POP,000000004089,000000000570,000000003750,000000002372,000000030380,000000003377,000000003291,000000000680,000000013277,000000006623,000000001135,000000001039,000000011543,000000005610,000000002795,000000002495,000000003713,000000004252,000000001235,000000004860,000000005996,000000009368,000000004432,000000002592,000000005158,000000000808,000000001593,000000001284,000000001105,000000007760,000000001548,000000018058,000000006737,000000000635,000000010939,000000003175,000000002922,000000011961,000000001004,000000003560,000000000703,000000004953,000000017349,000000001770,000000000567,000000006286,000000005018,000000001801,000000004955,000000000460
I99,       63458,       12015,       62166,       34698,      633326,       65365,       85642,       14154,      252146,      115473,       24045,       15935,      239293,       96365,       48347,       45706,       58027,       63970,       21548,      107836,      137924,      174750,       84769,       34545,       92470,       12673,       28220,       25398,       24038,      199181,       22665,      405765,      113536,        9903,      194384,       49340,       51353,      230917,       19291,       55055,       11303,       81651,      298928,       25890,       10198,      126237,       97766,       25754,       88891,        7783
A01,           0,       49261,           0,           0,           0,           0,       19315,           0,           0,        1166,      327219,         165,           0,           0,         180,           0,           0,           0,         162,       51784,      159523,         344,        1602,           0,           0,          71,         773,           0,          51,           0,           0,       20995,           0,           0,           0,           0,          47,        7798,        9176,         188,           0,           0,           0,         499,           0,           0,           0,           0,           0,           0
A03,           0,       64028,           0,           0,           0,           0,         690,           0,           0,           0,           0,          91,           0,           0,        7568,           0,           0,           0,           0,        3189,           0,           0,           0,           0,           0,        2060,           0,           0,           0,           0,           0,           0,           0,      116549,        1922,           0,           0,           0,        1240,           0,       32654,           0,           0,           0,           0,           0,           0,           0,           0,           0
A09,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       12071,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        1907,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
A10,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        2145,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
A12,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        6139,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           7,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
A16,      171429,       16851,      184353,       86726,      633826,      192081,       97715,       54091,      227313,      168758,       45103,       37775,      324056,      422309,      151857,      111765,      131496,      190317,       52498,      192922,      137384,      479751,      184468,      114360,      144600,       43440,       85671,       29306,       57879,      181689,       72419,      322888,      345892,       68568,      389658,      186242,      111345,      394591,       43126,      167267,       24729,      158815,      429008,       94103,       38018,      403331,      219526,       82837,      169323,       29758
A18,      401853,       56458,      300899,      264697,     1899905,      522847,      206849,      162548,      339114,      315920,       53974,       69228,      655107,      684848,      273489,      215514,      367026,      429779,      104296,      365969,      546582,     1077039,      454093,      173963,      404251,       65278,      121411,       79239,      140379,      463299,      168249,      654685,      451392,      105669,     1292238,      270262,      206087,     1156364,      108312,      326359,       63496,      294953,     1124200,      293691,      149633,      643467,      484332,      170544,      561218,       28751
A21,       57108,         280,        2749,        8121,        3488,       10897,        2312,         781,        6345,       31904,        2996,        1248,         476,        8310,          57,        1376,       13923,       11606,           0,        4508,         191,        1335,        1236,        1354,         991,        4984,        2419,        1093,          79,        6314,       16474,       47942,        7130,         602,        2902,        3279,       12938,       58786,       13042,       13834,          49,        4880,        6936,        8076,         113,       15546,         899,         962,        2158,         440
A36,      586247,           0,           0,      130032,     1696862,       39027,      207625,       29237,       95006,      183985,       90975,        1121,      155020,      337443,      334984,      158254,      196021,      225435,        7764,       30695,      194692,      813000,      318542,      122014,      184131,        2654,      182113,        3734,        2945,      204247,      170453,      989541,      211786,       15049,      698596,      221841,      249035,      785170,        7267,      369254,        3978,      304555,      582917,      197627,        2482,      746453,      232700,       37370,      366709,        2589
A44,        1101,        4220,         261,       18065,       38315,        6568,         885,        1387,         101,       11229,           0,        3860,        1810,        3201,        1778,         917,        6988,         525,         608,        6622,        3408,        1152,       20260,        3592,        7626,         715,        2842,       11975,        6707,          38,        2731,           0,        1913,        1911,        1025,        6467,        1130,        1690,          77,       22750,         175,        2573,        7721,         917,          89,           0,        3167,         987,        8563,        1224
A45,           0,       42789,           0,           0,      131722,           0,         245,       33006,      285470,        1232,           0,           0,      253386,       65122,           0,       40587,       16200,       30139,       37861,      123015,      151900,       14729,           0,           0,           0,           0,           0,           0,       47605,      502260,           0,      329540,        1458,           0,       90592,       68378,        2499,      269602,        8893,           0,           0,           0,       41904,           0,           0,       71415,       69721,       40400,           0,           0
A50,        1565,        7031,           0,         747,       14015,        4382,        3567,         420,        4119,         192,       36291,        1902,       11958,        1053,          60,           0,         645,         266,        1946,       12504,       20571,        7126,        1048,           0,        1209,          86,         568,        2252,        3080,       14333,         222,       13733,        1564,        1777,        7029,        5848,        1784,        8205,        1824,        2097,           0,        1329,        2989,         265,         934,        1939,        4700,        2513,         282,         886
A54,        5199,         619,       12394,        3501,      123935,        7366,          43,           0,        5900,        9851,        1292,        3229,        7705,       17355,        7553,       13178,       22114,        6795,        6217,        2774,        2152,        7412,       16539,       10785,        8117,        3353,       11022,        1275,         724,         873,       13666,       10111,       18333,        5432,       16670,        2886,       12050,        4372,         444,        2635,        4327,       54358,        8723,        2636,          84,        4312,        2832,        2459,       18038,         390
A56,        2560,       11809,           0,        1645,        4463,        1715,         197,          57,        5312,        4309,          23,       26136,           0,        2765,           0,           0,         714,        1644,        2102,        4365,           0,       10134,        5748,        1708,        1015,        2490,           0,         563,         188,          83,           0,           0,        2922,           0,         789,          55,       20853,       10311,           0,        1819,        1102,        1075,        1397,         536,         272,         359,      133286,         428,        1918,           0
A59,         285,       10031,        1693,         660,      415977,        3079,         159,         907,        1847,        4928,        6092,        1778,           0,        2013,        2738,         638,          70,        6073,         473,        3380,        6502,        3954,        7407,        1464,       13403,        4155,        2666,         606,         109,       33010,        1188,        1337,        1135,         150,        3398,        1032,        5824,       19052,         956,        2925,         778,        1493,        3005,        1357,         475,         156,       14047,         841,       26075,        1504
A61,       23199,          16,        2292,       11445,       62865,        1586,        3097,        3568,       18146,       84046,       11247,        1376,        4718,       12947,        1581,        2084,       36526,       24164,        2242,        3034,       23386,       15060,        8379,        5461,        1147,        1227,        4467,        1210,        5369,      184184,        2330,       80833,        4885,        1007,        6073,       17101,        9430,       10807,        2917,       13681,        3954,       20030,       12465,        3512,        4830,        4993,        7066,       14728,        6832,          22
A80,           0,           0,           0,           0,         460,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,         601,       15681,           0,         629,           0,           0,         380,           0,           0,         461,        5883,           0,           0,           0,           0,           0,           0,           0,           0,         155,           0,           0
A81,           0,           0,           0,           0,           0,           0,      120802,       35046,       23492,        3242,           0,        1873,           0,           0,        5832,           0,         292,           0,        5400,           0,        6726,          28,           0,           0,           0,           0,           0,        6683,           0,       40149,           0,           0,           0,           0,           0,         619,           0,           0,        2065,        3192,           0,           0,           0,        1210,           0,           0,           0,         580,        5792,           0
A87,       46103,           0,           0,           0,           0,           0,         182,           0,           0,       66055,       44742,           0,           0,        2846,           0,           0,           0,       37812,           0,       37447,       55610,        2131,           0,        5065,           0,           0,           0,           0,         493,       10407,           0,        4379,       25330,           0,           0,           0,           0,           0,         232,       46821,           0,           0,           0,           0,           0,        7748,           0,           0,           0,           0
A89,       51117,       14035,       49726,       26971,      445594,       76870,       37815,       43979,      268881,       60271,       33070,       19984,       22624,      102230,       24505,       38223,       54253,      128891,       15268,       79398,      114780,       92125,      161180,       54749,       49958,       41545,       38363,       38918,       20186,      447352,       22868,      410155,      120399,       12822,       82295,       52800,       92807,       79214,       19191,       71433,       11264,       95428,      296150,       22045,       23261,      110293,       35633,       60202,       64406,       14928
A90,      152634,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       32701,           0,           0,       84197,           0,           0,           0,       73049,           0,           0,      444441,           0,      122830,           0,       36406,           0,           0,      206017,           0,           0,           0,           0,           0,      373930,           0,      168854,      667257,           0,           0,           0,           0,           0,       69345,       28866,      258211,      259666,       45591,           0,       31778
A91,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       59704,           0,           0,           0,           0,           0,           0,       40523,         100,       19885,           0,           0,           0,           0,           0,        3781,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
A92,           0,       26493,       16669,           0,      178777,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       24316,           0,           0,           0,     1238247,           0,           0,           0,      209395,           0,           0,           0,      562578,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
A93,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        5279,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
A94,           0,           0,           0,           0,           0,           0,       17508,        4392,        4834,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       70184,           0,           0,           0,           0,           0,           0,           0,           0,           0,      345907,           0,      676263,           0,           0,           0,           0,          48,           0,        6658,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
B01,          96,       54299,         313,         181,          83,           0,           0,           0,           0,           0,       23611,          24,      111334,           0,           0,           0,         289,         252,         109,        7734,       23538,       88774,       18882,           0,           0,         293,       15945,           0,        5232,           0,           0,        3407,       15478,           0,           0,           0,         275,       31773,         689,           0,        8900,           7,           0,       12755,        1239,           0,          83,           0,       26192,        9379
B21,      650440,      114280,      437100,      232713,     3457270,      403833,      218135,       60274,     1086840,      739790,      160820,      103202,     1106680,      508332,      326249,      272158,      395780,      516512,      106752,      485601,      471634,     1025977,      495988,      408168,      374151,       85688,      161450,       93627,       89762,      622143,      258658,     1607355,      701072,      105464,      855395,      296708,      352504,     1121958,      101985,      390499,       75958,      473522,     1778422,      310844,       76780,      681747,      648812,      223851,      536486,       57354
B22,       62015,       26048,       36268,       36108,      419421,       52901,       75905,        9534,       63168,      112916,       16927,       17419,      204559,       70126,       35884,       26607,       46060,       64063,       23313,       31156,      121526,      180996,       82653,       47666,       76667,        6064,       22651,       27412,       18898,      114474,       47665,      337096,       67669,        6871,      158252,       48834,       42715,      194546,       28095,       81942,       13004,       67581,      212503,       30714,        9038,       66559,       91195,       26201,       75435,       11212
B30,       58965,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        4038,           0,           0,           0,           0,        4630,           0,       12584,           0,           0,           0,         300,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,      164312,           0,           0,           0,         629,           0,           0,           0,           0
B42,       79294,       20608,      106275,       45384,      541647,      121693,      158735,       29417,      395658,      199712,       51753,       45776,      337150,      157727,      153829,       74064,       95683,      166572,       32555,      162910,      118004,      251514,      130849,       81820,      160420,       39852,       49109,       25848,        9769,      211766,       65169,      395301,      168970,       20250,      256202,       68244,      192643,      374588,       27887,      111358,       35794,      121582,      351361,       46691,       35616,       74250,      259827,       52676,       99528,       11880
B46,      236403,      185889,      154805,      174522,     1468509,      245274,      455240,       68685,      488673,      354309,      185995,      110019,      493784,      392472,      191894,      139017,      186912,      125250,       72599,      239127,      479068,      418535,      242456,      182134,      319325,      130229,      111615,       61714,       58674,      649704,      117601,      731819,      449450,      118699,      531948,      199127,      176249,      590863,      104675,      190021,       90667,      307093,      810994,      110217,       54184,      298361,      331293,      194490,      241155,       95446
B50,           0,       22335,           0,           0,       74207,       17331,       34797,       24462,       60624,       70113,       46031,           0,       43773,       47264,       24901,       13709,       28505,       16869,       10280,       48474,      136950,       24407,       10281,       31006,       47629,       13324,           0,        2582,        6574,      204475,           0,       69421,       56154,       16628,       39684,        8980,       47879,       45511,       14936,       13700,       27107,       24975,           0,        5437,       26052,       26259,           0,       12473,           0,        4262
B54,       19612,        2978,        4081,       12070,        1807,        4030,        4695,        1166,       33467,       27718,        4938,        4857,       20739,       21067,       16363,       16695,       16077,       18868,        5474,       10522,        7339,       19004,       17037,       24006,       21195,        5035,       15945,        2895,        3841,        8541,        9249,       18998,       40711,       13590,       26929,       20821,        5938,       21167,        2774,       13032,       10020,       21530,       34586,       10866,        4292,       17603,       16975,       10206,       18729,        3652
B59,       14581,       50902,       10138,       20077,       56280,       14073,       15815,        5167,       21258,       62231,        3450,       16054,       22470,       11438,       14737,           0,       56087,       10456,        5071,       23165,       18785,       37271,       21584,        8165,       56175,        9514,        5445,        6557,        6095,       15348,       19133,        3455,       30033,       10121,       47073,       21252,       32157,       71101,        9267,       20112,        8290,       13252,       62913,        9265,        5249,       27170,       32485,       30997,       24173,       34655
B79,     1389303,      225249,     1000589,     1002354,    11953680,      854771,     1196713,      151752,     2795277,     2025079,      312214,      232561,     2921284,     1761486,      709170,      640474,     1649944,     2574078,      625083,     1350351,     2589019,     3451226,     1461224,     1106993,     1784114,      294493,      444721,      237795,      449123,     2816970,      565703,    12789907,     1970554,      216794,     3946006,     1021779,      785479,     4941337,      589282,     1396027,      239828,     2022888,     4653902,      480047,      242282,     1166248,     1385268,      839771,     1696201,      134605
B80,           0,           0,           0,           0,      142408,           0,       25698,           0,       57210,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,      101580,          65,           0,           0,         824,           0,           0,           0,        3594,        3855,        8294,           0,           0,           0,       48793,           0,           0,           0,         539,           0,           0,       22103,           0,           4,           0,        8056,           0,        4106,           0,           0
B89,      196722,       59191,      102369,      106580,     3446733,      107894,       84671,       44348,      396683,      124264,       39716,       86234,      287349,      125279,      103792,      158759,      111916,      183303,       47155,      146657,      156165,      393010,      205997,      108892,      104526,       85142,       50583,       65029,       81389,      328486,       24844,      740232,      195285,       49093,      357559,       50674,      398263,      331665,       49935,      130436,       35365,      139678,      609160,       88908,       49067,      196288,      164061,       81157,      201282,      283874
B91,           0,           0,           0,           0,           0,       21582,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,          12,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
B92,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
B93,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
B94,           0,           0,           0,           0,           0,           0,           0,        2125,        7656,        7715,           0,           0,       10247,        3203,        2107,           0,        2212,           0,           0,       82771,        2838,        7834,           0,           0,           0,         836,           0,           0,           0,      154296,           0,      650339,           0,           0,           0,           0,        1690,           0,       12982,           0,           0,        6361,       17463,           0,         690,           0,           0,           0,        1889,           0
D21,        7613,        4015,        6001,        1037,       61097,       18481,         262,        3600,        3152,       13274,         394,          33,       16773,        1797,         198,        3464,        7137,        2452,         297,       22143,        4461,       10860,        5098,        4621,          88,         930,        3490,         758,        3086,      139165,       57205,      130084,        4245,         662,       23753,       14627,        7211,       56390,         123,       21220,         129,       10869,       33230,       35003,         837,       16129,       38825,        3173,        7063,       13629
D30,           0,           0,       15454,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
D42,         317,         168,       58457,         693,         239,         242,           0,          15,       52390,           2,           0,       24344,           0,        5272,       41401,           0,          43,        5800,           0,        1425,        3616,       98699,       10821,        1482,         230,           0,        1544,         492,           0,        1165,       28508,           0,        2970,           0,       51616,         555,           0,           0,           0,        7082,        2661,        5062,        4259,          12,          24,       47680,           0,           0,         251,         891
D46,        6923,           0,       19720,        2632,      484731,        8637,           0,           0,       12420,       17281,           0,        1724,       36560,       17406,        1907,       14478,        1272,          46,        2637,       11374,         255,       44408,       18179,        2218,        9589,         490,        9978,        6203,        2867,       12217,           0,           0,        3526,       10218,       17533,        4283,        3714,        7051,         151,         671,         638,       16494,          17,           0,        4394,       73486,        3671,           0,       32460,        4538
D79,         713,           0,      153222,           0,     1214224,        5027,           0,           0,      186102,           0,           0,         758,      101608,       65737,       28214,           0,           0,           0,           0,        7477,       53730,        6835,      183096,       52986,          15,       13124,        3066,       10881,       53867,        7961,         411,     3131843,      290164,        8857,       10263,           0,       14288,      221400,           0,       39999,           0,         224,       29303,        3202,           0,           0,           0,           0,           0,           0
D80,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,      187821,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       25067,           0,           0,           0,           0,          44,           0,           0,           0,           0,           0,           0
D89,       14183,        7144,        5564,        1611,      106868,       42805,        4262,       11664,       35487,       16272,        2710,         733,       26407,       15011,         675,           0,        7319,       10734,         531,       26362,       19750,       70408,        5605,        4540,        1428,         559,        1609,        5309,        7038,       38748,         457,      724970,       21315,        2948,       97858,       23574,        1644,        7104,       19875,       27742,         882,        9407,        5874,        6301,           0,       25435,       22209,       10986,       54229,        1402
D91,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,          21,           0,           0,           0,           0,           0,           0,           0
D92,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
D93,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
D94,           0,           0,           0,           0,           0,           0,           0,           2,       15387,           0,           0,           0,           0,         194,           0,           0,           0,           0,           0,        5193,      130900,           0,           0,           0,           0,           0,           0,           0,           0,        8530,           0,      807776,           0,           0,           0,           0,           0,           0,           0,           0,           0,         217,           0,           0,           0,           0,           0,           0,         265,           0
E01,         428,       31570,        8364,         379,        1107,           0,       18568,           0,           0,        1179,       87756,        1063,        4531,           0,         847,           0,         538,           0,         738,       35215,       87796,        5332,        1053,           0,          37,         770,        2916,           0,          10,           0,           0,       21965,        1147,          23,         349,          28,           0,        7856,        6153,        2969,         642,           0,           0,         953,           0,       14888,         896,         611,           0,           0
E03,           0,       41740,           0,           0,           0,           0,         581,           0,           0,           0,           0,        2760,           0,           0,        6579,           0,           0,           0,           0,        2021,           0,           0,           0,           0,           0,        1123,           0,           0,           0,           0,           0,           0,         308,       88609,        1045,        1127,           0,           0,        2540,           0,       24901,           0,           0,           0,           0,           0,           0,           0,           0,           0
E04,      136123,      116271,      266624,       95321,     2116708,      130538,      228466,       62907,      701370,      318675,       78970,       38213,      503618,      242169,       98481,      109953,      137639,      179157,       46802,      317968,      305254,      711413,      121772,       73294,      156523,       28596,       38978,       93050,       36779,      490261,       96750,     1347506,      384085,       12789,      494085,      119231,      105792,      465648,       85160,      225632,       21599,      201731,      793677,       70407,       23969,      379733,      215404,       26975,      218151,       19985
E05,       35416,       11123,       25794,        4881,      408072,       79549,       57479,       15940,      276975,      156988,       15441,       10895,       46088,       13288,        4890,       44672,       27030,       53586,       11772,      183203,       59569,      126062,       30790,       11378,       34334,        7573,       32213,       17811,        7510,       68152,       27586,      207543,       89569,        1385,       86611,       70092,       40932,       27559,        9998,       32297,        7880,       51301,      113604,       24848,        7033,       22996,       80379,        8403,       43656,        2443
E12,       24693,      200717,           0,           0,      136161,           0,           0,           0,           0,           0,      703447,           0,           0,           0,           0,           0,           0,       21256,        8402,      130128,           0,           0,           0,           0,           0,           0,           0,           0,           0,      404107,           0,           0,       24696,           0,           0,       14571,           0,        1167,           0,       49400,           0,           0,       91995,           0,           0,           0,           0,           0,           0,           0
