DISTRIBUTION OF VACANCY CLUSTERS IN CZ-GE MONOCRYSTALS DIAM 200 MM GROWN WITH ADDITIONAL HEATER
Journal: International Forum “Microelectronics – 2020”. Joung Scientists Scholarship “Microelectronics – 2020”. XIII International conference «Silicon – 2020». XII young scientists scholarship for silicon nanostructures and devices physics, material science, process and analysis
Year: 2020

The distribution of vacancy clusters in large-diameter Ge CZ single crystals under various growing conditions has been investigated.