Structural and Phase Transformations in Water-Vapour-Plasma-Treated Hydrophilic TiO<sub><b>2</b></sub>Films
Journal: Advances in Materials Science and Engineering
Year: 2012

We have investigated structural and phase transformations in water-vapor-plasma-treated 200–300 nm thick Ti films, maintained at room temperature, by injecting water vapor into radio frequency (RF) plasma at different processing powers. Scanning electron microscopy (SEM) combined with optical microscopy and surface nanotopography analysis were used to view tracks of adsorbed water layers and to detect bulges or blisters appeared on the surface of treated samples. Rough surfaces with different si