E16,      136372,       15581,      155488,       80924,      636318,      150456,       62290,       44281,      205439,      144493,       42452,       47814,      274564,      320631,      121316,       97690,      114495,      178884,       44671,      152997,      118665,      408596,      170194,      110052,      130694,       38737,       75957,       28221,       47921,      137415,       72391,      271887,      273874,       63264,      327370,      175935,       96604,      344375,       41025,      149078,       23772,      126412,      487281,       83502,       30506,      319974,      222236,       84328,      157151,       28394
E18,     1174360,      247795,      871889,      586547,     6258427,     1107155,      687524,      317495,     1446034,     1231461,      413720,      243329,     1770004,     1616987,      743234,      619420,      959207,      955884,      272920,     1024696,     1054518,     2536293,     1254058,      446435,      840395,      191717,      427791,      288562,      225171,     1387578,      554166,     3115691,     1530102,      265146,     2468707,      834652,      619125,     2364564,      229070,      931942,      144892,     1068285,     3685509,      710864,      221294,     1586349,     1600423,      434880,     1340011,      116891
E19,       64703,        3239,       74828,       36316,      758994,       56857,       48312,       22987,      220848,       40720,        4179,       10361,      361791,      160599,      101753,       44655,       72775,       69819,       20054,      112422,       89480,      262729,      151302,       40764,       72481,       14417,       25725,        8143,       20693,      210140,       26207,      774309,       76853,       14927,      315543,       57802,       53309,      354595,       26566,       46146,        5212,       53643,      209038,       25907,       30286,      135282,      152184,       25916,      143636,       17613
E21,      338106,       58092,       69625,      154952,      712940,       35176,      118008,       54650,      353587,      252077,       10275,       42697,      297298,      108078,       57366,       70520,      263649,      187382,       36187,      131036,      158308,       99253,      105391,       97748,      105775,       53569,       45380,       25087,       12922,      105831,       49945,      383475,      177525,       27772,      152953,       84281,       63854,      592718,       75971,      115467,       30114,      219561,      284491,       58192,       27416,      237619,      202246,       76484,      142407,       14771
E22,       60693,       27469,       39638,       35368,      398445,       52899,       76007,        7919,       44664,       98114,       11321,       13291,      204504,       84201,       46342,       19771,       39485,       63955,       24155,       29840,       96894,      175789,       80620,       41153,       65030,        8819,       22530,       24358,       18238,       92604,       44790,      315365,       65056,        6521,      162282,       42568,       43107,      155981,       25217,       51307,       13472,       68516,      227137,       30242,        9234,       73537,      103188,       23708,       65838,       11756
E23,      109258,      103113,      176084,       71843,     1504593,      127615,      184866,       56942,      419150,      109932,       69340,       35832,      399340,      178533,       82418,       94599,      139506,      113223,       52712,      216726,      388072,      303872,      177470,       40636,      119417,       62916,       42154,       87007,       35213,      276119,       66269,      815004,      114713,       21302,      487754,      140789,      219922,      392023,       41284,      114750,       23348,       96446,      311806,       71606,       29487,      236966,      177805,       87890,      122121,       33725
E25,      113382,       95226,       64001,       26784,      299194,      107624,      176932,       43963,      445887,       48987,      100085,       24504,      180225,       49273,      106353,       81094,      129294,       85149,       36054,      200009,      289039,      144940,       85198,       21962,      112886,       26834,       26931,       15168,       56932,      248805,       73166,      982842,      231522,       15845,      108749,       73874,      129790,      171169,       64084,       37269,       14923,       82486,      219373,       51838,       26486,      146226,       50745,       38795,      122578,       22708
E26,       14010,       23765,       17282,       14127,      164533,       12772,       27555,        6100,      106872,       18091,       20059,        5231,       51899,       18119,       15592,       12562,       22937,       22516,       11999,       23565,       40835,       81324,       40819,       12195,       20439,        6838,       10340,        5965,        7693,       46771,        9590,      162505,       16938,        3176,       32508,       20660,       14169,      131394,       12185,       21172,        4549,       14895,       59680,        9506,        4673,       22584,       46827,       12093,       40694,        3155
E29,       10466,       13544,       14643,        5227,       51889,       19201,       19704,        5955,       40549,       20778,       17307,        2834,       17751,       11676,       10801,       11949,       12251,       51905,        9258,       24691,       16095,       65288,       28917,       12186,        7821,        4636,        7098,        7366,        4371,       54532,        8852,       90724,       23897,        2918,       24534,        7628,        9066,       35533,       15193,        7157,        6246,       14719,       25646,        5340,        4508,        8791,       33633,        9225,        5390,        4689
E31,         883,       30191,       12737,        3074,        1546,        6135,        3470,        8500,       45494,       30172,       30471,         370,       13208,       13806,        3943,        2231,         399,       14682,        6278,       28210,       19359,       18578,        8606,        6060,       20225,         673,        2550,           0,        1201,       31641,        6158,      123374,       15125,        2575,       56064,       13671,           0,       20793,       14185,       14821,        4843,        8964,       38723,        2438,       18985,       22512,         958,       13708,        2499,        4877
E32,      369853,       98863,      309080,      121596,     1587551,      175227,      276453,      101096,     1316043,      215685,      203450,       54026,      863222,      288296,       73058,       82273,      107478,      333595,       98102,      320852,      781235,      720073,      258149,      122112,      319847,       72613,       44842,       53564,      100040,      399035,      179224,     1060738,      195525,       21479,      393291,      187376,      123463,      306741,      137293,      375949,       43358,      314290,      501893,       60826,       41587,      441302,      629375,       97000,      110197,       34103
E36,      736011,       33817,       60313,      174489,     2393654,      143800,      729035,       42685,      474522,      490570,      164156,       31084,      604057,      489398,      423887,      280675,      259776,      715527,       62847,      334889,      760214,     1049855,      537123,      235861,      369304,       38128,      225305,       50006,       37326,      804422,      224206,     3265200,      616024,       54690,     1039984,      320823,      364672,     1333012,       98719,      524230,       41232,      416776,     1518034,      223002,       22184,      920498,      474387,       87692,      374857,       34153
E38,           0,           0,       10378,         125,           0,        3434,           0,           0,        7844,           0,        4652,           0,       29263,           0,           0,           0,       18070,           0,           0,           0,           0,           0,         935,           0,        1153,           0,           0,           0,           0,       21094,           0,           0,           0,           0,           0,           0,           0,        4109,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
E44,      161327,      252109,      141382,      155567,     1483365,      133933,      142261,       30928,      495920,      122740,       82565,       43982,      469666,      190142,      140973,      173728,      181716,      204178,      102426,      279333,      124201,      148709,      167997,      100643,      276444,       71138,       61434,       54838,       63984,      116460,      347960,      355074,      590848,       56198,      316610,      122869,       72728,      834629,       18638,      162615,       62503,      130426,      800845,       88794,       91081,      546310,      177576,      214200,      100998,       60955
E45,           0,       70530,           0,           0,       46549,           0,        3550,        6995,      150864,         731,           0,           0,       78560,       19428,           0,       18803,        6827,       17867,       23839,       32466,       69147,        6650,           0,           0,           0,           0,           0,           0,       13086,      290112,           0,      190535,       17202,           0,       45979,       25262,         338,       76509,        2273,           0,           0,           0,       10014,           0,           0,       58209,       96648,       15352,           0,           0
E47,           0,           0,           0,           0,          77,           0,       60222,           0,           0,           0,           0,           0,       14831,       20272,        8808,           0,           0,           0,           0,        9964,           0,       41878,        2915,           0,        3570,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,         252,           0,       25154,           0,           0,           0,           0,           0,        1541,           0,           0,           0,           0,           0
E50,        3658,       28361,        3416,        2252,       70335,       27429,       77570,       27176,       44988,       39380,       49882,        3838,       26005,       43564,        2255,        1225,        5777,         889,       24798,       55672,      173308,       39124,        9731,        1309,       38682,       14652,        2037,        6889,        7015,      132411,        3139,      157987,       32320,       18971,       50056,        7176,       57323,       10950,       19478,       18952,        6485,       13569,        5978,       26128,       29439,       38399,       27854,        9624,       17928,        6740
E52,        2254,        4321,        4274,        2924,       12454,        4969,        9271,         755,        5186,           0,       18906,        1969,       10745,        4107,        2741,        1392,        7459,        3500,        3063,       10916,        3970,       17562,           0,        2149,        1218,        1787,        1940,        1755,        2265,        5128,        2470,       22814,        4070,        1193,        7326,        3664,        2566,        8875,        3843,        3068,        2111,        3365,        6427,        4331,        2093,        6300,        7385,        3825,           0,        1356
E54,       85532,       14280,       84396,       64903,      546535,       36486,       13353,        3692,      284709,      136171,       50313,       34589,      115760,       66754,       98942,       82853,      106842,      105124,       33784,       71444,       11293,       95210,      105173,       70081,       76575,       24773,       76658,       14182,        4965,       37921,       39941,       81905,      152269,       44526,      107886,       61464,       70984,       75710,        3709,       53827,       31520,       87153,      201630,       33248,       15921,       76354,       95173,       32404,       82215,       17048
E55,       12698,      111200,       23205,       20374,      129254,       36470,       12046,        3157,       51930,       23800,        3594,       29143,       18767,       21149,        9607,       10893,       16725,       29627,       23195,       41361,       15917,       27726,       54343,       16193,       17339,       26033,       12683,       12206,        8956,       24469,       17641,       34432,       32486,        8385,       23281,       15985,       58986,       64610,        2990,       35248,       13378,       28293,       60511,       21550,        7751,       28741,       83371,       13045,       35644,       23720
E56,       24276,       28395,        1452,       12350,      301354,        4974,        8280,         727,       34173,       34399,        6039,       14764,        6125,        6492,        2380,           0,        8043,        9694,        8295,       13872,        2641,           0,       28684,       21310,       10375,       15262,           0,        5262,        1603,        6344,        2431,       20835,       29286,           0,        8642,        1003,       58948,       27070,        1677,       20903,        3423,       16857,       15653,        4449,        3376,       16825,       36596,        3787,       24377,        1855
E59,       21161,       73827,       20609,        4609,      186922,       25965,       22794,       15745,      155099,       34484,       19451,       12399,       68175,       22293,       48253,       17890,       74963,       46479,       11479,       92655,       46887,       87745,       50157,        8768,       69881,       21250,        5206,        7023,       12480,       71319,        8428,      110482,       42358,        7298,       51041,        6802,       17044,      128639,        9935,       11947,       13135,        9350,       95709,       17534,       13522,       29735,      126271,       29521,       42879,       10059
E61,        8032,       10055,       13348,       28124,      138901,       15599,       11350,        9763,       79841,       96614,       30721,       10463,       67046,       19523,       15657,        7480,       75434,       66969,       10688,       40538,       51880,       50654,       54668,       22463,       19231,        3813,       16017,        7865,        9245,      218793,       25206,      206101,       28211,        7832,       38877,       41206,       18529,       67106,        5555,       27563,        9276,       45469,       49447,       14771,        8218,       39627,       27927,       34801,       24437,       14751
E62,       64857,       45554,       94858,       34355,      729055,       43207,       72331,       32056,      211098,       90313,        3030,       23627,      201873,       82103,       43232,       32459,       85860,       91618,       24924,      137629,      110365,      191206,       56830,       34595,       62615,       15391,       28283,       25699,       21196,      195626,       44276,      257100,      138555,        7808,      141979,       41514,       65651,      289472,       21546,       72620,       12275,       59877,      192692,       28302,       24412,      121884,       94527,       22046,       48488,       10369
E66,       26519,       30255,       64250,       35312,      919010,       36819,       45996,       20751,      201604,       49483,       20525,       28362,      141440,       31232,       25169,       28610,       44087,       22057,       22832,       65103,       41611,      102209,       92271,       44701,       42878,       10031,       24468,       36176,       17943,      215854,       34485,      301251,       46561,       13834,      119654,       45286,       74610,      109605,       20349,       37010,        6363,       45906,      196988,       18123,       13742,       72061,      196481,       19709,       58470,        7627
E67,      208347,      100358,      254672,       64384,           0,           0,      443657,       36010,      839630,      427262,      116824,       32204,      999690,        3870,      164829,      144545,      224582,      207817,      146385,      415984,      741426,     1085445,      476071,       64561,      248159,       44923,       66798,       39372,       62636,           0,      106063,           0,      347467,       24917,     1176533,      171794,      201740,      879642,      131055,      122251,       27869,      203045,      800537,       92765,       67354,      421096,      528483,      118922,      403669,       27211
E68,           0,        3242,       18434,       24573,           0,           0,        2161,        2565,           0,           0,       28438,           0,      187729,          12,        1699,           0,           0,           0,        2554,           0,      118078,       78570,           0,           0,         672,           0,         710,        2601,           0,           0,        3389,           0,       84826,           0,           0,        4256,         373,      331356,           0,       53530,           0,       33334,      204737,       18215,        4599,           0,       52451,        2239,        3222,         619
E74,     1423708,      208641,     1019329,      882602,     9041462,      948199,     1498438,      152536,     3692827,     2427200,      334797,      234813,     3481424,     2014846,      781704,      569022,     1537255,     2000986,      685814,     1836824,     3305709,     2883210,     1929753,      898192,     1885820,      229693,      414251,      325620,      720070,     4301168,      396353,    12360880,     1985718,      201805,     3978612,      987062,      754272,     5004254,      461193,     1422458,      187122,     1931339,     4982114,      411507,      212986,     1343396,     1465637,      825823,     1945200,      113843
E75,           0,        7672,           0,        1004,           0,       41314,       17466,         188,      131244,           0,        1000,        1068,       56253,       44030,       18880,           0,       26801,           0,       27456,       23824,       28393,       85581,         947,           0,       25278,           0,       31566,           0,           0,           0,       37237,           0,       14488,        8819,       41789,           0,           0,      103791,        8260,       13454,        5464,       38812,       40580,       16766,         212,           0,        3397,           0,       52580,       10338
E77,           0,       32311,        3534,           0,       44478,       10205,       19598,       30716,           0,           0,           0,        3346,       30282,       21985,       26326,        3530,           0,           0,         564,        3007,       25801,       29278,       23788,           0,       10376,        5828,       24760,           0,        8806,       35851,       15739,        8695,           0,        1964,       23164,       37902,           0,       25988,        9805,           0,        2340,           0,           0,           0,        6966,           0,       16716,        1655,       23160,        1726
E79,      207659,       51879,      283911,      201598,     1198644,       77736,      256308,       67744,      607722,      458322,      103088,       74976,     1145112,      233424,      271519,      148080,      582768,      272117,      114090,      394563,      773082,     1101759,       51642,      181679,      326339,       47943,      159446,       69926,       90817,      439748,      151678,      384397,      146468,       97927,      331595,      279011,      367096,     1846340,      110731,      277072,       65614,      336609,     1137092,      123386,       76966,       55306,      684216,      144653,       53443,       34661
E80,           0,           0,           0,        2579,       76450,           0,         366,           0,           0,           0,           0,        6230,       15639,        5214,           0,           0,           0,           0,         286,       24506,      108492,           0,        3061,           0,        6770,           0,           0,           0,        6107,        6652,        7300,       17008,         183,           0,        2852,           0,         127,           0,       18861,           0,           0,        1589,           0,           0,           2,       57410,           0,        1979,        5162,           0
E81,           0,           0,        2728,           0,      394956,        4723,      109777,       37983,        8298,        3489,           0,         475,       24111,        7650,        2434,           0,        8080,        9846,       18288,       12144,       12461,       24591,        5531,           0,        3995,           0,           0,        4819,        5001,       95644,           0,       48909,        8556,           0,       12278,         537,        6524,       27714,       19893,        4459,           0,        7843,      149536,        3936,        7223,        7688,       35548,        7562,       14202,        4966
E84,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,          19,           0,           0,           0,           0,           0,           0,           0,          19,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        1893,           1,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
E85,        5788,         400,        1137,        2367,       20849,           0,           0,         162,        5757,        4295,         748,         875,        6236,         440,           0,        1519,        1374,        5575,        1054,        2429,        3590,         606,        2223,        3347,        1672,         536,        1311,         604,         189,        3342,        1097,        4988,        2645,         322,         609,           0,       26394,           0,           0,         621,         666,        1674,        9013,          78,          81,        2157,        2676,         866,        6831,           0
E87,       28549,           0,           0,           0,           0,           0,         712,           0,        2066,       42969,       15950,           0,           0,        2580,           0,           0,           0,       34111,         117,       41889,       52578,         868,           0,        4111,           0,           0,           0,           0,         295,        9459,           0,       15188,       19771,           0,           0,           0,           0,           1,         807,       28269,           0,           0,           0,           0,           0,       11425,           0,           0,           0,           0
E89,       91973,      708872,      146380,       69504,     3876750,       58713,      632891,       52968,      485586,      317593,      409897,       56804,      810431,      231902,      114372,       81761,      114194,      227651,      106365,      360499,      738948,      369000,      336058,      112621,      128693,       58948,       36288,       84166,       50802,     1987997,       49243,     1957837,      189509,       48422,      429301,       73392,      138918,     1377668,      612473,      165228,       25813,      216167,      634564,       65482,       81747,      110759,      319134,      173869,      310177,       12419
E90,      136329,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       34829,           0,           0,       58323,           0,           0,           0,       50551,           0,           0,      380605,           0,       98885,           0,       33872,           0,           0,      160892,           0,           0,           0,           0,           0,      295649,           0,      103266,      632247,           0,           0,           0,           0,           0,       51836,       27611,      211698,      222957,       40244,           0,       26925
E91,           0,           0,           0,           0,           0,         786,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       51214,           0,           0,           0,           0,           0,           0,       24795,         139,        8928,           0,           0,           0,           0,           0,        2214,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
E92,           0,       19340,       17632,           0,       51989,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       24133,           0,           0,           0,      965701,           0,           0,           0,      133793,           0,           0,           0,      339871,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
E93,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        3085,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
E94,           0,           0,           0,           0,           0,           0,       48570,       14607,       19880,           0,           0,           0,           0,           0,           0,           0,        2983,           0,           0,      175935,           0,           0,           0,           0,           0,           0,           0,           0,           0,      724597,           0,     1308931,           0,           0,           0,           0,           0,           0,       26286,           0,           0,           0,           0,           0,         692,           0,           0,           0,           0,           0
F01,          39,       53350,          26,           0,           0,           0,        6839,           0,           0,        1790,      302965,           0,           0,           0,           0,           0,       44246,        2564,           0,       15195,       53877,         354,           0,           0,         239,         237,           0,           0,         146,           0,           0,       10017,           0,           0,           0,           0,           0,        4549,        5184,          36,           0,           0,           0,        2611,         110,           0,           0,           0,       36772,           0
F03,           0,           0,           0,           0,           0,           0,         602,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,         323,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        1440,        1184,        1884,           0,           0,           0,           0,        2335,           0,           0,           0,           0,           0,           0,           0,           0,           0
F04,         260,        2842,       17992,        1165,      336965,       17163,      131088,       29387,       55144,        5828,        7974,        2131,       35815,       13626,         799,       19467,       12726,         485,        8418,         169,      115110,        3849,        8145,           3,        3245,         448,         872,       14418,         911,       26018,        2496,      153726,       56088,        1796,       41373,        1548,       25286,       55375,        2619,       37273,          40,       61624,      231958,         128,        1929,        3940,      239759,           0,       22794,        1178
F05,        6330,           0,           5,           0,           0,        2230,           0,         237,           0,       90539,           0,           0,        1185,           0,           0,           9,           0,           7,           0,       37915,          34,          69,          10,          23,           0,           0,         192,         264,           0,        1703,           0,        8400,           0,           0,       12688,           7,           1,           0,        3174,           0,           0,           3,        2867,           0,           0,          23,          14,         875,           0,           0
F12,           0,        9994,           0,           0,           0,           0,           0,           0,           0,           0,       87645,           0,         118,           0,           0,           0,           0,           0,          50,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       10134,           0,           0,        7376,           0,           0,           0,           0,       68468,           0,           0,           0,           0,           0,           0,           0,           0,      188220,           0,           0,           0
F16,         262,        1591,        3116,        9176,       46362,       38556,         592,          15,        3104,        6303,         235,        6607,       55938,       28238,        1887,        1801,        6820,        2836,        6985,        2367,       31009,       13617,       12281,           0,       22054,         296,       10490,         308,           0,       22691,        2777,       27220,       19917,        1307,       31547,        2663,       18145,       12127,           6,       24184,           0,         337,        9840,        1520,         954,       49600,        7408,         194,       12763,           0
F18,       62460,       22268,       56054,       66041,      229003,       47542,        4021,       20403,      208307,       98908,       29355,       10405,       93131,      108028,       35761,      211811,       51851,       25699,       17944,      111466,       39858,      135726,       28913,       28806,       28311,        2363,       15460,       47638,           0,       97223,       19229,      378951,       79348,       25142,      364769,       23542,       56505,      160322,        8806,       90663,        4555,      256680,      127615,       36260,        3145,       43521,       63123,        3417,       66571,        9385
F21,           6,           3,         527,         824,           0,         106,        3398,           0,        4413,       10700,        3369,        1015,       11640,         677,           0,          15,        9019,         300,           0,         162,           0,          40,       23137,         255,         548,        1456,         237,          89,       10079,        1242,         259,       17947,         580,         113,       50234,         862,          56,       14638,         111,        5769,           3,        5377,         354,         171,           0,        1003,         673,           0,        1146,           0
