutions (14nm+) while needing less photolithography tools.