Structure and electrophysical properties of porous carbon-modified dielectrics
Journal: Problems of advanced micro- and nanoelectronic systems development
Year: 2020

A physical method of receiving porous oxide films in vacuum conditions is brought forward in this work. The structure and properties of porous films received as a result of self-organization at magnetron spattering of a compound target are investigated in it. Correlations of the quantity and size of pores, the structure and properties of porous films are determined, as well. The self-organization process proves to form spatially spattered pores, to change electrophysical properties of dielectric