SEMICONDUCTOR-DIELECTRIC-SEMICONDUCTOR STRUCTURES FOR RF, PHOTONIC, NEURONET AND NANOSCALE INTEGRATED CIRCUITS
Journal: International Forum “Microelectronics – 2020”. Joung Scientists Scholarship “Microelectronics – 2020”. XIII International conference «Silicon – 2020». XII young scientists scholarship for silicon nanostructures and devices physics, material science, process and analysis
Year: 2020

SDS-structures based on silicon nanolayers, paraelectris and ferroelectrics are the basis for nanoscale quantum, radio, optic and neuromorphic integrated electronics compatible with industrial CMOS silicon process for multifunctional chips.