Projet ANR-06-JCJC-0147 – EFEIPS : Interaction plasma / surface: mesure de la contribution de chaque espèce en phase gazeuse au transfert d'énergie global
Programme : Programme "Jeunes chercheuses et jeunes chercheurs" (JCJC) 2006
Année de financement : 2006
Coordinateur du projet : UNIVERSITE D'ORLEANS (UNIVERSITE D'ORLEANS)
Partenaires : Université d'Orléans
Montant : 140000.0 euros
Date de début : 2006
Durée : 36 mois
Résumé : Energy transfer from a plasma to a substrate is a real issue in plasma processing. The understanding of the mechanisms responsible for the heat transfer is relevant and can help optimizing processes. -  At GREMI, young researchers (Anne-Lise THOMANN and Rémi DUSSART) working on low pressure plasma processes (sputtering deposition, cryogenic etching of silicon ...) had an interest on the energy transfer from the plasma to the substrate during processes: A.L. Thomann used to study the growth regime of metal thin films synthesized by plasma sputtering. It has been shown that the film formation depends on the flux and energy of plasma ions incoming onto the surface during the growth, and on the kinetic energy of the condensing metal atoms. However quantification of the observed effects was missing. R. Dussart and its colleagues have evidenced the building of a passivation layer on etched silicon surface. This layer is destroyed during the etching process by thermal effects. -  At the time that such questions arise, a researcher (Nadjib SEMMAR), specialist of thermal mechanisms joined the GREMI lab. After many discussions and brainstorming, we decided to initiate a new team in the lab to study and to measure the energy flux involved in the plasma/surface interaction. -  -  New ideas of diagnostics and measurements are born partly because the team is composed of researchers coming from different disciplines. -  - Anne-Lise THOMANN (CNRS) is a specialist of materials science: she works on the elaboration and characterization of thin films deposited by low pressure plasmas. -  - Remi DUSSART (Associate professor at the University of Orleans) used to work on capillary discharges for high energy photon production. He now works on cryogenic etching in low pressure plasmas. -  - Nadjib SEMMAR (Associate professor at the University of Orleans) is a physicist specialized on thermal transfers. He used to work at the Lermab Laboratory at Nancy during eight years on the energetic of systems. He now works on the modelization of the laser-materials interaction and on the experimental characterization of the energy transfer. -  To help us mounting and testing the experiments, Jacky MATHIAS, engineer (CNRS) joined the team. He is engineer specialized in Optical devices and works on the development of new diagnostics and reactors. -  An engineer assistant, Yves Tessier, specialist in Electronics will also work on this project especially to install the data acquisition of the new diagnostic recently developed. -  -  The experience and the different origin of each of us is a real benefit for this project. Because we have complementary capabilities in plasma and materials science and energetics we were able to propose a new approach of plasma/surface interaction study involving the direct measurement of the energy transfers. Two ATIP proposals (CNRS) have already been proposed in the 3 last years. Although the subject was qualified as a very interesting and relevant, it was not selected. But we think that the project did not have the maturity of today. The team is now clearly identified in the lab and a plasma reactor is dedicated to this experiment. Its autonomy is now total, but the team needs the recognition of the ANR to really expand its activities. A post doc will be appreciated on this new subject to participate to the experiments. -  -  The role of each member of the team is clearly identified: -  Jacky MATHIAS and Yves TESSIER will take part to the experiment installation and to the diagnostic construction. -  Nadjib SEMMAR will take part to the design of the proposed new diagnostic to make some direct estimation of the energy flux. He has a good background on calibration methods using black bodies. One of them has been made in the lab and is dedicated to this project. He will also participate to the modelisation of heat flux transfer when a sample is mounted on the diagnostic. -  Rémi DUSSART will be involved in the plasma characterization b