Before revision: 861707-1, 861707-9 Electrostatic-pneumatic actuation can double maximum displacement of a thin membrane compared to only electrostatic actuated membrane.Moghimi, M. J. Wilson, C. R. Dickensheets, D. L., “ Electrostatic-pnuematic MEMS deformable mirror for focus control” Optical MEMS and Nanophotonics (OMN), 2012 International Conference on , Banff, Canada, Aug. 2012, pp .132-133 .
After revision: 861707-1, 861707-9 Electrostatic-pneumatic actuation can double maximum displacement of a thin membrane compared to only electrostatic actuated membrane.Moghimi, M. J. Wilson, C. R. Dickensheets, D. L., “ Electrostatic-pneumatic MEMS deformable mirror for focus control” Optical MEMS and Nanophotonics (OMN), 2012 International Conference on , Banff, Canada, August 2012, pp 2012 International Conference on .