POP,000000004089,000000000570,000000003750,000000002372,000000030380,000000003377,000000003291,000000000680,000000013277,000000006623,000000001135,000000001039,000000011543,000000005610,000000002795,000000002495,000000003713,000000004252,000000001235,000000004860,000000005996,000000009368,000000004432,000000002592,000000005158,000000000808,000000001593,000000001284,000000001105,000000007760,000000001548,000000018058,000000006737,000000000635,000000010939,000000003175,000000002922,000000011961,000000001004,000000003560,000000000703,000000004953,000000017349,000000001770,000000000567,000000006286,000000005018,000000001801,000000004955,000000000460
I99,       68254,       13074,       67001,       37312,      667318,       71292,       89043,       14579,      265418,      125116,       25912,       17775,      252938,      104022,       50953,       48341,       61698,       67831,       22460,      114075,      141578,      185665,       91654,       36744,       98441,       13469,       30775,       29210,       24229,      204091,       24550,      437119,      121880,       10859,      208560,       52807,       55615,      247115,       20256,       58262,       12286,       88553,      326230,       28078,       10742,      133452,      109570,       28086,       95434,        8770
A01,           0,       47677,           0,           0,           0,           0,       18532,           0,           0,         449,      382262,          32,           0,          68,         781,           0,           0,           0,          85,       60252,      171968,         112,        1293,           0,           0,         107,         763,           0,          51,           0,         193,       21815,           0,           0,           0,           0,          34,        9488,        9189,         227,           0,           0,           0,         445,           0,           0,           1,           0,           0,           0
A03,           0,       63849,           0,           0,           0,           0,         713,           0,           0,           0,           0,         135,           0,           0,        7661,           0,           0,           0,           0,        3100,           0,           0,           0,           0,           0,        2016,           0,           0,           0,           0,           0,           0,           0,      119491,        2121,          12,           0,           0,        1238,           0,       41240,           0,           0,           0,           0,           0,           0,           0,           0,           0
A09,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       11588,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        1561,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
A10,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        2999,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
A12,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        6667,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,          10,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
A16,      178034,       18975,      177521,       90034,      665893,      229554,      101016,       56411,      230439,      198032,       49035,       40936,      333066,      449182,      163116,       91782,      131333,      196704,       52186,      208070,      143376,      491160,      191230,      120917,      147645,       46770,       94153,       30996,       63624,      190100,       74229,      331247,      370560,       70851,      389862,      188883,      118234,      420014,       43184,      171633,       27168,      158711,      438217,       99862,       36337,      423489,      226387,       80509,      174237,       28043
A18,      439354,       61808,      307405,      282071,     2329479,      562503,      250219,      170012,      388539,      385702,       60384,       82489,      733450,      736258,      283023,      236830,      396515,      495247,      110208,      407804,      572252,     1184093,      483242,      189149,      437823,       78415,      130372,       89196,      149511,      503919,      160541,      795887,      521516,      110795,     1281146,      277665,      220787,     1257781,      118872,      358567,       68658,      304205,     1301199,      304883,      158629,      701593,      524063,      187126,      586191,       30848
A21,       35481,         316,        2394,        7519,        5019,        8828,        2660,         883,        4997,       31404,        2324,         592,         529,        8346,         163,         580,       12815,       11576,         250,        4881,         256,        1621,        1961,        1418,        1177,        6610,        2404,        6567,          92,        4783,       17731,       37217,        8264,         459,        2308,        3485,       12094,       60777,       11023,       16695,         106,        3472,        4692,       12987,         114,       21202,         843,         966,        2057,         767
A36,      686949,           0,           0,      132544,     1769362,       43829,      198448,       27198,      125689,      209973,      110811,        1333,      229496,      342251,      350211,      168373,      194506,      564499,        6564,       62801,      192147,      857677,      323989,      141984,      192962,        2240,      189276,        3503,        3352,      228054,      180286,     1074314,      191271,       16136,      786144,      209985,      268314,      736284,       13626,      408154,        1005,      305713,      666775,      221074,        2107,      794631,      263877,       37004,      411118,        5345
A44,        1489,        3291,         251,       18552,       27811,        7365,         985,        1185,         908,       11075,           0,        4325,        3654,         602,        2255,        1104,        6732,         519,         680,        9833,        2292,        1316,       15183,        4337,       12925,         453,        2306,       10327,        5397,           0,        2802,           0,         598,        2238,        1331,        5496,        2343,        2867,           0,       16596,         179,        2888,       11314,         618,         238,           0,        7267,         636,        9107,        1793
A45,           0,       40761,           0,           0,      134382,           0,         230,       33224,      294668,        1280,           0,           0,      258598,       68289,           0,       43541,       10457,       30102,       38096,      129150,      158088,       14998,           0,           0,           0,           0,           0,           0,       47535,      532200,           0,      336867,        1373,           0,       94365,       74049,        2463,      277367,        9289,           0,           0,           0,       51251,           0,           0,       42218,       69050,       41850,           0,           0
A50,        1577,        5722,           0,         747,       16933,        5248,        3106,         409,        4597,           0,       38004,        1086,       13719,        2248,         108,           0,        1498,         252,        2724,       10816,       41869,        9067,         875,           0,        3078,          71,         413,        2413,        2686,       16185,        1493,       11646,        2055,        1846,        6694,        5873,        1597,        8848,        2414,        1962,           0,        1207,        4415,         306,         684,        2109,       10900,        2961,        1102,         704
A54,        5676,         692,       17258,        4048,      155185,        7501,         182,           5,        6324,       10295,        1394,        4117,        9109,       18568,        6986,       15269,       23837,        8063,        6245,        2783,        4882,        7525,       18909,       10859,        7753,        3431,       11073,        1171,        2908,         992,       14592,        8862,       19916,       11046,       18274,        3264,       11556,        4574,         562,        3441,        4025,       59917,        9440,        3672,          90,        7161,        2687,        2208,       19743,         395
A56,        4015,        4200,           0,        1269,        2857,        2369,         504,          86,        6107,        4903,          19,       41383,           0,        2499,           0,           0,         862,        1024,        2127,        4425,           0,       11888,        6080,        2166,        1033,        2060,           0,         573,         202,          32,           0,           0,        2618,           0,         902,         101,       49263,        8841,           0,        1690,         622,        1038,        2428,         770,         384,         384,      159664,         794,        2088,           0
A59,         319,        6439,        1625,        1089,      392248,        2377,         239,        2589,        1745,        5027,        7689,        1078,           0,        5721,        2903,         731,         115,       17074,        1009,        4725,       15041,        3752,        8309,         823,       13425,        5254,        2697,        1141,         114,       23339,        1251,        1433,        1436,         213,        3539,        1342,        6725,       21097,        1059,        3076,         955,        1687,        5218,        1711,         394,         161,       14625,         419,       22579,        1358
A61,       23670,           0,        2855,       12367,       62792,        1231,        3565,        3488,       17110,      121517,        8425,         542,        4690,        9926,        1603,        1916,       41169,       33941,        2389,        3239,       18889,       16109,       10011,        5654,        1210,         977,        4632,        1253,        8940,      211170,        2153,       80710,        3167,         970,        7135,       17216,       11210,       13838,        3577,       15753,        3744,       20382,       15960,        3883,        4306,        5174,         185,       15493,        7016,          29
A80,           0,           0,           0,           0,        1068,           0,           0,           0,           0,           0,           0,           0,           0,        3869,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,         606,       14678,           0,         990,           0,           0,         663,           0,           0,          58,        6045,           0,           0,           0,           0,           0,           0,           0,           0,         498,           0,           0
A81,           0,           0,        4380,           0,           0,           0,      129329,       52394,       30238,        3590,           0,        3116,           0,           0,        6453,           0,         275,           0,        4032,           0,       10594,          21,           0,           0,           0,           0,           0,        3654,           0,       43988,           0,           0,           0,           0,           0,         738,           0,           0,        2311,        6376,           0,           0,           0,        1375,           0,           0,        4380,           0,       10821,           0
A87,       44294,           0,           0,           0,           0,           0,         103,           0,           0,       68842,       57037,           0,           0,        3129,           0,           0,           0,       41087,           5,       37790,       61762,        2011,           0,        5890,           0,           0,           0,           0,         314,        8982,           0,        4653,       24147,           0,           0,           0,           0,           0,         207,       45830,           0,           0,           0,           0,           0,        3180,           0,           0,           0,           0
A89,       62306,       14482,       63002,       31702,      401752,       53364,       43133,       44242,      303659,       64654,       33437,       21722,       51063,      147446,       23789,       43345,       58869,      171778,       16454,       99457,      117871,      113024,      163561,       54243,       56089,       32310,       39933,       34246,       27278,      421397,       21557,      462298,      119694,       18206,      112779,       51858,      114036,       68044,       21181,       62200,       10736,      113608,      320550,       19374,       22450,      154406,       43765,       86697,       80843,        9509
A90,      130321,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       46095,           0,           0,       83882,           0,           0,           0,       72941,           0,           0,      454856,           0,      124010,           0,       36966,           0,           0,      209941,           0,           0,           0,           0,           0,      371056,           0,      171638,      671703,           0,           0,           0,           0,           0,       71903,       28922,      253497,      264455,       46284,           0,       31990
A91,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       61752,           0,           0,           0,           0,           0,           0,       41178,          94,       20023,           0,           0,           0,           0,           0,        3580,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
A92,           0,       27682,       17101,           0,      172769,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       28342,           0,           0,           0,     1392830,           0,           0,           0,      211445,           0,           0,           0,      546878,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
A93,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        6411,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
A94,           0,           0,           0,           0,           0,           0,       18424,        4178,        4852,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       71117,           0,           0,           0,           0,           0,           0,           0,           0,           0,      355160,           0,      684299,           0,           0,           0,           0,          45,           0,        7032,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
B01,           8,       57892,        4148,         137,         611,           0,           0,           0,           0,           0,       15689,          23,      131088,           0,           0,           0,          34,         128,        2167,        7362,       17474,       56136,       18904,           0,           0,         312,       10794,           0,        8061,           0,         252,        6192,       11518,           0,           0,           0,         552,        1676,        2994,          62,        9055,         123,         160,       17619,         541,           0,         268,           0,       24674,       14746
B21,      650571,      160676,      441223,      260540,     3784751,      458890,      237327,       71887,     1253155,      796236,      172322,      110027,     1180355,      558751,      349760,      289095,      435938,      489740,      126835,      559667,      462676,     1133107,      513036,      419058,      425441,       81326,      168555,      111218,       95546,      645241,      284127,     1844318,      813395,      129983,      908806,      337217,      387093,     1023407,      108940,      437190,       82234,      512699,     2127657,      319321,       77645,      719763,      719630,      231099,      598959,       57347
B22,       57723,       29934,       39489,       38219,      450628,       44014,       80576,        8430,       68288,      110209,       25985,       17333,      221521,       78402,       39522,       26721,       48595,       53723,       31865,       33093,      109001,      184442,       91316,       46972,       74310,        6464,       25565,       30725,       19654,      115774,       27036,      398887,       60195,        7314,      169401,       47369,       46767,      226769,       26389,       90775,       11005,       71032,      236647,       31873,        9264,       69201,      105489,       26103,       77463,       10451
B30,       56582,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        4375,           0,           0,           0,           0,           0,           0,       11710,           0,           0,           0,         300,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,      164966,           0,           0,           0,         636,           0,           0,           0,           0
B42,       80811,       25374,      108511,       56004,      940367,      135836,      149782,       33030,      352677,      217337,       45460,       52072,      355063,      127608,      173100,       82305,      113382,      183263,       31135,      150432,      404964,      254514,      112322,       84609,      193257,       42011,       48336,       29760,       12349,      232954,       79822,      442425,      193913,       21209,      295551,       68650,      245772,      395852,       47577,      118220,       36020,      127582,      457747,       57565,       39923,      124417,      321374,       56014,      101485,       13885
B46,      330849,      222782,      127889,      219578,     1875081,      232442,      355976,       78051,      640552,      513882,      213715,       97470,      547672,      407199,      265210,      169663,      226700,       56760,       83273,      280310,      793510,      480251,      345721,      228640,      359636,      150953,      133768,       89530,       78344,      504167,      182250,      797373,      516330,       94043,      514567,      164446,      183800,      665510,      135163,      211525,      105187,      269920,     1067400,      142250,       89104,      208557,      348355,      233517,      328991,      107446
B50,           0,       20844,           0,           0,       80156,       17318,       39352,       26959,       65470,       75653,       54318,           0,       56329,       35117,       24118,       14415,       34721,       24134,       10558,       43950,      180604,       32889,       11601,       32192,       58631,       15016,           0,        2173,        7062,      207624,           0,       71064,       56481,       19454,       45507,       11285,       47192,       45823,        8748,       14492,       23798,       26047,           0,        7336,       26911,       32563,           0,       12197,           0,        1927
B54,       24456,        4022,        4208,       13108,        3124,        4348,        5455,         585,       40979,       28285,        5214,        4925,       23997,       20571,       17486,       18777,       15722,       21568,        6231,       12223,        8159,       27059,       28224,       50947,       17267,        5454,       18027,        2606,        4080,        8457,        8824,       19343,       44425,        6594,       29681,       20309,        8723,       21866,        2944,       12919,       12499,       23749,       29018,        9255,        4833,       22352,       18948,        9725,       21279,        3232
B59,       14536,       45861,       18862,       33174,       55482,       15980,       10509,        3587,       36582,       62421,        3977,       18792,       17190,       11560,       15521,           0,       65095,       10548,        7070,       30007,       23737,       41070,       19615,       10622,       20302,       16676,        5120,        8076,        6418,        8541,       18419,        3037,       60223,       16876,       45517,       27092,       45735,       71155,        9557,       17925,        9068,       14406,       55698,       12572,        4918,       33619,       39969,       48716,       94697,       25128
B79,     1500246,      276618,     1269295,     1102955,    12430187,     1068425,     1377442,      173592,     3534200,     2396532,      405353,      279940,     3333022,     2282569,      807587,      796644,     1750541,     3145574,      687099,     1344507,     2386589,     3879478,     1648893,     1225790,     1928986,      340161,      485319,      270725,      432900,     3416728,      578014,    13912092,     2323677,      274176,     4487944,     1085034,      900594,     5004875,      505465,     1453217,      248458,     2190520,     6090291,      526484,      254647,     1299376,     1676411,     1071885,     1768923,      135382
B80,           0,           0,           0,           0,      122559,           0,       29943,           0,       67220,           0,           0,           0,           0,        2479,           0,           0,           0,           0,         322,           0,       74388,          90,           0,           0,        2347,           0,           0,           0,        2721,        5730,        8067,           0,           0,           0,       39027,           0,           0,           0,           0,           0,           0,       29730,           0,        3655,           0,        7566,           0,           0,           0,           0
B89,      210111,       47735,      127332,      102342,     3856400,      117139,       94077,       39024,      933115,      140340,       63787,       95816,      306147,      182795,      107528,      232928,      114947,      320347,       55713,      168357,      178537,      304611,      187824,       98034,      118120,       92137,       50590,       50418,      112596,      356690,       21144,      901883,      210065,       49974,      396438,       55571,      431035,      421947,       52555,      102142,       38630,      143723,      664756,       90569,       51801,      210770,      222782,       85184,      237514,      308429
B91,           0,           0,           0,           0,           0,        6344,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,          23,           0,           0,           0,        1928,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
B92,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
B93,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
B94,           0,           0,           0,           0,           0,           0,           0,        2171,        4167,       16905,           0,           0,       15190,           0,        6389,           0,        4236,           0,           0,       77027,        3217,       10275,           0,           0,           0,        1805,           0,           0,           0,      179882,           0,      444405,           0,           0,           0,           0,        1520,           0,       20877,           0,           0,       10439,       17987,           0,        1157,           0,           0,           0,        7063,           0
D21,       10073,        3095,        6401,         906,       71077,        6685,         556,        4829,        5155,       13873,         601,          19,       15723,        6329,         159,        3713,        7150,        2414,         264,       19827,        4321,       11788,        2884,        5518,         713,        1037,        3857,        4780,        3169,      154027,       17983,      147196,        5328,         261,       23772,       15099,        8721,       50284,          81,       22746,         225,       12751,       39337,       25719,         831,       14419,       43110,        1392,        8064,       14960
D30,           0,           0,       16502,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
D42,         388,         189,       41261,         654,        4296,         431,           0,           0,       52532,           0,           0,        8719,           0,        5829,       41970,           0,           0,        5333,          30,         221,        3541,      133135,       12566,         403,         292,           0,        1935,         450,           0,         856,       30245,           0,        3042,           0,       53044,         411,           0,           0,           0,        7183,        5118,        3946,        4125,          12,          18,       46448,           0,           0,         247,         965
D46,        7653,           0,       45326,        2518,      272091,        9455,           0,           0,        8138,        2659,           0,        1195,       41995,       17082,        3760,       14625,         204,          29,        2030,       18388,         171,       36631,       20008,        1569,       16560,         667,       11012,       15382,        2798,        1718,           0,           0,       15528,       11594,       16895,        5185,        5936,        8303,         216,         674,        3508,       14536,        1488,           0,        1587,       56148,        1030,           0,       32407,        2199
D79,        1030,           0,      157373,           0,     1418032,        6039,           0,           0,      123925,           0,           0,         133,      199468,       69839,       35911,           0,           0,           0,           0,        6671,       24113,        6567,      229314,       76704,          16,       15017,        3413,       14337,       57190,        2556,         191,     3402065,      345039,       11299,       10073,           0,       21162,      130688,           0,       47842,           0,         119,       29304,        3436,           0,           0,           0,           0,           0,           0
D80,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,      232918,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       24656,           0,           0,           0,           0,          36,           0,           0,           0,           0,           0,           0
D89,       20273,        9598,       18077,        1911,      113516,       13056,        4140,        3069,       27885,       18329,        4998,        1142,       15299,       17015,         743,           0,        6529,       16353,        1272,       31943,       22527,       29301,        5037,        3692,        4795,         546,        1616,        6189,        7280,       67470,         338,      546898,       26420,        3351,      105815,       24253,        4565,        8006,       27366,       26200,         308,        9724,        3981,        7581,           0,       37206,       28793,       11323,       47223,        1245
D91,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,          25,           0,           0,           0,           0,           0,           0,           0
D92,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
D93,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
D94,           0,           0,           0,           0,           0,           0,           0,           1,       19607,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       10384,      134342,           0,           0,           0,           0,           0,           0,           0,           0,        9111,           0,      667713,           0,           0,           0,           0,           0,           0,           0,           0,           0,         930,           0,           0,           0,           0,           0,          23,          12,           0
E01,         486,       40756,        4887,         290,        3031,         283,       19371,           0,           0,        1182,      105868,        1148,        7889,           0,         894,           0,         398,           0,        1624,       39761,       95661,        5486,        1276,           0,         265,         705,        2304,           0,           0,           0,        1241,       15797,        1147,         583,         526,          24,        1527,        9119,        7084,        2508,         640,           0,           0,        1132,         601,       12884,        1325,         190,        5529,           0
E03,           0,       46277,           0,           0,           0,           0,          10,           0,           0,           0,           0,        2859,           0,           0,        5466,           0,           0,           0,           0,        2190,           0,           0,           0,           0,           0,        1430,           0,           0,           0,           0,           0,           0,         371,       82245,        1142,         954,           0,           0,        2326,           0,       31367,           0,           0,           0,           0,           0,           0,           0,           0,           0
E04,      138502,      118337,      268344,      106137,     2209466,      152333,      263336,       63927,      676251,      395770,       83779,       38210,      536113,      260008,      113700,      114736,      138730,      201030,       41719,      332786,      318754,      744776,      134739,       75785,      159370,       27787,       41170,       93278,       39782,      501755,       95523,     1439920,      432890,       13663,      521474,      117936,      110329,      524416,       90943,      231345,       21525,      225454,      953535,       77754,       25342,      425765,      255435,       26207,      239253,       20591
E05,       36022,       11592,       22163,        5973,      357805,       75971,       65558,       16167,      335418,      139170,       16497,       12220,       57330,       14184,        5201,       43129,       26896,       54493,        9955,      198044,       55383,      140736,       35374,       10041,       40480,        9649,       33458,       18169,        7898,       80839,       38001,      209159,       97997,        1571,       96252,       74159,       45622,       29646,        8901,       32959,       11461,       56599,      151651,       25307,        6872,       23266,       95306,       10944,       43524,        4450
E12,        9926,      212850,           0,           0,      130670,           0,           0,           0,           0,           0,      743857,           0,           0,           0,           0,           0,           0,       27376,        8955,      136895,           0,           0,           0,           0,           0,           0,           0,           0,           0,      423576,           0,           0,       30614,           0,           0,       13593,           0,           0,       23891,       58689,           0,           0,      129917,           0,           0,           0,           0,           0,           0,           0
