Before revision: E. Motamedi, "Merging Micro-optics with Micromechanics: Micro-Opto-Electro-Mechanical (MOEM) devices", Critical Reviews of Optical Science and Technology, V. CR49, SPIE Annual Meeting, Proceeding of Diffractive and Miniaturized Optics, page 302-328, July, 1993 See also Nanoelectromechanical systems Microfabrication Microscanner References Bibliography P. Rai-Choudhury (editor), MEMS and MOEMS.
After revision: Microoptomechanical systemsE. Motamedi, "Merging Micro-optics with Micromechanics: Micro-Opto-Electro-Mechanical (MOEM) devices", Critical Reviews of Optical Science and Technology, V. CR49, SPIE Annual Meeting, Proceeding of Diffractive and Miniaturized Optics, page 302-328, July, 1993 See also Nanoelectromechanical systems Microfabrication Microscanner References Bibliography P. Rai-Choudhury (editor), MEMS and MOEMS.