F22,           0,           0,           0,         108,        3520,           0,          14,           0,           0,           0,           0,           0,           0,         125,           0,           0,           0,           0,          79,           0,          22,          36,           0,           0,         722,           0,          48,           0,           0,           0,         327,       28180,           0,          53,           0,           0,           0,           0,         587,         442,           0,           0,        1589,          29,           0,        1202,           0,           0,           0,           0
F23,         387,          13,         638,         239,        1018,         823,         195,           4,        2081,        1551,           0,         106,           5,          16,           0,           0,           4,           0,          32,           3,          18,           0,           0,           0,           9,          19,           8,           5,         258,        1290,           0,       25655,         912,           0,           0,          22,        1417,           1,           0,           0,          37,           0,         719,         146,           0,          94,          17,           0,           0,           0
F25,       15075,         987,         270,          21,           0,          29,        3064,           0,         106,           0,         623,          26,        2297,           0,           0,           0,           0,           0,           0,         371,        9616,           0,         227,           0,           0,          13,           1,        5565,        1746,          54,           0,       79425,           0,           2,           0,         116,           4,           0,           0,           0,           0,           0,          51,        3556,         563,           6,          58,           0,           0,         354
F26,         338,         125,           9,          15,           0,         142,         128,           0,           0,           0,           0,          12,           6,           7,           0,           0,           0,           0,           0,          11,         110,         863,           5,           0,           0,           0,           0,           0,           0,        3682,           0,        8644,           0,           0,           0,           1,         458,          86,           0,           0,          22,           5,          10,          19,           0,           4,           0,           0,           0,           0
F29,           0,          11,         108,           0,           0,        1204,           0,          62,           0,           0,           0,          23,           0,           0,           0,           0,           0,           0,           0,          38,          26,         258,           0,           0,           0,           0,           0,           0,           9,           0,           0,        2159,           0,        1298,           0,          45,           1,           0,           0,           0,           0,           0,         137,           0,           0,           0,           0,           0,           0,           0
F31,        6097,           0,         280,           0,       18417,         715,       23783,       11625,       11848,        2394,       11364,        4464,       29997,       62487,           0,        1214,           0,        1994,        4510,        1995,       10484,        4001,        2778,       32464,        3442,        1224,         636,         162,        2033,       13599,       15534,       10700,       19952,           0,       45541,        1515,       18907,       16992,         429,        7157,       11406,       14341,       23124,          16,        9359,       10788,       58574,          37,           0,        1089
F32,        9870,         152,         148,           0,         443,         785,        8030,        3899,           0,           0,        1884,         306,         562,         249,           0,           0,        1743,        1034,           3,       15817,        7724,       34111,         989,         215,         291,           3,          26,           0,           5,         518,           0,      233989,          27,         360,          20,         251,          51,         693,        7546,        1466,           8,        3131,         410,          30,           0,        1740,       21876,           0,         172,          77
F36,       20639,           3,           0,        2822,      102283,         112,       22824,         611,       23617,        9014,       12404,        1171,       20926,       18126,       37882,        3672,        5247,        3025,          91,         203,       12555,       50336,         307,        1086,        3642,          93,        5362,           0,           3,        6323,        5097,       81916,        7231,         502,       74326,        2664,        6353,       40387,        5250,       16709,          34,          33,       26414,        3771,           0,       13739,       20007,           0,        4961,        3801
F38,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
F44,      321618,      158319,      412517,      260584,     1176887,      313966,      615044,      172009,      833509,      662752,      260390,      168032,     1292422,      489343,      504656,      302043,      592466,      556538,      109338,      281096,      565893,      538212,      505192,      333568,      445854,      195497,      259800,      185935,       77962,     1227950,      209810,     1631804,      692564,      125640,     1068761,      298124,      306531,      595137,      153014,      328634,      126961,      667967,     1368263,      171076,       56823,      762051,      521747,      258972,      368193,      216320
F45,           0,       16352,           0,           0,       14096,           0,           0,        3046,      285252,           0,           0,           0,      114854,        9280,           0,       14606,       15626,       21706,       12536,       42402,       61354,         561,           0,           0,           0,           0,           0,           0,        4603,      155268,           0,      178685,        2741,           0,       50562,      159329,           0,      312277,           0,           0,           0,           0,       15743,           0,           0,           0,       41706,        5973,           0,           0
F50,           0,        6298,           0,           0,           0,           0,           0,        2095,           0,           0,       32023,           0,           0,           0,           0,           2,           0,           0,           0,        4188,           0,           0,           0,           0,           0,           0,           0,           0,           0,       10565,           0,        8090,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,          85,        4431,           0,           0,           0
F52,           0,           0,         515,           0,           0,         246,         144,         475,        2894,          41,       12730,          79,         191,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       11172,           0,         109,           0,          42,         348,           0,         134,           0,           0,           0,           0,         101,           0,           0,          53,          37,           0,           0,           0,           0,           0,           0
F54,        3096,           2,       10213,        2683,       10537,          38,           0,           0,       11600,        1807,        2726,         110,       10518,         847,         173,         224,         681,         163,           4,        4190,           0,         725,           0,        1482,        2291,           1,         447,           0,           0,       12545,         206,        2476,        1679,        1010,        1517,           1,         241,        3537,           0,          35,          54,         629,        1096,         310,           0,         961,         523,           0,        4654,         205
F55,         196,         417,        2702,        1381,       17976,        3425,           0,         206,        2534,        2355,         175,        1712,        3602,         791,        1464,        3665,        1165,         632,         210,           5,         838,        1156,         587,           0,        5904,        3409,        1222,        1690,         253,        6924,           2,        1159,         727,        1472,           4,         445,        1889,         537,         158,        1791,         153,        1915,        3172,        2569,        1205,         649,       10484,        1243,           0,        1928
F56,          59,           2,           0,          41,        1845,           0,           0,           0,        2838,         110,           7,         179,         577,           4,           0,           0,           0,           0,         139,         827,         458,           0,         397,           0,         415,           0,           0,         299,           0,          38,           8,          98,         102,           0,           3,           3,         176,         530,           0,         295,           0,           0,           0,           8,           0,          37,           3,           0,           0,           0
F59,           0,          12,          20,        1250,      223938,        3609,         925,         343,       35968,        1227,       13025,         581,       14946,        1810,        1837,           0,       19271,       28477,         180,       10170,       20040,           9,        2242,           0,        5424,           0,           0,           2,        2141,        4054,        6173,       13994,        2192,        1926,       29742,           0,          25,        2790,        1862,          82,           0,         447,        4028,         538,          43,        1553,      124116,       19068,        2199,        3924
F61,        1394,        1573,        1485,        1434,       10149,        2190,        2978,        2228,        5911,      142677,       68922,        3294,       18054,        3848,          36,           0,       26668,       18817,         450,         234,       10909,       21106,        4035,          60,        7943,         654,        1117,         418,        5254,        5790,        1854,       53044,       11474,        1368,         266,         835,        1053,       37767,       73260,        4921,        1944,        5118,        2073,        7516,           0,        2284,        8146,        2358,        5123,        1689
F62,          39,           9,         321,          13,        1034,           0,         491,        2237,        1200,        3109,          23,         383,         767,         169,           0,          78,         315,         734,           0,         434,         439,          74,           0,           0,        1061,           0,         371,         112,        1869,        1041,         582,        4259,         227,          29,        1711,           0,           3,           0,           0,         771,          49,           1,        4234,        3150,        1102,          97,        5327,           0,           0,           7
F66,        1260,           9,          14,           0,         140,         307,           0,         387,        3700,           0,           0,           1,           5,          11,           0,        1581,          45,           0,           0,          55,           0,           0,           0,          98,           0,           0,           0,           0,           0,         274,           2,       19789,           0,           3,         780,          21,          89,           4,          19,           0,           0,           0,         634,          77,           0,       12189,       27852,           0,           0,          77
F77,           0,          80,           0,           0,        8658,         639,          62,         108,           0,           0,           0,        3933,          32,         780,           0,         108,           0,           0,           0,           0,         210,           0,         974,           0,        1481,          67,          61,           0,         367,         302,           0,          26,           0,         831,         464,         465,           0,        9871,          64,           0,           0,           0,           0,           0,          77,           0,         756,           0,        2248,          10
F79,           0,         695,         493,          52,           0,          52,         815,         301,           0,           0,          24,          48,          76,          10,           0,         246,        1648,           0,          25,           0,           0,          22,        4352,           0,          41,           9,         246,        2974,           0,           0,           0,         175,           0,         293,           0,         850,           3,           0,         605,           0,           7,        2101,          80,         137,           0,           6,          11,           0,           0,          29
F80,           0,           0,           0,           0,           0,           0,           0,           0,       66942,           0,        4043,           0,           0,           0,           0,           0,           0,           0,           0,        6126,      336628,           0,           0,           0,         969,           0,           0,           0,         136,           0,           0,           0,           0,           0,       80991,           0,           0,           0,       29829,           0,           0,           0,           0,           0,           0,           7,           0,           0,           0,           0
F81,           0,           0,           1,           0,           0,           0,       21960,        3775,        1690,        5040,           2,           0,           0,           0,           0,           0,           0,           0,          35,           0,         213,           0,           0,           0,           0,           0,           0,           0,        1202,        1883,           0,       39303,       10654,           0,           0,         346,           0,           0,        3303,           0,           0,           0,       26530,           0,           0,           0,           0,           0,           0,       22747
F85,          23,           0,          48,           0,           0,           0,           0,           0,           0,           0,        7634,           0,        1703,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,          10,           0,          23,           0,          47,           0,          16,           0,        2883,           0,          22,           0,           0,           0,           0,           0,           0,           0,           0,          18,           0,           0,        6054,         741,           0,        1054,           0
F87,        7152,           0,           0,           0,           0,           0,         274,           0,           0,        3235,       18234,           0,           0,        2456,           0,           0,           0,       51539,         884,        3348,       12288,         265,           0,           0,         280,           0,           0,           0,           1,        1605,           0,        7401,        1380,           0,           0,           0,           0,        5662,        1313,       19664,           0,           0,           0,           0,           0,       16053,           0,           0,         141,           0
F89,        7413,           9,        1903,        6041,       19873,        5701,       19065,         827,        7914,        7956,       31443,        6076,       14568,         612,       19953,         157,       31954,        2441,        1565,       40471,        3326,        9417,        8612,           0,        1679,        3585,         558,        7041,         989,       60092,        2716,       22410,        8555,        6132,       23069,         170,        2646,      118601,        1528,        5612,         547,        3616,       70113,        3609,           0,         899,       10378,           0,       48437,          46
F90,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,          23,           0,           0,           0,           0,           0,           0,           8,           0,           1,          46,           0,           0,           0
F91,           0,           0,           0,           0,           0,        1693,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       56573,           0,           0,           0,           0,           0,           0,        5202,           0,       22557,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
F92,           0,       33525,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,      222886,           0,           0,           0,        5582,           0,           0,           0,      123158,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
F93,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
F94,           0,           0,           0,           0,           0,           0,       63615,           0,        1746,           0,           0,           0,           0,           0,           0,           0,        1021,           0,           0,      164354,           0,           0,           0,           0,           0,           0,           0,           0,           0,      190095,           0,      486280,           0,           0,           0,           0,           0,           0,        5611,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
G01,           2,        4417,         139,           3,        1884,           0,         164,           0,           0,         813,       51897,           5,         129,           0,           0,           0,           0,         182,           0,        1157,        3358,         356,         105,           0,           1,           8,          91,           0,           0,           0,           0,          23,           8,           0,           0,          19,           0,         360,        6593,         216,           0,           0,           0,           0,           0,          64,         172,         246,         970,           0
G03,           0,       14395,           0,           0,           0,           0,           1,           0,           0,           0,           0,        1625,           0,           0,          93,           0,           0,           0,           0,          24,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,          13,        2320,           5,           0,           0,           0,           0,           0,         847,           0,           0,           0,           0,           0,           0,           0,           0,           0
G04,         317,         659,        4039,        1751,       35296,       28317,        3238,         375,        2602,        2462,        1474,         678,        5267,       31791,         842,        1568,        3535,         782,         308,        2619,       13691,        1470,        1940,         438,        5508,         715,         116,        1053,         206,        2383,         338,       17072,        7871,          92,       12498,        3493,        1734,        3756,          58,        1772,         298,        2045,       16762,        1514,         638,        6400,        7762,         131,        4048,         268
G05,         149,           9,          43,          51,        3261,        3881,         544,         294,         520,        4842,         796,         847,         909,         401,           8,        3434,         144,         429,          39,        3711,         358,        4145,         549,          13,        1442,         147,         965,         204,          22,        2082,         320,        1642,        2770,          19,        1632,        1341,        1321,         124,          13,         251,          76,         594,        3744,          54,          75,         177,        1452,         107,         220,          37
G12,           0,        5830,           0,           0,           0,           0,           0,           0,           0,           0,       23057,           0,           0,           0,           0,           0,           0,           0,         182,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        7723,           0,           0,        1162,           0,           0,           0,           0,          93,           0,         868,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
G16,        4162,         501,        3096,        1954,       35204,        7299,         807,          54,       10112,        2200,         878,         639,       11917,       21323,        1793,        2318,        1640,        2811,        1959,        2342,         791,        9205,        3430,        1441,        3859,         358,       11335,         564,           3,        9937,        2941,        1943,       10437,        1089,        8446,        8622,        1978,      626668,         405,        2850,         264,         934,        8605,        1320,         419,       10638,        3754,        1939,        2561,        1061
G18,       60161,        8458,       30287,       21791,      425575,       44513,       10457,        7071,      182298,       72472,       24833,       16871,      166481,       91557,       41987,       45033,       57736,       64770,       12010,       34447,       38657,       93641,       65688,       21077,       28246,        8667,       20640,       11759,        1018,       73520,       33562,      105866,       77657,       14304,      133122,       39646,       40825,      107878,        9085,       59115,       10198,       55307,      196150,       46559,       12290,       76025,      126287,       26514,       85153,        5797
G21,        6109,        1040,        1000,        3826,        3267,        1589,        3873,         620,        3427,        5195,         570,         976,        2517,        5962,         286,         904,       16925,        1745,         333,        2945,         799,         887,        2167,        2500,        3415,        1215,        3035,          88,         185,        1269,        1791,        1447,        4401,         458,        2507,        2412,        1991,       11343,        1325,        7206,        1125,        2005,        8348,          12,         341,        4146,       14893,       13545,        4726,         445
G22,        2308,         331,           0,         142,       11180,        1459,        2010,         609,        2210,        2521,         563,         329,        7520,        2031,         399,         711,        2751,           0,        2503,         715,        1853,        7223,        2023,         205,        5699,          22,         545,         988,         963,        1377,         562,       20100,        1637,         455,        4708,        2790,         811,          43,        2432,        3008,         702,         690,        9412,        3477,         131,        3318,        3436,         802,        2646,           0
G23,        2213,        6241,        4478,        1279,       23226,        2264,        1516,        1609,        8760,        1107,        9020,        2400,       10157,        1456,         804,        2431,        1516,         893,         712,        3429,       18690,        2337,        2687,         931,        2218,        2177,        1313,         963,        1084,        1379,        1257,        6487,       22383,         376,       14521,        8138,        3373,        8223,         542,        5417,         273,         934,       17485,           0,         466,       10337,        4163,        2475,        1183,         425
G25,        1332,        1972,        1022,         698,        4457,        2118,         551,         862,        3595,         314,        4169,         958,        1235,         839,         498,         473,        2316,         710,         491,        5902,        3503,        4219,        2601,         307,        1151,         399,         406,         302,        1374,        2308,        1600,        8499,        1126,         695,        2661,         556,        2074,        2236,        1565,        3586,         225,         458,        7896,           1,         965,        3091,        1300,        1052,        3591,         497
G26,         208,         417,         606,         306,        2976,         259,         815,         280,        5096,         122,         672,         135,        1349,         445,         145,         157,         810,        2026,          10,         146,         900,        2654,         684,          51,         655,         219,         131,         559,          51,         849,         604,        5491,         195,          21,         618,         613,          86,        1404,          73,        1051,          82,           5,        5440,           0,          19,         812,         327,         558,          96,          24
G29,         334,          55,         406,         137,         426,         693,         233,         137,         431,         372,         372,         720,         109,         115,          19,         641,         177,         321,          64,         374,         582,        1525,        1212,         282,         127,         218,         130,          99,           5,         842,         101,         947,         949,          43,         903,         252,         100,        2994,          56,          36,         116,          51,         780,           0,         143,         101,         269,         339,         152,          63
G31,         105,          36,         170,         127,        2959,         122,          25,         580,        3416,         253,       13514,           5,         256,        2356,           3,         100,           9,           0,           3,         503,         221,         104,          36,        3458,        1954,          23,          33,           0,        2283,          37,        2805,        2319,         610,           0,        4100,          68,        8894,         587,          30,         174,          58,        6082,        1745,       26362,        1264,        1788,         129,         113,           0,          25
G32,        3172,        1560,        2075,        2680,       11990,        3521,        2109,        2688,        8513,         665,        3827,        1464,        5990,        1009,         268,        1757,        1050,        5615,         458,        2945,        3398,        5447,        3382,        2755,        4611,         405,         182,         539,         406,        3076,         755,       16395,        4109,         370,        2990,        3898,        2533,        2597,        1429,        5860,         966,         471,       11124,         706,         638,        5255,        3664,        1858,        1682,         634
G36,       24165,         321,         162,        3049,      113421,        1378,        3336,         174,        1292,       21262,        2676,         422,       13183,       12390,       11543,        5857,        7500,       10981,         226,        1533,        8868,        4020,        4484,        4829,       12527,         226,        5315,         250,          41,       14152,        3868,       30387,       15587,         317,       27800,        6920,       11653,       24427,         834,       23698,        1065,         299,       33393,        5632,         153,       25237,        4779,        1585,       12149,         191
G38,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
G44,       63639,       16293,       77497,       38501,      466380,       15694,       31582,       16034,      174616,       77486,       16294,        3723,       66223,       27938,       37592,       25169,       46598,       38029,        4077,       51862,       98052,       60146,       46292,       23936,       65615,        2621,       11774,       13528,        9766,       36139,       22704,        7795,        6384,        4167,       41887,       25257,        3651,       56220,        7487,       37635,        5963,       85302,      269402,       14879,        6904,         493,       27813,       15133,       19126,       10016
G45,           0,         314,           0,           0,           0,           0,           0,           0,       69583,           0,           0,           0,        1078,         593,           0,        1628,           0,         111,         699,        3449,          77,         787,           0,           0,           0,           0,           0,           0,        2273,        9115,           0,       31491,         269,           0,        1754,       10304,           0,        5513,           0,           0,           0,           0,         232,           0,           0,           0,         200,         372,           0,           0
G50,           0,          35,           1,         163,         606,          15,          42,         396,          38,           1,        6743,         378,           1,          94,          64,          14,         278,           0,           0,         835,         142,           0,         150,          56,         182,          46,           0,           0,          97,           3,          30,        1011,          27,          87,         351,          51,         593,          10,          16,           0,           0,          61,           0,          12,         111,         209,          36,           9,         932,        1726
