POP,        4253,         604,        4218,        2484,       31589,        3747,        3275,         717,       14166,        7201,        1187,        1163,       11830,        5803,        2842,        2565,        3860,        4342,        1241,        5042,        6074,        9549,        4610,        2697,        5324,         870,        1637,        1530,        1148,        7945,        1685,       18136,        7195,         641,       11151,        3278,        3141,       12072,         990,        3673,         729,        5256,       18724,        1951,         585,        6618,        5431,        1828,        5123,         480
I99,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
A01,           0,       49252,        1263,           0,           0,           0,       20236,           0,           0,         559,      264712,          14,           0,          70,           0,           0,           0,           0,          61,       74224,      230242,         429,         761,           0,           0,          81,         790,           0,          94,           0,           0,       22365,           0,           0,           0,           0,           0,        8119,       20917,         214,           0,           0,           0,           0,           0,           0,          64,           0,           0,         327
A03,           0,       54835,           0,           0,           0,           0,         798,           0,           0,           0,           0,         164,           0,           0,           0,           0,           0,           0,           0,        3336,           0,           0,           0,           0,           0,        2025,           0,           0,           0,           0,           0,           0,           0,      117122,        2296,           1,           0,           0,        1655,           0,       44320,           0,           0,           0,           0,           0,           0,           0,           0,           0
A09,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       22672,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        1561,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
A10,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        3787,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
A12,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        7899,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
A16,      196003,       21085,      159138,       91457,      775273,      256576,       85801,       63401,      276433,      232121,       55565,       57179,      354280,      505490,      175703,       96846,      140923,      215201,       52293,      217937,      182957,      497909,      216902,      124575,      170622,       54157,      107027,       46037,       72833,      212679,       82714,      377209,      531333,       83496,      450830,      201485,      135413,      451413,       47155,      181903,       30812,      173025,      476451,      111192,       37632,      445411,      352938,       84273,      201504,       29639
A18,      555593,       72915,      372891,      203440,     2658636,      630795,      290312,      199246,      473281,      456708,       61910,      102552,      842953,      843463,      362394,      265567,      468132,      595098,      122733,      481484,      537382,     1336020,      546508,      214632,      527790,      110158,      147160,      103006,      170755,      592471,      183321,      840765,      487384,      121210,     1480578,      313663,      297183,     1374964,      127783,      409211,       74041,      349385,     1808877,      368539,      174156,      829264,      642485,      206661,      646192,       35097
A21,       13935,         102,        7283,        9784,        4260,        6940,        2768,         805,        7204,       37607,        3293,         707,        1177,       17826,         279,         976,       13944,       14893,           0,        5539,         421,          35,        2171,        4881,        1745,        8450,        2312,        2016,          68,        4551,       22608,       70517,        5963,         959,        4325,        4381,       16763,       62237,        4862,       20362,         184,        5955,        5287,       13477,         147,       22447,        1867,       13652,        6863,         494
A36,      674267,           0,           0,      298587,     1777634,       49417,      217250,       34843,      124954,      220745,      129019,        5297,      280068,      378643,      367668,      218167,      232774,      436971,        6566,      147235,      220119,      975245,      362506,      187766,      234494,        2233,      214156,        4133,        3600,      272066,      255842,     1435918,      245346,       22407,      720981,      177448,      319307,      795506,        5475,      518142,        3466,      307718,      639806,      253924,         877,      845824,      246295,       38174,      429483,        5688
A44,        1714,        5578,        3034,       19762,       30128,         965,         573,        1511,        6307,       10876,           0,        6095,        3098,         550,        7197,         840,        7153,         576,         943,       11294,        2633,         212,       14511,        2361,        9139,         614,        3001,       23719,        4285,         364,        2518,        5341,        1037,        3255,         876,        5336,       24282,        1615,           0,           0,         311,        2710,       11743,       14301,         107,           0,        8057,           0,       12937,        1632
