PLANAR GAS CHROMATOGRAPHIC COLUMNS MANUFACTURED ON SILICONE SUBSTRATES
Journal: International Forum “Microelectronics – 2020”. Joung Scientists Scholarship “Microelectronics – 2020”. XIII International conference «Silicon – 2020». XII young scientists scholarship for silicon nanostructures and devices physics, material science, process and analysis
Year: 2020

This paper presents the main stages in the development of technology for the manufacture of planar gas chromatographic columns.