E16,      136961,       15718,      159867,       88883,      542002,      163237,       79143,       46080,      194550,      171597,       47465,       52268,      282401,      324287,      131683,       80556,      108957,      178305,       47608,      177203,      108997,      403006,      172786,      105186,      117158,       34779,       84710,       30996,       53666,      139994,       79432,      279954,      294828,       65841,      333023,      173566,      104225,      349894,       40654,      149244,       25974,      129673,      528890,       90562,       29738,      322114,      235142,       81411,      163010,       28382
E18,     1279436,      253249,      848715,      644151,     6781109,     1180752,      674782,      335527,     1517018,     1372063,      455318,      254478,     1915171,     1676257,      817988,      660203,      967841,     1028961,      282605,     1042290,     1143997,     2712692,     1346105,      400088,      890842,      207040,      448608,      305844,      245368,     1463537,      569711,     3320808,     1675390,      267651,     2304089,      840094,      656906,     2385108,      247191,      978677,      165472,     1211883,     4093518,      739045,      227043,     1697906,     1702283,      448830,     1403487,      115617
E19,       74282,        4960,       87374,       47809,      747242,       62302,       58839,       24299,      214851,       68074,        4491,       10570,      355838,      171547,      107872,       49279,       69821,       73582,       21188,      121636,      123308,      286894,      166304,       47741,       81111,       16912,       27418,        9253,       27306,      235968,       28001,      843683,      139434,       16147,      351053,       61212,       60589,      370645,       31579,       51384,        6292,       58395,      232773,       28460,       30201,      152507,      151777,       30342,      150979,       16928
E21,      251834,       45589,       74601,      161829,      650700,       53212,      118692,       58210,      298368,      262455,       13281,       41272,      315759,      134628,       64715,       74132,      237828,      190695,       38805,      193569,      227820,       97614,      132668,       97938,      116699,       54120,       46081,       26571,       13972,      103423,       52005,      374639,      191032,       32573,      179986,       85457,       91139,      650643,       66852,      124836,       36932,      121607,      321150,       71912,       28926,      243595,      207016,       99246,      156644,       16865
E22,       63565,       35370,       40879,       36587,      429259,       34086,       80467,        8338,       56018,       98198,       21450,       13275,      221939,       86700,       52355,       18497,       41813,       64948,       26539,       32172,      100707,      177289,       88416,       42176,       63014,        9105,       24674,       27307,       20090,       95306,       44027,      364316,       61779,        5075,      168234,       42306,       38732,      166721,       26868,       55664,       14164,       71641,      249177,       31432,       11290,       77062,       99946,       24626,       75695,       11981
E23,      108483,      107287,      205471,       77851,     1579372,      112816,      194245,       55869,      394611,      112141,       54988,       36410,      365590,      177879,      104831,       97062,      151996,      124702,       51454,      238750,      408805,      263076,      192246,       40601,      123938,       63475,       44352,       96831,       37866,      296504,       70318,      894533,      127870,       25297,      517517,      162377,      293865,      450788,       47010,      136340,       30000,       94014,      511350,       77819,       24708,      241630,      186556,       85115,      167283,       28131
E25,      120331,       95667,       65531,       29330,      447109,      115156,      176691,       46252,      429367,       52185,      105733,       25477,      191441,       52772,      112968,       83241,      134316,       95156,       31293,      203825,      290407,      151318,      104497,       22873,       94401,       33145,       28763,       16401,       62771,      244654,       74306,      976852,      246757,        8218,      114805,       89495,      145347,      177857,       71191,       38337,       18484,       87559,      260867,       54352,       26177,      151458,       53780,       44389,      129812,       19737
E26,       14917,       21910,       15281,       17213,      145713,       12736,       27773,        6308,      106515,       18416,       23086,        4448,       48631,       19266,       16833,       12539,       19077,       28107,       12692,       21898,       39068,       70023,       40341,       11718,       20157,        9943,       10994,       13582,        8219,       44534,       10380,      152114,       23366,        6966,       31101,       20678,       19601,      130823,       14018,       21324,        4778,       14888,       70196,       10317,        4856,       23210,       48813,        9882,       40664,        2589
E29,       10500,       12593,       18884,        5119,       47205,       19844,       19560,        5603,       48272,       24551,       18317,        3562,       12396,       14226,        9004,       12003,       11955,       43836,        5852,       22209,       16417,       73872,       28829,        8964,        7669,        4861,        7627,        7460,        4524,       53358,        9490,      111280,       25290,        2774,       29273,        7487,        9040,       42026,       16940,        7091,        6418,       15679,       32523,        5724,        4145,        8485,       27752,        9136,        5465,        4568
E31,         798,       34651,       11227,        4047,        1186,        6524,        3511,        7120,       40608,       32837,       29868,         599,       14494,       15023,        4249,        2205,         471,       11216,        8969,       28915,       19735,       32814,        9130,        6407,       17947,         694,        2569,           0,        1366,       11459,        8820,      120284,       17703,        2570,       53112,       11906,           0,       23578,       14925,       14788,        4924,        8777,       44255,        2415,       18610,       26953,         586,       13593,        2481,        6612
E32,      385971,      101486,      353468,      133088,     1730528,      187546,      294486,      104012,     1809293,      230695,      242272,       55474,      910885,      288955,       79106,       92142,      114181,      336067,      115480,      326660,      957909,      666821,      283323,      121587,      371550,       80662,       56356,       57777,       99168,      434838,      205131,     1037874,      245996,       24869,      404803,      203902,      157805,      353871,      166577,      437156,       48493,      355744,      607502,       67034,       35025,      449157,      467066,       91600,      128523,       42848
E36,      852053,       34650,       62578,      298589,     2444759,      149483,      770858,       43362,      453113,      529833,      176047,       30906,      646028,      486770,      466775,      295196,      261391,     1000354,       60847,      320076,      739201,     1009433,      539796,      254378,      382038,       34331,      234399,       48688,       38053,      823877,      246993,     3348113,      645703,       58479,     1080024,      310521,      426248,     1327757,       74944,      576606,       43141,      452161,     1619203,      243168,       20515,      943144,      510255,       92416,      388916,       33393
E38,           0,           0,        9060,         266,           0,        3790,           0,           0,           0,           0,        2762,           0,       29544,           0,           0,           0,       18614,           0,           0,           0,           0,           0,         827,           0,        1303,           0,           0,           0,           0,       24788,           0,           0,           0,           0,           0,           0,           0,        3567,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
E44,      187057,      249852,      202385,      167830,     1575003,      215098,      156413,       32084,      548035,      126592,       69114,       42390,      493041,      228856,      159633,      189162,      173322,      222717,      124911,      260782,      169495,      110801,      180473,      119923,      242797,       73763,       67397,       55567,       78840,       99062,      414026,      403492,      669749,       61186,      336752,      123752,      127896,     1006376,       20831,      169232,       64189,      130531,      947556,       77340,       92889,      530530,      181623,      255312,      142751,       47954
E45,           0,       72294,           0,           0,       44240,           0,        3811,        7386,      148114,        1330,           0,           0,       84974,       21676,           0,       19443,        5369,       14845,       23867,       34423,       71392,        7185,           0,           0,           0,           0,           0,           0,       13184,      319982,           0,      182317,       16195,           0,       43613,       28200,         332,       86524,        2420,           0,           0,           0,       10472,           0,           0,       41097,       98894,       18825,           0,           0
E47,           0,           0,           0,           0,        2115,           0,       20293,           0,           0,           0,           0,           0,        5266,       23476,       13082,           0,           0,           0,           0,           0,           0,       36833,        2086,           0,        3270,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        1127,           0,       21131,           0,           0,           0,           0,           0,        1699,           0,           0,           0,           0,           0
E50,        3119,       27080,         296,        2734,       70874,       29643,       99127,       29276,       44431,       40837,       64100,        3324,       29095,       60689,        2522,        1071,        8365,        1498,       16181,       48254,      201805,       40623,        9165,        1061,       45117,       15818,        2158,        6970,        7057,      144142,        2989,      160909,       32267,       21877,       46133,        7312,       63596,       14994,       16180,       20016,        6250,       14776,        7564,       23700,       33327,       40956,       21298,       16070,       11486,        5434
E52,        2672,        5919,        4073,        3070,       11898,        6217,        8574,         870,        5764,           0,       21123,        1920,       10628,        2587,        3826,        1578,        7516,        3168,        3092,        7694,        5187,       18262,           0,        2585,        1276,        1816,        2043,        2329,        2220,        5049,        2618,       22543,        4203,        1268,        7435,        3756,        2669,        8189,        3019,        3137,        2403,        3473,        7700,        3878,        2186,        6966,        8202,        2602,           0,        1217
E54,       90184,       15239,       75090,       66520,      604600,       37566,       13543,        3780,      286735,      136260,       51270,       34133,      114324,       64998,       98578,       89516,       98741,      114703,       30783,       62732,       10120,      100422,      114572,      152190,       72130,       24950,       79895,       15384,        4205,       37540,       43067,       82557,      155856,       52666,      105667,       54177,       94733,       76606,        4219,       68558,       27887,       45888,      208102,       35745,       14519,       77714,       94973,       24394,       86654,       16488
E55,       13397,      105817,       25971,       21300,      131836,       40617,       10520,        3418,       58198,       25433,        3828,       31916,       22954,       22373,       10196,       10879,       18845,       30456,       20290,       40295,       17245,       29930,       52840,       16567,       17810,       27402,       13424,       12583,       10847,       22235,       17776,       35524,       30937,        8544,       23989,       16171,       73415,       68153,        3550,       35274,       13557,       29527,       86956,       22524,        7792,       29690,       87036,       14160,       41444,       23853
E56,       25170,       28805,        1269,       13701,      318839,        5771,        6962,         833,       31694,       31423,        4691,       14368,        6362,        6760,        2455,           0,        7797,       10973,        7226,        8024,         143,           9,       28542,       21040,       10870,       11567,           0,        6125,        1792,        6421,        2419,       19563,       29651,         601,        9483,        1131,       58802,       23753,        1836,       19795,        3024,       18556,       18195,        5016,        3751,       16990,       35827,        4227,       26901,        1331
E59,       20866,       71405,       25701,        4921,      173181,       26043,       26123,       16605,      262611,       44226,       19238,       11377,       53536,       21802,       45824,       15547,       91401,       67120,       12249,       87223,       62941,       89875,       52428,        8409,       65176,       26913,        5767,        7421,       12580,       61281,        8089,      127272,       44629,        8596,       48731,        7356,       22231,      133449,       10916,       13677,       14424,       11684,      182626,       19334,       11968,       28876,      115191,       29954,      189988,        9312
E61,       10084,        8537,       14234,       29666,      140475,       16970,        8967,       10228,       55717,      113377,       27482,       10342,       70610,       21530,       14716,        7723,       63378,       74377,       10428,       38562,       53507,       46803,       57244,       23279,       19398,        4135,       17388,        7471,       11484,      232714,       24823,      204822,       29835,        7088,       47143,       40286,       28558,       72287,        6760,       29399,        9107,       52901,       35546,       15661,        8379,       40919,       28069,       35878,       28377,       11613
E62,       63257,       44803,       91091,       36858,      678434,       40429,       76678,       32777,      188290,       96332,        5335,       23383,      206648,      102217,       47158,       34015,       82763,       92344,       22287,      133325,      140028,      185366,       58886,       33835,       69967,       16625,       29900,       27795,       22092,      206447,       43894,      266598,      144497,        7175,      148893,       40996,       66901,      286884,       25957,       78148,       12740,       61343,      186969,       33016,       24056,      123220,       97972,       22424,       48716,        7968
E66,       27488,       30445,       60501,       37285,      846673,       41745,       46905,       21662,      225865,       53990,       22368,       29182,      134606,       36822,       27328,       32220,       46669,       26271,       21557,       76644,       44844,      100556,       98266,       37890,       49862,       10391,       25421,       37764,       19287,      219183,       36749,      302743,       52377,       15481,      127026,       44989,       84201,      117467,       21986,       36697,        7336,       50452,      225445,       18650,       14007,       78700,      215149,       23144,       56121,        8205
E67,      232203,      127489,      288373,       62894,           0,           0,      444215,       39086,     1094135,      446073,      137141,       32376,      997941,        3934,      164851,      155961,      228413,      182327,      150496,      399162,      771427,     1093252,      521841,       62580,      262958,       48748,       67769,       42669,       65265,           0,      120166,           0,      374499,       28494,     1291353,      176609,      240130,      964685,      135813,      126419,       27533,      216993,      860055,       88179,       67651,      449548,      588498,      113816,      395840,       27194
E68,           0,        3511,       22300,       27623,           0,           0,        2350,        2899,           0,           0,       33704,           0,       98943,           0,        1758,           0,           0,           0,        1023,           0,      100268,       51011,           0,           0,        4239,           0,         708,        2690,           0,           0,        3370,           0,       95768,           0,           0,        4513,         611,      333551,           0,       54766,           0,       81593,      240721,       22446,        4770,           0,       54584,        2633,        2501,          54
E74,     1559891,      232078,     1221356,      998066,     9521471,     1287405,     1774774,      167379,     4073304,     2731433,      359916,      297921,     3869918,     2735073,      970046,      628194,     1772780,     2526475,      754636,     1832375,     3359322,     3501269,     2126448,      982078,     1807902,      283405,      492195,      367567,      683683,     3839889,      429698,    13133193,     2095453,      254580,     4503818,     1035456,      875043,     4817981,      531862,     1554416,      209123,     1974793,     6237266,      463889,      233723,     1628230,     1740739,     1115739,     2055038,      130882
E75,           0,        6694,           0,         808,           0,       48437,       31870,         186,      172464,           0,        3633,        1188,       43938,       54734,        8698,           0,       24650,           0,       47395,       23824,       35027,       74716,         949,           0,       25672,           0,       30647,           0,           0,           0,       31939,           0,       15154,        8250,       19928,           0,           0,       95358,        8336,       19272,        5665,       25319,       29602,       20331,         245,           0,        3201,           0,       40393,       11162
E77,           0,       30999,        3648,           0,       48638,       10713,       21734,       30224,           0,           0,           0,        5813,       32046,       22069,       28199,        3649,           0,           0,         482,        3254,       27276,       31914,       24767,           0,       11660,        5808,       26425,           0,        9994,       36774,       16654,        9204,           0,        2274,       24351,       37532,           0,       31651,       10989,           0,        2383,           0,           0,           0,        7203,           0,       17994,        2224,       24657,        1623
E79,      211427,       51137,      359979,      218875,     1324784,       89078,      271799,       77563,      591287,      505040,       98007,       84727,     1310743,      246555,      276098,      168417,      526450,      324132,      135021,      416446,      820445,     1107383,       77091,      197983,      354351,       60968,      180344,       86783,      103724,      477430,      155194,      500873,      198525,      113568,      366945,      247574,      347871,     1346310,      151653,      294903,       72953,      542575,     1358825,      142500,       79045,       74294,      764973,      158337,       86215,       36864
E80,           0,           0,           0,        5056,      107728,           0,        1233,           0,           0,           0,           0,        8760,       17088,        6014,           0,           0,           0,           0,         250,       27757,      108290,           0,        3199,           0,        1450,           0,           0,           0,        6321,       12605,        6049,       18121,         262,           0,        4149,           0,           0,           0,       18291,           0,           0,        1911,           0,           0,           6,       52851,           0,           0,        5981,           0
E81,           0,           0,        5622,        5840,      352306,       13040,      131297,       39461,        5176,        3720,           0,         355,       22376,        9873,        2753,           0,        9328,       12285,       19911,        9832,       11602,       25592,        5360,           0,         429,           0,           0,        5263,        7125,      120012,           0,       44952,        7845,           0,       12212,         359,        9024,       25637,       15393,        5351,           0,       10573,       88479,        4169,       10158,        8769,       38629,        1096,       21353,        8866
E84,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,          80,           0,           0,           0,           0,           0,           0,           0,          13,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        1656,          35,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
E85,        5825,           0,        1177,        2435,       19030,           0,           0,         162,        3989,        4329,         921,         609,        5890,         445,           0,        1564,        1290,        5797,         885,        2266,        4283,         709,        2448,        3619,        1781,         517,        1354,         775,         206,        3149,        1133,        4857,        2783,         318,         581,           0,       10426,           3,           0,         603,        2487,        2017,       19932,          79,          67,        2182,        2544,         973,        6799,           0
E87,       27933,           0,           0,           0,           0,           0,         727,           0,        2492,       46020,       17793,           0,           0,        2487,           0,           0,           0,       33194,         133,       42583,       56558,         714,           0,        3974,           0,           0,           0,           0,         295,        9073,           0,       14259,       19805,           0,           0,           0,           0,           0,         896,       29303,           0,           0,           0,           0,           0,       13873,           0,           0,           0,           0
E89,      114403,      727687,      140505,       67351,     4288460,       80263,      741763,       57449,      798829,      357376,      476554,       57371,      750793,      297103,      125017,       98066,      109531,      332310,       95203,      382980,      817505,      338004,      325193,      117983,      141329,       66213,       35572,       92807,       56923,     1793762,       46591,     2044291,      197404,       49621,      431022,       83585,      197557,     1438471,      184012,      182662,       31690,      184077,      709136,       73747,       55854,      109640,      299925,      142302,      346881,        5043
E90,      140586,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       35903,           0,           0,       57899,           0,           0,           0,       51212,           0,           0,      373970,           0,       99698,           0,       33650,           0,           0,      164395,           0,           0,           0,           0,           0,      267611,           0,      104439,      630635,           0,           0,           0,           0,           0,       53816,       27650,      212632,      228266,       39645,           0,       28629
E91,           0,           0,           0,           0,           0,        1029,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       54478,           0,           0,           0,           0,           0,           0,       23847,         144,        8985,           0,           0,           0,           0,           0,        2144,           0,           0,           0,           0,           0,        2184,           0,           0,           0,           0,           0,           0,           0,           0
E92,           0,       22422,       16275,           0,       54808,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       27966,           0,           0,           0,     1070606,           0,           0,           0,      120016,           0,           0,           0,      327276,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
E93,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        4172,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
E94,           0,           0,           0,           0,           0,           0,      105898,       19094,       20505,           0,           0,           0,           0,           0,           0,           0,         265,           0,           0,      197882,           0,           0,           0,           0,           0,           0,           0,           0,           0,      754555,           0,     1314504,           0,           0,           0,           0,           0,           0,       27100,           0,           0,           0,           0,           0,        1334,        1539,           0,         419,           0,           0
F01,           0,       53364,          15,          92,           0,         284,        6253,           0,           0,        1959,      213904,           0,           0,           0,           0,           0,         422,          95,        1170,       12568,       51938,        3373,           0,           0,           0,          68,         512,           0,          31,           0,           0,       22054,           0,           0,           0,           0,           0,        2044,        9104,          10,           0,           0,           0,          21,          62,           0,          12,           0,       26239,           0
F03,           0,         409,           0,           0,           0,           0,           0,           0,           0,           0,           0,           6,           0,           0,           0,           0,           0,           0,           0,          59,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        1097,          95,        1993,           0,           0,           0,           0,         351,           0,           0,           0,           0,           0,           0,           0,           0,           0
F04,         230,         995,       17353,        1326,      249521,        9889,      106958,        9153,       41027,       38222,       10016,        8524,       24014,       16142,         256,        5205,       23244,         183,         670,       18537,      121296,        4724,        5512,           0,        1435,        1990,        7711,       40479,        1194,       18584,        2492,      104637,       53275,        1043,       57362,        1050,        4452,       36699,         683,       64416,          33,       18459,      157727,         144,        9236,        8293,      123406,           0,       50225,        1849
F05,        3202,           0,         198,           0,           0,        1579,           0,           0,        1886,          10,         144,          12,         382,           9,           0,           0,           0,           1,           0,       25022,           0,          31,          24,           0,          30,           0,         248,          10,           0,        1483,           0,        8178,           3,           0,       20811,           2,         168,           0,        6540,           0,           0,          47,        1098,           2,           0,          33,        1071,           0,           0,           0
F12,           0,       10598,           0,           0,           0,           0,           0,           0,           0,           0,       71308,           0,        2973,           0,           0,           0,           0,           0,          27,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       10134,           0,           0,        2238,           0,           0,           0,           0,       26922,           0,           0,           0,           0,           0,           0,           0,           0,      398851,           0,           0,           0
F16,        1863,         686,        3571,       26449,       45310,       10660,         135,          15,       24793,        7384,         911,        2276,       51989,       30049,        3047,        1961,       16047,        5996,         888,       21998,       16889,       24767,       11295,           0,         230,         300,        2788,        7055,        5739,       24424,        1654,        1543,       14164,         503,       15199,         533,       11676,        5768,           0,        1081,           0,          25,       10107,        1170,         305,       37780,       14014,         388,       14280,           0
F18,       77506,       32468,       49875,       72056,      584511,       44580,        7956,        9007,      261284,      124226,       42830,       19627,      105396,       99839,       30040,       37553,       97053,       12826,       15070,      137807,       21959,      141166,       78700,       30611,       27124,        5304,       11432,       41143,        5328,      113873,       30905,      574647,      163550,       21364,      265679,       11768,       14874,      175526,       10794,       79689,        9239,      106030,      176925,       55224,       11302,       44959,      195679,       13048,       81268,       16558