A45,           0,       41422,           0,           0,      135721,           0,         239,       49064,      347854,       16733,           0,           0,      286892,       75370,           0,       48558,       11673,       32220,       42813,      143417,      165199,       19028,           0,           0,           0,           0,           0,           0,       48546,      549888,           0,      367224,        1546,           0,      106662,       98118,          29,      310707,        9692,           0,           0,           0,       55324,           0,           0,       51076,       76679,       47507,           0,           0
A50,        2100,        6105,           0,           0,       16480,        9997,       13120,         231,        7015,           0,       38597,        1234,       13863,        3119,         305,           0,        1433,        1376,        2852,       14727,       28158,       14782,        1813,           0,        2475,          81,        1182,        1551,        9534,       14059,        4638,       26506,        1210,         372,       12929,        4730,        2726,       11737,        2605,        3124,           0,        1722,        3254,         831,         725,        6713,        6708,        2413,        1266,        1076
A54,        5819,         861,       15407,        5153,      161975,        8508,          35,           3,       11791,       14252,        1698,        1149,       10590,       18027,        8420,       17128,       26266,        8903,        6199,        3061,        1253,       15188,       16061,       11762,        8064,        3144,       12437,         972,        3330,        2926,       15934,        7814,       21395,        5960,       18023,        3421,       13438,        3776,         617,        5329,        3990,       60928,        8786,        2602,         357,        3879,        2406,        2759,       25023,         962
A56,        7734,        4209,         100,        2094,        3343,        1930,         862,         121,        6530,        5196,          23,       60112,           0,        2441,           0,           0,         900,        2164,        2777,        3623,           0,        6262,        8429,        2273,        1648,        5881,           0,         683,         291,         864,           0,           0,        3354,           0,        1046,          72,       79728,       13068,           0,        2814,         817,        1174,        1903,         305,         666,         446,      170222,         696,        2973,           0
A59,         330,        7591,        1390,        1139,      380718,        5338,         259,        2752,        1895,       13029,        7211,         646,           0,        6711,        2980,         863,         292,       13082,         430,        4468,       11810,        6598,        6008,        4420,       14956,        6278,        2762,        1215,         126,       27310,        1357,        1523,        1947,         182,        5085,        2207,        7509,       22681,        1043,        1896,        1500,        2600,        7125,        1225,         750,         154,       18019,        2844,       24679,        1070
A61,       25207,           0,        3100,       10459,       58169,        1792,        3293,        3643,       19740,      155502,        8776,         727,        2854,       10246,        1889,        1848,       43535,       44156,        3629,        8469,       13647,       21799,       10785,        5959,        1340,         999,        5195,        1991,        9053,      248167,        1821,       62583,        4054,         998,        8579,       20001,       12646,       16606,        7633,       18649,        4719,       22775,       20071,        5515,        5322,        6039,         684,       17173,        7125,          36
A80,           0,           0,           0,           0,         101,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       25182,           0,        1183,           0,           0,        1220,           0,           0,           0,        2029,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
A81,           0,           0,        1850,           0,           0,        3627,      155707,       48331,       48140,        3031,        1629,        2966,           0,        3806,        8477,           0,         304,           0,        3477,           0,       10742,         198,           0,           0,           0,           0,           0,        3368,           0,       43527,           0,           0,           0,           0,        1666,         835,           0,           0,        5067,        6001,           0,           0,           0,        4726,           0,           0,        4184,        1304,       10365,           0
A87,       58560,           0,           0,           0,           0,           0,           2,           0,           0,       75586,       54702,           0,           0,        4469,           0,           0,           0,       50787,           0,       44077,       70804,        3750,           0,       12750,           0,           0,           0,           0,         385,       14988,           0,        5247,       25869,           0,           0,           0,           0,           0,         234,       55749,           0,           0,           0,           0,           0,        1117,           0,           0,           0,           0
