Determination of microrelief of the sample by singular beams superposition
Journal: Computer Optics
Year: 2019

In present paper we propose easy way to implement method of interfering vortices with opposite topological charge for the real time determination of the thickness and information about the surface of studied samples with the resolution up to 7 nanometers. The determination of the characteristics of the medial cross-section of submicron-objects becomes possible due to phase sensitivity of interfering singular beams to the slightest changes in the optical path difference between them. The dependen