F21,        2039,           1,         274,        1986,           0,          58,        8363,          18,        5656,        8740,        3538,        1553,       15530,         183,           0,         118,       13649,         255,           0,         815,           0,          74,        7988,         134,         717,         495,         185,          95,        4530,        1188,         385,       20438,         237,          65,       29894,          43,          57,        6782,          83,        1591,           0,        7454,         338,          53,           0,        2046,        1986,          29,        2164,           0
F22,        1551,           0,           0,           2,       10421,          18,         705,           0,         202,           0,           0,           0,           0,           2,           0,           0,           0,           0,          28,           0,          89,          24,           0,           0,        1383,           0,          15,           0,           0,           7,           6,       29668,           0,           0,           0,           0,           0,           0,           0,         462,           0,           0,         156,           0,           0,        1036,           0,           0,           0,           0
F23,           0,          10,         254,         211,        2525,        1049,        2992,           0,        1762,         643,           5,          11,           0,           0,           0,           0,           0,           0,         141,           2,           0,           0,           0,           0,           8,          88,           0,           0,          58,         455,           0,       25438,        1816,         208,           0,          91,        3258,           0,           0,           0,           0,           0,        1329,          54,           0,         103,           1,           0,           0,         665
F25,       16640,        5718,         242,           2,           0,          60,        3382,           0,         236,           0,         759,           0,        3250,           0,           0,           2,           0,           0,          12,         448,       14098,           0,          95,           0,           0,           0,           3,         158,         311,         167,         276,       28709,           0,          13,           0,           0,         993,           0,           0,           0,           5,           0,         373,          26,        2461,           5,         200,           0,           0,           2
F26,         890,          32,           7,          36,           0,          54,          54,           0,        1618,           0,          14,         102,           3,          15,           0,           0,           0,           0,           0,           2,           0,         437,          29,           0,           0,           0,           0,           0,           0,         413,           0,        8397,        2882,           8,           0,           0,         247,           1,           0,           0,           0,           0,         659,           0,           0,           0,           0,           0,           0,           0
F29,           0,           0,          30,           0,           0,         973,           0,         419,       16517,           0,           3,           0,           0,           0,           0,           0,           0,           0,           0,           0,          21,          34,           0,           0,           0,           5,           0,           0,           0,           0,           0,        1381,           0,        1141,           0,          42,         165,           0,           0,           0,           0,           0,        2780,           0,           0,           0,           0,           0,           0,           0
F31,        3190,           0,        8630,          11,       11005,        1342,       55982,        3822,       14029,       17208,       25352,        3788,       20670,       49591,           0,        1450,           0,        1200,        1772,        1382,       29341,        2095,        6514,       37367,        3486,        1092,         797,          32,        1032,        2799,        2805,       15743,        8498,           0,       38471,          81,       18177,       11140,        2021,       10276,        5150,       12812,       17511,         193,        7939,        1003,       26599,           1,           0,           0
F32,        7231,         213,         422,         693,           0,         198,       21834,        4395,       17102,           6,       11902,         180,         526,         459,           0,           7,        1493,         615,           1,        7975,       12022,       33844,         179,           1,        1569,           0,          70,           0,          82,           0,           1,      258405,         274,           0,           0,         175,         149,        4767,        7609,        1145,           0,        2050,         655,          20,           0,        2302,       18801,           0,         235,           0
F36,       13282,           0,           0,        3705,      298921,         741,       22743,          42,        2054,       16735,       20204,        1778,       20765,        7612,       23198,        4721,        9275,        9186,         313,         452,       11389,       84354,         875,        2124,        4051,         470,        7508,          16,          22,        3699,        3388,       77500,       22906,        1288,       73770,        5746,        6949,       20243,         417,       20341,          31,          30,       25330,        2434,           0,       13210,        5286,           0,        7788,         166
F38,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
F44,      414656,      210076,      328572,      277242,     1210808,      287747,      549780,      194332,      939011,      792311,       36454,      152287,     1049846,      604530,      434459,      297563,      517798,      504827,       97421,      305235,      786498,      637261,      533872,      313466,      441466,      191892,      287705,      193050,       93563,     1025749,      378379,     1500854,      719423,      106518,      973491,      261217,      327903,      521053,      179450,      346070,      138216,      618975,     1619692,      223995,       64701,      652175,      571491,      287272,      548106,      170182
F45,           0,         126,           0,           0,       45765,           0,           0,        5062,      191362,           0,           0,           0,      308054,       18200,           0,           0,      114830,       21738,        8355,       33624,       45735,         565,           0,           0,           0,           0,           0,           0,        4206,      156500,           0,      115543,         587,           0,       38865,       30739,           0,      248366,           0,           0,           0,           0,       30253,           0,           0,           0,       41163,       12095,           0,           0
F50,           0,           0,           0,           0,           0,           5,           0,         823,           0,           0,       70795,           0,           0,           0,           0,           0,           0,           0,           0,        5743,           0,           0,           0,           0,           0,           0,           0,           0,           0,        2662,           0,        6951,           0,           0,           0,           0,           0,           0,          16,           0,           0,           0,          14,           0,           0,          32,       62816,           0,           0,           0
F52,           0,           0,         526,           0,           0,           0,           0,           0,           0,        6650,        1610,           0,           0,           0,           0,           0,           1,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        2102,           0,           8,           0,         872,          36,           0,           0,           0,           0,           0,           0,         135,           0,           0,           6,          30,           0,           0,           0,           0,           0,           0
F54,        1373,           9,        2235,           0,       23705,         372,           0,           0,       11635,         423,         550,        1485,        9711,       11350,          13,         214,       14338,          20,           0,        3912,           0,         110,           0,        2138,         381,           0,         360,           0,           0,        2510,        1152,        2860,        4463,         998,        1418,           4,          51,        1819,          14,          78,          67,        2046,        1376,          74,           0,         202,        1130,           0,       10605,          21
F55,         418,        1954,        3987,        2172,        6926,        3501,         312,         497,        4104,        1427,         349,        1746,         495,        2277,        2550,        2406,        1540,         899,         136,           0,        1319,         152,         286,         311,        4063,        1583,         756,         152,         178,        3727,         224,        4708,         620,        1329,           0,         218,         993,        1321,         198,         583,         322,        1443,        6835,        1557,          21,         858,        7851,        1153,          47,        2573
F56,          88,         427,           0,          52,        3800,           0,           0,           0,         503,         210,          11,         178,         110,         128,           0,           0,           0,           0,           2,        1109,           0,           0,         128,           0,         633,           0,           0,           0,           0,          22,           5,         672,         145,          25,          33,           4,        1538,         285,          17,         715,           2,           0,           0,           5,           0,         121,         491,           0,           0,           0
F59,           0,          88,           0,        1638,      230519,         396,        1658,        1411,       54332,       14574,        4288,         932,       20442,        3419,        2398,           0,       20624,       12068,         139,       15626,        7484,           0,        2820,           0,        2805,           0,           2,           0,         948,        8827,        3378,       17982,        1903,        7853,       26450,          18,          25,        3222,        4496,        2512,           0,         107,       21503,         148,          51,          26,       33834,       18299,        3959,        2541
F61,         738,        1792,        1336,        1793,       14944,        7677,        1296,        2371,        1470,       54744,       48209,        1988,       13243,        3519,           0,           0,       10319,        6136,         456,          74,        9802,       17589,        1310,          46,        5144,           3,         664,        1874,        4303,       32506,        1534,       52279,        5318,        1037,          40,         197,        1264,       11613,       77138,        3877,        2115,        1907,        3253,         921,           8,         887,       11204,         812,        3037,        1752
F62,           0,           0,         255,          90,        9675,          32,         659,         138,        4625,        3843,         477,        3927,        2473,        2129,           0,        1634,         886,         475,           0,        1058,        1010,           7,           0,           0,         161,          18,         251,          26,        1895,         411,           6,        4801,         297,           0,        3808,           8,           5,          20,           0,         568,         203,          97,        4924,        2563,         101,          65,        6222,           0,           0,           6
F66,           0,           2,           0,           0,           0,         396,           0,           7,        8882,           0,           0,           0,          26,           0,           0,           0,          38,           0,           0,          25,           0,           0,           0,           1,           0,           0,           0,           0,           0,         385,           2,       19319,           0,           0,          44,           0,         280,           0,           8,           0,          17,           0,         526,          32,           0,           0,           2,           0,           0,           0
F77,           0,          95,           0,           0,        6167,          93,         188,           0,           0,           0,           0,        5360,          93,        1923,           0,          32,           0,           0,           0,        3529,         128,           0,         958,           0,        7724,         267,         636,           0,         187,         780,          22,           0,           0,         209,         800,         218,           0,       10172,          76,           0,           4,           0,           0,           0,          96,           0,        1714,           0,       12821,           0
F79,           0,          82,        1088,           8,           0,           0,         692,          78,         115,           0,        4662,          22,          97,           1,           0,           0,           0,          67,           3,           0,           0,           0,        2626,           0,          14,           0,         235,        1339,           0,           0,           0,         436,           0,         962,           0,         810,         427,           5,         720,           0,           0,         151,          94,           0,           0,         260,        5166,           0,           0,           0
F80,           0,           0,           0,       13538,           0,           0,         252,           0,       80675,           0,        2394,           0,           0,           0,           0,           0,           0,           0,           0,        2923,      462029,           0,           0,           0,         395,           0,           0,           0,        1220,           0,         143,           0,          58,           0,       65093,           0,           0,           0,       46823,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
F81,           0,           0,           0,           0,           0,         578,       11086,         808,        1054,        2600,         184,           0,           0,           0,           0,           0,           0,           0,           0,         444,          37,           0,           0,           0,           0,           0,           0,           0,         308,          13,           0,       40049,       50165,           0,           0,           2,           0,           0,         152,           0,           0,           0,        7907,           0,           0,           0,       11238,           0,           0,       13943
F85,         452,           0,           0,           0,           0,           0,           0,           0,          64,           0,        5699,           0,        3312,           0,           0,           0,           0,           0,           0,         957,           0,           0,           0,           0,           0,          29,           0,         263,           0,           0,           0,         587,           0,          19,           0,           0,           0,           0,           0,           0,           0,           0,          14,           0,           0,        2119,          59,           0,         856,           0
F87,        7888,           0,           0,           0,           0,           0,         865,           0,           0,       10745,       22078,           0,           0,         143,           0,           0,           0,       26930,        1256,       14209,       15571,          91,           0,           0,           0,           0,           0,           0,        1028,         639,           0,         713,        4841,           0,           0,           0,           0,        7101,        3650,       36154,           0,           0,           0,           0,           0,       31859,           0,           0,           0,           0
F89,        1103,         110,        1501,        1646,       37858,         169,       32982,          81,        5607,       14411,       27732,        2637,       11895,           5,       73256,         127,       46129,        1492,        4948,       40568,        3111,        5815,       21011,          48,        3021,        6562,         561,        9768,        5420,       58975,        3587,       27244,        5344,        6122,        5886,        5317,        8571,       34193,        3169,        6439,         511,        9714,       46721,        1190,         424,        1831,       26626,           0,       47621,         448
F90,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,         275,           0,           0,           0,           0,           0,           0,           0,          73,           0,           0,           0,           0,           0,           0,           0,           0,           1,           0,           0,           0,           0
F91,           0,           0,           0,           0,           0,         256,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       39745,           0,           0,           0,           0,           0,           0,        3963,          36,        4527,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
F92,           0,       16965,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,      110848,           0,           0,           0,       19091,           0,           0,           0,      225754,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
F93,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
F94,           0,           0,           0,           0,           0,           0,       59647,           0,        8856,           0,           0,           0,           0,           0,           0,           0,        5307,           0,           0,      113568,           0,           0,           0,           0,           0,           0,           0,           0,           0,      113908,           0,      817066,           0,           0,           0,           0,           0,           0,         178,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
G01,           6,        4847,           0,           1,         152,          11,          71,           0,           0,           2,       96499,          12,         464,           0,           0,           0,           0,           0,           1,        6931,        2326,         892,         205,           0,           4,          18,          13,           0,           0,           0,           3,          38,           2,          45,           0,           1,           2,         600,          41,         166,           0,          36,           0,           2,           0,         203,          11,           4,         227,           0
G03,           0,       11756,           0,           0,           0,           0,           0,           0,           0,           0,           0,         154,           0,           0,         267,           0,           0,           0,           0,           8,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,          39,        1279,           5,           0,           0,           0,           0,           0,        1838,           0,           0,           0,           0,           0,           0,           0,           0,           0
G04,         333,         574,        2977,        1926,       24915,       22439,        6920,         500,       14326,        3382,        1854,        1062,        6070,        9267,        1335,        1467,        2228,        2255,         455,        5000,        4981,        1861,        1799,         462,        3588,         128,         160,         417,         585,         865,         203,       18013,        7448,         123,        7815,        1877,        2897,        5938,         134,        2071,         347,        3005,       52609,        2474,         282,        7796,        4588,          98,        4091,         360
G05,         202,          29,         250,          45,         955,        1505,        1207,         134,        3563,        5785,         251,        1123,         813,         338,          29,        1402,         164,         751,          35,        4625,         320,        5504,         500,          41,        2504,         358,        1020,          31,          74,        1860,         484,        2279,        3201,           8,        2667,        3143,        1892,          71,          16,         579,         151,         517,         415,          20,          62,          95,        2410,         201,         146,           0
G12,           0,        6182,           0,           0,           0,           0,           0,           0,           0,           0,       18655,           0,           0,           0,           0,           0,           0,           0,         161,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       12422,           0,           0,       18399,           0,           0,           0,           0,           0,           0,         612,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
G16,        2378,         197,        4901,         690,       24417,        7417,        1016,          54,       13224,        2047,       15798,        1080,        9303,       24681,        2368,        2081,        2414,        2934,        1884,        3793,        1157,        8630,        4878,        1911,        4942,         296,        6550,         942,        1217,        5663,        1014,          76,       13091,        1171,       10642,        6155,        2352,        4164,        1600,        2484,         347,        1784,        7114,        2037,         475,       13654,        5519,        1738,        2388,         952
G18,       78491,       21488,       49024,       27257,      317055,       50035,       14707,        5059,       86114,       20127,       29066,       16552,       97163,       92500,       44223,       35117,       50902,       57305,       20543,       47409,       30398,       87535,       54393,       34865,       33815,        9585,       23283,       13273,        7846,       52186,       20979,       76806,       87158,        9384,      315373,       52057,       42891,       86064,        8640,       46761,        9607,       62288,      196042,       44192,        8724,       75771,       96861,       26852,       86426,        5875
G21,        6049,         691,         853,        6841,        2928,        1279,        5699,         760,        6802,       10847,         238,         477,        2907,        1437,         550,        1124,        9773,        2794,          87,        1825,        1198,        1071,        3517,        4214,        3049,         772,        1960,         265,         340,        1141,        1367,        1707,        5265,         502,        1857,        3327,        2556,        5483,        1578,        7602,        1473,        3086,       11197,         399,         241,        7270,        8447,        8602,        2427,         208
G22,        2898,         331,           0,          53,       11149,        1412,        1810,         430,        2405,        3532,         326,         283,        7716,        1307,         401,         276,         438,           0,        1571,         318,        7600,        5819,        2900,         211,        4827,          42,        1071,        1227,        1139,        1309,          32,       31779,        1088,         142,       12691,        1251,        1306,         906,        1515,        2594,         618,        1033,        6651,         243,          50,        3773,        1384,         846,        2230,         366
G23,        1805,        3954,        2540,        1092,       67344,        7669,        1237,        1936,       13843,        1949,        3477,        1658,       11749,        1338,         867,        2827,        8364,         824,         735,        4310,       17663,        3460,        4692,         830,        5562,        1420,        1234,         660,         543,        1829,        1544,       11514,       14098,         288,       30040,        9982,        6576,        8543,         497,        7139,         621,        1324,         484,        5626,         172,       10375,        7083,        1789,        1268,        1668
G25,        1572,        1364,        1150,         537,        4201,        5251,        1064,         786,        3703,         376,        4196,         756,         508,         520,         335,         961,        3243,         419,         195,        6595,        3035,        2662,        3300,         367,        1033,         557,         601,         765,        1840,        2492,        1608,        9316,        3989,         858,        3927,         498,        4298,        1701,        1441,        1863,         487,        1251,        8639,        5991,         269,        4544,        2803,        1106,        3166,         408
G26,         219,         319,         380,         585,        1707,         191,         959,          89,        3145,         247,         583,          58,        1821,         519,         214,         628,         754,        1311,         149,         162,         938,        1884,         705,         366,        1050,         257,         280,         588,          78,        2551,         503,        6119,        1602,          13,         613,         396,         623,        1395,          38,         986,          97,           8,        2555,          15,          29,        1428,        1548,         809,         202,          30
G29,         144,         194,         484,         191,         986,        2332,         340,         175,        2854,         384,         774,         278,          81,          43,          24,         667,         269,         684,         222,         319,         608,        2225,        1303,         140,         294,          75,         160,         139,          20,         803,         230,        1370,         569,          22,        2069,         331,         500,        2901,          57,         428,         143,         130,        1176,           0,          72,         142,         611,         271,          65,          23
G31,           0,         376,         357,         304,           0,          27,        1056,         142,        4829,         237,         801,          40,         161,         122,          14,         137,          16,           0,          29,         430,        1334,         119,          56,        4307,      174339,           4,          39,           0,        2532,          24,         124,        3375,        4171,           6,        2074,          36,        1252,        5235,          15,         684,          51,        1385,        1729,        7848,         348,        1953,        1264,         141,        1101,          33
G32,        2699,        1842,        3240,        3209,       14241,        2329,        2326,        2240,       16954,        1149,        2912,         887,        3468,        2435,         659,        1982,        1138,        7686,         825,        2913,        4181,        6342,        4025,        3390,        6487,         354,        1109,         616,        1692,        2171,        1591,       25462,        7254,         569,        5338,        4130,        3626,        2882,        1973,        6461,        1126,        1711,       15144,         255,         982,        7003,        5774,        1995,        1469,         843
G36,       22500,         455,          14,        2346,       74552,        5265,        5953,         231,        2501,       18357,        4293,         533,        9087,       12589,       19298,        6914,        6638,       14986,         279,        2011,        9770,        3830,       10491,        9239,       11773,         488,        8527,         209,          89,       14265,        7141,       58788,       22284,         530,       29730,       11376,       14388,       10602,         207,       11016,         700,       10637,         293,       21593,          81,       42268,       12315,        1288,       13499,         532
G38,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
G44,       84825,       18436,       51666,       32972,      339884,       20556,       13456,       17813,      237635,      103282,      255838,       17720,       73911,       22434,       34123,       28127,       27534,       21414,        5236,       32441,       67263,       67006,       56664,       27480,       71019,        4870,       13797,       11422,       13147,         369,       15725,       16224,        7586,        2746,       39276,       31452,        6376,       74011,        6383,       99549,       10595,       71227,      372141,        6290,        4372,           0,       50668,        9924,        9575,        7879
G45,           0,           7,           0,           0,           0,           0,           0,           0,      133680,           0,           0,           0,       15823,        1350,           0,           0,          55,         141,         762,        2256,         108,         170,           0,           0,           0,           0,           0,           0,          31,        9680,           0,       18837,          87,           0,        4917,        6372,           0,        6634,           0,           0,           0,           0,         340,           0,           0,           0,         363,         909,           0,           0
