FEATURES OF FORMATION AND FUNCTIONAL CHARACTERISTICS OF MULTILAYER SYSTEMS BASED ON POROUS SILICON
Journal: International Forum “Microelectronics – 2020”. Joung Scientists Scholarship “Microelectronics – 2020”. XIII International conference «Silicon – 2020». XII young scientists scholarship for silicon nanostructures and devices physics, material science, process and analysis
Year: 2020

In this work, the features of the phase composition and chemical bonds of the surface of multilayer porous silicon samples grown under different conditions were investigated by methods of optical and X-ray spectroscopy.