G52,           6,         221,         147,          38,           0,         266,           0,          39,         142,           0,        5148,         389,         262,         440,           0,           5,         251,          21,          10,          11,          49,         838,           0,          10,          57,         245,         157,          40,          19,          41,          40,         399,         245,          12,          82,         294,         228,          15,          55,          22,         641,          43,         350,           0,          34,        1179,         168,         107,           0,          35
G54,        2104,         214,        2527,        1231,        3616,        1401,        4141,         144,        5314,        3010,        2764,        1479,        7710,        6448,         643,        4493,        2943,        3220,         688,        1690,        3947,         396,        2063,        1936,        1955,         794,        2274,         621,          72,        5641,        1304,         308,        8068,        2226,        2036,        7727,        1876,       24178,        1215,        1832,         921,         461,        5002,        1636,         299,        1658,        1713,         980,        3607,         178
G55,        1362,        3589,        1970,        2215,       17732,        4653,         186,         225,        6349,        3303,         383,        3081,        1747,        2566,        1834,        2403,        1700,        1382,         990,        2629,        4216,         817,        3657,        2363,        6215,         902,        1723,        1061,         793,         658,         983,        1570,        2403,         383,        1685,        2714,        2819,        6836,        1051,        4531,        2010,        7997,        6567,          58,         331,        2265,       10282,        1012,        1403,        7989
G56,         482,         413,          45,          76,       12601,         145,           0,          86,         598,         325,         487,         909,         295,         173,          95,           0,         830,          83,          43,         503,         305,           0,         686,        1047,        6578,         671,           0,         631,           0,         266,         235,       13204,        1472,           0,         175,          87,         778,         132,           0,        1314,         139,          73,           0,           0,         135,        1635,         270,         100,        1016,          15
G59,         466,         991,        1083,         178,       16831,        1906,         407,         482,      148020,        2877,       22615,         460,        7858,        3053,        1914,         223,        2242,       12377,         687,        7485,        7523,        2566,       10894,         881,        3608,         436,         344,        4488,         613,       19358,         434,        9918,        1466,         261,        3916,        1513,         627,        5478,         512,        1138,         239,          69,        4739,          77,         546,        1240,        9613,        1755,       20317,         162
G61,         302,         148,         771,        1316,       17706,        4073,        8276,        6565,        8886,        3069,        2250,         848,        3851,         690,         117,         518,        3523,        4632,         294,        2064,        2752,       10045,        1867,         721,        4838,         174,         910,        2531,         110,        3722,         912,        6782,        3209,         229,         878,        2679,         858,         981,         452,        1512,         673,         551,        1850,          44,         461,        2569,       25238,        1338,        1341,         119
G62,        1426,         830,        5262,        2571,       30868,        4646,        6662,        1591,       10113,        5766,         563,        2968,       11238,        6076,        1001,        1571,        4675,        1924,         796,        5425,        3743,        6128,        2629,        1798,        9298,        1458,        1482,        2602,         513,        7049,        3126,       13204,        9924,         181,        4039,        2256,        5433,       10630,          91,        8128,        1150,        1651,       18266,          33,        1334,        8131,        8183,        1804,        2292,        1493
G66,         728,         838,        1422,         543,        6309,         912,         327,         467,        8546,         753,         659,        1240,        3074,         497,         339,         290,        1045,         812,        1566,        1113,         786,         416,        2089,        1016,        1261,         463,        1071,         514,         708,        1557,         435,        8285,        1547,         244,        1830,        1032,        2539,         802,         140,         851,         110,         193,        7659,           0,         267,        2225,       17208,         612,         627,          93
G77,           0,         590,          27,           0,         926,        8009,         156,          99,           0,           0,           0,         203,         633,         303,          25,          52,           0,           0,           0,          16,         117,          36,         290,           0,         187,          16,         248,           0,          91,          66,          67,          34,           0,         208,         199,         377,           0,         512,          85,           0,          23,           0,           0,           0,          90,           0,          52,          13,         265,           0
G79,        3643,        1552,        3549,        1772,        3885,        1465,         451,         683,        3212,         420,        3241,        1724,        5524,        1394,         146,        9667,        2696,       14165,        2058,        2898,        1658,       11090,        2911,        2961,        2620,         439,         789,         705,         183,        1689,         304,       35588,        1436,         537,        6234,        2767,        3128,        5762,        1999,        1533,        1388,          57,       25540,        1523,         467,        2695,       10071,         763,         427,         246
G80,           0,           0,           0,         106,         839,           0,           0,           0,           0,           0,           0,         238,         648,          14,           0,           0,           0,           0,           0,         742,        2075,           0,          95,           0,         132,           0,           0,           0,         110,          64,         636,         148,           5,           0,           0,           0,         127,           0,         304,           0,           0,           4,           0,           0,           8,         954,           0,          63,         240,           0
G81,           0,           0,          15,           0,        1258,          78,        3868,        1048,          17,          18,           0,          85,         470,         258,          60,           0,         306,         276,         499,         288,          64,         804,          76,           0,         100,           0,           0,          60,          20,        1081,           0,         995,         276,           0,         286,           0,         138,         114,         778,         620,           0,          83,        1666,           0,         139,         254,         849,         464,         267,          98
G85,          63,           0,          43,          13,         238,           0,           0,           0,          36,          36,         145,           0,          34,           9,           0,           0,           0,          71,           0,          11,          53,           3,           0,          14,          27,           3,           6,          25,           0,           2,           0,           0,          18,           9,           0,           0,        4959,           0,           0,           9,          39,         187,         727,           0,           0,        1749,          13,           1,         120,           0
G87,        8260,           0,           0,           0,           0,           0,           0,           0,        1077,        5902,        5440,           0,           0,           0,           0,           0,           0,        5229,        2169,         313,         639,           0,           0,           0,           0,           0,           0,           0,           1,         157,           0,         246,         773,           0,           0,           0,           0,           0,           4,        6998,           0,           0,           0,           0,           0,        2112,           0,           0,           0,           0
G89,       12476,        8073,       42642,        4466,       23339,        3855,       13777,        1360,       20266,       14760,      111324,        1654,       13488,        6947,        4939,        2037,       10742,       19207,        1689,       22381,        3009,        7717,       21529,        4402,        2564,        1484,        3099,        4159,        9213,       10924,         517,       34018,       11249,        3985,       30751,        3244,        1594,        2977,        1355,       20477,        5271,        2706,       16794,        7193,        3272,        7384,        2770,        2357,       23119,          92
G90,        1041,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,         300,           0,           0,           0,           0,           0,           0,           0,           0,           0,          23,           0,           0,           0,           0,           0,           0,         150,           0,           0,           0,           0,           0,         438,           0,         592,        6194,           0,           0,           0,           0,           0,         616,          57,         550,         347,           0,           0,          18
G91,           0,           0,           0,           0,           0,           3,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,         178,           0,           0,           0,           0,           0,           0,        1798,           1,           0,           0,           0,           0,           0,           0,         204,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
G92,           0,         698,        4775,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        1419,           0,           0,           0,       16269,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
G93,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
G94,           0,           0,           0,           0,           0,           0,       22234,         791,        5398,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       12050,           0,           0,           0,           0,           0,           0,           0,           0,           0,       56000,           0,      695309,           0,           0,           0,           0,           0,           0,        8085,           0,           0,           0,           0,           0,         194,           0,           0,           0,           0,           0
I89,      280179,      449430,      186950,      130387,     2457151,      225113,      724969,      227957,      740022,      280715,      276544,       98592,     1260329,      354703,      132253,       40908,      434180,      733312,      185569,      471998,     1420544,      637860,      294517,      115741,      394592,      113806,      127914,      115597,      297469,     1385961,      103474,     3246942,      273409,       74478,      854526,      170574,      804793,     1074788,      305880,      241042,      139731,      202680,      615624,      150072,      113052,      478499,      434223,      172304,      498978,       70889
I91,           0,           0,           0,           0,           0,         992,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        9828,           0,           0,           0,           0,           0,           0,       12810,           9,        8794,           0,           0,           0,           0,           0,         407,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
I92,           0,       22684,        6348,           0,       36400,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,      258158,           0,           0,           0,       90660,           0,           0,           0,      156898,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
I93,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,         136,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
I94,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,      256604,           0,           0,           0,           0,           0,           0,          14,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
K01,           2,        3086,         139,           3,        1884,           0,         164,           0,           0,         813,        4108,           5,         129,           0,           0,           0,           0,           0,           0,         131,        2250,         356,         105,           0,           1,           8,          91,           0,           0,           0,           0,          23,           8,           0,           0,          19,           0,         360,          14,         216,           0,           0,           0,           0,           0,          64,          10,         246,         970,           0
K03,           0,       14395,           0,           0,           0,           0,           1,           0,           0,           0,           0,        1625,           0,           0,          93,           0,           0,           0,           0,          24,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,          13,        2265,           5,           0,           0,           0,           0,           0,         516,           0,           0,           0,           0,           0,           0,           0,           0,           0
K04,         317,         659,        4012,        1751,       31784,        7047,        3238,         360,        2406,        2462,        1474,         678,        5267,        8449,         842,        1568,        3535,         782,         308,        2619,        9999,        1470,        1940,         438,        4258,         715,         116,        1053,         206,        2279,         338,       17062,        7869,          92,        2808,        3484,        1734,        3107,          58,        1695,         298,        1687,       16653,        1514,         638,        6369,        5132,         131,        3921,         268
K05,         149,           9,          43,          51,        3261,        1726,         544,         294,         520,        4842,         796,         847,         909,         400,           8,        3434,         144,         429,          39,        3711,         358,        4145,         549,          13,        1442,         147,         965,         204,          22,        2082,         320,        1642,        2770,          19,        1632,        1341,        1321,         124,          13,         251,          76,         594,        3744,          54,          75,         177,        1452,         107,         220,          37
K12,           0,        5830,           0,           0,           0,           0,           0,           0,           0,           0,       23057,           0,           0,           0,           0,           0,           0,           0,         182,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        1855,           0,           0,        1162,           0,           0,           0,           0,          93,           0,         868,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
K16,        4162,         501,        3096,        1195,       17602,        6593,         807,          54,       10112,        1994,         878,         636,        7962,       21204,        1689,        2107,        1527,        2763,        1959,        2274,         791,        9205,        3430,        1441,        3526,         358,       10598,         564,           3,        2452,        2941,           0,        9653,        1089,        8050,        8223,        1978,      624668,         405,        2753,         264,         934,        8602,        1120,         415,       10273,        3734,        1939,        2155,        1061
K18,       53841,        8399,       28985,       21006,      211033,       44423,       10457,        7061,      172450,       70873,       24833,       16648,      164448,       84853,       41934,       44969,       47473,       62200,       11837,       33838,       23432,       93042,       63840,       20861,       26543,        8576,       20366,       11577,        1018,       70139,       30986,       96950,       75432,       14304,      119500,       36282,       40825,      105322,        9085,       49347,       10152,       49074,      191100,       45823,       10669,       74093,        2714,       25509,       85143,        5628
K21,        6109,        1040,         915,        3796,        3267,        1510,        3873,         607,        3427,        5195,         570,         974,        2517,        5962,         286,         904,       16925,        1745,         333,        2945,         799,         887,        2158,        2500,        3415,        1215,        2965,          88,         185,        1269,        1716,        1447,        4401,         458,        2507,        2412,        1990,       11343,        1325,        5092,        1125,        2005,        8346,          12,         341,        4146,        8906,       13545,        4724,         445
K22,        2308,         331,           0,         142,       11180,        1459,        2010,         609,        2210,        2521,         563,         329,        7520,        2031,         399,         711,        2751,           0,        2503,         715,        1853,        7223,        2023,         205,        5545,          22,         545,         988,         963,        1377,         562,       20100,        1637,         455,        4708,        2790,         811,          43,        2432,        3008,         702,         690,        9412,        3477,         131,        3318,        3436,         802,        2522,           0
K23,        2213,        6241,        4478,        1279,       23226,        2151,        1516,        1609,           0,        1107,        9020,        2400,       10157,        1456,         804,        2431,        1516,         893,         712,        3427,       18690,        2337,        2687,         931,        2218,        2177,        1313,         963,        1084,        1379,        1257,        6487,       21673,         376,       14521,        7764,        2785,        8223,         542,        2140,         273,         934,       17485,           0,         466,       10337,        4163,        2475,        1183,         425
K25,        1332,        1972,        1022,         698,        4457,        2109,         551,         862,        3595,         314,        4169,         958,        1235,         839,         498,         473,        2316,         710,         491,        5902,        3288,        4219,        2601,         307,        1151,         399,         406,         302,        1374,        2308,        1600,        8499,        1126,         695,        2661,         556,        2074,        2236,        1565,        3586,         225,         458,        7896,           1,         472,        3091,        1300,        1052,        3591,         497
K26,         208,         417,         606,         306,        2976,         241,         815,         280,        5096,         122,         672,         135,        1349,         445,         145,         157,         810,        2026,          10,         146,         899,        2654,         684,          51,         655,         219,         131,         559,          51,         849,         604,        5491,         195,          21,         618,         613,          86,        1404,          73,        1051,          82,           5,        5440,           0,          19,         812,         327,         558,          96,          24
K29,         334,          55,         406,         137,         426,         693,         233,         137,         431,         372,         372,         720,         109,         115,          19,         641,         177,         321,          64,         374,         582,        1525,        1212,         282,         127,         218,         130,          99,           5,         842,         101,         947,         949,          43,         903,         252,         100,        2994,          56,          36,         116,          51,         780,           0,         143,         101,         269,         339,         152,          63
K31,         105,          36,         170,         127,           0,         122,          25,         446,        2521,         253,        3300,           5,         256,         115,           3,          31,           9,           0,           3,         503,         221,         104,          36,        3439,        1517,          23,          33,           0,         646,          37,        2805,        2005,         495,           0,          32,          68,        7626,         587,          30,         174,          58,          25,        1745,       26362,        1058,        1739,         129,         113,           0,          25
K32,        2805,        1560,        2075,        2680,       11990,        3506,        2109,        2682,        8513,         665,        3827,        1464,        5662,        1009,         268,        1757,        1050,        5615,         458,        2945,        3324,        5447,        3382,        2755,        4118,         405,         182,         539,         406,        3076,         755,       12765,        4109,         370,        2990,        3898,        2533,        2597,         814,        5860,         966,         471,       11080,         706,         638,        5252,        3664,        1858,        1682,         634
K36,       23825,         321,         162,        3049,       56227,        1082,        3336,         174,        1292,       21262,        2676,         422,       13183,       11270,       11543,        5857,        7500,       10981,         226,        1533,        8868,        4020,        4484,        4710,       12527,         226,        5315,         250,          41,       14152,        3868,       23438,       15115,         317,       27798,        6920,       11649,       24425,         401,       23431,        1065,         299,       33393,        5632,         153,       25237,        4779,        1585,       12149,         191
K38,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
K44,       10205,        8760,        8784,       22864,       79800,        3997,        5438,        2567,       14225,        7681,        1796,        3723,       24563,       16470,       13369,       13191,       12148,           0,         608,         110,        2231,        9197,       15232,        8214,       20425,        2621,        5407,        9584,        1727,         148,       11725,        7499,        5100,        2831,       23973,       12230,         975,       28098,        1771,       15198,        5865,        7379,       29666,        4785,        4601,         493,       23225,       15133,       18697,        8390
K45,           0,         210,           0,           0,           0,           0,           0,           0,        7194,           0,           0,           0,        1048,         593,           0,        1628,           0,         111,         699,        3059,          77,         787,           0,           0,           0,           0,           0,           0,         761,        2000,           0,       31491,         269,           0,        1754,        7823,           0,        5513,           0,           0,           0,           0,         232,           0,           0,           0,         200,         372,           0,           0
K50,           0,          35,           1,         163,         606,          15,          42,         396,          38,           1,        3018,         378,           1,          94,          64,          14,         278,           0,           0,         835,         142,           0,         150,          56,         182,          46,           0,           0,          97,           3,          28,        1011,          27,          87,         351,          51,         226,          10,          16,           0,           0,          61,           0,          12,         111,         209,          36,           9,         932,        1726
K52,           6,         221,         147,          38,           0,         266,           0,          39,         142,           0,        5148,         389,         262,         440,           0,           5,         251,          21,          10,          11,          49,         838,           0,          10,          57,         245,         157,          40,          19,          41,          40,         399,         245,          12,          82,         294,         228,          15,          55,          22,         641,          43,         350,           0,          34,        1179,         168,         107,           0,          35
K54,        2104,         214,        2527,        1231,        3616,         423,         194,         144,        4806,        3008,        2764,        1479,        4126,        6448,         643,        4493,        2943,        3220,         688,        1632,         284,         396,        2061,        1936,        1955,         794,        2274,         621,          22,        5641,        1304,         307,        8068,        2226,        2036,        7727,        1876,        1276,         151,        1832,         921,         461,        5002,        1636,         299,        1658,        1713,         980,        2938,         160
K55,        1362,        3243,        1970,        1671,        7151,        3952,         186,         225,        5241,        2683,         313,        1641,        1166,        2090,         177,        1471,        1133,        1382,         509,        2629,         489,         703,         889,        2363,        1470,         797,         959,         669,         631,         565,         961,        1570,        1511,         377,        1674,        1268,        2098,        3887,         164,        2566,         872,        1505,        5013,          36,         331,        1470,        5671,         345,        1113,        2637
K56,         482,         413,          45,          30,       12601,         144,           0,          86,         308,         325,         487,         903,         295,         172,          95,           0,         830,          83,          43,         503,         305,           0,         343,        1047,         996,         671,           0,         631,           0,         266,         232,       13204,        1468,           0,         175,          87,         777,         132,           0,        1314,         139,          73,           0,           0,         135,        1634,         270,         100,         908,          15
K59,         466,         991,        1083,         178,        8293,         523,         156,         482,        3835,        2144,        1223,         460,        1955,         756,         444,         223,        2128,       12377,         568,        3178,         755,        2566,        6064,         881,        3258,         433,         344,         204,         413,         574,         377,        1397,         783,         246,        1836,         336,         474,        3674,          72,         450,         239,          69,        2971,          77,         445,        1240,        3605,        1754,        5495,         162
K61,         253,         148,         427,        1194,        1274,         777,           7,         654,        1766,        5173,        1131,         792,        1577,         647,         117,         518,        3317,        4632,         238,        2047,         758,         957,         889,         719,        1988,         174,         910,        2531,          98,        3720,         714,        4786,        1571,         229,         876,        2138,         858,         969,         203,         801,         599,         172,        1089,          44,         361,        2098,        2721,        1338,         873,         119
K62,        1426,         830,        5096,        2571,       30868,        4646,        6662,        1591,       10113,        5766,         563,        2968,       10479,        5517,        1001,        1571,        4594,        1924,         796,        5425,        3743,        6128,        2629,        1798,        9298,        1458,        1482,        2602,         513,        7049,        3126,       13204,        9924,         163,        4039,        2256,        5433,       10630,          91,        8128,        1150,        1651,       17992,          33,        1334,        8130,        7918,        1804,        2292,        1493
K66,         728,         838,        1422,         543,        6309,         912,         327,         467,        8546,         753,         659,        1240,        2764,         497,         339,         290,        1045,         812,        1566,        1113,         786,         416,        2089,        1016,        1261,         463,        1071,         514,         708,        1557,         434,        8285,        1547,         244,        1830,        1032,        2411,         802,         140,         851,         110,         193,        7659,           0,         267,        2225,       17207,         612,         627,          93