G50,           0,           0,          16,          33,         446,        3396,          68,         191,         205,           0,       12210,        1035,           3,           2,          33,           8,         663,           0,           1,         472,         379,           0,          20,           0,           0,         284,           0,          22,         102,          10,          75,         857,          50,          43,         130,          51,         607,           6,          24,           0,           0,          78,           0,         814,         252,         389,          69,          17,         604,         405
G52,         120,         205,         115,          56,         191,          91,           0,          38,         125,           0,        3122,         197,         158,         630,           9,          14,         428,          76,          22,          53,          88,         254,           0,         112,          69,         156,         196,         122,          17,          25,          30,         434,         544,          18,         210,         124,         330,          16,          95,          39,         980,          14,         293,           0,          32,         809,         402,         134,           0,          16
G54,        2844,         652,        4335,        1333,        4789,        1064,        9273,         238,        7699,        5183,        1724,        1007,        5038,        4454,        1982,        4558,        2587,        3686,         798,        1666,        1958,         593,        2936,        6418,        2472,         676,        2813,         439,         114,         589,        1421,         695,        7214,        1829,        1986,        2578,        3138,       18181,         949,        2752,        1086,        2778,        5230,        1554,         202,        2091,         994,         988,        1986,         322
G55,        1498,        4875,        2723,        1385,       24614,       14328,          79,         449,       10251,        2964,         349,        2355,         924,        1730,        2094,         988,        2097,        3264,        1328,        2543,        4439,        1020,        3974,        2507,        3200,        2163,        1128,        2487,         679,        1405,         527,        1766,        1627,         249,        1173,        6266,        2384,        9327,         400,        4004,        1244,        2456,        1370,         100,         552,        3235,        5673,         551,        1110,        6774
G56,         436,         281,          61,         192,       15473,         192,          12,          66,        3520,        2871,         381,         453,         220,         201,          69,           0,         184,         219,         144,         487,         267,           0,         857,        1030,        2765,         472,           0,          37,          31,         286,         181,         676,        2570,          10,         344,         282,        3012,         219,           1,         880,         161,         121,           0,           0,         155,         913,        1444,         108,        1212,         378
G59,         424,         379,         663,          85,       19217,         755,        1536,         856,      138218,       11005,       26352,         223,        7313,        1124,        2606,         192,        2667,        9876,         484,       12507,        8692,        3168,       10506,         744,        4918,         693,         214,        1098,        1761,        3555,        1266,        5496,        7172,         255,        4003,        1780,         561,        9066,        1068,        1728,         357,          65,       11387,        1166,         253,        1106,       14920,         976,       14591,         244
G61,         209,         132,         461,         910,       41301,        2049,       20097,        8461,        3850,        4101,        4739,        1104,        2589,        1815,         184,         492,        2450,         150,         800,         930,        4469,        9151,        2170,        1212,        2619,         118,         985,        3713,         680,       53200,        1298,        7638,        3419,         139,        1690,        1556,        1208,        3263,         302,        1423,         529,        1013,        3812,       17939,         951,        2141,       42637,         777,         504,        1001
G62,        2852,        2308,        5446,        2725,       29999,        2551,        6886,        1381,        4899,        5548,        2008,        1580,       10763,        3850,        1169,        3292,        5120,        6476,        1497,        6797,       16142,        5174,        3673,        2043,        9785,        1402,        2419,        2636,        1747,        7004,        2504,       13858,       13825,         120,        9541,        5593,        6378,       13312,         563,        8969,        1286,        4097,       20400,         426,        2193,       11144,        5053,        1116,        2200,        1186
G66,         885,         634,        1692,         757,       12120,        1150,         576,         999,       10752,        1476,         805,         769,        3122,         540,          85,         914,        1090,         839,         496,        1370,        2136,        1147,        2565,        1520,        1499,         197,         585,         316,         659,        1278,         643,        9991,        1758,         421,        2997,        1139,        3265,        2235,         157,        1238,         158,         609,        7969,           0,         364,        3235,        8778,         418,        2166,         247
G77,           0,         230,           0,           0,         202,        3562,         178,         102,           0,           0,           0,         388,          32,         316,         505,          84,           0,           0,           1,           5,          54,         192,         162,           0,         362,          25,         239,           0,          61,         369,         222,         147,           0,          14,         204,         115,           0,        1056,         129,           0,          12,           0,           0,           0,          48,           0,         137,          20,         304,          13
G79,        3308,        2115,        3585,        2505,        7842,        1146,         622,         434,        3546,        1388,        3257,         665,       11960,        2151,        1200,       17643,        3758,        1457,         254,        3834,        1929,        3757,        3871,        2718,        5993,         219,         329,         383,          85,        1126,         362,       16044,        1795,        1913,        8170,         827,        7462,        7076,        1842,        3515,         481,         288,       16916,         970,         488,        4980,        3890,        1662,         649,         612
G80,           0,           0,           0,          40,        2159,           0,           3,           0,           0,           0,           0,         453,         378,          65,           0,           0,           0,           0,           0,         924,        1409,           0,          84,           0,           3,           0,           0,           0,         215,          46,         195,         290,          46,           0,           0,           0,           0,           0,         527,           0,           0,           6,           0,           0,           4,        1246,           0,           0,           9,           0
G81,           0,           0,          11,           4,        2550,         122,        5589,         412,         149,          78,           0,           0,         367,          20,          96,           0,         584,         608,        2256,          73,        1958,         365,          65,           0,           0,           0,           0,          25,         100,         869,           0,        1505,         187,           0,         214,           0,         240,         831,        4924,         632,           0,          99,        3690,           0,         163,        1162,        1400,          22,         301,          83
G85,          49,           0,          20,          18,         198,           0,           0,           0,        5929,          85,         186,           0,          34,          10,           0,           0,           0,         111,           1,          80,           4,          13,           0,          60,          36,           8,           0,           7,           0,         112,           3,          21,          54,           2,           0,           0,        4592,           0,           0,          10,          19,         208,        1004,           0,           0,        2120,          57,           2,         175,           0
G87,        1325,           0,           0,           0,           0,           0,           0,           0,          19,       11851,         701,           0,           0,          59,           0,           0,           0,        1342,           0,        1368,        4371,          15,           0,           0,           0,           0,           0,           0,           1,        1350,           0,         258,        2445,           0,           0,           0,           0,           0,           2,       38141,           0,           0,           0,           0,           0,        1274,           0,           0,           0,           0
G89,        9131,        7506,        8292,        4393,       19967,        1063,       15851,        1672,        5322,       14987,        5145,         966,        2751,        7438,        8668,        2285,       11517,       11395,        3079,       11385,        8361,        6107,       18781,        5916,        3442,         968,         821,         627,        8755,       16219,         982,       28580,       15403,        2898,        2862,        3779,        6189,        5942,        1687,       21793,        3073,       10719,       18463,        6897,        5051,       12580,        4576,        3205,       45416,        2213
G90,         410,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,         435,           0,           0,           0,           0,           0,           0,           0,           0,           0,         170,           0,           0,           0,           0,           0,           0,        1099,           0,           0,           0,           0,           0,         871,           0,         565,        2739,           0,           0,           0,           0,           0,         412,         225,         588,           0,           0,           0,          16
G91,           0,           0,           0,           0,           0,           5,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        4538,           0,           0,           0,           0,           0,           0,        1501,           0,           0,           0,           0,           0,           0,           0,         208,           0,           0,           0,           0,           0,          72,           0,           0,           0,           0,           0,           0,           0,           0
G92,           0,         317,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,         311,           0,           0,           0,       12577,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
G93,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
G94,           0,           0,           0,           0,           0,           0,         883,        2318,        2097,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        4116,           0,           0,           0,           0,           0,           0,           0,           0,           0,       88000,           0,      156504,           0,           0,           0,           0,           0,           0,       11118,           0,           0,           0,           0,           0,         332,           0,           0,        2810,           0,           0
I89,      267648,      403214,      205281,      122133,     2494708,      242981,      767568,      237131,      782334,      317188,      271002,       98652,     1290939,      332951,      122371,       45326,      413539,      628056,      191714,      499922,     1463896,      650698,      307617,      110133,      428267,      119214,      123541,      115140,      327434,     1238011,       90348,     3299528,      281190,       65368,      817858,      156848,      427098,      963465,      320205,      183486,      127551,      187203,      554228,      143028,      102797,      468999,      450472,      154583,      538439,       67226
I91,           0,           0,           0,           0,           0,        2004,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       12569,           0,           0,           0,           0,           0,           0,       16078,           8,        9384,           0,           0,           0,           0,           0,          35,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
I92,           0,       21505,        6261,           0,       40633,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,      213830,           0,           0,           0,       90339,           0,           0,           0,      153250,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
I93,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,         123,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
I94,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,      244118,           0,           0,           0,           0,           0,           0,         215,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
K01,           6,        3767,           0,           1,         152,          11,          71,           0,           0,           2,        1798,          12,         464,           0,           0,           0,           0,           0,           1,        2480,        1882,         892,         205,           0,           4,          18,          13,           0,           0,           0,           3,          38,           2,          45,           0,           1,           2,         600,           0,         166,           0,           0,           0,           2,           0,         203,          11,           4,         190,           0
K03,           0,       11756,           0,           0,           0,           0,           0,           0,           0,           0,           0,         154,           0,           0,         267,           0,           0,           0,           0,           8,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,          39,        1259,           5,           0,           0,           0,           0,           0,        1551,           0,           0,           0,           0,           0,           0,           0,           0,           0
K04,         333,         574,        2977,        1926,       22324,        6049,        6920,         491,       14300,        3382,        1648,        1062,        6070,        9267,        1335,        1467,        2228,        1887,         455,        5000,        4850,        1861,        1799,         462,        3487,         128,         160,         417,         585,         865,         200,       17981,        7345,         123,        4784,        1877,        2897,        4091,         134,        2054,         347,        3005,       16608,        2474,         282,        7783,        4300,          98,        4091,         360
K05,         202,          29,         250,          45,         955,         788,        1207,         134,        3563,        5785,         251,        1123,         813,         338,          29,        1402,         164,         751,          35,        4625,         320,        5504,         500,          41,        2504,         358,        1020,          31,          74,        1860,         484,        2279,        3201,           8,        2667,        3134,        1892,          71,          16,         579,         151,         517,         415,          20,          62,          95,        2410,         201,         146,           0
K12,           0,        6182,           0,           0,           0,           0,           0,           0,           0,           0,       18431,           0,           0,           0,           0,           0,           0,           0,         161,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       12422,           0,           0,       18399,           0,           0,           0,           0,           0,           0,         612,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
K16,        2378,         197,        4901,         690,       23226,        6913,        1016,          54,       11477,        1852,       15798,        1073,        6362,       24372,        2368,        1698,        2414,        2934,        1884,        3535,        1157,        8630,        4878,        1911,        2471,         296,        6450,         942,        1217,        3952,        1014,          76,       12819,        1171,       10506,        6041,        2170,        4164,        1600,        2484,         347,        1784,        7114,        2037,         475,       12813,        5021,        1738,        2222,         952
K18,       63309,       20015,       47506,       25980,      249943,       50047,       13472,        5059,       86003,       18688,       29066,       16096,       96545,       86580,       44223,       34956,       50322,       51091,       20138,       44922,       30373,       87157,       52541,       34400,       30974,        9565,       22056,       12770,        7846,       49456,       20937,       65955,       86051,        9367,      311714,       42568,       42891,       85449,        8605,       46296,        9572,       60888,      191027,       43428,        8141,       75229,       90345,       26004,       86347,        5753
K21,        6034,         691,         853,        6803,        2928,        2486,        5699,         760,        6802,       10741,         238,         468,        2907,        1437,         550,        1124,        9773,        2782,          87,        1825,        1198,        1071,        3174,        4214,        3049,         772,        1959,         265,         340,        1141,        1356,        1707,        5265,         502,        1857,        3327,        2556,        5483,        1578,        5045,        1473,        3086,       11151,         399,         241,        7270,        8447,        8602,        2426,         208
K22,        2898,         331,           0,          53,       11149,         346,        1810,         430,        2405,        3532,         326,         283,        7716,        1307,         401,         276,         438,           0,        1571,         318,        7600,        5819,        2900,         211,        4767,          42,        1071,        1227,        1139,        1309,          32,       31779,        1088,         142,       12691,        1251,        1306,         906,        1515,        2565,         618,        1033,        6499,         243,          50,        3773,        1384,         846,        1976,         366
K23,        1805,        3954,        2540,        1092,       67344,        2049,        1237,        1933,       13807,        1949,        3477,        1658,       11749,        1338,         867,        2827,        8364,         824,         735,        4281,       17663,        3460,        4692,         830,        5562,        1420,        1234,         660,         543,        1829,        1478,       11514,       14098,         288,       30040,        9741,        6120,        8543,         483,        3958,         621,        1324,       60232,        5626,         172,       10349,        7083,        1789,        1268,        1668
K25,        1572,        1360,        1150,         537,        4201,        5245,        1064,         786,        3703,         376,        4196,         756,         508,         520,         335,         961,        3243,         419,         195,        6595,        3035,        2662,        3300,         367,        1033,         557,         601,         765,        1840,        2492,        1608,        9316,        3989,         858,        3927,         498,        4298,        1701,        1441,        1863,         487,        1251,        8639,        5991,         269,        4544,        2803,        1106,        3166,         408
K26,         219,         319,         380,         585,        1707,         191,         959,          89,        3145,         247,         583,          58,        1821,         519,         214,         628,         754,        1311,         149,         162,         938,        1884,         705,         366,        1050,         257,         280,         588,          78,        2551,         503,        6119,        1602,          13,         613,         396,         623,        1395,          38,         986,          97,           8,        2555,          15,          29,        1428,        1548,         809,         202,          30
K29,         144,         194,         484,         191,         986,        2332,         340,         175,        2854,         384,         774,         278,          81,          43,          24,         667,         269,         684,         222,         319,         608,        2225,        1303,         140,         294,          75,         160,         139,          20,         803,         230,        1370,         569,          22,        2069,         331,         500,        2901,          57,         428,         143,         130,         773,           0,          72,         142,         611,         271,          65,          23
K31,           0,         376,         357,         304,           0,          27,        1056,         142,        4819,         237,         801,          40,         126,         122,          14,          13,          16,           0,          29,         430,         534,         119,          56,        4307,        2872,           4,          39,           0,          39,          24,         124,        3361,        3879,           6,          86,          36,         249,        5235,          15,         248,          51,          80,        1643,        7848,         338,        1953,        1150,         141,           0,          33
K32,        2324,        1842,        3240,        3209,       14241,        2311,        2326,        2232,       16071,        1149,        2912,         887,        3262,        2435,         659,        1982,        1138,        7686,         825,        2913,        4181,        6342,        4025,        3390,        6487,         354,        1109,         616,        1692,        2171,        1591,       23902,        7254,         569,        5338,        4128,        3274,        2882,        1477,        6461,        1126,        1298,       15138,         255,         982,        7002,        5774,        1995,        1469,         843
K36,       21436,         455,          14,        2346,       68849,        1309,        5953,         229,        2501,       18357,        4290,         533,        9087,       12589,       19298,        6914,        6638,       14986,         279,        2011,        9770,        3830,       10491,        9239,       11773,         488,        8527,         209,          89,       14265,        7141,       49544,       22284,         530,       29624,       11376,       14322,       10602,         207,       11009,         700,       10637,       29984,       21593,          81,       28589,       12315,        1288,       13499,         532
K38,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
K44,        4872,       12133,       10908,       15221,       67443,        4270,        8046,        4210,       44956,       13441,        3897,        7552,       34456,       22074,       16971,       12571,       16182,           0,        1709,         177,        1737,       21041,       38296,        6815,       20490,        4870,        5828,        8217,        3633,         317,        8258,       16167,        5544,        2312,       21210,        9187,        3572,       44517,         394,       74931,        5198,       13420,       58841,        6290,        3806,           0,       18104,        9924,        8594,        6600
K45,           0,           7,           0,           0,           0,           0,           0,           0,        5036,           0,           0,           0,       15823,        1350,           0,           0,           0,         141,         762,        2105,         108,         170,           0,           0,           0,           0,           0,           0,          31,        2363,           0,       18837,          87,           0,        4685,        5565,           0,        6634,           0,           0,           0,           0,         340,           0,           0,           0,         363,         783,           0,           0
K50,           0,           0,          16,          33,         446,        3396,          68,         191,         205,           0,       11330,        1035,           3,           2,          33,           8,         663,           0,           1,         472,         379,           0,          20,           0,           0,         284,           0,          22,         102,          10,          75,         857,          50,          43,         130,          51,         163,           6,          24,           0,           0,          78,          43,         814,         252,         389,          69,          17,         604,         106
K52,         120,         205,         115,          56,         191,          91,           0,          38,         125,           0,        3122,         197,         158,         630,           9,          14,         428,          76,          22,          53,          88,         254,           0,         112,          69,         156,         196,         122,          17,          25,          30,         434,         544,          18,         210,         124,         330,          16,          95,          39,         980,          14,         293,           0,          32,         809,         402,         134,           0,          16
K54,        2844,         652,        2794,        1333,        4789,         903,         339,         238,        7630,        4788,        1724,        1007,        5038,        4454,        1982,        4558,        2586,        3686,         798,        1638,         333,         593,        2879,        6418,        2472,         654,        2698,         439,          34,         500,        1421,         695,        7134,        1829,        1986,        2578,        3138,        2046,         111,        2752,        1078,        2778,        5230,        1554,         202,        2091,         994,         988,        1909,         322
K55,        1429,        3828,        1928,         697,        7841,        3481,          79,         144,        5643,        2274,          28,        1996,         923,        1645,         402,         753,        1410,        3264,         520,        2527,         667,         924,        1083,        2507,        1392,         667,         862,        1048,         412,         850,         518,        1766,        1507,         249,        1048,        1131,        1722,        4737,          98,        2762,        1115,        1658,        7991,         100,         426,        3214,        4807,         345,        1029,        2445
K56,         430,         281,          61,         192,       15473,         180,          12,          66,         991,        2871,         322,         435,         220,         200,          69,           0,         184,         219,         144,         487,         267,           0,         308,        1030,         115,         472,           0,          37,          31,         286,         181,         238,        2570,          10,         344,         282,        2972,         219,           1,         871,         161,         116,           0,           0,         155,         883,        1443,         108,        1208,         378
K59,         424,         379,         663,          85,        9872,         641,         280,         795,        4475,        5269,        1055,         223,         900,        1064,         336,         192,        2567,        9876,         453,        2101,        1360,        3178,        5560,         744,        4448,         350,         208,         190,         378,        1128,         382,        3498,        2552,         255,        1257,         428,         561,        8255,         273,         728,         357,          65,        8351,        1166,         249,        1106,        5821,         976,        5706,         244
K61,         139,         132,         340,         739,        6187,         745,         204,         428,         707,        4100,        1046,        1097,        2191,        1628,         184,         492,        2439,         150,         248,         930,        1151,        1048,        1497,        1212,        1489,         118,         985,         815,         280,       13047,         823,        7571,        2430,         139,        1690,        1283,        1058,        3182,         207,         768,         529,         996,        2329,       17939,         420,        1585,         607,         777,         385,        1001
K62,        2852,        2308,        5446,        2725,       29999,        2531,        6886,        1381,        4865,        5548,        2008,        1580,       10763,        3850,        1169,        3292,        5120,        6476,        1497,        6797,       16142,        5174,        3673,        2043,        9785,        1402,        2419,        2636,        1747,        7004,        2504,       13858,       13825,         120,        9448,        5593,        6378,       13312,         563,        8969,        1286,        3841,       19767,         426,        2193,       11141,        5051,        1116,        2200,        1186