A89,       79863,       14898,       53859,       46181,      469260,       66966,       59275,       50109,      365745,       87727,       53396,       41068,       32659,      162710,       32163,       55140,       75361,      221773,       35359,      119463,      146381,      178500,      175235,       80830,       66900,       38470,       43902,       53184,       28176,      456623,       24810,      424839,      143596,       12931,      156381,       42042,      180883,       74011,       40639,       64151,       13250,      166249,      232150,       34946,       21765,      175091,       59879,      111013,       91104,       13072
A90,      129965,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       45718,           0,           0,       83570,           0,           0,           0,       68101,           0,           0,      458038,           0,      131181,           0,       37241,           0,           0,      211263,           0,           0,           0,           0,           0,      370196,           0,      175636,      676044,           0,           0,           0,           0,           0,       80138,       27953,      247919,      252536,       45059,           0,       32846
A91,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       65130,           0,           0,           0,           0,           0,           0,       49642,          73,       25543,           0,           0,           0,           0,           0,        4308,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
A92,           0,       23847,       19200,           0,      136679,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       31518,           0,           0,           0,     1383087,           0,           0,           0,      237787,           0,           0,           0,      605656,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
A93,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        6119,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
A94,           0,           0,           0,           0,           0,           0,       21310,        5682,        4737,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       88999,           0,           0,           0,           0,           0,           0,           0,           0,           0,      402821,           0,      725265,           0,           0,           0,           0,           0,           0,        7685,           0,           0,           0,           0,           0,           0,           0,           0,         140,           0,           0
B01,          42,       43578,         383,          99,         309,         256,           0,           0,           0,           0,       11744,         208,       89133,           0,           0,           0,         100,           0,         373,       11079,       32772,       48458,       29072,           0,           0,         370,       10594,           0,        9596,           0,          59,        1521,       10682,           1,           0,           0,           0,        5891,       85309,       26655,        5875,           0,           0,       38199,           0,           0,         393,           0,       18507,       10704
B21,      672791,      142394,      589698,      310713,     4272882,      750796,      247266,       78854,     1407314,      865950,      200369,      149144,     1326702,      568711,      419082,      311755,      545937,      659957,      115045,      543432,      482204,     1253049,      598097,      450050,      470127,      131347,      184549,      125920,      101133,      732955,      356206,     1923524,      869561,      130254,      967335,      416454,      466339,     1351813,      109729,      513457,       88722,      550151,     2412555,      346375,       81497,      808094,      795626,      299668,      677087,       70903
B22,       65118,       29289,       36409,       37050,      448299,       46868,       89446,        9437,       46792,      121723,       22451,       25250,      193876,       73528,       40515,       26221,       45550,       62684,       25564,       31450,       95022,      169948,      100908,       48897,       94654,        6140,       23594,       33922,       19235,      130436,       28263,      323772,       67289,        8158,      163278,       44223,       49024,      261061,        6153,      104567,       12317,       71930,      278273,       30082,        8864,       72648,      117997,       23114,       89537,       11650
B30,       60202,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        4340,           0,           0,           0,           0,           0,           0,        1127,           0,           0,           0,         300,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,      177947,           0,           0,           0,         520,           0,           0,           0,           0
B42,      124501,       35073,      118511,       73209,      963760,      209067,      150150,       39236,      474156,      264487,       68462,       60731,      380707,      140110,      192324,      108719,      128322,      180316,       32548,      178467,      566022,      621681,      142385,       96072,      239670,       42918,       58094,       31545,       11674,      312587,      100909,      771080,      196818,       20710,      387941,       87981,      310308,      438116,       57728,      158127,       35165,      150454,      707411,       87678,       39230,      132974,      409168,       58293,      131657,       16720
