Excimer laser
Wavelength determination
The wavelength of an excimer laser depends on the molecules used, and is usually in the ultraviolet: Excimer lasers, such as XeF and KrF, can also be made slightly tunable using a variety of prism and grating intracavity arrangements.

Excimer laser

Section Title: Wavelength determination
Table Section Text: The wavelength of an excimer laser depends on the molecules used, and is usually in the ultraviolet: Excimer lasers, such as XeF and KrF, can also be made slightly tunable using a variety of prism and grating intracavity arrangements.

Excimer	Wavelength	Relative power

Ar2*	126 nm

Kr2*	146 nm

F2*	157 nm

Xe2*	172 & 175 nm

ArF	193 nm	60

KrCl	222 nm	25

KrF	248 nm	100

XeBr	282 nm

XeCl	308 nm	50

XeF	351 nm	45

Sentence(s)

Excimer laser Xe₂ has 172 nm of wavelength.
Xe₂ has a wavelength of 172 nm.
Xe₂ has a wavelength of 172 nm.

final_sentence: Excimer laser Xe₂ has 172 nm of wavelength.
final_sentence: Xe₂ has a wavelength of 172 nm.
final_sentence: Xe₂ has a wavelength of 172 nm.