K66,         885,         634,        1692,         757,       12120,         878,         576,         992,        5552,        1476,         805,         769,        2910,         540,          85,         914,        1090,         839,         496,        1370,        2136,        1147,        2565,        1520,        1499,         197,         585,         316,         659,        1278,         643,        9991,        1758,         421,        2997,        1139,        3035,        2235,         157,        1238,         158,         609,        7894,           0,         364,        3235,        8778,         418,        2166,         247
K77,           0,         230,           0,           0,         202,         583,         178,         102,           0,           0,           0,         388,          29,         316,         505,          84,           0,           0,           1,           5,          54,         192,         162,           0,         362,          25,         239,           0,          61,         369,         222,         147,           0,          14,         204,         115,           0,        1056,         129,           0,          12,           0,           0,           0,          48,           0,         137,          20,         235,          13
K79,        3308,        2115,        3585,        2505,        7842,         876,         622,         434,        3546,        1388,        3251,         665,       11960,        2151,        1200,       17506,        3758,        1457,         254,        3834,        1929,        3757,        3866,        2718,        5993,         219,         258,         383,          85,        1126,         362,       16044,        1795,        1913,        8170,         827,        7462,        7076,        1842,        3515,         481,         288,       17176,         970,         488,        4980,        3890,        1662,         649,         612
K80,           0,           0,           0,          40,        2159,           0,           3,           0,           0,           0,           0,         453,         378,          65,           0,           0,           0,           0,           0,         924,        1082,           0,          84,           0,           3,           0,           0,           0,         215,          46,         195,         290,          46,           0,           0,           0,           0,           0,         297,           0,           0,           6,           0,           0,           4,        1246,           0,           0,           9,           0
K81,           0,           0,          11,           4,        2550,         122,        5589,         373,         149,          78,           0,           0,         367,          20,          96,           0,         584,         608,        2222,          73,        1958,         355,          65,           0,           0,           0,           0,          25,         100,         869,           0,        1505,         187,           0,         214,           0,         240,         831,         399,         632,           0,          99,        4383,           0,         163,        1162,        1400,          22,         301,          83
K85,          49,           0,          20,          18,         198,           0,           0,           0,        5929,          85,         186,           0,          34,          10,           0,           0,           0,         111,           1,          80,           4,          13,           0,          60,          36,           8,           0,           7,           0,         112,           3,          21,          49,           2,           0,           0,        4592,           0,           0,          10,          19,         208,         560,           0,           0,        2120,          57,           2,         175,           0
K87,        1325,           0,           0,           0,           0,           0,           0,           0,          19,        8258,         455,           0,           0,          59,           0,           0,           0,        1115,           0,        1368,        1570,           0,           0,           0,           0,           0,           0,           0,           1,        1350,           0,          96,        1475,           0,           0,           0,           0,           0,           2,         879,           0,           0,           0,           0,           0,         296,           0,           0,           0,           0
K89,        9131,        7506,        8256,        4043,       19967,        1737,       15784,        1672,        5288,       14987,        4600,         966,        2732,        7427,        8668,        2285,       10171,       11395,        1633,       11385,        4621,        6054,       18668,        5038,        3353,         968,         821,         627,         628,       16219,         972,       28579,       15397,        2898,        2862,        3778,        5932,        5155,         513,       21310,        3073,       10719,       14102,        6897,        5022,       12580,        4282,        3205,       43583,        2212
K90,         410,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,         435,           0,           0,           0,           0,           0,           0,           0,           0,           0,         170,           0,           0,           0,           0,           0,           0,        1099,           0,           0,           0,           0,           0,         871,           0,         553,        2739,           0,           0,           0,           0,           0,         412,         225,         588,           0,           0,           0,          16
K91,           0,           0,           0,           0,           0,           5,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        1178,           0,           0,           0,           0,           0,           0,        1501,           0,           0,           0,           0,           0,           0,           0,         208,           0,           0,           0,           0,           0,          72,           0,           0,           0,           0,           0,           0,           0,           0
K92,           0,         317,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,         269,           0,           0,           0,       11830,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
K93,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
K94,           0,           0,           0,           0,           0,           0,         413,        2318,        1918,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        3266,           0,           0,           0,           0,           0,           0,           0,           0,           0,       88000,           0,      156504,           0,           0,           0,           0,           0,           0,       11118,           0,           0,           0,           0,           0,         332,           0,           0,        2810,           0,           0
M01,         762,           0,           0,        2285,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,         864,           0,         127,           0,        3097,           0,       11091,           0,         310,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        9575,           0,           0,           0,           0,           0,         660,           0,           0,           0
M05,           0,        3697,           0,         686,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,         306,           0,           0,           0,           0,          23,         148,           0,         578,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,          76,           0,           0,           0,           0,           0,           0
M12,           0,         355,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,      592250,           0,           0,           0,           0,        1514,           0,           0,           0,           0,      131404,       25302,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        2287,           0,           0,           0,           0,           0,           0,           0,           0
M18,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,          75,           0,        2227,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
M21,           0,           0,           0,           0,           0,          47,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,         250,        1781,           0,           0,           0,       11942,         252,           0,           0,        5281,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,          42,           0,           0,           0,           0,           0,         274,           0
M23,           0,         118,           0,           0,        2933,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,          20,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,         110,           0,         257,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        1062,           5,          58
M25,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        2585,           0,           0,           0,           0,         123,           0,           0,           0,           0,           0,        5989,           0,           0,           0,           0,           0,           0,        1344,           0,           0,           0,           0,           0,           0,           0,           0,         214,           0,           0,         539,           0,           0,         130,           0,           0,           0,           0,         629,           0
M29,           0,         118,           0,           0,        5256,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           6,           0,           0,           0,           0,           0,           0,           0,           0,           0,         291,           0,           0,           0,         368,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           2
M30,           0,         591,           0,           0,           0,           0,       63537,           0,           0,           0,           0,           0,           0,      641944,           0,           0,           0,           0,       64225,           0,           0,       12489,       27854,           0,           0,           0,       90648,           0,           0,           0,           0,           0,           0,         224,     1143849,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
M32,           0,       54113,       83682,           0,       18286,           0,           0,           0,           0,           0,           0,           0,        7147,           0,       20303,       16065,           0,         785,        6860,        8477,           0,       11745,        5100,           0,           0,        7671,       92622,           0,         744,        5267,           0,           0,           0,           0,           0,       49293,           0,           0,           0,           0,           0,           0,      330419,           0,           0,           0,           0,           0,      324374,          97
M38,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        1539,           0,           0,           0,           0,          29,           0,           0,           0,           0,           0,           0,           0
M44,           0,           0,           0,           0,         790,           0,           0,           0,           0,           0,           0,       70241,        8670,           0,           0,           0,           0,           0,       50435,           0,           0,      157951,        3396,           0,       28838,           0,           0,           0,           0,           0,           0,           0,           0,           0,      141658,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
M50,           0,           0,           0,           0,          34,           0,           0,           0,           0,       39145,           0,           0,        1157,           0,       22726,       17558,           0,           0,           0,           0,      118857,       27803,        1994,           0,       29406,           0,           0,           0,           0,           0,         449,       69672,           0,           0,       44029,       13013,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,         253
M52,        1766,        1658,           0,           0,           0,          77,           0,           0,           0,           0,           0,           0,       37086,           0,        1462,        4113,           0,           0,           0,           0,           0,           0,        8090,           0,           0,         431,           0,         478,         343,           0,         494,           0,           0,         193,           0,        2247,           0,           0,        1943,           0,           0,        6943,           0,           0,           0,           0,           0,           0,           0,           0
M54,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,         346,           0,           0,           0,         598,           4,           0,           0,           0,          64,           0,           0,           0,           0,           0,           0,        6649,           0,           0,           0,           0,           0,           0,           0,        1410,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        3319,         183
M55,           0,           0,           0,           0,         166,           0,           0,           0,           0,           0,           0,           0,           0,         241,           0,         291,           0,           0,           0,           0,           0,           0,         283,         499,           0,           0,           0,           0,           0,           0,         388,           0,           0,           0,           0,         282,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        1986,         783
M56,           0,          85,           0,         199,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        1236,           0,          42,           0,           0,           0,           0,           0,         361,           0,           0,           0,           0,         760,          49,           0,         144,           0,           0,           0,           0,           0,           0,           0,           0,           0,         201,           0,           0,           0,           0,           0,           0,           0,        3275,           7
M59,           0,        1551,           0,           0,        1845,           0,           0,           0,           0,           0,           0,           0,           0,           0,        5285,          85,         350,          22,           0,       13727,       13084,           0,        8827,         407,        4373,           0,           0,         741,          20,       29164,         224,           0,           0,           0,        1183,        1552,           0,       11970,         335,           0,           0,           0,        2769,          50,           0,           0,          17,         130,       17211,         954
M61,           0,         789,           0,        1189,           0,           0,        4168,           0,           0,        2463,           0,           0,        2379,           0,         159,           1,           0,        1144,          29,           0,           0,           0,        2905,           0,           0,           0,          27,           0,         338,        4299,           0,           0,           0,           0,           0,        4492,           1,        3693,           0,           0,           0,           0,         720,           0,           0,           0,           0,           0,       12868,          22
M62,           0,           0,         157,        1036,           0,           0,           0,           0,           0,           0,        2651,           0,       18949,           0,          48,           0,           0,           0,         224,           0,           0,           0,        5775,           0,       12052,         492,        5918,           0,          69,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,         433,           0,           0,           0,           0,           0,           0
M66,           0,          96,           0,           0,        4173,           0,           0,           0,           0,           0,           0,           0,         402,           0,           0,         969,       19165,           0,           1,           0,           0,           0,        3099,           0,           0,           0,          50,           0,           0,        4038,           0,           0,           0,           0,          25,           0,           0,           0,           0,           0,          27,           0,           0,           0,           0,           0,           0,           0,         768,           0
M67,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        1563,           0,           0,           0,           0,           0,           0,           0,           0,           0,          63,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,         345,           0,           0,           0,           0,           0,           0,           0,      239043,           0,           0,           0,           0,           0,           0,           0
M68,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
M79,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       82353,           0,       35564,        7771,           0,       57514,           0,           0,           0,           0,        4756,           0,           0,        1643,        1909,           0,           0,           0,           0,           0,           0,           0,        4111,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
M80,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,      146957,           0,         161,           0,           0,           0,       20178,       13151,       44016,           0,          20,           0,         386,           0,           0,           0,           0,           0,           0,           0,           0,           0,       34523,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       26693,           0
M81,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        1809,           0,         100,           0,        2204,           0,           0,           0,           0,           0,         184,           0,           0,           0,           0,           0,        1731,           0,           0,       25327,           0,           0,           0,           0,           0,           0,           0,           0,           0,        1034,       18504,           4
M87,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,         300,           0,           0,           0,           0,           0,           0,           0,        1850,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
M89,           0,       19050,           0,       48878,      224755,           0,       88969,           0,           0,        3218,       13024,           0,       19561,           0,       43443,        6809,       10973,       15847,        4599,         221,           0,       38892,       10796,         227,      115538,        6903,       26790,           0,        1685,       21293,        6903,        7042,        7665,           0,       10478,           0,        1709,      138489,           0,        3754,          55,           0,       93328,        6299,           0,           0,       12660,        9058,       81274,        5870
M91,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       21817,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
M92,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
M93,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
M94,           0,           0,           0,           0,       22131,           0,           0,           0,           0,           0,           0,           0,         381,           0,           0,           0,           0,           0,           0,           0,           0,        2226,         755,           0,         839,        4243,        1584,           0,           0,           0,           0,           0,           0,           0,       40745,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,          86,           0,        7506,           0
N01,           0,        5321,       12171,           0,        1465,        5779,           0,           0,       27211,           0,           0,           0,       59259,        1662,           0,           0,           0,           0,        1593,         393,           0,       69411,       16197,          90,           0,         236,        1195,           0,        8289,           0,           0,        1981,       17893,         499,        1715,        1102,           0,        5999,           0,        1422,           0,           0,           0,       23142,          52,           0,           0,           0,        4909,        7053
N05,        3726,           0,       34093,        3297,      207739,        2730,           0,           0,         141,       22310,           0,        3630,       30083,       21159,       37401,       12601,       19141,       40838,           0,        8309,      180332,       12111,       26851,        5109,         615,           0,           0,        1123,           0,       73287,           0,      293394,       11460,          91,       48916,        3901,       34557,       30580,           0,           0,          42,       61930,      245168,           0,          15,      176889,           0,           0,       53034,           0
N12,           0,      661606,           0,           0,     1124469,           0,     1534088,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        5309,     1739640,     1600017,           0,           0,        2484,           0,           0,           0,           0,           0,      991808,           0,     4595826,     3332843,           0,      155491,           0,           0,           0,      382651,           0,           0,     1809437,           0,           0,           0,     2667080,           0,           0,           0,        1739
N18,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       86629,           0,           0,           0,           0,           0,           0,           0,           0,           0,      101872,           0,      290946,      471365,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           5
N21,           0,           0,           0,         769,           0,        1742,         490,         477,           0,           0,           0,           0,           0,           0,           0,           0,         203,           0,           0,           0,           0,           0,         284,           0,           0,           0,           0,           0,           0,           0,           0,      269325,          76,         169,           0,         367,           0,       20585,           0,           0,           0,           0,        1612,           0,           0,         564,        9367,           0,        9435,           0
N23,           0,           0,         224,        1946,        1721,           0,           0,         522,           0,        4550,           0,           0,        3430,           0,           0,           0,       18253,           0,           0,           0,           0,          15,        1520,           0,        8478,         932,           0,           0,           0,           0,           0,        2525,         532,          26,           0,           0,          92,           0,           0,        1530,           0,          77,        7409,           0,           0,       35598,           0,        3753,           0,           0
N25,           0,           0,        5930,        2721,      630442,         103,           0,        3838,         193,        2840,           0,           0,        6947,           0,         321,           0,       11817,           0,           0,         100,       34743,       40114,       18355,           0,         651,        1955,           0,         135,           0,       51386,           0,      136983,        1582,         899,       18181,       10968,        2174,       78110,           0,        6813,        1043,        7932,       13825,         915,           0,       71013,        1038,           0,           0,         587
N29,           0,           0,        1280,           0,         651,           0,           0,           0,           0,           0,           0,         157,           0,           0,           0,        4113,         120,           0,          20,          10,           0,           0,        1596,          51,           0,         455,           0,           0,           0,           0,           0,           0,        1444,         258,           0,           0,           0,           0,           0,          72,           0,          20,        4202,           0,           0,           0,           0,          99,           0,         187
N30,      108958,       80392,      649050,       47139,     2346315,       25232,       60768,           0,     1630579,           0,       80476,       75020,      754193,      185587,      134241,       89427,           0,      153932,           0,       50242,      830949,     1036464,      703989,      293990,        7518,       42038,       22516,      363486,       31563,     1054411,      426737,     1260124,      476148,       52878,       11116,       30880,      105984,      156970,       19100,      290061,       23946,      241148,       51378,           0,        9725,       23425,       86138,       15781,     1231255,      133028
N32,       16555,       15682,       18475,       63605,     2628074,       29369,       11321,       11496,      124718,      285241,       18691,        6352,       60684,       42984,       50895,       44236,      102239,           0,           0,      269961,           0,      752201,      136835,       30464,        9066,        7759,           0,        2221,           0,       79010,        1011,      613324,      361764,       20599,      398935,       21502,      174201,      866580,           0,       23190,        1008,        1087,       70414,       54760,           0,        5700,       57161,        8613,        1884,       21545
N38,           0,         236,           0,           0,           0,       20434,           0,           0,         240,        4495,           0,           0,        1539,           0,           0,           0,          64,           0,           0,           0,           0,           0,           0,           0,        1717,           0,           0,           0,           0,       68507,           0,           0,         613,           0,           0,        1106,           0,           0,           0,           0,           0,           0,        5722,           0,           0,           0,           0,           0,          46,           0
N44,      169690,       35587,      338090,      130315,     1376410,      189538,       30016,        8323,      171117,        7184,           0,        8951,      454485,      472733,      287402,      119482,       94016,       42945,           0,      316137,      115792,      654444,      429984,      109969,      153895,       14021,      111936,       42151,       20494,        3882,       14722,       59747,      141296,       44563,      562324,      215428,      337113,      359763,           0,        1375,       16329,      246627,        9700,       52645,       22755,      156935,      287776,           0,      364157,       27020
N50,           0,           0,        3880,           0,       52727,       14619,       33266,           0,       31000,           0,           0,           0,       36680,           0,           0,           0,       29876,       24979,          70,        7379,           0,           0,       26208,       35940,           0,           0,           0,           0,        6544,       11389,           0,       88095,       36604,           0,           0,           0,           0,       73289,           0,           0,        6835,       33503,           0,           0,           0,       22318,       23122,       11698,           0,        1988
N52,        4119,         236,        1129,        2828,       27417,           0,        2074,        1999,       24038,       20379,           0,         268,        3454,           0,           0,           0,        4727,           0,           0,       20071,       29738,        9136,           0,        2745,        2785,           0,        1627,           0,           0,       14533,           0,       68617,       12919,         491,           0,           0,         831,       23119,           0,        4206,          70,        1052,       10499,        1029,           0,       11828,        1073,        5508,       10939,          88
N54,           0,         118,           0,         540,       22770,          69,           3,          64,         664,           0,           0,           0,           0,           4,         757,           0,           0,           0,           0,           0,          78,       11008,           0,           0,           0,         635,           0,           0,           0,           0,           0,           0,         627,         442,        2898,         252,         620,           0,           0,           0,           0,          60,          22,          45,           0,         872,        5351,           0,           0,         391
N55,           0,           0,           0,           0,           0,         775,           0,           3,         324,           0,           0,           0,           0,         116,        1018,           0,           0,           0,          15,         250,           0,         200,        1385,           0,           0,           0,           0,        3495,           0,           0,           0,           0,          50,         232,          38,           0,           0,         862,           0,         928,           0,         236,         654,           0,           0,         682,        1010,           0,         120,         346
