Electron microscopy of non-monocrystalline magnetron sputtered silicon thin films containing fibrous nanosilicon
Journal: Engineering journal of Satbayev University
Year: 2024

The article examines the features of the microstructure of a new type of silicon film, based on a previously unstudied form of nanosilicon, obtained by magnetron sputtering. Microstructural analysis was carried out using a Jeol JSM-6490LA scanning electron microscope, a JEM2100 transmission electron microscope, and a Ntegra atomic force microscope (AFM) Therma. Raman spectroscopic analysis of silicon films was carried out on a Horiba system Jobin – Yvon HR800UV (France). It has been established