APPLICATION OF FOCUSED CHARGE-PARTICLE BEAMS OF IN MANUFACTURING OF NANOCOMPONENTS
Journal: Telecommunications and Radio Engineering
Year: 2010

Application of focused beams of medium energy light ions, electrons and low energy heavy ions is considered for the technology of manufacturing of small-dimension components. Physical principles applied as the basis for interaction of the above beams with resistive materials are described. The proton beam lithography is considered as a new technology possessing high potential capabilities for various applications like micro-optics and nanoelectronics of terahertz wave band. When you are citing t