N56,           0,           0,           0,           0,       22468,           0,           0,          13,         665,        1718,           0,          50,         538,         236,           0,           0,           0,           0,         180,         147,           0,         232,        1148,          53,           0,           0,           0,          35,           0,           0,           0,       45294,           0,           0,        1001,        1597,           0,        5077,           0,         394,           0,         842,           0,         169,          69,         178,       35340,           0,           0,         110
N59,           0,         946,         106,           0,         178,       16257,           0,        1984,       17151,         189,           0,         172,        1645,        1192,        2530,         300,         702,           0,         127,         142,        3808,      103637,       16840,         623,        4633,         265,           0,        1890,         136,        4346,           0,        2844,        5373,         555,         681,           0,         808,        2511,           0,           0,        2268,         266,        6222,       10907,        5938,         106,        7248,           0,           0,        9556
N61,           0,        3783,        3566,          10,       19174,         861,           0,        2375,        3542,        1061,           0,        2690,        2875,        4134,        1873,           0,           0,           0,         636,        1946,       15928,       15075,        4236,        9494,           0,          41,           0,           0,           0,        1720,         943,       28816,         258,           6,       15300,           0,        1317,           0,           0,        1922,         246,         321,        8488,        1053,         562,         276,       11988,           0,        1161,          21
N62,       12211,        6363,        2329,         732,      107688,         141,         139,        2012,        1757,        3228,        2069,        1430,         198,        1994,           0,           0,       14834,       25056,           0,       40748,       15251,       10509,       35457,         835,       12318,        6283,           0,          67,         398,       70652,         464,       13567,         218,           0,        6352,         468,           0,       10231,        1876,          72,           0,        3907,           0,         898,         355,      130965,       47570,           0,         908,        1753
N66,           0,           0,           0,           0,           0,        7687,           0,           4,           0,         729,           0,           0,        1544,          56,           0,           0,           0,           0,           0,           0,           0,        4976,        2801,           1,           0,       19469,         566,         716,           0,        2360,           0,           3,           0,           0,         109,           0,        1815,           0,           0,           0,           0,           0,           0,         116,           0,       11117,           0,           0,           0,           0
N67,           0,           0,      259086,           0,     8356151,      153017,           0,           0,      200237,           0,           0,           0,      397619,      197554,           0,           0,           0,           0,           0,           0,      135000,           0,      115388,       98055,           0,           0,           0,           0,       52108,      722267,           0,     4982473,           0,           0,        9728,           0,           0,      130688,           0,           0,           0,      212601,           0,           0,           0,       13791,           0,           0,           0,           0
N68,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       11447,           0,           0,           0,           0,           0,        9885,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,      683402,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       26709,           0
N79,       10106,           0,           0,         731,     3557648,      243526,      227945,          12,           0,           0,           0,          32,        3631,      108372,         533,           0,        8685,        3225,         160,           0,        9517,      270609,      380575,        5834,       17508,        5144,           0,        7805,        3756,      565444,           0,     2180947,      417017,        1017,      791414,       21597,           0,     1117391,       28193,       10864,         619,       18912,        1380,        2303,         105,      277493,        5346,           0,      220515,        3017
N80,           0,       44780,           0,           0,       10713,           0,        5304,           0,        3208,           0,           0,        3260,       14590,        7367,           0,           0,           0,           0,           0,         716,           0,         345,       10730,           0,       65082,           0,           0,           0,       19028,        4893,        6953,       93259,         502,           0,           0,           0,           0,       25550,        1235,           0,           0,       33233,           0,           0,        8687,         239,       52256,           0,           0,           0
N81,           0,           0,           0,           0,         178,        9397,           3,           0,       28534,           0,           0,           0,        1417,          23,           0,           0,           0,           0,           0,        1156,           0,           0,         951,           8,           0,           0,           0,         546,           0,         106,           0,       21869,           0,           0,        7905,           0,           0,           0,         714,           0,           0,        2389,         947,           0,        3303,           0,       20496,           0,           0,          30
N87,           0,        3429,           0,           0,           0,           0,           0,           0,         950,           0,           0,           0,           0,           0,           0,           0,           0,           0,        1368,           0,           0,        2678,           0,           0,         113,           0,           0,           0,          30,           0,           0,           0,           0,           0,           0,           0,           0,       12779,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
N89,      140970,       29499,       68418,       11357,      139355,       61613,       29877,       27010,      147394,       12493,        1976,        8722,      100106,       93326,           0,       13338,       43589,      184142,         605,       14229,       77616,      103875,       84407,       32592,        1560,       20003,         214,        4585,         401,      672201,       15026,      400569,      120492,       11050,       22177,       16471,       40280,      122435,        1844,      115696,       10839,       40782,      194220,       14061,        4772,       57438,       91012,        9310,       62234,       18714
N91,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
N92,           0,        6701,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
N93,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
N94,           0,           0,           0,           0,       59021,           0,           0,       17370,       64496,           0,           0,           0,       85572,           0,           0,           0,           0,           0,           0,      113317,           0,       90397,         139,           0,           0,           0,        1375,           0,           0,           0,           0,     1138799,           0,           0,           0,           0,        7304,      108620,           0,           0,           0,       23978,        4213,           0,           0,       75433,         426,           0,       60975,           0
Q12,     1742700,           0,     1649839,     1169114,    17722779,     1539785,       20080,      331920,     6026416,     3698127,           0,      610350,     4092771,     2583144,     1490986,     1279674,     2141509,     2254513,           0,           0,      267818,     3948609,     2651045,     1231874,     2356188,      515094,      606588,      729271,       20857,     3375653,     1191314,     6011033,           0,      270187,     4735145,     1804253,     1382707,     4464481,       29935,     1635693,      225669,       10922,     8367138,     1043418,      235131,           0,     3800481,     1159935,     2322858,      351921
Q18,           0,           0,       88067,           0,     2608379,       16800,           0,           0,      713208,           0,           0,       12920,      293164,           0,      122570,       48652,           0,           0,           0,           0,           0,      240210,           0,       83100,       68625,        3900,       34995,           0,           0,       34753,           0,           0,           0,         447,       62953,           0,      123361,      136506,           0,           0,           0,           0,      700387,           0,           0,           0,           0,           0,           0,       41542
R01,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       62122,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       10868,           0,           0,           0,           0,           0,           0,           0,           0,           0,          63,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
R12,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
R18,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
R30,           0,           0,           0,           0,       61537,         605,           0,           0,           0,           0,           0,           0,       70383,           0,           0,        1662,           0,           0,           0,           0,           0,           0,           0,           0,         959,           0,           0,           0,         104,           0,           0,           0,           0,           0,           0,           0,         297,           0,           0,           0,           0,           0,           0,           0,           0,           0,        5781,           0,           0,           0
R32,           0,           0,           0,           0,           0,        1324,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        6566,           0,       21423,           0,           0,           0,           0,           0,           0,           0,           0,        9253,           0,           0,           0,           0
R38,           0,           0,           0,           0,           0,           0,           0,           0,           0,         336,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
R44,           0,           0,           0,           0,           0,        6274,           0,           0,           0,           0,           0,          10,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        1097,           0,           0,           0,           0,           0,           0,           0
R50,           0,           0,           0,           0,       33780,          18,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,         234,           0,           0,           0,           0,           0,           0,           0,           0
R52,           0,           0,           0,           0,        6409,           0,           0,           0,           0,           0,           0,         419,           0,        4125,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        4550,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
R54,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,         456,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
R55,           0,           0,           0,           0,           0,        2083,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,         294,           0,           0,           0,           0,           0,           0,           0,           0,           0,         276,           0,           0,           0,           0,           0,         390,           0,           0,           0,           0,           0,           0,           0
R56,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           6,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
R59,           0,           0,           0,       15593,           0,        2025,           0,           0,       84233,           9,           0,         991,        3504,           0,           0,        2863,           0,           0,           0,           0,           0,         937,           0,           0,        5634,           0,        6871,           0,           0,           0,           0,           0,           0,        3295,        4199,        4674,         614,           0,           0,           0,           0,           0,        1790,           0,           0,           0,        4161,           0,           0,           0
R61,           0,           0,           0,           0,       30166,           0,           0,           0,           0,           0,           0,          35,       93690,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,         134,         351,           0,          47,           0,           0,           0,           0,           0,           0,           0,           0,           0,         691,           0,           0,           0
R62,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,         860,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
R66,           0,           0,           0,           0,           0,         711,           0,           0,           0,           0,           0,           0,        1420,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        2680,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
R79,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
R80,           0,           0,           0,           0,        3238,           0,           0,           0,           0,           0,           0,         248,           0,           0,           0,           0,           0,           0,           0,           0,           0,          22,           0,           0,           0,           0,           0,           0,         954,           0,           0,           0,           0,           0,           0,           0,           0,        6490,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
R81,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,         337,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
R87,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,         300,           0,           0,           0,         944,           0,           0,         121,           0,           0,           0,           0,           0,           0,           0,           0,           0,         602,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
R89,           0,           0,           0,           0,           0,       19449,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       19181,           0,        3013,         249,           0,         239,           0,           0,         885,           0,       13492,           0,           0,           0,           0,          71,         398,           0,        9214
R91,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
R92,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        1948,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
R93,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
R94,           0,           0,           0,           0,      438294,           0,           0,           0,           0,       10912,           0,           0,      161317,           0,           0,           0,           0,           0,           0,           0,      626521,           0,       27130,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       16676,      333733,           0,           0,           0,           0,         127,           0,           0,         103,      135653,           0,           0,           0
S67,           0,      109446,           0,           0,     2295331,          35,           0,         760,           0,           0,       11098,           0,           0,       17470,       26285,           0,           0,           0,        7775,          36,      164577,       57985,           0,           0,           0,           0,        5937,        3541,           0,       96687,           0,      468472,           0,           0,           0,       49325,           0,      103111,       15990,           0,          12,           0,           0,         959,       11226,           0,       24897,           0,      136053,           0
S89,           0,           0,           0,         675,        3572,        6035,           0,           0,        1296,           0,           0,         448,        2313,           0,         264,         221,           0,           0,          97,           0,           0,           0,           0,           0,           0,           0,           0,         662,           0,           0,           0,           0,           0,           0,         351,          45,           0,           0,           0,           0,           0,           0,           0,         321,           0,           0,        1159,           0,           0,         584
T01,      101135,       66918,      327279,        4868,     2931667,        8618,          12,           0,      666360,       31726,           0,         109,      222675,        3041,           0,       34798,      354996,       38639,       42311,      207548,         147,      313927,        8155,       22811,       13307,      234637,        2723,       44878,         394,       11145,       27865,           0,      120592,        2134,       13136,           0,          93,      236541,        9685,       12503,           0,           0,           0,           0,        9677,       15318,     1500147,        2555,       68876,       82446
T09,     1190189,           0,     2255743,     1118773,    16671614,      998033,     2056219,           0,     9295283,     2979769,     1302919,      488713,     4370488,     2300233,     1251900,     1191466,     1465634,     1332435,      641580,     1718152,     2124164,     3467303,     2374195,     1414346,     2016876,           0,      694880,     1033952,           0,     3651123,     1319095,     6283883,     2353722,      248598,     3970741,     1014159,           0,     4828823,      413000,     1556680,      306253,     2853022,     9142262,      894127,      161310,     1665826,     5304518,      714369,     2260563,      194857
T10,      110038,       11899,       40850,       27645,      291715,       23527,       40057,       11510,      539082,      112672,       39349,        4478,       59476,       31607,       12471,       50157,       55550,       48870,       33902,       23713,       61531,      123225,       54864,       34501,       23562,       15368,       15786,       12546,       10984,       77362,       17593,      229233,      156090,        5246,       69487,       56053,        9973,      148545,        9155,      111066,        9456,       63774,      393249,       17350,       13878,       97164,      120339,        7485,       40341,        1129
T11,          94,        1366,         913,           0,           0,        1161,       50118,           0,        2202,           0,           0,           0,       92602,           0,        9168,         913,         284,        2123,           0,        5097,        8901,           0,       57300,       42590,           0,           0,        9844,      391474,        1868,      259843,         966,         741,           0,        7432,           0,        6173,           8,         397,          78,       23870,           0,           0,       15289,           0,           0,          30,          13,          35,         463,           0
T12,      179748,       26341,      130742,       59973,     1184991,       93688,      155179,       40260,      337554,      179668,       69144,       39224,      157664,      129832,       96506,       89740,      221754,      225641,       39603,      147500,      280453,      188196,      139600,      114249,      201892,       32536,       41101,       70725,       35746,      220086,       31297,      620012,      201834,       19798,      291515,      118971,       59401,      398582,       32637,       64277,       29901,      157181,      458995,       55737,       17005,      180308,      120233,       59457,       94432,       12860
T13,      435568,       40743,      387235,      305346,     2556060,      379729,      397807,       75873,     1185515,      468366,       73973,      140500,     1063547,      572488,      337949,      264032,      374778,      471012,      146446,      559104,      557180,      783426,      469258,      308468,      443822,      116296,      222383,      156406,       96503,      419333,      200361,      525250,      869244,       78442,     1121757,      355362,      312233,      742193,       99049,      295263,       83251,      642787,     2085524,      185541,       55746,      651148,      608375,      220718,      590333,       36751
T14,        5656,           0,        8080,       17415,      105868,        8479,       40309,         203,      105606,           0,           0,         596,       45098,           0,        3873,        7804,       14337,        7012,         846,        2863,       15666,       18904,         913,           0,           0,         148,         855,           0,        6316,        6876,        1350,       71358,           0,           0,       13749,        4073,        4194,       10872,        9084,           0,         453,           0,           0,           0,         140,           0,        4713,         105,        9698,         250
T15,      356707,        2179,      114636,           0,       42671,        5368,      145844,       22690,      447827,         113,       86229,        1479,      748661,        3787,           0,         172,           0,       20202,           0,      128908,           0,           0,         177,           0,        1507,       11844,        2377,        1033,       32131,     1693091,        9729,     1695998,      257386,       13109,      669489,       13779,        6027,      637999,       62017,       38379,         757,        5431,      225559,           0,        9996,       96196,      194175,      191193,      267767,           0
T16,       67574,       16711,       53647,       77646,      682264,       61291,      118110,       20080,      447717,       84884,       32239,       21479,      318144,      110000,       94680,       53485,       16804,       84796,       49082,      140325,      190185,      243669,      168177,       52797,       79183,       14007,       38616,       48698,       40950,      255868,       19298,      552016,       42881,       12660,      248492,       70956,       86170,      330065,       34690,       31394,       13659,       80208,      616837,       25766,       13803,       14953,      143648,       32798,      172632,        5468
T19,      169225,           0,           0,       42229,       39501,       11152,       93229,       27502,      359602,       30000,       80317,         500,      470173,         270,           0,       10471,      245713,       30068,           0,      328871,       59291,       12913,      305789,           0,           0,        9944,       15222,       92731,      448857,      190932,       65666,     1331442,      330512,       64914,       18462,        8120,           0,      692852,      103224,       80476,       26824,      743614,     1565795,           0,      102628,      307331,      142172,      109303,           0,           0
T20,        2383,        1772,        2248,         950,       34869,        3484,        5752,         830,       27242,        2068,           0,         933,        3044,        7586,        8299,        2740,        2340,           0,        2433,         450,        1147,       11638,         812,        1947,        3090,        1598,         215,           0,        2856,        2469,        3347,       32678,        5507,         241,       25203,        2526,        1652,       13549,         248,       12134,         239,        1575,       18195,         646,         368,        6139,        8258,        7041,         217,           7
T21,           0,         109,          26,         556,           3,         251,         244,          87,        8936,           0,           0,           0,         905,        2197,        2348,         190,         450,        2123,         595,          16,        1039,         542,         475,           0,        1077,       32065,           0,       66015,         473,       56016,         170,          35,        5332,         318,           0,        4894,        1867,          68,         166,       51216,        1211,           0,        6469,           0,         155,           9,        2873,           0,         878,           0
T22,      104240,         962,        4498,        8638,       87804,        1191,       11550,      284839,      112467,       24430,        1708,         326,       93067,        3651,       35182,       15271,       87157,      266160,        2213,       11525,       17612,       16612,        2642,       53978,       67197,         830,        6976,        9354,        7741,      109878,        1391,       25193,      165328,           0,      186779,       35815,        4513,      921376,       10399,       28944,         630,      231932,     1221880,           0,         680,       22995,        8691,        5144,        7847,        2464
T23,       12163,       12613,       13687,       16648,       63945,       52303,        4037,         933,       14207,       19796,         233,       20622,       15077,       13844,       15272,        9796,       13124,       12606,       10379,        9858,        4335,       38450,       34590,        7224,       19526,       24873,        8068,        4143,        6022,       10109,       10306,       32484,       14177,        6171,       23089,       12297,       25100,       42887,        1671,       11800,       10175,       20255,       46137,       13135,        4879,       17013,       27801,       13820,       48913,       23159
T24,      150950,       23959,      208286,       87757,     1419237,      109711,      188360,       20434,      733574,      146070,       57573,       52234,      649572,      132848,      241776,      113737,      166538,       95974,       50776,      241535,      274501,      538065,      429247,       76942,      214769,       43831,       59234,       81275,       52370,      320064,      109048,      559011,      289528,       43650,      442505,      433994,      253406,      459051,       47589,       79305,       26419,      169711,      709844,       49248,       39067,      266805,      207950,       80147,      217778,       36631
T25,       10977,           0,        7429,       11949,      100189,       13680,       24936,         103,       93688,       35067,         709,        4629,       40056,           0,       10675,        7667,        8566,        7102,        7066,       19273,       69896,       33041,       21070,        7395,       14695,        3044,        3779,        8134,        7440,       25580,        4648,       75149,       52973,        3016,       20577,        7335,       14274,       48625,         756,       14094,        1615,       30027,       69744,        6775,        2523,       22741,       19459,        3660,       20551,         852
T27,        7482,         338,           0,        8560,       83282,           0,           0,        2975,       23149,           0,        3151,       18807,           0,          14,        5164,        3442,        4632,        3485,           0,           0,           0,       17998,           0,           0,       12694,        1435,           0,           0,        3683,        3216,          72,       35695,           0,           0,         458,           4,        7620,       37734,           0,           0,           0,        3269,        7635,           0,           0,           0,       15861,        9135,          12,        1370
T28,       89528,       23198,       36832,       45533,      693479,       54587,       68409,      128291,      224877,       51092,        8855,       28034,       43245,       37420,       55645,       25929,       33725,       44075,       28994,       95669,       77187,       90939,      125176,       37440,       96429,       17593,       37834,      115874,       24790,       73432,       13173,      195644,       79689,       17707,      185539,       43715,      152927,      226123,       15573,       95010,       20759,       62954,      323633,        8718,       11080,       70904,      142921,       15325,      115220,        2007
T29,           0,           0,       24462,        3924,        6815,        3754,        4885,         617,       27279,       51449,         164,        1547,        2316,         569,        3062,        2232,        2387,        1125,         646,        1740,        3532,       17654,        9081,         144,        9884,         469,       13154,        3536,        2078,        3221,         522,        3272,        1461,           0,        3692,         338,        2060,        7617,         767,       81266,         744,        1827,       13580,         574,        2472,        3286,        2716,         331,       11325,         363