K77,           0,         590,          27,           0,         926,          49,         156,          99,           0,           0,           0,         203,         633,         303,          25,          52,           0,           0,           0,          16,         117,          36,         290,           0,         187,          16,         248,           0,          91,          66,          67,          34,           0,         208,         199,         377,           0,         512,          85,           0,          23,           0,           0,           0,          90,           0,          52,          13,         224,           0
K79,        3643,        1552,        3549,        1772,        3885,        1458,         451,         679,        3212,         420,        2800,        1724,        5524,        1394,         146,        9667,        2696,       14165,        2058,        2898,        1658,       11090,        2858,        2961,        2620,         439,         583,         705,         183,        1689,         304,       35588,        1436,         537,        6234,        2767,        3128,        5762,        1999,        1533,        1388,          57,       25540,        1523,         467,        2695,       10071,         763,         427,         246
K80,           0,           0,           0,         106,         839,           0,           0,           0,           0,           0,           0,         238,         648,          14,           0,           0,           0,           0,           0,         742,        2075,           0,          95,           0,         132,           0,           0,           0,         110,          64,         341,         148,           5,           0,           0,           0,         127,           0,         251,           0,           0,           4,           0,           0,           8,         954,           0,          63,         240,           0
K81,           0,           0,          15,           0,        1258,          78,        3368,        1048,          17,          18,           0,          85,         470,         258,          60,           0,         306,         276,         466,         288,          64,         804,          76,           0,         100,           0,           0,          60,          20,        1081,           0,         986,         276,           0,         286,           0,         138,         114,          58,         620,           0,          83,         750,           0,         139,         254,         849,         464,         267,          98
K85,          63,           0,          43,          13,         238,           0,           0,           0,          36,          36,         145,           0,          25,           9,           0,           0,           0,          71,           0,          11,          53,           3,           0,          14,          27,           3,           6,          25,           0,           2,           0,           0,          18,           9,           0,           0,        4959,           0,           0,           9,          39,         187,         198,           0,           0,        1749,          13,           1,         110,           0
K87,        6376,           0,           0,           0,           0,           0,           0,           0,         319,        2904,         635,           0,           0,           0,           0,           0,           0,         952,        2169,         313,         592,           0,           0,           0,           0,           0,           0,           0,           1,           0,           0,         144,         773,           0,           0,           0,           0,           0,           4,         854,           0,           0,           0,           0,           0,        1368,           0,           0,           0,           0
K89,       12476,        8073,        4366,        3747,       23315,           0,       13777,        1325,       20266,       14760,        7701,        1654,       13465,        6947,        4935,        2037,       10542,       15207,         688,       21461,        2809,        7614,       21390,         667,        2564,        1484,        3099,         649,         417,       10924,         501,       33799,       11110,        3971,       30751,        3244,        1369,        2977,         326,       20002,        5271,        2706,        5309,        7193,        3271,        7384,        2770,        2353,       20491,          92
K90,        1041,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,         300,           0,           0,           0,           0,           0,           0,           0,           0,           0,          23,           0,           0,           0,           0,           0,           0,         150,           0,           0,           0,           0,           0,         438,           0,         585,        6194,           0,           0,           0,           0,           0,         616,          57,         550,         347,           0,           0,          18
K91,           0,           0,           0,           0,           0,           3,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,         178,           0,           0,           0,           0,           0,           0,        1798,           1,           0,           0,           0,           0,           0,           0,         204,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
K92,           0,         698,        4775,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        1318,           0,           0,           0,       13427,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
K93,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
K94,           0,           0,           0,           0,           0,           0,       20789,         791,        5398,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       12049,           0,           0,           0,           0,           0,           0,           0,           0,           0,       56000,           0,      178381,           0,           0,           0,           0,           0,           0,        8085,           0,           0,           0,           0,           0,         194,           0,           0,           0,           0,           0
M01,         790,           0,           0,        1885,           0,           0,           0,           0,       34296,           0,           0,           0,           0,           0,           0,           0,        1455,           0,         168,           0,        3453,           0,       12251,           0,         278,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        9433,           0,           0,           0,           0,           0,         516,           0,           0,           0
M05,           0,        4900,           0,        1316,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,         393,           0,           0,           0,           0,           0,         270,           0,         937,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
M12,           0,         404,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,      579342,           0,           0,           0,           0,        1415,           0,           0,           0,           0,      128967,       29359,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        2402,           0,           0,           0,           0,           0,           0,           0,           0
M18,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,          65,           0,        2129,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
M21,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        1735,           0,           0,           0,       10520,         160,           0,           0,        4681,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,         354,           0
M23,           0,         135,           0,           0,        2719,           0,           0,           0,           0,           0,           0,           0,           0,           0,         302,           0,           0,          19,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        1186,           0,         107,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        1057,         301,           0
M25,           0,           0,           0,           0,           0,           0,           0,           0,         131,           0,        3926,           0,           0,           0,           0,         126,           0,           0,           0,           0,           0,        6215,           0,           0,           0,           0,           0,           0,        2396,           0,        2710,           0,           0,           0,           0,           0,           0,         130,           0,           0,         497,           0,           0,         116,           0,           0,           0,           0,        1057,           0
M29,           0,         135,           0,           0,        5127,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        1291,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,         264,           0,           0,           0,         134,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,          10
M30,           0,         674,           0,           0,           0,           0,       66046,           0,           0,           0,           0,           0,           0,      495740,           0,           0,           0,           0,       55366,           0,           0,       12122,       24391,           0,           0,           0,      121139,           0,           0,           0,           0,           0,           0,         213,     1034624,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
M32,           0,       53240,       35967,           0,       12583,           0,         100,           0,       83499,           0,           0,           0,        7423,           0,       18030,       14237,           0,        2462,        5566,        7531,           0,        2826,        9960,           0,         125,        6955,       98419,           0,         626,        4482,           0,           0,        1622,           0,           0,       50144,           0,           0,           0,           0,           0,           0,      324283,           0,           0,           0,        6132,           0,      326161,          88
M38,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        4892,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
M44,           0,           0,           0,           0,         845,           0,           0,           0,         667,           0,           0,       65018,       10977,           0,           0,           0,           0,           0,       19726,           0,           0,       91146,        2491,           0,       34694,           0,           0,           0,           0,           0,           0,           0,           0,           0,      123106,           0,           0,           0,           0,           0,           0,           0,          13,           0,           0,           0,           0,           0,           0,           0
M50,           0,           0,           0,           0,         803,           0,           0,           0,           0,       36277,           0,           0,        1105,           0,       24320,       14415,           0,           0,           0,           0,      164851,       23573,        2158,           0,       23489,           0,           0,           0,           0,           0,         160,       51977,           0,           0,       40887,        9940,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,         114
M52,        1759,        1443,           0,           0,           0,         157,           0,           0,        3390,           0,           0,           0,       42899,           0,        2684,        2793,           0,           0,           0,           0,           0,           0,        6604,           0,           0,         474,           0,         490,         247,           0,         489,           0,           0,         144,           0,        2564,           0,           0,        1550,           0,           0,        7034,           0,           0,           0,           0,           0,           0,           0,           0
M54,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,         378,           0,           0,           0,         633,           0,           0,           0,           0,          94,           0,           0,           0,         173,           0,           0,        6090,           0,           0,           0,           0,           0,           0,           0,        1666,           0,           0,         368,           0,           0,           0,           0,           0,           0,           0,        2894,         265
M55,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        1333,           0,         147,           0,           0,           0,           0,           0,           0,           1,         370,           0,           0,           0,           0,           0,           0,         521,           0,           0,           0,           0,         485,           0,           0,           0,           0,           0,           0,          21,           0,           0,           0,           0,           0,        1927,         197
M56,           0,         104,           0,         109,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,         732,           0,          51,           0,           0,           0,           0,           0,         361,           0,           0,           0,           0,         356,          82,           0,         204,           0,           0,           0,           0,           0,           0,           0,           0,           0,          98,           0,           0,           0,           0,           0,           0,           0,        2937,          27
M59,           0,        1767,           0,           0,        2243,           0,           0,           0,           0,           0,           0,           0,           0,           7,        7761,          87,         285,          28,           0,       18171,        3539,           0,        9869,         272,        1656,           0,           0,         829,           0,       23865,         340,           0,           0,           0,        1335,        1661,           0,       12898,         176,           0,           0,           0,       14709,           0,           0,           0,        5308,         123,       12432,        1681
M61,           0,         740,           0,        1314,           0,           0,       20295,           0,         754,        2643,           0,           0,        9904,           0,         152,           1,           0,        1174,         283,           0,           0,           0,        7509,           0,           0,           0,         195,           0,         405,         825,           0,           0,           0,           0,           0,        4509,           1,        2009,           0,           0,           0,           0,         714,           0,           0,           0,           0,           0,        7673,         126
M62,           0,           0,        9610,         796,           0,           0,           0,           0,           0,           0,        3066,           0,       18508,         465,         102,           0,           0,           0,         173,           0,           0,           0,         698,           0,       11159,         423,        5510,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,         286,           0,           0,           0,           0,           0,           0
M66,           0,         112,           0,           0,           0,        2327,           0,           0,           0,           0,           0,           0,         402,           0,           0,        1088,       17106,           0,           0,           0,           0,           0,         982,           0,           0,           0,          46,           0,           0,        2643,           2,           0,           0,           0,        1500,           0,           0,           0,           0,           0,          27,           0,           0,           0,           0,           0,           0,           0,         761,           0
M67,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        1683,           0,           0,           0,           0,           0,           0,           0,           0,           0,          81,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,         203,           0,           0,           0,           0,           0,           0,           0,      218600,           0,           0,           0,           0,           0,           0,           0
M68,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
M79,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       69250,           0,       16197,       15123,           0,       46346,           0,           0,           0,           0,       14143,           0,           0,           0,        2246,           0,           0,           0,           0,           0,           0,           0,        3711,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
M80,           0,           0,           0,           0,           0,           0,           0,           0,        6148,           0,           0,           0,      155617,           0,         190,           0,           0,           0,        8610,       12035,       13313,           0,         508,           0,         637,           0,           0,           0,           0,           0,           0,           0,           0,           0,       35761,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       71407,           0
M81,           0,           0,           0,           0,           0,           0,           0,           0,           8,           0,           0,           0,           0,           0,           0,           0,           0,           0,         483,           0,         104,           0,        3139,           0,           0,           0,           0,           0,         371,           0,           0,           0,           0,           0,        2204,           0,           0,       22288,           0,           0,           0,           0,           0,           0,           0,           0,           0,        1159,       13971,           0
M87,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,         259,           0,           0,         300,           0,           0,           0,           0,           0,           0,           0,        1850,           0,           0,           0,           0,           0,           0,           0,           0,         100,           0,           0,           0,        1928,           0,           0,           0,           0,           0,           0,           0
M89,           0,       20309,           0,       43345,      236950,           0,       79725,           0,       37009,        2915,       11999,           0,       26153,         161,       42254,        6321,       13698,        2687,        7029,         219,           0,       35328,       13197,           9,      114769,        5259,       29195,           0,        2407,        9860,        8711,       12049,         746,           0,        8925,           0,         762,      174199,           0,        3480,          66,           0,       93646,        5969,           0,           0,       34120,        9118,       84505,        7831
M91,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       20650,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
M92,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
M93,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
M94,           0,           0,           0,           0,       22155,           0,           0,           0,       68380,           0,           0,           0,         419,           0,           0,           0,           0,           0,           0,           0,           0,        2123,        1227,           0,        1820,         963,        1518,           0,           0,           0,           0,           0,           0,           0,       36753,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,          85,           0,        1908,           0
N01,           0,        6064,        9650,           0,        4481,           0,           0,           0,           0,           0,           0,           0,       56588,        1899,        1974,           0,           0,           0,         401,         519,           0,      114992,       19076,          91,           0,         203,        1385,           0,        3559,           0,           0,        1701,       15306,         170,        2064,        1403,           0,        7496,           0,        1055,           0,          15,           0,       17693,           0,           0,           0,           0,        7565,        8966
N05,        4103,           0,       29461,        1106,      325954,        3767,           0,           0,           0,       21739,           0,        4907,       32530,       19750,       31731,       10357,       28800,       41546,           0,       10050,      151362,        7820,       30233,        2161,         821,           0,           0,        1167,           0,       68475,           0,      272285,       11028,          37,       42455,        5077,       33960,       35707,           0,           0,          35,       62730,      173668,           0,          20,      166322,           0,           0,       49610,           3
N12,           0,      625477,           0,           0,     1201011,           0,     1544454,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        5209,     1674252,     1493356,           0,           0,        2254,           0,           0,           0,           0,           0,      986594,           0,     4624578,     3622085,           0,      132087,           0,           0,           0,      382651,           0,           0,     1301852,           0,           0,           0,     2466025,           0,           0,           0,        1576
N18,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       69494,           0,           0,           0,           0,           0,           0,           0,           0,           0,      104101,           0,      304951,      406894,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
N21,           0,           0,           0,           0,           0,         184,         501,         294,           0,           0,           0,           0,           0,           0,           0,           0,         200,           0,           0,           0,           0,           0,         461,           0,           0,           0,           0,           0,           0,           0,           0,      215045,           0,         116,           0,         391,        1402,       15842,           0,           0,           0,           0,         686,           0,          12,         585,        2100,           0,        9443,           0
N23,           0,           0,         338,        3456,        1681,           1,           0,         516,         555,        2327,           0,           0,        3229,           0,           0,           0,       21750,           0,           0,           0,           0,          56,         420,           0,       13192,        1260,           0,           0,           0,           0,          75,        2059,         364,          27,           0,           0,         646,           3,           0,        1338,           0,           0,        7300,           0,           0,       32187,           0,        3386,           0,           0
N25,           0,           0,        7164,        2362,      640603,          74,           0,        2417,           0,         294,           0,           0,        7128,           0,         173,           0,       11904,           0,           0,         127,       27551,       37665,       21102,           0,        7486,        3224,           0,          99,           0,       44878,           0,      155079,        1479,         835,       17444,        9811,        1572,       87062,           0,        2422,         792,        4243,       12218,         930,           0,       47978,         336,           0,           0,         599
N29,           0,           0,        2257,           0,           0,           1,           0,           0,           0,           0,           0,         117,           0,           0,           0,        3729,        1082,           0,           0,          53,           0,           0,           0,          44,           0,           0,           0,           0,           0,           0,           0,           0,        1403,         333,           0,           0,           0,           0,           0,          72,           0,          30,         603,           0,           0,           0,           0,           0,           0,         156
N30,      101752,       72592,      607224,       46427,     2327065,       24954,       61623,           0,     1409682,           0,       77390,       67364,      700564,      163928,      147354,       86882,           0,      150566,           0,      109737,      822569,      928623,      659442,      279100,        7114,       45679,       24586,      335751,       31427,      963929,      398631,      889567,      468987,       50561,       11373,       19407,       96484,      150097,       20805,      265822,       24543,      235746,       50417,           0,       10316,       26093,       86152,       13279,     1214344,      139317
N32,       11224,       17070,       13070,       55085,     2540935,       25688,       16334,       12779,        8435,      277752,       17458,        5947,       58487,       43765,       25117,       50651,       92905,           0,           0,      224338,          35,      580614,      120204,       28894,        8284,        4660,           0,        1595,           0,       67737,        1620,      667568,      312373,       17175,      340517,       20658,      155252,      683122,           0,       19345,         688,         876,       56858,       48522,           0,        6818,      101972,        8957,         954,       17588
N38,           0,         270,           0,           0,           0,       17820,           0,           0,         239,        4813,           0,           0,        1363,           0,           0,           0,          38,           0,           0,           0,           0,           0,           0,           0,        1557,           0,           0,           0,           0,       75104,           0,           0,        1176,           0,           0,        2621,           0,           0,           0,           0,           0,           0,        3999,           0,           0,          29,           0,           0,          58,         404
N44,      148290,       33245,      322964,      121983,     1186826,      186905,       30331,        4766,      165049,       11774,           0,        9874,      427846,      341751,      266126,      113182,       90727,       41548,          28,      281024,      102112,      636185,      321028,       80602,      135611,       14021,      109535,       40786,       21294,         168,       14976,       83069,      138085,       42273,      638144,      174540,      289115,      311140,           0,        1260,       15192,      250769,        7742,       49509,       21505,      154384,      288632,           0,      365310,       38467
N50,           0,           0,           0,           0,       68893,       14363,       31059,           0,       27074,           0,           0,           0,       28905,           0,           0,           0,       22435,       26277,         192,       11167,           0,           0,       23881,       31516,           0,           0,           0,           0,        6121,       15090,           0,       89474,       38925,           0,           0,           0,           0,      106587,           0,           0,        6525,       31188,           0,           0,           0,       24669,        5104,       12133,           0,        2041
N52,        4103,         269,        1389,        2827,       30941,           0,        2322,        1236,       18070,       19023,           0,         195,        2430,           0,           0,           0,        4257,           0,           0,       16162,       19163,        9890,           0,        3336,        2783,           0,        1551,           0,           0,       14179,           0,       69812,       12401,         501,           0,           0,         901,       23189,           0,        4325,         273,         677,       11041,         632,           0,       12014,        1067,        5237,       10479,          43
N54,           0,         135,           0,         530,       23905,          77,          16,          39,           0,           0,           0,          16,           0,           6,         727,           0,           8,           0,           0,         646,           0,       13333,           0,           0,           0,         870,           0,           0,           0,           0,           0,           0,         711,         326,        2918,          50,           0,           0,           0,           0,          53,         212,          19,           0,           0,        1163,        6203,           0,           0,         889
N55,           0,           0,           0,           0,           0,         753,           0,           0,           0,           0,           0,           0,           0,         236,         652,           0,           0,           0,           0,           0,           2,         165,        1290,           0,           0,           0,           0,         484,           0,           1,           0,           0,           0,         183,          27,           0,           0,         811,           0,         417,           0,         242,         349,           0,           0,         445,        1087,           0,         109,         238
