BEOL IMPACT TO IC PERFORMANCE FOR SOI180, SOI90 AND CMOS180, CMOS90 TECHNOLOGIES
Journal: International Forum “Microelectronics – 2020”. Joung Scientists Scholarship “Microelectronics – 2020”. XIII International conference «Silicon – 2020». XII young scientists scholarship for silicon nanostructures and devices physics, material science, process and analysis
Year: 2020

Test structures of ring generators for researching BEOL impact to the IC performance were developed. The frequency characteristics of the test structures were measured. The electrical circuit’s parasitic components of the test structures were extracted. The impact of various parasitic components on IC performance for SOI180, SOI90 and CMOS180, CMOS90 technologies was studied.