T40,     1332878,           0,     1380653,      905150,    17200000,     1764736,     2253951,      513138,           0,     3389921,      922912,      609262,     4814510,     2806780,     1467019,     1040385,     1733415,      929706,      614939,     3079664,     5374911,     4890708,     3321955,      587589,     2006279,      356987,      685066,           0,       35784,     4350485,      526935,    15300000,     3992016,      125687,     4721854,     1299583,     2383214,     4657926,      497235,     1494799,           0,       94894,           0,      842098,      285822,     3584765,           0,      621174,     3445819,           0
T41,      189506,      872260,      244856,      153926,     4727879,      137748,      713381,      113748,      755900,      470710,       53127,       83551,     1097305,      656228,      167046,      219074,      254775,      245273,       74933,      260401,      959332,     1843420,      509534,      171049,      192718,       85054,      102755,           0,      126169,      946641,       90428,     2637556,      710658,       54174,      677183,      142023,      205031,     1469962,       69846,      176339,       28142,      365323,           0,       83936,       32572,      365340,           0,      179009,      492015,           0
T50,       31566,         917,       39714,       14320,      458798,       19640,      248174,       39661,      297148,       39104,       11771,        8996,      163656,      102201,       76873,       56742,       70965,       50505,        9150,       92813,      267273,      163338,       20528,        9712,       58822,       12869,       14685,       19508,       22395,      283813,       13546,      672524,      103173,        2106,       75445,       50851,       41471,      562880,       12606,       15411,       22127,       56331,      142200,        7606,        6746,       47895,       35616,       27290,       53742,        3734
T51,       19010,           0,           0,        7352,           0,           0,       54285,       34033,      637506,       16347,        3761,           0,       28531,           0,        6811,           0,        3601,           0,        8047,       66628,       35162,           0,       80728,           0,           0,           0,        3391,        1033,       27709,       51399,           0,      412162,           0,           0,           0,        5031,       16819,      183068,        3443,       14750,         106,       63058,           0,           0,       10848,       98960,      228374,        4599,       25344,           0
T53,       73167,     1124980,           0,       15166,       35407,       22813,           0,           0,       64493,           0,           0,        2104,           0,         692,           0,      102685,      199995,      447060,           0,           0,           0,       40069,        3041,       40256,          35,       97141,        2344,       19625,          26,           0,      309766,           0,        1735,      131035,        9203,      394134,       70192,           0,           0,           0,        6348,        1015,     1177946,       20284,           0,        1582,       64998,      170034,        1349,      257251
T99,           0,          18,           0,        8257,           0,       13690,           0,        1720,           0,       17205,           0,       25531,           0,           0,           0,           0,           0,           0,           0,       33348,           0,       11870,           0,           0,        2520,       17397,           0,           0,           0,           0,           0,           0,           0,           0,           0,       17248,           0,        5227,          59,           0,           0,       24051,           0,           0,       11417,       35090,           5,           0,        9413,           0
U01,           0,           0,           0,           0,       64652,           0,           0,           0,         752,           0,        3000,           0,           0,           0,           0,       19621,           0,           0,           0,           0,           0,        5348,           0,           0,           0,           0,           0,        7518,           0,       18153,           0,        7044,        6483,           0,        3795,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       15361,           0
U11,        3201,        4356,       34761,         229,       21593,        1783,        1846,       34220,        9182,         620,        8079,        7703,           1,        3018,        1203,         239,        1668,        1234,         302,        1809,           0,        4351,        3993,         399,        2392,         170,        1157,         407,           0,          84,        5921,        6126,           0,        2027,         469,         692,        6946,        2442,         339,        2317,        1259,           0,        6314,         823,           0,         772,        2640,        1253,        5193,        4045
U20,      344856,     1838724,      175447,      174060,     2116297,      319180,      452597,      227122,      832045,      220067,      189078,      176201,     1039763,      428925,      157290,      162169,      385947,      527726,      183140,      387162,      950896,      791170,      385555,      109833,      456529,      220385,      180853,       87907,      305745,     1153503,      504734,     2530150,      374361,       85332,      643445,      276562,      591486,      687881,      288197,      305970,      178566,      222574,     1403054,      196092,       92921,      537836,      371482,      151630,      508091,      352213
U30,       18507,        4837,       47737,        3533,      488829,       34236,       60606,        6298,       77243,        5769,       17640,        9194,       43714,       51055,       38613,       14062,       44237,           0,       25620,       77691,       35475,        5592,       25119,       15480,        1679,        3901,         957,        9677,       17869,       96591,        8236,      171941,           0,        3982,       31555,        9910,       46748,       89139,        5998,       34130,        3485,       28704,       75899,       14535,        7466,       45848,       53894,        3531,       63867,         901
U40,        4407,       35536,        5017,           0,       17369,       10300,           0,        1579,       12590,        7429,       24594,        5869,        1328,          64,        1228,        2967,        2636,       22783,        2403,         242,        1234,        3617,        2122,        6972,           0,       13610,       16882,        8435,         621,       13740,      154271,       30422,       11608,        5101,           0,       14363,       10072,        5314,        4819,        2925,        2156,         327,       39605,        3629,         521,        1368,       36732,         564,         273,        9694
U41,       63812,      790351,        6206,         707,       87167,       49115,        9016,           0,           0,           0,           0,           0,           0,           0,          44,        1776,           0,      268523,           0,           0,        1277,       42394,        6364,         645,           0,        5015,         651,           0,           0,           0,      119610,           0,           0,       12384,           0,       15025,           0,         185,           0,         242,         819,           0,      126094,       15682,           0,           0,           0,           0,           0,       27526
U50,      142781,        8327,       79846,       33152,      391832,       91199,      102558,       19825,      183811,      124961,       21814,       24987,      309759,      149090,       77043,       27483,       35202,       47078,       15828,       86455,       51868,      251021,      166763,       35259,       59127,       10980,       54652,       25098,       17456,      101300,       71868,      238400,      156475,       17462,      181222,       35088,       75099,      171589,        6656,       85245,        5791,       85639,      356186,       36329,       23045,      159198,      153724,       22472,      152629,       16485
U95,           0,           0,      115955,           0,      772416,       99620,      210248,       36932,      959419,           0,           0,       25688,      621172,      172672,       69349,       49814,      137743,      211564,       54097,      367913,      579598,      483305,      113692,           0,      102784,       16961,           0,           0,       42360,      621111,           0,     1059713,           0,           0,      781130,           0,      203221,      639952,       46494,           0,       61921,           0,      704086,           0,       20049,      378154,      183438,       48234,      188149,           0
U99,       22424,       77419,       58813,       58306,      266749,      385673,      361544,       29240,      523007,       58052,       41817,       46458,      358095,      143347,      139129,       29645,       40640,      289107,       94250,      130904,      761573,      538720,       83900,       44864,      136547,       56522,       29740,       17397,       10359,      667223,        1170,      877822,      111762,        8254,      204088,       54658,       22237,      748777,       97785,       34248,        4052,       80479,     1079093,       32270,       15966,      238948,       43786,       69659,       44616,        2093
V34,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
V98,           0,      428896,      565627,      497233,     3857935,      512990,     1016248,      280445,     2442720,     1350311,     1122086,      281686,     1951992,     1046810,      692624,      467173,     1040068,      758012,      177138,      939627,     1865585,     1260883,      873314,      498350,      867289,      236771,      391972,      345492,      179173,     1882221,      492601,     4426985,     1318483,      177354,     2120638,      496360,      533761,     1419461,      401279,     1090594,      193853,      963392,     2998745,      417119,      124131,     1026494,     1858591,      402476,     1008758,      243393
W01,     2225425,     3502531,      681129,     1503870,    17835471,     2841931,     5980134,     2354607,     6277499,     1394774,     1026981,     1102186,    12623855,     3792922,     1191292,       18786,     2570675,     5347729,     2416264,     4472437,    13050290,     7573605,     2335052,     1009484,     5345836,     1319279,     1548502,      691289,     4396570,    10594104,     1019094,    30027023,     2992027,      794198,     7034477,     1629009,     3621168,     5574055,     3092519,     1692167,     1613506,     1603398,     3200474,     1657423,      977522,     5636927,     2847175,     1493657,     4680124,      699756
W31,      243106,       32536,      145836,       21234,     4505041,      164465,      519030,      106542,      597074,      947902,      728903,       26012,      177168,      264326,       76077,      327005,      735666,       61824,       70098,       57822,      242607,      146988,      133102,      109714,       51105,       18942,       13095,      158424,        8934,     2162016,      203040,     2482732,      153195,        3368,      598777,      377839,       12489,      704408,      151241,      297144,       45011,      122210,     1253912,      149930,       42677,      442956,      168480,      261533,      110233,       22696
W61,     1559056,    17491658,     1479694,     1105963,    11973879,     1634368,      847216,     1063435,     7346143,     1628819,     1936876,      911307,     3100795,     4672897,     1009432,     2091164,     1894733,     2702844,      169358,     1546364,     1894064,     4193430,     4096236,     1153727,     1603145,     1150111,     1257505,      681243,      298809,     4735515,     6415998,     4694136,     3251736,      690227,     3299730,     2260875,     3341743,     6511676,      263787,      898902,      520562,     1179533,    16861087,     1135856,      187461,     4020276,     2595092,      929588,     1154563,     2684999
X01,      138491,       74520,       30659,         700,     1813720,      176343,      153301,         286,       22853,      202806,           0,       49163,      481858,      117162,       30524,       84273,      226274,      209958,       55801,           0,      159152,      225996,      215626,      112495,      188056,       24151,       45315,       19967,           0,      523258,      137927,      237986,      331990,       21012,     1048980,      167369,      171810,      408149,       49471,       59209,       24837,       25934,      866545,       22360,       14392,       45917,      301981,        8825,        9752,        6883
X02,       86516,       53633,       21465,       39376,      590946,      109119,       33822,       18994,           0,      105662,       66378,       24581,      295499,       52207,       92078,       31135,       81712,      126862,       22681,      100745,      201817,        8016,       77136,       78214,         860,       50437,        1509,        5066,           0,      127772,       29588,      133427,      159461,        8770,      323579,       27529,       90385,      195339,       30049,      228082,       16641,       82125,      330428,        9021,        3557,        1474,      128981,       74845,        5158,        2042
X05,       52951,      102838,       89512,       26548,     1900218,      272125,       24156,         895,     1908608,      153306,           0,       84209,      355121,      142609,      151752,       13263,      110683,       51565,           0,       26604,       14400,      344775,      303907,      154901,      217818,       57992,       45318,      281725,           0,      324555,      139764,      892739,      115368,       20694,     1723464,       73630,      292467,      503917,       52570,       72543,       23409,       36382,      316245,      143962,        2895,      445778,      211102,       18837,      542593,       49579
X06,      294140,      102566,       24256,      188852,     1404985,      157004,      411945,       60396,      636288,      602002,      312983,       42210,      543497,      298247,       46519,       78284,      379398,      594268,      232136,      625081,      722894,      766771,       95815,      114633,      195514,       28255,        9227,       78472,           0,      568087,       71010,      109721,      467801,        9835,      611470,      310226,      139130,      800683,       62418,      286230,       16158,      282907,     1142832,       72063,       42705,      225436,      538210,      162721,      221591,       33856
X08,     1001799,      767737,     1222565,      485391,     9669469,      876862,      502510,      217609,     2359186,     1413843,      492106,      213375,     2521546,      600607,      463956,      392443,      742272,      988946,      141557,     1519749,      356891,     1253965,     1633359,      464615,     1277289,      186976,        5678,      330040,           0,     2138415,      491426,     6241014,     1769176,       72429,     5844169,      449786,     1596743,     3084067,      213115,      917930,      268449,     1137466,     3257351,      375247,       77805,     1158931,     2139490,      155153,     3898405,      177270
X09,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
X11,      455380,      246731,      494958,      199853,     5674204,      565738,      721064,      117546,     1025029,      716052,      269790,      115586,     1564751,      449761,      238085,      150809,      531861,      826337,      219001,      750465,      724317,     1446788,      658279,      317261,      435775,      144908,       39167,      190338,           0,     1687109,      281093,     3510223,      847417,       43809,     3169352,      552931,      537938,     2158450,      213294,      484670,       59486,      323928,     1957324,      182495,       42028,      667971,      789691,      252296,      764600,       73721
X12,       39216,       13970,       23797,        5244,      330357,       33398,       15084,        1561,        2051,       33282,       39455,       11009,       73376,       25102,       24356,       19266,       18905,       50592,       11648,      125683,      181371,        6698,       31747,       40561,       32213,       13064,        6684,        3919,           0,       62077,       33039,       82053,       77408,        5367,      123177,       24242,       32687,       22809,        4519,       41521,        6097,       17141,      256867,       13594,         722,       35541,       35985,       12599,       27536,        9195
X14,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
X21,     1547277,      180341,     1115102,      576787,     6009993,      547639,      534986,      139984,     2334936,      675736,      458877,      129454,     1461810,      276735,      137040,       51769,     1155953,     1111919,      180077,      287578,       93302,     4160063,      237996,     1106854,      635621,       52342,       75737,      276225,           0,        1582,      391511,     1670364,     6078808,       16564,     5107911,      787958,      893482,     1294619,        6958,     2978585,      287382,        1061,     1975597,      206639,       74351,     1580609,      936064,       45435,      118173,        8593
X30,      177577,     1628859,     3967807,     1314028,    25016488,     1287935,      789272,      279257,     3152615,     5980567,      396228,      585079,     2048171,     4787955,      175130,      547774,     2115973,     2814875,      136133,           0,       61890,     3457585,      295306,     2645242,     1958954,       83722,      472789,     1408525,           0,      120486,     2039770,    18077243,     6052254,      155060,    26369183,     1708605,     1518885,     9499688,     1644840,     8610628,      377107,     2663145,    15736815,     1038816,       77895,     1426411,     4443520,     1591559,     4017893,      340966
X40,     4956248,     1200517,      877823,     1009072,    20389758,     2420460,     1884394,      395277,     5057337,     2486471,      966112,           0,     5803407,     2687190,     2196698,      814950,     1521518,     1756102,       81680,           0,     1260170,     3314585,      237043,      802594,     5833049,     1194523,      137839,      659810,           0,    15008379,     1470127,    11551071,     5757119,      109534,     6250556,      709871,     1240068,     3613370,           0,     2443063,      278515,     2918806,     5646857,      486989,      142695,     2729009,     1670474,      123370,     7799440,      985040
X41,     2031381,     2165763,     5077880,     2189983,    41986176,     4493419,     2195170,      826280,    14934275,     7966778,     1500566,      869051,     8429363,           0,     1471987,     1467880,     3896829,     3193318,     1030076,           0,      990913,     7514720,      460774,     1849120,     3584642,      428395,      475135,      913108,           0,    10943474,     1694468,    30586267,     2952343,      203067,    15343832,     2682119,     1223785,    15031194,      965974,           0,      738037,     2282540,    13002518,     2297793,      509117,     2973604,      791307,           0,    11108293,      439517
X42,     2207540,       15181,      222340,      140013,     5685728,      417710,       66969,           0,           0,       12534,      342361,      131316,       57746,         529,       11500,           0,      250113,         188,           0,           0,           0,      813752,           0,           0,       20974,      110674,           0,           0,           0,           0,        4566,     4022949,           0,         223,       40900,       12204,      540245,      951447,           0,           0,           0,           0,     1502603,       19294,        1656,       17884,      572190,        5120,      307251,           0
X44,           0,      469216,      474183,       15699,     5237140,     2166371,     2856760,      148217,     2320174,      342960,      849383,      289282,     3079475,       70948,     1524712,      412825,           0,     1348002,      821338,           0,     2101256,       43796,    11671608,      280604,      170374,      192874,      137029,     1247109,           0,      359146,           0,     2588685,       70921,      631080,      958946,        2113,     1569072,     2691597,           0,           0,       98120,      795485,     1767554,           0,       18334,     4115791,     5237600,       24519,       23635,      146400
X47,           0,           0,           0,         302,      937856,      375534,      311188,      286020,     1339298,       21704,      418233,           0,     1537410,           0,      967080,      164155,           0,      119347,       13613,    13768921,     3942446,      685360,     3136884,           0,       51994,      118172,           0,      388485,           0,      783108,           0,     3627218,      266232,       13103,      249299,      115979,     1372758,     1022233,           0,           0,       32656,           0,       49994,      159601,        2440,      964105,     1688247,       27535,           0,           0
Y01,      149809,       84457,      126187,      171414,     2485866,      184210,      294485,       51549,      569005,      325779,       53603,       62434,     1055792,      200017,      157072,      171597,      200990,      193019,      102022,      395815,      870368,     1189656,      319566,      112272,      279759,       43949,       49334,       91785,       64316,      828624,       72253,     1766356,      287575,       26742,      873955,       98759,      293630,     1451242,      146604,      162705,        8841,      242720,      800035,       68415,       38984,      204680,      563227,      114832,      372814,       31259
Y02,       54275,       16971,       29725,        6326,      239548,       25275,           0,       16687,      150279,       92730,       37820,       22814,       68207,       70807,       45554,       57436,       34400,       45331,        3481,       19952,           0,       18439,       21631,       33366,        4187,        7033,       14781,       24371,       12409,       85678,       22303,       27145,      131679,        4628,       56736,       32308,      100030,           0,        7859,       42604,        4779,       46073,       70161,       25562,       17650,       51456,      132014,       13995,       86522,        8038
Y04,       86927,       68160,      104252,       86471,     2259912,       91760,      608995,       27258,      539519,      193840,       55601,       43966,      595044,        4739,       74953,       95554,      122542,       96807,       98607,      224441,      548956,      341777,      142373,       69557,      252169,       24437,       13050,       65204,       26792,      948196,       33371,     1863081,      212027,       14526,      466466,       82887,      215917,     1089272,      135729,      106065,        2934,      158078,      689277,       36774,       26913,      172695,      316252,       97069,      140629,       19207
Y05,      178928,       97345,      179393,      165687,     3496198,      170052,      498899,       61767,      718698,      301121,      150156,       78119,     1219924,      175818,      171410,      173179,      199440,      176508,      104287,      385011,      820618,     1012538,      346150,      105569,      324265,       46983,       46387,      137287,       43388,     1221297,       59430,     2116752,      284036,       25180,      768127,      129231,      349969,     1496485,      164184,      175328,       11896,      239208,     1080039,       75056,       53158,      233348,      652922,      126677,      407685,       24234
Y06,       88058,       68026,      107821,       87159,     2236350,       93521,      400262,       27404,      543061,      196499,       58496,       44098,      584604,        4739,       75265,       95672,      122346,       97458,       97051,      222564,      588142,      699306,      147965,       69042,      187113,       24842,       13046,       66154,       27282,      960544,       34939,     1834823,      212163,       14237,      468627,       83601,      228493,     1101431,      138957,      103888,        2932,      157664,      685187,       37061,       27553,      171061,      324564,       96958,      140559,       19475
Y07,      560419,      218467,      377751,      105667,     2786733,      356576,         333,      222641,     1545037,     1026671,      322696,      225668,      882977,      976535,      601042,      632127,      379333,      646759,       34926,      206147,         651,      409913,      187587,      375293,       74221,       90918,      159891,      218713,      152977,     2184204,      247638,      382770,     1423523,       46826,      767046,      421823,     1026384,     1027539,       96781,      457065,       47666,      641686,      562418,      338156,      174981,      523793,     1684811,      145327,     1201072,      112843
Y08,       -1720,       -2924,       -5546,       -4042,     -109656,       -3763,       -8954,       -1735,      -26263,         448,         808,        -919,      -15931,       -4090,       -1832,         118,        1898,       -4646,        4507,      -10058,        9472,      -24850,       11678,        2185,       -5751,       -1180,        3148,        1130,         347,      -45117,       -2046,      -15401,         220,        -614,      -18486,       -4195,       -9559,       -7762,       -2654,       -1644,         -44,       -7111,       -6766,         880,        1875,        4219,       30082,       -1378,       -9903,        -370
Y10,           0,           0,           0,         332,       20350,           0,           0,           0,      129981,           0,           0,        3259,           0,           0,           0,           0,        1015,       25571,           0,       20125,           0,        4117,        3289,           0,       33947,       18274,           0,       16685,       97435,           0,        8660,      171520,           0,          86,       46989,       16869,           0,           0,           0,       26952,         560,           0,           0,        4942,           0,           0,           0,       15165,           0,       77644
Y11,           0,        2372,      289228,        2577,     1596525,      372761,       96375,        6784,           0,           0,           0,      101972,        6683,           0,         867,       47987,      127531,           0,           0,      146551,       27271,      227494,      132621,           0,        3772,      169993,        3101,      355461,           0,      116119,           0,     1579085,           0,       91512,     1952681,      197774,      105339,      346694,        9838,       68507,        1601,           0,         485,      140057,           1,           0,      949790,      383022,        3344,        2400
Y12,           0,           0,      104527,         693,      496117,       49324,         626,           0,        5194,           0,           0,       14091,          47,           0,          26,           0,           0,           0,           0,       57275,         286,       54883,        2029,           0,         122,       11399,          38,       57479,       10013,        2841,         331,      405675,           0,       17911,     1197007,       52873,       15809,      116902,          67,        3139,           0,           0,         304,       17505,           0,           0,      456251,      118183,         375,        1375
Y13,           0,           0,           0,           0,           0,           0,           0,           0,        2295,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        1915,           0,           0,           0,        1540,           0,       14270,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       20183,           0,           0,           0
Y14,           0,        1820,      171839,        1779,     1366302,      309674,      123218,        7438,       94203,           0,           0,       48421,        7590,         818,        1067,       28761,      114651,       16343,           0,      198886,       23868,      153262,      107822,           0,       12041,      116367,         477,      428522,       77716,       90393,        1076,     1250917,           0,      121052,     1829070,      188059,       74021,      241994,        3861,       70812,        2472,           0,         476,      101187,           0,           0,      830535,      579030,        2030,       74455
Y15,           0,         116,       46546,         130,      393291,       53700,        4620,           0,       26716,           0,           0,       12765,           0,         681,         157,        4344,        4753,         416,           0,       26807,         518,       59860,       20407,           0,        9869,       20787,           6,        5688,         475,       17858,        6869,      245555,           0,        7883,      172712,       24620,       48391,       66298,         325,        6709,         210,           0,           0,       16301,           0,           0,      141612,       24643,           0,        4081
Y21,           0,        1384,     1136884,       13833,     5563848,      682642,        4681,        1125,       94861,           0,           0,      204842,        1401,         488,         188,       16716,        9143,       14537,           0,      648545,        9880,      743939,       31425,           0,       20431,      236847,        3494,      546729,      170460,       75527,       17005,     6976849,           0,      219896,     9551351,      511634,      227057,     1122882,       17333,       66865,        1340,           0,        4757,      321293,          21,           0,     5062729,     1254277,        8460,       14010
Y50,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        4762,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
Y51,           0,           0,           0,           0,     2580965,       27298,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,      187134,           0,           0,           0,           0,           0,           0,           0,           0,           0,      320958,           0,           0,           0,           0,           0,           0,           0,           0,       93336,           0,           0,           0,           0,           0,           0,           0,           0,           0,        3082,           0