N56,           0,           0,           0,           0,       23800,           0,           0,          28,         729,         127,           0,           0,         227,         409,           0,           0,           0,           0,           0,         391,           0,          14,         844,          52,           0,           0,           0,          10,           0,           0,           0,       39386,          98,           0,         143,        1105,           0,        4710,           0,         332,           0,         775,           0,         164,          48,         143,       41766,           0,           0,          25
N59,           0,        1078,         429,           0,         239,       30415,           0,        3311,        4940,         117,           0,         124,        1134,        1195,        3623,           0,         731,           0,           0,         945,        5473,        7692,       10948,         616,         361,         265,           0,        3591,         217,        5359,         558,        2851,        4309,        1720,        2887,           0,        1244,        3222,           0,           0,        1320,         357,        1592,        9954,       12505,          14,        3905,           0,           0,        3447
N61,           0,        4313,        6832,          10,       48821,         481,           0,        1403,        2097,         866,           0,        1093,        2339,        2041,        1846,           0,          28,           0,         478,        2828,        6673,       12389,        3028,         525,           0,          79,           0,        5650,           0,        4945,        1070,       24160,         889,          20,       15107,           0,         676,           0,           0,        1739,         267,         294,       10141,         537,          66,         268,       12248,           0,         684,          24
N62,       11467,        5899,        1033,         777,      133837,           0,         132,        1851,        2283,        2261,        1821,        1804,         198,        1913,           0,           0,       14588,       25164,           0,       36317,       16705,        8256,       34695,         501,       13313,        5768,           0,         100,         618,       30035,        3503,       25606,         106,           0,        5738,         471,           0,        8625,        1876,          72,          17,        3809,           0,        1094,         477,      128559,       44096,           0,        2292,        1958
N66,           0,           0,           0,           0,           0,        5722,           0,           0,           0,           0,           0,           0,         960,           0,           0,           0,           0,           0,           0,           0,           0,        4937,        2601,           2,           0,       21202,         395,         540,           0,        1912,           0,        8561,           0,          98,         189,           0,        1277,           0,           0,           0,           0,           0,           0,          70,           0,       11267,           0,           0,           0,           0
N67,           0,           0,      227926,           0,     8550952,      169524,           0,           0,      184470,           0,           0,           0,      223644,      187776,           0,           0,           0,           0,           0,           0,      146316,           0,      140257,       56579,           0,           0,           0,           0,       51873,      701848,           0,     4500567,           0,           0,       10060,           0,           0,      221400,           0,           0,           0,      245961,           0,           0,           0,       13306,           0,           0,           0,           0
N68,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       37243,          31,           0,           0,           0,           0,       16704,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,      737937,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
N79,       10079,           0,           0,         634,     2667723,      180426,      194928,           8,        1045,           0,           0,           0,       22781,       98247,        3543,           0,        7085,        3390,           0,           0,       14250,      244173,      377030,        6524,       15511,        4915,           0,        4846,        2365,      477841,           0,     1838624,      368591,         955,      921097,       16391,           0,     1077047,       32883,        9779,         616,       25400,         993,        2336,          85,      258341,       21651,           0,      215356,        2785
N80,           0,       51797,           0,           0,       16320,           0,        6015,           0,           0,           0,           0,        6873,        5608,       14936,           0,           0,           0,           0,           0,        1086,           0,        2352,        6834,           0,       74570,           0,           0,           0,       18239,        3500,        9610,      112132,        5112,           0,           0,           0,           0,       18483,        2754,           0,           0,       26033,           0,           0,        3638,         602,           0,           0,           0,           0
N81,           0,           0,           0,           0,           0,         665,           3,           0,       33018,           0,           0,           0,        1362,           0,           0,           0,           0,           0,           0,         166,           0,           0,         524,           4,           0,           0,           0,         439,           0,          90,           0,        8005,           0,           0,        8381,           0,           0,           0,        2555,           0,           0,           0,           0,           0,        5473,           0,       48677,           0,           0,          17
N87,           0,        3907,           0,           0,           0,           0,           0,           0,         935,           0,           0,           0,           0,           0,           0,           0,           0,           0,         111,        1335,           0,        2585,           0,           0,           0,           0,           0,           0,          30,           0,           0,           0,           0,           0,           0,           0,           0,       12577,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
N89,      150615,       34656,       57589,       14038,      123475,       47750,       14935,       23676,       38305,        7315,        1467,        9241,       84422,       94097,           0,       12572,       45058,      116761,         361,       11340,       49543,      189494,       78679,       29803,        4179,       17256,           0,        3513,         401,      695482,       18921,      399167,      110395,       10838,       18193,       21002,       31156,      104698,        2295,      131528,        9166,       46163,      192490,       14968,        5585,       44448,       57549,        8712,       52047,       22234
N91,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
N92,           0,        7490,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
N93,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
N94,           0,           0,           0,           0,       52797,           0,           0,       15811,           0,           0,           0,           0,       53961,           0,           0,           0,           0,           0,           0,       68556,           0,       88509,        2821,           0,           0,           0,        1091,           0,           0,           0,           0,     1373778,           0,           0,           0,           0,        5326,       78288,           0,           0,           0,       19549,        5608,           0,           0,       84601,         413,           0,       53574,           0
Q12,     1699130,           0,     1577385,     1160554,    15097113,     1204342,       22113,      321619,     5457840,     3319732,           0,      593459,     3996158,     2190681,     1453622,     1058830,     2018033,     2175623,           0,           0,      245856,     3626273,     2728781,     1174638,     2228411,      473384,      584703,      702636,       20835,     3390408,     1136640,     7748696,           0,      270128,     4437190,     1780682,      888180,     4895000,       38428,     1587925,      210382,        7798,     7615636,      986214,      236061,           0,     3640590,     1085976,     2225351,      355341
Q18,           0,           0,       86591,           0,     2744623,       15460,           0,           0,      718952,           0,           0,       12500,      253452,           0,       90181,       44867,           0,           0,           0,           0,           0,      229372,           0,       65621,       65123,        3662,       33506,           0,           0,       38620,       19397,           0,           0,        1382,       64555,           0,       93384,      130322,           0,           0,           0,           0,      557640,           0,           0,           0,           0,           0,           0,       43742
R01,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       59322,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       15545,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
R12,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
R18,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
R30,           0,           0,           0,           0,       60746,        1015,           0,           0,           0,           0,           0,           0,       62327,           0,           0,        1603,           0,           0,           0,           0,           0,           0,           0,           0,         959,           0,           0,           0,          90,           0,           0,           0,           0,           0,           0,           0,         302,           0,           0,           0,           0,           0,           0,           0,           0,           0,        5517,           0,           0,           0
R32,           0,           0,           0,           0,           0,         807,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        2010,           0,        8856,           0,           0,           0,           0,           0,           0,           0,           0,        9617,           0,           0,           0,           0
R38,           0,           0,           0,           0,           0,           0,           0,           0,           0,        5504,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
R44,           0,           0,           0,           0,           0,        1964,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,         531,           0,           0,           0,           0,           0,           0,           0
R50,           0,           0,           0,           0,       44137,           1,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,         194,           0,           0,           0,           0,           0,           0,           0,           0
R52,           0,           0,           0,           0,        6037,           0,           0,           0,           0,           0,           0,         112,           0,        2836,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        5282,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
R54,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,          13,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
R55,           0,           0,           0,           0,           0,         853,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,         348,           0,           0,           0,           0,           0,           0,           2,           0,           0,         135,           0,           0,           0,           0,           0,           5,           0,           0,           0,           0,           0,           0,           0
R56,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
R59,           0,           0,           0,        5220,           0,        7197,           0,           0,       95589,           6,           0,        1218,        4023,           0,           0,        2516,           0,           0,           0,           0,           0,        1136,           0,           0,        4833,           0,        6876,           0,           0,           0,           0,           0,           0,        1324,        4585,        4762,         478,           0,           0,           0,          42,           6,        1810,           0,           0,           0,        3789,           0,           0,           0
R61,           0,           0,           0,           0,        8884,           0,           0,           0,           0,           0,           0,          52,       78350,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,         107,        1904,           0,         135,           0,           0,           0,           0,           0,           0,           0,           0,           0,         906,           0,           0,           0
R62,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,         777,           0,           0,           0,           0,           0,          33,           0,           0,           0,           0,           0,           0,           0,           0,           0
R66,           0,           0,           0,           0,           0,         534,           0,           0,           0,           0,           0,           0,        1420,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        1397,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
R79,           0,           0,           0,           0,           0,           3,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
R80,           0,           0,           0,           0,        4932,           0,           0,           0,           0,           0,           0,         284,           0,           0,           0,           0,           0,           0,           0,           0,           0,         150,           0,           0,           0,           0,           0,           0,         564,           0,           0,           0,           0,           0,           0,           0,           0,       12493,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
R81,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,         205,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
R87,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,         750,           0,           0,           0,         804,           0,           0,         278,           0,           0,           0,           0,           0,           0,           0,           0,           0,        1094,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
R89,           0,           0,           0,           0,           0,        9267,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       12258,           0,        3259,         197,           0,          85,           0,           0,         919,           0,        9243,           0,           0,           0,           0,          71,         359,           0,           0
R91,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
R92,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        1106,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
R93,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
R94,           0,           0,           0,           0,      299964,           0,           0,           0,           0,        8017,           0,           0,      152261,           0,           0,           0,           0,           0,           0,           0,      613762,           0,       28629,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,         283,      316478,           0,           0,           0,           0,         155,           0,           0,          34,      131598,           0,           0,           0
S67,           0,      100635,           0,           0,     2379063,           3,           0,         788,           0,           0,       10513,           0,           0,       14312,       20781,           0,           0,           0,        7385,         102,      147957,       55388,           0,           0,           0,           0,        4901,        3131,           0,       89964,           0,      440500,           0,           0,           0,       38662,           0,       93641,       14594,           0,          12,           0,           0,         932,       11002,           0,       25602,           0,      109866,           0
S89,           0,           0,           0,        1286,        6907,       15865,           0,           0,        2211,           0,           0,         544,        2061,           0,         365,          18,           0,           0,          60,           0,           0,          17,           0,           0,           0,           0,           0,         488,           0,           0,           0,           0,           0,           0,        2136,           0,           0,           0,           0,           0,           0,        5351,           0,         288,           0,           0,        1395,           0,           0,         185
T01,       98027,       69048,      288356,       11089,     2946074,        7382,          12,           0,      490073,       27758,           0,          12,      223973,        4431,           0,       34043,      338548,       42584,       41453,      193770,         195,      321346,        7961,       22617,       12896,      182204,         207,       41099,         319,       14158,       21400,           0,      112183,        1908,       11581,           0,         136,      210818,       17858,       12585,           0,           0,           0,         271,        9754,       15351,     1386622,        2053,       53960,       87697
T09,     1115516,           0,     2088288,     1032536,    16089973,      913599,     2090143,           0,     8325978,     2687346,     1294723,      441601,     4241572,     2590600,     1010228,      958165,     1366872,     1268695,      573418,     1579785,     1978654,     3665541,     2190676,     1182356,     1916680,           0,      663159,      892721,           0,     4049282,      982572,     6005503,     2171041,      232720,     3751523,      971331,           0,     4499734,      388987,     1452014,      289325,     2514798,     8575890,      802439,      157030,     1570789,     5031574,      796889,     2127315,      182547
T10,      110997,       12034,       41091,       27441,      296811,       21520,       43443,       10875,      525717,      114867,       41492,        5459,       59434,       33419,       12631,       54791,       54163,       62112,       36400,       25277,       64675,      122309,       53368,       34207,       23570,       14853,       15725,       14854,       11181,       80547,       17425,      235004,      155515,        4905,       64205,       56744,       10741,      144665,        9131,      109870,        9381,       63234,      386848,       17090,       13961,       97155,      119885,        8582,       39664,        1242
T11,         103,        1479,         884,           0,           0,        1179,       20120,           0,        2336,           0,           0,           0,       26361,           0,       14706,         899,         278,        2495,           0,        2120,        9353,           0,       55327,        1540,           0,           0,        8333,      366136,        1895,      257023,         810,         696,           0,        5701,           0,           0,          28,         382,         152,       19796,           0,           0,       15427,           0,           0,          65,          21,          41,         508,           0
T12,      221685,       25451,      115857,       51952,     1173297,       90513,      160843,       44686,      311977,      166827,       61551,       46108,      197720,      122788,       97447,       88613,      206917,      208193,       46376,      138719,      284809,      178304,      130617,       90154,      182969,       27768,       35892,       67107,       37747,      206458,       41000,      610046,      202157,       18745,      281301,      109998,       59506,      404806,       33751,       66733,       28566,      155160,      516081,       31085,       16723,      174788,      110016,       55964,       88306,       10894
T13,      330895,       43247,      369946,      307534,     2248089,      360498,      361770,       72874,     1084611,      449782,       72106,      132019,     1030266,      542470,      333425,      250999,      360058,      470116,      143483,      462777,      541069,      745000,      464916,      317098,      384342,      121493,      222145,      139131,       92534,      410625,      182739,      495208,      861487,       75245,     1128832,      340208,      271561,      694408,       94074,      287393,       82685,      656573,     1953453,      136352,       55854,      629104,      627136,      207992,      568929,       38326
T14,        4698,           0,        8085,       18634,      121255,       19328,       53838,         144,       93540,           0,           0,        1000,       44046,           0,        4754,           0,        6852,       10464,        1070,        2843,       26089,       19972,        1797,           0,           0,         142,         567,           0,        7810,        6955,        1135,       76770,           0,           0,       13955,        7261,        4406,       11799,        9408,           0,         569,           0,           0,           0,         207,           0,        5899,        8650,       12093,         254
T15,      299164,        2101,      105152,           0,       40222,        5260,      159639,       21057,      391380,           0,       82255,        1616,      717660,        3412,           0,         355,           0,       21826,         477,      122240,           0,           0,       17941,           0,        1395,       13983,        1855,        5085,       27376,     1701161,        6327,     1572830,      248274,       12824,      605503,       14004,        4859,      660117,       60673,       37418,         694,        5587,      217599,        4893,       14614,      100917,      190610,       11319,      253295,           0
T16,       67346,       16972,       52548,       65948,      717624,       61599,      118713,       19662,      435947,       84261,       27384,       22995,      310187,      111196,       97433,       55549,       14045,       86783,       52127,       91867,      139856,      245937,      164767,       51778,       79683,       13397,       38751,       48292,       38140,      269465,       18408,      593580,       40363,       13770,      224199,       68854,       87528,      336244,       36545,       28461,       13952,       80105,      582793,       26100,       13996,       15315,      146930,       32088,      153564,        5632
T19,       68480,           2,           0,       13743,       26594,       10224,       64846,       26043,      205774,           0,       79982,        2000,      112158,           0,           0,        9220,      218801,       30968,           0,      314057,       55863,       11516,      279429,           0,           0,       10521,       12486,        5302,      470057,       26034,       56348,     1069214,      294144,       24180,           0,        7816,           0,      513740,       34448,       50145,       24065,      372621,     1355505,           0,       95338,      269519,      116861,      100623,           0,           0
T20,        2323,        1689,        2167,        1025,       31267,        3347,        5766,         671,       24925,        1930,           0,         924,        2868,        9677,        8234,        2696,        1819,        2433,        2399,         327,        1176,       11516,         476,        2269,        2467,        1503,         208,          20,        2828,        3238,         470,       29812,        4727,         237,       24600,        2889,        1586,       13663,         239,        9099,         231,        1627,       17885,         529,         362,        5983,        7746,        5934,         182,           8
T21,           0,         109,          27,         303,          70,         254,         564,          87,        8525,           0,           0,           0,         936,           0,        2506,         179,         433,           0,         644,          14,         794,         603,         399,           0,         985,       32685,           0,       64870,         543,       57203,         154,          31,        5003,        1217,           0,        4185,        1773,          72,         217,       26672,         180,           0,        6197,           0,         161,          11,        4313,           0,        3353,           0
T22,      121586,         930,        4000,        8122,       50200,         981,        9829,      297004,       48832,       23748,        1815,         283,       82947,        3954,       30600,       14437,       82087,      265035,        2087,        3982,       18576,       14506,        3013,       46920,       63436,         849,       10077,        8455,        7713,       98451,        1191,       23655,      161398,           0,      180364,       35131,        4013,      943904,        5973,       27446,         564,      230776,     1116796,           0,         648,       23799,        9015,        5356,        7397,        2302
T23,       17452,       11459,       13510,       17111,       62678,       51576,        2538,         901,       15181,       18014,         247,       19054,       15248,       12976,       14506,        9590,       11766,       11769,        8426,        9364,        4295,       38968,       35773,        8889,       19902,       22325,        8071,        7456,        5940,        9766,        8463,       31594,       13644,        9247,       22557,       12854,       26854,       43272,        1054,       11341,        8916,       20353,       44639,       16624,        4783,       15436,       27156,       13512,       45929,       21322
T24,      145769,       24219,      193389,      115316,     1358935,      103328,      173429,       18441,      533357,       84135,       39540,       48878,      612073,      155642,      226548,      109739,      148517,       86569,       50845,      151855,      250986,      514341,      393416,       62691,      200840,       40943,       54631,       67740,       51514,      315419,      106314,      561678,      279959,       25226,      481465,      298009,      244920,      447173,       50787,       79127,       25176,      158693,      692888,       45472,       38218,      255805,      203538,       79462,      207498,       38511
T25,       14142,         680,        8828,        8659,       97207,       13195,       23595,        1500,       97250,       19773,           0,        4332,       44507,           0,       16471,        9465,        5221,        6315,        6642,       16998,       63577,       37486,       19998,        9057,       16481,        3092,        4636,        6904,        7678,       25218,        4954,       54200,       55159,        3382,       21359,        7397,       14349,       55484,        1244,       14703,        2063,       27117,       71259,        8991,        4532,       23956,       20040,        4383,       21667,        1117
T27,        2647,           0,           0,        8517,       66023,           0,           0,        2382,       22517,           0,        2996,       16612,           0,          40,        5447,        2687,        1950,        3511,           0,           0,           0,       17085,           0,        1491,       12190,        1345,           0,           0,        4461,          16,         101,       35969,           0,           0,         442,           4,        7485,       35713,           0,           0,           0,        4081,        7535,           0,           0,           0,       15399,       12333,          20,        1433
T28,       91283,       41568,       32299,       36079,      614857,       57863,       63880,      127337,      223136,       37823,       10066,       23791,       39996,       22369,       52377,       24428,       27186,       35621,       26309,       82062,       69426,       76483,      109380,       24488,       82274,       17196,       31427,       58424,       24145,       60539,       13421,      202792,       79800,       18919,      165586,       37312,      106970,      223502,       13456,       83570,       18029,       56419,      295707,        9863,        7718,       62108,      140941,       19861,      126937,        1790
T29,           0,          50,       25480,         502,        6627,        9978,        5162,         573,       23742,       26020,         167,        1478,        2133,        1418,        1419,        1754,        2027,        1172,         876,        1700,        3216,       19616,       10785,         107,        8821,         145,       13317,        3500,        2154,        3235,         542,        2822,        1460,         975,        3559,         337,        2064,        6819,         887,       27501,         551,        1810,       13174,         575,        2242,        3144,        2674,         215,        9390,         349
T40,     1233824,           0,     1240372,      850111,    17029575,     1611954,     1865711,      497589,           0,     3081708,      906982,      535482,     4582387,     2588916,     1410926,      833756,     1678526,      867478,      591487,     2907450,     5336957,     3241549,     2999091,      439577,     1844004,      321538,      652638,           0,       34958,     4101895,      445303,    14913380,     3583018,      119497,     4407036,     1218181,     2221297,     4689139,      478461,     1410893,           0,       93360,           0,      781383,      271430,     3321243,           0,      612619,     3142211,           0
