Structural-phase inhomogeneity of aluminum films in multilayer systems
Journal: Yugra State University Bulletin
Year: 2022

The work is devoted to the study of the influence of the sequence of metal layers in two-layer films (Al 0.5% Ni)/Mo and composition SiO2/Si (111) on the phase composition and structural perfection of Al 0.5% Ni films. The samples used in the experiment were two-layer metal films (Al 0.5% Ni)/Mo and Mo/(Al 0.5% Ni), which were deposited on monosilicon substrates of orientation (111) and composition SiO2/Si (111). The influence of the arrangement of metal layers on the phase composition, crystall