Y52,           0,           0,           0,           0,        7562,        2357,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       21452,           0,           0,           0,           0,           0,           0,           0,           0,           0,        6593,           0,           0,           0,           0,           0,           0,           0,           0,        1575,           0,           0,           0,           0,           0,           0,           0,           0,           0,        4547,           0
Y53,           0,           0,           0,           0,     2331622,       25327,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,      132834,           0,           0,           0,           0,           0,           0,           0,           0,           0,      291760,           0,           0,           0,           0,           0,           0,           0,           0,       73623,           0,           0,           0,           0,           0,           0,           0,           0,           0,        6030,           0
Y54,           0,           0,           0,           0,      116706,        1511,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       48284,           0,           0,           0,           0,           0,           0,           0,           0,           0,       27689,           0,           0,           0,           0,           0,           0,           0,           0,        4902,           0,           0,           0,           0,           0,           0,           0,           0,           0,         583,           0
Y55,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
Y61,           0,           0,           0,           0,      273818,       55727,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,      336259,           0,           0,           0,           0,           0,           0,           0,           0,           0,      129067,           0,           0,           0,           0,           0,           0,           0,           0,       39739,           0,           0,           0,           0,           0,           0,           0,           0,           0,       53102,           0
Z00,     2220916,      898530,     1278841,     1186322,    11967508,     1857853,     2182845,      594087,     5399225,     2684196,     1518237,      485403,     3687309,     2310515,     1729159,     1243754,     2023402,     2540180,      586100,     2338467,     2832063,     4523488,     2367737,      980624,     1913598,      452253,      886421,      658643,      490506,     4211272,      932450,     9589780,     2806400,      429388,     4368568,     1604787,     1531560,     4403077,      652146,     2242897,      351185,     2024540,     5464871,     1004000,      370536,     3131744,     3062846,      743756,     2162141,      357083
Z18,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
Z41,      130321,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       43573,           0,           0,       82205,           0,           0,           0,       72732,           0,           0,      454784,           0,      124010,           0,       36966,           0,           0,      208579,           0,           0,           0,           0,           0,      349750,           0,      171452,      671703,           0,           0,           0,           0,           0,       71903,       27747,      253350,      264246,       45925,           0,       31990
Z42,       88223,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       28002,           0,           0,       54281,           0,           0,           0,       43213,           0,           0,      349686,           0,       96696,           0,       27601,           0,           0,      147936,           0,           0,           0,           0,           0,      216232,           0,       86414,      435933,           0,           0,           0,           0,           0,       44816,       22776,      167254,      185952,       36147,           0,       26841
Z43,       26023,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        7267,           0,           0,        3618,           0,           0,           0,        8760,           0,           0,       29336,           0,        1437,           0,        6282,           0,           0,       18275,           0,           0,           0,           0,           0,       50749,           0,       19003,      188752,           0,           0,           0,           0,           0,        9316,        4667,       55295,       55554,        3498,           0,         946
Z44,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,         222,           0,           0,        1677,           0,           0,           0,         209,           0,           0,           0,           0,           9,           0,          62,           0,           0,        1362,           0,           0,           0,           0,           0,        1065,           0,         186,        2389,           0,           0,           0,           0,           0,           0,         661,         643,         209,         376,           0,           4
Z45,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
Z46,      124726,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       12803,           0,           0,       33384,           0,           0,           0,       34748,           0,           0,      209236,           0,       47532,           0,       18142,           0,           0,       56371,           0,           0,           0,           0,           0,      100164,           0,       74151,      209941,           0,           0,           0,           0,           0,       31510,        9670,      129350,      152126,        6502,           0,        5832
Z47,        7782,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,         196,           0,           0,        7874,           0,        1161,           0,         461,           0,           0,         936,           0,           0,           0,           0,           0,        7754,           0,        5067,       20262,           0,           0,           0,           0,           0,           0,         852,        7538,        7794,         985,           0,           0
Z48,      105520,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        4946,           0,           0,        5963,           0,           0,           0,       14411,           0,           0,      135001,           0,       23262,           0,       16970,           0,           0,       13760,           0,           0,           0,           0,           0,       23528,           0,       13142,      176941,           0,           0,           0,           0,           0,       14016,        9753,      108843,      130306,        1807,           0,        1172
Z51,           0,           0,      242920,           0,     1655133,      247575,      524048,       85266,     2015835,           0,           0,       57152,     1405927,      467475,      186169,      108679,      453946,      458317,      118074,      836021,     1890841,     1142614,      310566,           0,      241249,       34704,           0,           0,       99351,     1290096,           0,     2161473,           0,           0,     1857007,           0,      532343,     1334659,      117472,           0,       77481,           0,     1685784,           0,       47358,      822847,      364956,      110110,      469529,           0
Z52,           0,           0,      126965,           0,      882717,      147955,      313800,       48334,     1056416,           0,           0,       31464,      784755,      294803,      116820,       58865,      316203,      246753,       63977,      468108,     1311243,      659309,      196874,           0,      138465,       17743,           0,           0,       56991,      668985,           0,     1101760,           0,           0,     1075877,           0,      329122,      694707,       70978,           0,       15560,           0,      981698,           0,       27309,      444693,      181518,       61876,      281380,           0
Z53,           0,           0,       24070,           0,      150036,       28381,       21320,        7103,      117094,           0,           0,       11651,       53729,       26599,       21013,       14893,       37831,       22231,       11244,       35786,       67378,       52887,       55953,           0,       24828,        8085,           0,           0,        5504,       41254,           0,       65144,           0,           0,      102628,           0,      126912,       43383,        3179,           0,        5065,           0,       40452,           0,        3969,       79513,       50343,       13060,       31459,           0
Z54,           0,           0,       91885,           0,      622380,       71239,      188928,       29829,      842325,           0,           0,       14037,      567443,      146073,       48336,       34921,       99912,      189333,       42853,      332127,      512220,      430418,       57739,           0,       77956,        8876,           0,           0,       36856,      579857,           0,      994569,           0,           0,      678502,           0,       76309,      596569,       43315,           0,       56856,           0,      663634,           0,       16080,      298641,      133095,       35174,      156690,           0
Z61,           0,           0,           0,           0,           0,           0,           0,       12226,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,      417183,           0,      394761,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
19H,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
19X,           0,     4935602,     2848842,     1938018,    37080563,     2930793,    11951202,     3535869,    12294744,     4470781,     4641560,     1291987,    18731718,     5158423,     1872632,      485787,     6618526,     9921756,     2637052,     8335055,    23734212,    10353207,     4201978,     1625737,     6230943,     1881953,     1754059,     1931251,     4776469,    19823131,     1595787,    54936470,     3822108,     1027158,    12137387,     3656193,     6295080,    12448794,     5067269,     4529277,     1889776,     2653939,     8001146,     2139812,     1539321,     7405698,     7192592,     2594324,     7298851,      894788
21A,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,      109288,           0,           0,           0,           0,           0,           0,        9815,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
21B,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
21C,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
21D,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        7600,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
21F,           0,           0,           0,           0,     1675706,           0,      116565,       24609,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       64899,           0,           0,       45655,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,      141479,           0,           0,           0
21G,      304275,           0,           0,           0,      276000,           0,       10032,       27752,           0,           0,           0,           0,        3046,           0,           0,           0,           0,           0,           0,        1025,           0,           0,           0,           0,           0,           0,           0,           0,       13317,           0,       80500,           0,           0,           0,      251110,           0,       15925,           0,           0,        2815,           0,           0,       81321,           0,           0,      135232,       10000,           0,           0,           0
21X,      321490,           0,           0,       15995,      666000,        2499,     2253555,       74310,       10800,      356155,     1120885,           0,     1422845,           0,           0,           0,           0,      757370,      162580,      342226,     3283196,       15800,      396208,      217020,      358640,       32830,           0,       32015,      211103,     1804565,           0,     1946250,        1165,           0,      162400,      250000,      179810,     1104878,      259860,      110000,           0,      120100,     1540523,      125690,      101280,           0,     1191565,       58750,      726175,           0
24A,           0,           0,           0,           0,           0,       28845,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
24B,           0,        1894,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,     1487395,           0,           0,           0,      220675,           0,           0,           0,      584708,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
24C,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
24D,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,     1276695,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
24F,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,      190283,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       70272,           0,           0,       90895,           0,           0,           0,           0,      467530,           0,           0,           0,           0
24G,      210729,       17708,      202582,      122617,     1096355,      144546,           0,           0,     1664153,           0,       16135,       35277,       44829,      246757,       19521,       20983,      141075,           0,       10564,       75152,           0,      637011,      126864,       13534,      282202,           0,       27835,         188,       61982,      233050,       18807,      111685,       84504,           0,      279523,       33755,        3955,      385935,       19060,       45771,       14613,       47895,      426652,       41291,           0,           0,       31535,      148330,           0,        9195
24T,      136300,      300765,       59550,      114386,     1419045,      249427,      821015,      101920,      155475,      117568,       32230,       89020,     1895516,      634727,      179951,           0,       94230,      866576,      344335,      781200,     3089398,     1340875,      227066,      295273,      387300,       51990,       19159,      122265,      796303,     1183871,       38000,     2546576,      658890,           0,      483465,      108291,       98455,      642676,      707689,       16510,      161325,       50000,       37474,      218950,       93047,      739120,      703989,      100557,      633975,      134950
24X,           0,       10570,      530840,           0,     1462175,       44360,      106207,      247990,     1677020,        6000,      196655,       36156,      467375,      457385,           0,      621570,     1089443,      155152,      104905,      248970,      225800,      571032,           0,           0,           0,      133410,           0,           0,      120270,     2684747,       67817,     1459212,         695,        7341,     1107619,      714124,       89720,      570715,         168,        1144,       44419,           0,      159550,       27580,       82585,      545273,           0,      220542,           0,       37528
31A,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,      111151,           0,           0,           0,           0,           0,           0,        4505,           0,      115950,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
31B,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
31C,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
31D,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       36030,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
31F,           0,           0,           0,           0,      229745,           0,       50515,        9300,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       59775,           0,           0,       15666,       12590,           0,           0,           0,           0,           0,           0,           0,           0,        5500,           0,           0,           0,           0,           0,         670,           0,           0,           0,           0,           0,           0,           0,       13920,        8000,           0,           0
31G,       91370,           0,           0,           0,       75625,           0,       13070,        8765,           0,           0,           0,           0,       26808,           0,           0,           0,           0,        2114,        1275,        4970,       11671,           0,         975,        1245,           0,           0,           0,        3235,       16736,       21100,       19149,        5800,           0,           0,      204440,           0,       26970,           0,         865,        4155,           0,       40942,       51045,           0,           0,       38520,       49970,           0,           0,           0
31X,      354910,      139995,           0,        2973,      403310,        5557,     1489013,       51115,       86995,      266950,      681740,           0,     1129414,           0,           0,           0,       14135,      726628,       46280,      242214,     3306048,       25600,      348639,      166664,      323620,       51725,           0,      164366,      147688,     1389065,           0,      588044,       81890,           0,      156915,        6580,      518808,      971613,      242892,       69590,           0,       50804,      748610,       78300,      157980,       11295,      793395,       94665,      579585,           0
34A,           0,           0,           0,           0,           0,        1310,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        2904,           0,        2555,           0,           0,           0,           0,           0,        5382,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
34B,           0,        4543,        8410,           0,       16990,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,     1596550,           0,           0,           0,      169660,           0,           0,           0,      253913,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
34C,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,         190,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
34D,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       51320,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
34F,           0,           0,           0,           0,           0,           0,           0,           0,           0,        7335,           0,           0,           0,           0,           0,           0,       77063,           0,         650,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       79761,           0,           0,       44950,           0,           0,           0,           0,      370189,           0,           0,           0,           0
34G,      138881,       13537,      223728,      108563,      400530,       71151,        3037,         397,      628773,           0,         372,       14219,        7445,      124353,       26161,       12353,      202154,        3928,        1216,       24246,           0,      454322,      121110,        7229,      120878,        4087,       24810,        1630,        1461,      168324,        4123,      222019,       43120,        1040,      186953,       13641,        5345,      332878,        1921,       19131,         867,       14948,      372938,       20751,        5837,       30314,       30533,        8030,        1236,        9842
34T,      352751,      690231,       14871,      192900,     2079411,      195254,      808136,      273287,      391983,      218094,      127278,      122358,     1493863,      337676,      221491,           0,      262510,      931614,      153750,      573790,     1830777,      802051,      367793,      310958,      364074,      184765,      184224,      292953,      445819,     1348656,      125108,     1993962,      434569,      186234,      766716,      265628,      217822,      709456,      759195,      184104,      280201,      255622,      265318,      249155,      175229,     1185579,      535625,      141945,      404007,      251702
34X,        8930,       24352,      391657,        3054,     1172346,       10533,      111499,      189449,     1060179,        5972,      224863,       26158,       21750,      588320,        5911,      181067,      784470,      399749,       61985,      212477,      134426,      632288,           0,         120,       10465,      124672,        4856,          40,      125684,      922096,       57699,      483665,         605,       17393,      712360,      603058,       93150,      539075,       37776,         300,       56793,        3161,      125539,       26335,       58400,      218550,        1295,      185881,           0,       34216
41A,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,      197176,           0,           0,           0,           0,           0,           0,      160230,           0,       89986,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
41B,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
41C,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
41D,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,      494440,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
41F,           0,           0,           0,           0,     5150186,           0,      398165,       81921,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,      533854,           0,           0,       97377,       35320,           0,           0,           0,           0,           0,           0,           0,           0,       20000,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,      273369,       66000,           0,           0
41G,      646953,           0,           0,           0,     1403525,           0,       61691,      102615,           0,           0,           0,           0,      126328,           0,           0,           0,           0,       35979,       10860,       76747,      267058,           0,        6525,        4116,           0,           0,           0,       64180,       60339,       15600,      153942,       56280,           0,           0,     1884960,           0,      274029,           0,           0,       43230,           0,      107951,      442123,           0,           0,      497680,      270897,           0,           0,           0
41X,      558971,      455500,           0,      168392,     6872160,       22491,     6934224,      384691,     1338900,     2975175,     2767691,           0,     5845131,           0,           0,           0,       30020,     3370005,      533845,     1673584,    10927101,     1175400,     1607008,      673237,      839245,      192060,           0,      543740,      683351,     3489255,           0,     9061461,      564905,           0,      990115,      259705,     4621518,     4973428,     1198167,      840983,           0,      544793,     3797368,      378290,      369495,      102533,     4380164,      261685,     2899165,           0
44A,           0,           0,           0,           0,           0,       43885,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,      184820,           0,      145373,           0,           0,           0,           0,           0,         623,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
44B,           0,      374658,       81410,           0,      140275,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,     3462430,           0,           0,           0,     1425035,           0,           0,           0,     2568001,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
44C,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        1606,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
44D,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,     5434455,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
44F,           0,           0,           0,           0,           0,           0,           0,           0,           0,       17860,           0,           0,           0,           0,           0,           0,      983295,           0,         385,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,      304133,           0,           0,       95510,           0,           0,           0,           0,      973354,           0,      331040,           0,           0
44G,      651181,       32681,      649532,      316870,     3161170,      677725,       68618,       42198,     6130867,           0,       20048,       85739,      442651,     1572260,      505990,       64280,     1251747,       60272,       30700,      487678,           0,     1564606,      600987,       66944,      653058,       68600,      120153,       65070,      106526,     1301466,      178929,     6799631,      480717,       59627,      684233,      104351,       28295,      832714,      195668,      269819,       25289,      282780,     1902290,      122241,       56445,      240091,      183552,      333351,        3239,       45951
44T,     2019171,     3312888,      503667,     1401297,    17407807,     2199644,     4842949,     2165053,     2719694,     1210545,      553817,     1073053,    12290829,     2255944,     1108617,           0,     1776159,     3816796,     1581453,     4198168,    12744730,     6455014,     1831691,      877938,     4805355,     1250776,     1229808,      631231,     3835273,     9949151,      998461,    20340376,     2929297,      633251,     6346927,     1067287,      701263,     5313727,     2890744,      989269,     1491453,     1478239,     1410608,     1628028,      753107,     4185461,     2725563,     1216761,     4771769,      697222
44X,      292731,      248236,     1817956,       31683,     5148850,      172920,      536849,      703305,     3444801,      315129,     1631656,      130870,     1181110,     1618739,      210200,      870640,     2778925,     2240972,      842110,     1761023,      911770,     1808744,           0,        1455,      142390,      229347,      237202,        2455,      556942,     6770787,      264053,    13145518,        6759,      136954,     2487885,     1060292,      195745,     1166485,      673620,       67470,      205965,       83991,     1130827,       50220,      239740,     1439287,       12880,      475145,           0,       37528
52T,      596060,       25265,           0,       50000,     1754786,       29925,           0,      246255,     1178685,           0,      180155,       58374,      485944,       23280,       60795,      147405,      594763,      611730,           0,      401128,     3119880,     1068285,       16530,      127770,      323640,      187610,        7890,       32694,      467404,     4478119,           0,     1927749,      265464,           0,      289185,      720640,      101115,      510445,      138835,      167330,       68760,           0,      962300,       35190,       71280,      772075,      865925,           0,           0,      172478
53T,      596060,       25265,           0,       50000,     1754786,       29925,           0,      246255,     1113810,           0,      180155,       58374,      485944,       23280,       60795,      147405,      546120,      611730,           0,      379404,     3075730,     1053015,       16530,      127770,      323640,      210270,        7890,       32610,      466699,     2858949,           0,     1789119,      265464,           0,      206615,      720640,       93460,      510445,      138835,      166595,       68760,           0,      908205,       33900,       63645,      710205,      807959,           0,           0,      168861
61V,         248,        6000,           0,        4151,      481602,           0,        5300,        6051,         742,           0,       45203,          35,        7896,       13247,       11355,           0,           0,       72302,           0,           0,      273824,        3376,         605,           0,       70200,       12369,         164,         979,           0,       14479,        9261,      899150,           0,           0,       87687,         419,           0,      513326,       83464,      155350,         600,      152427,          32,       13421,        3250,         369,        1561,           0,           0,           0
64V,        1077,        3000,           0,         718,     2010971,         148,        5600,       10609,         544,           0,       49964,          85,        6785,       11072,       12211,         568,           0,       61022,           0,           0,      367418,        4113,         945,           0,       76110,        8533,         154,        1681,           0,       17057,        2080,      424000,           0,           0,       91651,         254,           0,      398874,       38835,      121750,         221,      125954,         309,       14162,         182,           0,        1327,           0,           0,           0
71W,       45884,       21894,           0,           0,       86615,           0,     1071339,       45446,      710911,       19064,       11938,           0,      306751,           0,           0,           0,       30020,      458591,         790,       12754,      243602,           0,      265930,      122439,       92926,        9810,           0,       24560,      148120,        2712,           0,     2113399,        1845,           0,           0,           0,     2981388,       14344,           0,           0,           0,        4226,     1700354,       17221,           0,           0,       13572,        4513,        7265,           0
74W,     2179541,     3480637,      681129,     1503870,    17748856,     2841931,     4908795,     2309161,     5566588,     1375710,     1015043,     1102186,    12317104,     3792922,     1191292,       18786,     2540655,     4889138,     2415474,     4459683,    12806688,     7573605,     2069122,      887045,     5252910,     1309469,     1548502,      666729,     4248450,    10591392,     1019094,    27913624,     2990182,      794198,     7034477,     1629009,      639780,     5559711,     3092519,     1692167,     1613506,     1599172,     1500120,     1640202,      977522,     5636927,     2833603,     1489144,     4672859,      699756