T41,      164779,      200025,      210824,      125525,     4518418,      123458,      593720,      128737,      695114,      375286,       67768,       68171,      970531,      672100,      192818,      198998,      271027,      232061,       69921,      216946,      756781,     1729549,      422812,      146308,      229730,       57683,      103617,           0,       95635,      845823,       77786,     2518790,      643865,       38610,      641701,      149142,      152161,     1623774,       48502,      141895,       35222,      295266,           0,       76375,       30954,      273258,           0,      182081,      437689,           0
T50,       30279,        1029,       25652,        8587,      447844,       34325,      190659,       38297,      281368,       37584,       16416,       21706,      120553,       86969,       78030,       52540,       77355,       46158,        8551,       80331,      260215,      207774,       22312,       10851,       46711,       11338,        6619,        8433,       26275,      224854,       11623,      747639,       94924,        2394,       75877,       46873,       20427,      537731,       17730,       26145,       18996,       42414,      141007,        3975,        6948,       48791,       34456,        7410,       57664,        3068
T51,       15057,           0,           0,        7070,           0,           0,       51119,       30728,      595927,       14023,        4028,           0,       25879,           0,        5938,           0,        3194,           0,        7497,       60261,       36684,           0,       63488,           0,           0,           0,        2885,           0,       34472,       35297,           0,      331920,           0,           0,           0,        4485,       15835,      173029,        3351,       12693,          99,       54204,           0,           0,       10209,       82962,      211325,        3658,       20743,           0
T53,       61864,     1150605,           0,       14996,       29309,       16046,           0,           0,       67000,           0,           0,         792,           0,         762,           0,       88789,      203329,      487887,           0,           0,           0,       41331,        2045,       41994,         109,      123795,        2631,       17847,          40,           0,      239170,           0,        1621,       83305,        9143,      354988,       63788,           0,           0,           0,        5768,        1199,     1013811,       25776,           0,        1426,       64768,      180833,        1275,      249437
T99,           0,         240,           0,       17492,           0,       14291,           0,        1417,           0,       16096,           0,        1700,           0,           0,           0,           0,           0,           0,           0,       37749,           0,       18438,           0,           0,        1875,       16078,           0,           0,           0,           0,           0,           0,           0,           0,           0,       17269,           0,           0,         183,           0,           0,       22701,           0,           0,       10290,       34420,           7,           0,        9618,           0
U01,           0,           0,           0,           0,       58125,           0,           0,           0,        1180,           0,        3878,           0,           0,           0,           0,        5343,           0,           0,           0,           0,           0,        5560,           0,           0,           0,           0,           0,        5218,           0,       21505,           0,        1728,        7229,           0,        5226,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       12367,           0
U11,        5211,        4446,       15323,          16,       18144,        1198,        2223,       20935,        7884,           0,        7481,        4684,         937,        3505,        1478,         686,        2073,        9567,         209,        2054,         138,        5269,        2954,         243,        1158,         678,        1121,         935,           0,         110,        2677,        7979,           0,        1631,         646,         663,        2413,        3086,         419,           0,         708,           0,       29131,        2172,           0,        1089,        3431,           0,         814,        5043
U20,      398721,     1675147,      168336,      174163,     2326507,      323360,      471805,      228377,      882050,      229648,      246854,      154250,     1096136,      499516,      178324,      113468,      433417,      600896,      189284,      389314,      938498,      762452,      431971,      127330,      437445,      209398,      198501,      111039,      276567,     1207824,      571224,     2678527,      333942,       99458,      680720,      330453,      933430,      725127,      307157,      289458,      191563,      238051,     1573652,      201398,      105124,      549787,      352541,      177055,      512327,      270394
U30,       16764,        4804,       32191,        2570,      439503,       15618,       53474,        6219,       62361,        2831,       21968,        6407,       40243,        9383,       34505,       14556,       42524,           0,       29045,       93984,       29557,        3135,       24121,       15000,        2033,        4063,        1354,        9984,       17819,      108478,       13092,      156745,           0,        4058,       32766,        5134,       50898,       82073,        5394,       33205,        2274,       27162,       62870,       18148,        8828,       46462,       51652,        3559,       29386,        1476
U40,        3859,       34998,       18791,           0,       20624,        9616,           0,         652,       13266,        5759,       24533,        3554,         820,         119,         706,        2009,        2754,       28583,        1745,         247,        1562,        2290,        2218,        6086,           0,       14787,       18375,        7623,         886,       12714,      118260,       14134,       10867,        4083,           0,       13729,        9434,        5861,        4791,        2182,        2216,         125,       42327,        6942,         523,        1359,       23987,         426,         374,       10985
U41,       26853,      854969,       10370,         633,      235286,       55693,        9023,           0,           0,           0,           0,           5,           0,         328,          44,        1463,           0,      199224,           6,           0,        2281,       45804,        5789,         495,           0,        5101,         719,           0,           0,           0,      101747,           0,           0,       13357,           0,       12984,           0,         279,           0,          63,         941,           0,      110669,        9508,           0,           0,           0,           0,           0,       26145
U50,      128829,        7437,       77058,       24973,      369887,       91701,       54118,       16594,      206527,      105249,       13163,       22506,      261137,      141314,       66774,       26140,       38877,       41594,       16814,       51022,       50447,      241898,      167075,       31799,       53300,       11081,       49064,       24335,       14403,       91244,       21322,      250705,      164035,       16510,      174276,       42337,       71429,      178142,        5724,       80445,        5591,       75880,      312761,       35083,       22915,      156786,      129091,       19173,      138984,       12841
U95,           0,           0,      114119,           0,      608115,       99895,      227368,       33035,      980494,           0,           0,       23849,      660714,      143490,       58049,       35773,      134136,      163976,       52641,      376507,      541605,      522682,      107325,           0,       92263,       12761,           0,           0,       41450,      615071,           0,      912275,           0,           0,      812367,           0,      103666,      692035,       25366,           0,       48206,           0,           0,           0,       20770,      371689,      151181,       39376,      166724,           0
U99,       27216,      107235,       47818,       51169,      294042,      100710,      283570,       33536,       93892,       49045,       18515,       27949,      402287,      124974,      114274,       24747,       31666,      279176,      189687,      320248,      716538,      551159,       65353,       42630,      381901,       54633,       17281,       14161,        9739,     1096996,        3867,     1251071,      243335,        6308,      106598,       45095,       24106,     1079571,      155668,       32791,        6157,      390648,     1030470,       22202,       49731,      198152,       51871,       62082,       88137,        2785
V34,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
V98,      664748,      389682,      698704,      444873,     3501400,      585807,     1051739,      302293,     2146652,     1289555,     1225593,      258447,     2077624,     1001243,      711905,      674153,      996454,      911795,      199041,      922492,     1574666,     1054712,      789399,      452201,      712495,      233948,      365268,      333472,      142341,     2263038,      349303,     5082799,     1123760,      203827,     2192738,      641984,      547176,     1638994,      352347,      886120,      183017,     1192638,     2600803,      349000,      107501,     1113277,     1643209,      370284,      771504,      294613
W01,     2419643,     4298190,      520134,     1572992,    18515633,     2724090,     5743411,     2538211,     5642362,     1466309,     1401529,     1127811,    12365284,     3526284,     1219815,       74786,     2772304,     5620894,     2180757,     4262389,    11776078,     7131948,     2438314,     1029703,     5194138,     1425441,     1413320,      851747,     4016044,    10522867,     1177364,    29198950,     2781923,      989953,     7327397,     1739458,     4139408,     7175575,     3143568,     1696431,     1688223,     1840932,     3268349,     1688856,     1041506,     6350920,     2694151,     1515828,     4403725,      817993
W31,      379370,       53766,      294641,       13902,     4553931,      126858,      585557,       84899,      996881,     1018841,      664007,        4494,      292205,      196674,      156437,      146570,      785830,       49360,       49288,      120545,      201525,      111191,      110931,       79917,       53487,       21873,        6534,      341511,       52570,     2131958,       88083,     2640110,      196514,        3206,      498191,      182042,       71673,      624151,      191680,      280251,        6588,       12662,      974606,      153929,       82516,      320133,       77401,      344997,       40768,       15005
W61,     1407941,    15086797,     1179104,     1124132,    10844013,     1487499,      945012,      842457,     6575158,     1324180,     2005003,      837105,     2796750,     3997005,      879285,     1153368,     1712933,     1678063,      164477,      982181,     2439471,     3416237,     3692555,      845214,     1374202,     1129889,     1267394,      604017,      200432,     2946224,     5424793,     3392307,     2479964,      679794,     3187775,     2263856,     2937062,     5217875,      361511,     1513514,      528786,     1117113,    16180421,     1059823,      221936,     2696951,     2862345,      678483,     1297426,     2625695
X01,      135016,       69527,       78774,         796,     1777103,      143864,      132255,         275,       20978,      191138,       27698,       39478,      460159,      122926,       22543,       84273,      208405,       34065,       55784,           0,      150448,      222371,      205332,       97514,      187081,       22547,       43978,       13461,       29156,      505415,      124049,      221343,      319172,       19967,      651096,      159441,      152950,      362016,       47933,       55169,       23313,       23620,      774252,       22680,       10940,       56231,      281216,        8825,        9752,        6908
X02,       82958,       52208,       21085,       37280,      634153,      112224,       33942,       17832,           0,      103627,       38249,       20692,      309487,       38943,       91797,       31135,       79522,      294003,       22695,      109041,      200646,        7936,       79116,       68695,         620,       51911,         899,        4730,       25356,      139775,       39922,      125359,      155098,        8305,      663563,       28640,       80872,      189844,       29201,      221196,       15812,       75620,      270628,        9455,        2504,        2373,      118312,       74845,        5158,        2053
X05,       56128,       99288,       83702,       23009,     1125728,      269679,       22641,         867,     1752024,      145230,       43233,           0,      328331,      123386,      132224,       13263,       88841,       48666,           0,       24605,       14400,      397579,      297217,      127475,      211456,       58662,       45318,      238633,       14168,      292956,      135757,      767396,      110501,       20964,     1094392,       64028,      284065,      492171,       54236,       66578,       22230,       32495,      251790,      134264,        2685,      455944,      468566,       18837,      542593,       47502
X06,      310584,      114560,       23280,      158236,      811509,      179192,      393359,       67063,      584087,      595412,       77194,      112826,      474284,      304885,       42601,       78284,      370103,      247174,      172090,      622477,      694358,      636470,       92232,      252314,      181139,       25870,       59931,       90855,       29151,      473507,       68007,       21396,      421198,        9336,      960232,      271026,      142886,      492171,       20791,      270054,       15032,      254494,     1132862,       66577,       32159,      239262,      262438,      162721,      221591,       34003
X08,      978086,      591764,      836682,      421725,     9545570,      941688,      519919,      195631,     1974090,     1430681,      540865,      103549,     2249146,      681819,      431094,      392443,      635096,      468583,      137770,     1317211,      264253,     1310051,     1634530,      331983,      980554,      172293,       76200,      402392,       68367,     2008982,      439205,     6928943,     1672170,       89653,     3951912,      601930,     1458744,     3078709,      302852,      829020,      161962,      986220,     2952715,      363850,       87437,     1135967,     1198863,      155153,     3898405,      165210
X09,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
X11,      428806,      230239,      371483,      182520,     4927049,      487288,      615458,      123739,      909970,      648408,      249240,      111548,     1395479,      433015,      206920,      150809,      482189,      743214,      201825,      638240,      695369,     1375905,      590842,      243869,      381698,      134508,       30026,      164304,       59650,     1509285,      252178,     3235050,      771679,       40927,     2935248,      525281,      465488,     1660931,      205369,      437382,       54688,      331777,     1403862,      168281,       38878,      597148,      642933,      252296,      764600,       66820
X12,       29264,       14542,       38356,        4862,      266986,       31810,       11912,        1444,        2668,       60194,       34954,           0,       78836,       26505,       24223,       22577,       18845,       70122,       12515,       49779,      122072,        6347,       35035,       35948,       25710,       12068,        5949,        5876,       12638,       60371,       33846,      104954,       68545,        6056,      119027,       24378,       29406,       26897,        5498,       40455,        5662,       23696,      254360,       14466,         670,       35345,       89319,       12599,       27536,        9555
X14,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
X21,     1126514,       22746,      922381,      394218,     4669336,      340924,      549308,      154569,      731578,      398611,      389275,       65980,     1436842,      758369,       90702,       51769,     1121877,      785877,      152350,      164280,       86736,     4004328,      116653,      789059,     1113279,       50087,       68148,      250637,      119903,          31,      247653,     1537935,     5453109,       12647,     1829930,      456383,      824819,     1230386,       36283,     1539906,      249824,      620054,      443758,      274146,       89035,     1207626,     2022202,       45435,      118173,       17140
X30,      160565,     1315238,     4256544,     1164879,    19756356,      928865,      760053,      191688,     5783014,     5607326,      663862,      622432,     1968335,     3672612,       18630,      547774,     1819114,     3083367,      124434,           0,       55825,     3480571,      264950,     2220723,     3479784,       37930,      312792,     1434783,      156887,      861824,     1590061,    17169183,     5523715,         322,    30279284,     1560926,     1291703,     8545341,     1502514,     8629122,      366860,     2707898,    12448033,     1102232,       79528,     1359184,     2745019,     1591559,     4017893,      299292
X40,     4981680,     1268022,      411091,      896987,    20023356,     2955095,     1906536,      271485,     3784849,     2313498,      557609,           0,     6181594,     2538167,     2158351,      814950,     1546240,     1930593,       73472,           0,     1257546,     3331281,      222450,      651799,     3265165,     1180507,      147457,      401957,      160956,    13985859,     1647927,    12169325,     5254355,      247298,     5786423,      788161,     1261620,     2552524,           0,     2512860,      236273,     2813317,     7167150,      548880,      149267,     2495996,     1099923,      123370,     7799440,      904847
X41,      905313,     1816529,     3600744,     2122553,    31801460,     3696767,     2172628,      375741,    11002737,     7485133,     1251204,      702550,     8550117,           0,     1330908,     1467880,     3244526,     2444427,      937603,           0,      972911,     7321471,      443201,     1514280,     2991598,      371764,      404969,      833185,      598103,    10348144,     1350884,    28590087,     2694517,      250101,    14375436,     2435265,     1203972,    11703342,      910108,           0,      725746,     2762060,     9022257,     1845106,      334879,     3061974,      877850,           0,    10000000,      421534
X42,     2671004,      142289,      239771,      118741,     7754332,      404499,       64489,           0,           0,       13647,           0,      147910,       56105,         584,       11500,           0,      354360,         212,           0,           0,           0,      821410,           0,           0,       21059,      118604,           0,           0,       88994,           0,        2563,     4283239,           0,           0,       31580,           0,      600536,      905296,           0,           0,           0,           0,     2116849,       14448,        2468,       18213,      907112,        5120,      307251,           0
X44,           0,      304312,      497581,       16485,    11319846,     2040814,     2603488,           0,      618134,       19866,     1248409,        2046,      668688,       20993,     1289595,      412825,           0,      456518,      748526,      103448,     1840740,       42822,    10673400,        6800,       84199,       86961,       78290,      928955,      168429,     1047658,           0,     2050542,       97239,      465640,     2371231,      116302,     1314750,     1834205,           0,           0,       62447,      805354,     1015552,           0,       36925,     3755976,     5208537,       24519,       23635,      123410
X47,           0,           0,           0,         942,      575102,      314724,      219479,      912534,           0,       21704,      350652,           0,     1526276,           0,      967080,      164155,           0,      111702,       12809,    12224419,     3676522,      672599,     2680812,           0,      141746,       69677,           0,      380602,       10365,           0,           0,     2170983,      254714,       13380,     1114097,      115979,     1318427,     1134099,           0,           0,       21217,           0,       31712,      149809,       48615,      662476,     1009526,       27535,           0,           0
Y01,      122267,       97581,      100613,      132975,     1902520,      162647,      236056,       48215,      406826,      287192,       37606,       48565,      922050,      180130,      150395,      170456,      189488,      206279,       77993,      317017,      709051,     1113232,      283552,       79318,      233379,       38122,       45673,       71160,       43317,      964785,       66374,     1254688,      225300,       22490,      802245,      102213,      308850,     1137793,      115344,      159299,        8532,      218155,      674276,       73492,       36889,      158214,      542729,      110135,      359042,       30792
Y02,       37839,       14315,       38208,        9162,      299783,       19485,           0,       18663,      115538,       62358,       26563,       15204,      101506,       73861,       48195,       35374,       23384,       44970,        6532,       20297,        3386,        2060,       20353,       14101,       11353,        7245,        9160,       19775,        9040,      219414,       13588,       98297,       87640,        3111,       45688,       35332,       63784,           0,       13591,       29771,        3058,       51915,       68822,       26234,       12264,       39399,      138536,       11933,      118003,        7822
Y04,       60909,       32186,       61864,       48086,      852704,       48872,      611353,       73037,      376419,      163587,       16486,       20016,      383625,        3918,       39421,       45368,       80201,       50806,       68361,      148572,      787225,      428483,       88834,       45702,      118479,       13658,        5553,       43294,       17950,      615363,       19575,     1269485,      113175,        8366,      400010,       54078,       85180,      550747,       90531,       62118,        2262,      114143,      420819,       20448,       15589,       98597,      129111,       49476,       80231,        5830
Y05,      206024,      110377,      200850,      178943,     3603069,      165650,      590004,       72633,      843556,      400352,       98093,       78833,     1316991,      185147,      184992,      182935,      232331,      185045,      155074,      476950,     1106856,     1304614,      383732,      120292,      374124,       42397,       46614,      155677,       68909,     1543282,       69923,     2503909,      420373,       27856,      975923,      135014,      375277,     1678566,      212498,      223839,       11060,      299617,     1066513,       78019,       66860,      282892,      603611,      147806,      457147,       27309
Y06,       60680,       33344,       59909,       49115,      888827,       48182,      254419,       12841,      377639,      163580,       16423,       19713,      393773,        3918,       40336,       45361,       80073,       51725,       69832,      154151,      483035,      499995,       88704,       46204,      118473,       13517,        5534,       43083,       18084,      710948,       19965,     1285599,      113773,        8470,      276672,       54026,       89242,      556452,       98351,       64027,        2264,      117509,      424789,       20936,       16041,       98937,      246476,       51065,       80385,        5926
Y07,      544459,      223474,      402055,       80474,     3553490,      316143,        2990,      218043,     1559669,      930175,      383466,      219792,      991679,      905541,      568136,      576180,      344744,      582344,       34667,      198993,         703,      214000,      195987,      337021,       58290,       85966,      145926,      239905,      126648,     2327729,      217202,      752689,     1282707,       42256,      606787,      417128,      984593,      990653,      101051,      428902,       46857,      594246,      774015,      321266,      173556,      513614,     1672422,      141923,     1147930,       98305
Y08,       -2167,       -3318,        4881,       -1556,     -112573,       -1951,      -16380,        -979,      -30552,        -543,         249,        -519,       -3050,        2795,       -1803,          18,         961,       -4831,        2014,      -11214,      -19303,      -27081,       24899,       -1065,       -7189,        -874,        2796,        5697,        -623,       39451,       -1363,      -61517,         290,        -752,      -21429,       -3133,       -5424,         482,       -2874,       -2019,         -74,       -7226,      -12813,        -556,         778,        3110,        2594,       -2628,       -7617,        -502
Y10,           0,           0,           0,           0,       20123,           0,           0,           0,      110233,           0,           0,        3840,           0,           0,           0,           0,        1103,       15582,           0,       20516,           0,        4032,        3574,           0,       35100,       12013,           0,       12055,       75745,           0,       10262,       10648,           0,          88,       57982,       17255,           0,           0,           0,       28767,        1111,           0,           0,        5551,           0,           0,           0,           0,           0,       67522
Y11,          14,        1449,      248630,           0,     1607308,      281980,       72148,        8708,           0,           0,           0,       80320,        7001,           0,         815,       35961,      112841,           0,         176,      138097,       31402,      233538,      132808,           0,        3900,      126790,           0,      319985,           0,      108860,           0,     1584898,           0,       73158,     1822128,      137663,      108118,      280554,       14686,       46667,         409,           0,         408,      115243,           0,           0,      868672,      331382,        2379,        2088
Y12,           0,           0,       89683,         874,      468704,       50792,         894,           7,        5276,           0,           0,       13988,          50,           0,          20,           0,           0,           0,          18,       58217,         752,       57809,        1869,           0,         140,       10888,          62,       54003,       10724,        3899,         559,      353639,           0,       15851,      917653,       35990,       16554,       80805,         580,        3358,           0,           0,         300,       21555,           0,           0,      434106,       87392,         450,        1824
Y13,           0,           0,           0,           0,           0,           0,           0,           0,        2829,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        1457,           0,           0,           0,        1949,           6,        1324,           0,           0,           0,           0,           0,           0,           0,          24,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        1936,           0,           0,           0
Y14,          78,        2049,      160587,        1399,     1333018,      243098,       63550,        7443,       77379,           0,           0,       43172,        7218,         767,         677,       30689,      101539,       16778,          60,      191262,       30995,      114538,      106323,           0,       32801,      115181,         353,      435266,       97771,       84725,        2423,      960865,           0,       83632,     1715539,      144032,       73342,      195191,        3329,       62592,        1675,           0,         477,       89129,           0,           0,      786290,      362111,        1842,       63200
Y15,           0,           0,       48470,          97,      338895,       25772,        4700,           0,       27462,           0,           0,       10770,           0,           0,         156,        4049,        5104,         356,           0,       26431,         280,       94424,       15542,           0,        6946,       19392,          32,        6625,         462,        9692,        6659,      189044,           0,        6653,      168436,       21076,       46047,       55428,         348,        4685,         194,           0,           0,       17257,           0,           0,      168620,       22919,           0,        3326
Y21,           0,         957,      980662,       12140,     5161095,      567047,       14014,        2002,       98188,           0,           0,      176071,        1273,         509,         519,        1588,        7301,        6020,           0,      541904,        6709,      681154,       16413,           0,        4083,      189288,         824,      590025,      141203,       73898,       15959,     4204420,           0,      175368,     8892788,      455844,      214754,     1005998,       11614,       68054,         471,           0,        4778,      282321,          20,           0,     4687778,      996193,        7956,       14459
Y50,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        4799,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
Y51,           0,           0,           0,           0,     2340489,       29229,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,      181932,           0,           0,           0,           0,           0,           0,           0,           0,           0,      287056,           0,           0,           0,           0,           0,           0,           0,           0,       82744,           0,           0,           0,           0,           0,           0,           0,           0,           0,        3082,           0
