6-axis force-torque sensor chip composed of 16 piezoresistive beams
Design of a novel six-axis force/torque sensor based on strain gauges by finite element method
A Six-Axis MEMS Force–Torque Sensor With Micro-Newton and Nano-Newtonmeter Resolution
Development of 1-axis torque sensor with different shape of support and measurement spoke
A novel capacitive type torque sensor for robotic applications
A novel POWERPACK for robotic application, integrated torque sensor, harmonic drive and motor