DUAL-PORT SAW SENSOR WITH ZnO NANORODS AS SENSING ELEMENT
Journal: Sensor Electronics and Microsystem Technologies
Year: 2015

Highly-sensitive dual-port SAW sensor on 128YX – LiNbO3 substrate with sensing element based on ZnO nanorods was proposed in the research. Low-temperature ZnO nanorods synthesis technology was developed, morphometric characteristics of ZnO nanorods were investigated by scanning electron microscopy, energy dispersive spectroscopy and X-ray diffraction analysis. Physical models of SAW sensor and SAW sensor with ZnO nanorods were built, sensitivity of such sensors was analyzed by finite element met