Y52,           0,           0,           0,           0,       22016,        2092,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       25108,           0,           0,           0,           0,           0,           0,           0,           0,           0,        9221,           0,           0,           0,           0,           0,           0,           0,           0,         939,           0,           0,           0,           0,           0,           0,           0,           0,           0,        4547,           0
Y53,           0,           0,           0,           0,     2611674,       18653,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,      129862,           0,           0,           0,           0,           0,           0,           0,           0,           0,      287236,           0,           0,           0,           0,           0,           0,           0,           0,       71609,           0,           0,           0,           0,           0,           0,           0,           0,           0,        6030,           0
Y54,           0,           0,           0,           0,      116687,        1632,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       41151,           0,           0,           0,           0,           0,           0,           0,           0,           0,       27655,           0,           0,           0,           0,           0,           0,           0,           0,        4873,           0,           0,           0,           0,           0,           0,           0,           0,           0,         583,           0
Y55,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
Y61,           0,           0,           0,           0,      145364,       41986,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,      335452,           0,           0,           0,           0,           0,           0,           0,           0,           0,      135409,           0,           0,           0,           0,           0,           0,           0,           0,       23946,           0,           0,           0,           0,           0,           0,           0,           0,           0,       53102,           0
Z00,     2097747,      880018,     1282892,     1084056,    12003701,     1618721,     2096748,      573586,     5270941,     2387790,     1518237,      467534,     3532678,     2154978,     1638938,     1187891,     2009040,     2438250,      603582,     2330900,     2823466,     4498828,     2503110,      986032,     1914685,      427380,      836290,      586980,      476190,     4285141,      908125,     9744357,     2707150,      434720,     4529244,     1600527,     1558880,     4576908,      586047,     2107818,      337902,     1829908,     4994814,      944010,      362453,     3032098,     2832003,      734489,     2043091,      304245
Z18,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
Z41,      152634,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       41202,           0,           0,       84141,           0,           0,           0,       72459,           0,           0,      444368,           0,      122830,           0,       36406,           0,           0,      204651,           0,           0,           0,           0,           0,      354717,           0,      168672,      667257,           0,           0,           0,           0,           0,       69345,       28309,      258992,      259448,       45130,           0,       31778
Z42,      108519,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       26562,           0,           0,       55634,           0,           0,           0,       41614,           0,           0,      351750,           0,       95894,           0,       28101,           0,           0,      144949,           0,           0,           0,           0,           0,      219444,           0,       85508,      442451,           0,           0,           0,           0,           0,       43195,       23320,      170934,      183270,       36150,           0,       27028
Z43,       26943,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        7310,           0,           0,        2689,           0,           0,           0,        9902,           0,           0,       30037,           0,        1439,           0,        6005,           0,           0,       18144,           0,           0,           0,           0,           0,       53986,           0,       18765,      183650,           0,           0,           0,           0,           0,        9169,        4624,       53613,       52385,        4094,           0,         950
Z44,         932,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,         229,           0,           0,          56,           0,           0,           0,         590,           0,           0,           0,           0,          17,           0,          50,           0,           0,        1366,           0,           0,           0,           0,           0,         523,           0,         182,        3281,           0,           0,           0,           0,           0,           0,         551,         882,         218,           0,           0,           0
Z45,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
Z46,      123869,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       12999,           0,           0,       47384,           0,           0,           0,       36433,           0,           0,      192367,           0,       47134,           0,       19100,           0,           0,       55703,           0,           0,           0,           0,           0,       96713,           0,       71335,      216720,           0,           0,           0,           0,           0,       29551,        9855,      125771,      152051,        6553,           0,        5789
Z47,        7846,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,         178,           0,           0,        8319,           0,        1163,           0,         713,           0,           0,         933,           0,           0,           0,           0,           0,        7771,           0,        4992,       19356,           0,           0,           0,           0,           0,           0,         926,        7429,        7136,         458,           0,           0
Z48,      113321,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        4946,           0,           0,        5786,           0,           0,           0,       15095,           0,           0,      133837,           0,       21683,           0,       16359,           0,           0,       13933,           0,           0,           0,           0,           0,       19642,           0,       12741,      175720,           0,           0,           0,           0,           0,       13612,        9928,      108219,      129280,        1856,           0,        1174
Z51,           0,           0,      234150,           0,     1278103,      224920,      515826,       74513,     2071868,           0,           0,       51980,     1475813,      359491,      150988,       73077,      401850,      355965,      114055,      770780,     1610939,     1120927,      279934,           0,      207516,       26312,           0,           0,       99378,     1287001,           0,     1880983,           0,           0,     1700595,           0,      244417,     1315054,       57512,           0,       60538,           0,           0,           0,       48608,      825964,      302190,       85861,      425900,           0
Z52,           0,           0,      120031,           0,      669988,      125025,      288458,       41478,     1091374,           0,           0,       28131,      815099,      216001,       92939,       37304,      267714,      191989,       61414,      394273,     1069334,      598245,      172609,           0,      115253,       13551,           0,           0,       57928,      671930,           0,      968708,           0,           0,      888228,           0,      140751,      623019,       32146,           0,       12332,           0,           0,           0,       27838,      454275,      151009,       46485,      259176,           0
Z53,           0,           0,       22974,           0,      138932,       23677,       22960,        5374,      115302,           0,           0,        9938,       51477,       27268,       18337,       16057,       29985,       24302,       11319,       28971,       58877,       49429,       52563,           0,       25304,        7035,           0,           0,        5183,       41263,           0,       54320,           0,           0,       82733,           0,       54237,       42049,        2788,           0,        4667,           0,           0,           0,        4104,       82053,       41977,       10736,       25885,           0
Z54,           0,           0,       91145,           0,      469183,       76218,      204408,       27661,      865192,           0,           0,       13911,      609237,      116222,       39712,       19716,      104151,      139674,       41322,      347536,      482728,      473253,       54762,           0,       66959,        5726,           0,           0,       36267,      573808,           0,      857955,           0,           0,      729634,           0,       49429,      649986,       22578,           0,       43539,           0,           0,           0,       16666,      289636,      109204,       28640,      140839,           0
Z61,           0,           0,           0,           0,           0,           0,           0,        8647,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,      375085,           0,      366984,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
19H,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
19X,     4213694,     5287972,     2539685,     1763013,    33225068,     2659408,    12430852,     3203268,    11074300,     3665161,     4156806,     1122423,    18233523,     4617738,     1562513,      336964,     6024486,    10628963,     2488657,     7530138,    20955674,     9495768,     3940713,     1412925,     5718932,     1594540,     1595550,     1703880,     4126744,    19039265,     1741777,    50607820,     3489720,      960447,    11616346,     3785986,     6360578,    11246589,     4143675,     4069096,     1753565,     2722644,     7686395,     1900618,     1483356,     6499853,     6519274,     2721704,     6624538,      921627
21A,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       73380,           0,           0,           0,           0,           0,           0,       72310,           0,       37500,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
21B,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
21C,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
21D,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        7600,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
21F,           0,           0,           0,           0,     1079000,           0,      163063,       14150,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       76510,           0,           0,       19850,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       80020,           0,           0,           0
21G,       14405,           0,           0,           0,      251000,           0,       36379,       18209,           0,           0,           0,           0,        8000,           0,           0,           0,           0,        2650,           0,       19079,       67585,           0,           0,           0,           0,           0,           0,       21921,        5517,           0,       22452,           0,           0,           0,      366855,           0,       89555,           0,           0,       21030,           0,         300,      160346,           0,           0,      124000,       61000,           0,           0,           0
21X,       32100,      105000,           0,       94620,     2818000,          56,     1421749,       43916,      251850,      933480,      322870,           0,     1035505,           0,           0,           0,           0,      528863,       81415,      243877,     2355776,      765000,      174485,      147570,      192835,      142095,           0,      318330,       89227,      413395,           0,     2678658,      157500,           0,      152030,           0,      135840,      571000,      756680,      198000,           0,           0,      267563,      156600,       83325,           0,     1455710,           0,      849975,           0
24A,           0,           0,           0,           0,           0,        4000,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       41845,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
24B,           0,         598,           0,           0,      649835,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,      612450,           0,           0,           0,       71020,           0,           0,           0,      396200,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
24C,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
24D,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,      813725,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
24F,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,      176140,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,      137711,           0,           0,       37515,           0,           0,           0,           0,      341870,           0,       58590,           0,           0
24G,       28227,       14265,       90612,       45658,     1029460,       58526,           0,         167,      669162,           0,           0,       14945,       36308,      186446,       71149,        2761,      246376,           0,           0,      160494,           0,      538934,       45080,       15499,      135077,           0,       13105,       20930,           0,      394914,       40337,      254755,      118616,       14275,       57244,        1000,           0,      286284,           0,       31754,           0,        3512,      461673,       53724,           0,       73265,       14940,           0,           0,       14560
24T,      216415,      354450,       80745,      185600,     2340154,      604528,      616883,      329709,      367313,      252844,      119520,      258055,     2110550,      328857,      250587,           0,      159655,      394769,      167063,      772601,     2476983,      671855,      418196,       86400,      684044,      387829,      302965,      116285,      333517,     1574808,      342015,     2077055,      506261,      152485,     1037979,      155330,      246115,     1021900,      415183,      191870,      358232,      196910,      246461,      331520,       66807,     1072465,      365039,      151407,      694860,      187865
24X,        5055,       17941,      542385,           0,      288056,       90135,       24215,      220745,      392560,       97470,      419450,           0,       13625,      480820,       96030,      252705,      257010,      158850,      129920,      128441,      163525,      674601,           0,           0,      148500,       34469,        1700,           0,        9570,     2732477,      198990,     2605144,           0,        6263,       87500,       50000,       40000,      540900,      258690,       66817,       10210,       37700,      311698,       15000,       36550,      164823,           0,       14960,           0,           0
31A,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        5866,           0,           0,           0,           0,           0,           0,       68770,           0,        8582,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
31B,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
31C,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
31D,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       35800,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
31F,           0,           0,           0,           0,      194545,           0,       27105,        8454,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       77900,           0,           0,        3070,        6490,           0,           0,           0,           0,           0,           0,           0,           0,        6500,           0,           0,           0,           0,           0,         405,           0,           0,           0,           0,           0,           0,           0,        5640,        8000,           0,           0
31G,       38855,           0,           0,           0,       66750,           0,        4500,        7046,           0,           0,           0,           0,       20843,           0,           0,           0,           0,        1962,        1355,        5911,       51845,        9400,         975,        1274,           0,           0,           0,        3776,        4804,        7700,       35570,        5800,           0,           0,      279305,           0,       80126,           0,        1790,        5020,           0,        8684,      100075,           0,           0,       74650,       63390,           0,           0,           0
31X,       46765,      115670,           0,        6335,      309915,        5834,      758076,       44455,      115825,      408630,      269170,           0,      709172,           0,           0,           0,       13550,      472031,       45800,      116275,      748836,      234300,      130019,      134175,      168725,       12195,           0,      216624,       46385,      191275,           0,      561627,       74390,           0,      181900,        7400,      303369,      473265,      214297,      166355,           0,       55888,      333535,       64995,       49430,       10990,     1054360,       40400,      650945,         660
34A,           0,           0,           0,           0,           0,         300,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        2380,           0,       21650,           0,           0,           0,           0,           0,          44,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
34B,           0,        1812,        6085,           0,      646210,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,      676805,           0,           0,           0,       86465,           0,           0,           0,       96715,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
34C,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,         355,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
34D,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,      399890,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
34F,           0,           0,           0,           0,           0,           0,           0,           0,           0,        8715,           0,           0,           0,           0,           0,           0,       32453,           0,         445,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       78890,           0,           0,       37015,           0,           0,           0,           0,      163699,           0,        2452,           0,           0
34G,       33527,        3219,       85944,       42253,      412721,       97469,         845,        2986,      361857,           0,         970,        2308,       24006,      171601,       24294,        6802,      107786,        5068,        1069,       52323,           0,      438295,       28297,        6058,       84893,        3191,       29445,        3648,         126,      227426,       11618,      157362,       37660,        3512,       48458,        7970,        5139,      176388,       71053,       17407,        1919,       81023,      460723,       24834,        7232,       89085,       13621,       11205,         596,        1879
34T,      249923,      694168,       29821,       98620,     2407089,      301308,     1937929,      215745,      247563,       56936,       82339,       83181,     1925745,      217614,       94671,        7365,      212632,      568258,       91849,      304758,     1377082,      480508,      288760,      122883,      252742,      268191,      115706,       25253,      192610,     1329331,      500316,     1158863,      342562,       94478,      492698,      287744,      156356,      323563,      207618,      103002,      213033,      159069,      228397,      223305,       88979,      358342,      147250,      160182,      208611,      225075
34X,       12130,       29755,      282735,        3665,      297785,       37007,       13483,       15601,      148517,        3263,       24607,       17946,       35386,       66223,        2406,      108862,      199317,      739066,       89485,       39242,      175082,      419562,        4000,        1185,      142085,       26844,       14110,          40,        7179,     2617811,      202280,     1481390,         683,        8312,       44863,       15084,       42305,      479470,       84704,       25641,       37352,        2463,       13760,        4516,       15918,      177238,        1165,      130098,       10370,        1650
41A,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,      199039,           0,           0,           0,           0,           0,           0,      154920,           0,      205936,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
41B,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
41C,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
41D,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,      522870,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
41F,           0,           0,           0,           0,     3704225,           0,      332115,       66612,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,      528730,           0,           0,       67388,       47910,           0,           0,           0,           0,           0,           0,           0,           0,       25500,           0,           0,           0,           0,           0,         670,           0,           0,           0,           0,           0,           0,           0,      145810,       74000,           0,           0
41G,      434048,           0,           0,           0,     1203150,           0,       64729,       83628,           0,           0,           0,           0,      150090,           0,           0,           0,           0,       38093,       12135,       80692,      278729,           0,        7500,        5361,           0,           0,           0,       67415,       63758,       36700,       92591,       62080,           0,           0,     1838290,           0,      285074,           0,         805,       44570,           0,      148893,      411847,           0,           0,      400968,      308702,           0,           0,           0
41X,      592391,      595495,           0,      155370,     6609370,       25527,     6169682,      361496,     1415095,     2885970,     2328546,           0,     5551700,           0,           0,           0,       44155,     3489263,      417545,     1573198,    10949953,     1185200,     1559439,      622881,      804225,      205066,           0,      650266,      619936,     3073755,           0,     7703255,      642624,           0,      988430,       16285,     4960516,     4840163,     1181029,      800573,           0,      475497,     3005455,      330900,      426195,      113828,     3981994,      297600,     2752575,           0
44A,           0,           0,           0,           0,           0,       16350,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,      187724,           0,      147928,           0,           0,           0,           0,           0,        6005,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
44B,           0,      377307,       40403,           0,      435260,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,     3571585,           0,           0,           0,     1374020,           0,           0,           0,     2237206,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
44C,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        1796,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
44D,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,     4209080,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
44F,           0,           0,           0,           0,           0,           0,           0,           0,           0,       25195,           0,           0,           0,           0,           0,           0,      870075,           0,        1035,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,      313622,           0,           0,       49565,           0,           0,           0,           0,      876013,           0,      331040,           0,           0
44G,      564542,       32434,      670678,      268100,     2465219,      569205,       12465,       42595,     5095487,           0,        4285,       64716,      405267,     1449856,      512630,       55650,     1312826,       69200,       16279,      436772,           0,     1381917,      536458,       54389,      491734,       72687,      117128,       68426,        1460,     1186450,      164245,     6909965,      439333,       60667,      591663,       84237,       29685,      779657,      178336,      223439,       10389,      258536,     1848576,      101704,       62282,      270405,      182550,      193051,        4475,       46598
44T,     2236055,     3668354,      458988,     1479811,    18067513,     2226941,     4830070,     2336774,     2956202,     1244515,      648865,     1108018,    11891192,     1958893,     1143891,       10425,     1944439,     3989631,     1390868,     3990759,    11486109,     5916190,     1972418,      893621,     4782129,     1351232,     1394873,      801919,     3484414,    10113936,     1085016,    19787762,     2704976,      819485,     6594458,     1224624,      820630,     5380507,     2946255,     1156863,     1610329,     1683861,     1638452,     1658233,      835289,     4628494,     2557196,     1258149,     4541801,      813974
44X,      301661,      262012,     1678773,       34737,     4857696,      139093,      542141,      644764,     2827960,      315101,     1659864,      119253,      735485,     1749674,      216111,      419712,     2447031,     2335569,      799190,     1724530,      820382,     1869900,           0,        1575,      152855,      226323,      242058,        2495,      562356,     5007017,      253935,    12202685,        6669,      147006,     2092626,      949226,      199175,     1134845,      760174,       66626,      218339,       87152,     1096816,       48975,      215555,     1112564,       14175,      440484,           0,       34216
52T,       41205,           0,           0,           0,     1478842,        4855,           0,        6265,      131713,           0,           0,       23500,      297020,           0,           0,           0,           0,           0,           0,       26600,      613492,      377435,           0,           0,      289395,           0,           0,      154355,           0,     2169962,      330670,     1546675,      145192,           0,           0,       62385,       87135,      346025,      123240,       23330,       22970,           0,      432023,           0,       23040,       88700,     1051485,           0,           0,       78650
53T,       41205,           0,           0,           0,     1428922,        4855,           0,        6265,      123100,           0,           0,       23500,      297020,           0,           0,           0,           0,           0,           0,       26600,      655042,      377435,           0,           0,      289395,           0,           0,      165235,           0,     2158392,      335510,     1478500,      131591,           0,           0,       62385,       81874,      346025,      116035,       23330,       22970,           0,      403758,           0,       20610,       88700,      977795,           0,           0,       78650
61V,         148,        3000,           0,        1437,        6212,           0,      575300,       12107,        9342,           0,       44822,           0,        4926,        6255,        9021,           0,           0,       98602,       95989,           0,      152974,        1027,           0,           0,       56410,       16918,         188,        4147,           0,       17254,        9944,     1196400,           0,        3320,       91626,         527,       90000,      393760,      250153,      151350,         166,       67293,         109,       10877,        2518,         401,         444,       47940,           0,           0
64V,          27,        6000,           0,        4151,      481276,           0,        5300,        6051,         742,           0,       45203,          35,        7896,       13247,       11355,           0,           0,       72302,           0,           0,      273824,        3376,           0,           0,       70200,       12369,         164,         979,           0,       14479,        9261,      899150,           0,           0,       87687,         429,           0,      513326,       83464,      155350,         600,      152427,          32,       13421,        3250,         369,        1561,           0,           0,           0
71W,       73493,      440543,           0,           0,       91164,           0,      900876,       44611,      772460,       54495,        9032,           0,      428270,           0,           0,           0,       44155,      567631,        1309,        7072,      221682,           0,      271020,      128626,       86408,           0,           0,       16245,      154805,        6776,           0,     1842999,        2783,           0,           0,           0,     3389803,       12798,           0,       63343,           0,        9396,     1541540,       17426,           0,           0,       60924,        4181,       73734,           0
74W,     2346150,     3857647,      520134,     1572992,    18424469,     2724090,     4842535,     2493600,     4869902,     1411814,     1392497,     1127811,    11937014,     3526284,     1219815,       74786,     2728149,     5053263,     2179448,     4255317,    11554396,     7131948,     2167294,      901077,     5107730,     1425441,     1413320,      835502,     3861239,    10516091,     1177364,    27355951,     2779140,      989953,     7327397,     1739458,      749605,     7162777,     3143568,     1633088,     1688223,     1831536,     1726809,     1671430,     1041506,     6350920,     2633227,     1511647,     4329991,      817993