B46,      334162,      230531,      221439,      261043,     2316951,      233603,      423624,       72693,      839673,      614941,      174583,      132949,      825791,      366965,      288750,      197406,      244942,       35412,       97392,      357154,      987477,      568956,      263743,      199852,      471738,      137121,      151754,      128120,       72103,      506949,      161031,      843464,      719951,      126307,      770104,      229294,      173921,      919136,      172313,      245005,      130959,      333123,     1078963,      114258,       80572,      386945,      482237,      284007,      290618,      118899
B50,           0,       24587,        8381,           0,       75804,       29292,       30778,       38265,      131524,      115439,       82769,           0,       97381,       43652,       52743,       16400,       36292,       41705,       21093,       50710,      203237,      101530,       31703,       41895,      113631,       21485,           0,        7211,        8518,      221740,           0,       96815,       79747,       10026,       62932,         393,       63284,       88706,        7296,       17187,       20321,       25243,           0,       11844,       25274,       43418,           0,       16610,           0,        3458
B54,       26839,        4543,       17066,       13140,        3274,        4569,        5841,         540,       40078,       32356,        5029,        5305,       23273,       18764,       18107,       17402,       22810,       24218,        7275,        2087,        7081,       18568,       19454,       60406,       19142,        6166,       21066,        2817,        4383,       10084,       10096,       20207,       47557,       10293,       28785,       20123,       11076,       23628,        2799,       14463,       10451,       16560,       21447,       13432,        5103,       28684,       10470,       12293,       12588,        4266
B59,       14829,       48460,       17901,       23932,       71701,       17219,       17955,       14744,       42537,       63660,        5553,       22199,       20545,       19732,       19293,           0,       45981,       16531,       14288,       23328,       22709,       29984,       23123,       10079,       30237,       15377,        5769,        7677,        5841,       20203,       26979,          40,       47416,       12523,       59166,       32513,       42687,       88807,       11223,       18857,        7415,       16742,       72513,       15401,        4380,       28682,       37080,       62359,       61309,       31680
B79,     1672953,      319895,     1515830,     1206853,    14627934,     1258001,     1675156,      244398,     4013698,     2927753,      484883,      324427,     4433091,     1881235,      900064,      719190,     1854000,     3426223,      795399,     1505905,     2493096,     4003380,     1977470,     1440029,     2157753,      381557,      561174,      343269,      436085,     3121504,      605057,    15818773,     2706387,      271593,     5082549,     1067524,     1434107,     5431094,      628481,     1743483,      302568,     2445937,     7030865,      699254,      315065,     1497599,     1838021,     1141931,     2023386,      158838
B80,           0,           0,        1392,           0,      134327,           0,       24772,           0,       73913,           0,           0,        2853,           0,          83,           0,           0,           0,           0,           0,           0,      161375,           0,           0,           0,        1584,           0,           0,           0,        2597,        6911,        8674,           0,           0,           0,       89432,           0,           0,           0,           0,           0,           0,       28090,           0,           0,           0,        7626,           0,           0,           0,           0
B89,      222656,       96949,      153496,      141742,     4611540,      112251,       90375,       53867,      561158,      146401,       64017,       57472,      363275,      192997,      152641,      172871,      104314,      194697,       59991,      205944,      241305,      301428,      208340,       99873,      159503,      116834,       74737,       55556,      119872,      425806,       36540,     1258349,      299631,       70465,      333425,       83175,      451491,      508296,       45026,      111410,       44631,      170234,      707249,       96172,       70969,      288511,      232319,       80715,      231040,      369259
B91,           0,           0,           0,           0,           0,        3715,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,         921,           0,           0,           0,         514,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
B92,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
B93,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,         266,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
B94,           0,           0,           0,           0,           0,           0,           0,        2075,       10885,        9113,           0,           0,       16012,        7340,        9427,           0,        5686,           0,           0,      103207,        4088,       13468,           0,           0,           0,        1471,           0,           0,           0,      291443,           0,      625560,           0,           0,           0,           0,           0,           0,       15029,           0,           0,        5830,       12568,           0,           0,           0,           0,        7773,        8839,           0
D21,       12797,        3066,        8302,        3722,       90342,        2841,           3,        7063,        1202,       18138,         894,           6,       15167,        2485,        1493,        3721,        6705,        2135,         163,       19408,        9201,       23107,        3807,        5863,        1027,        2013,        5837,        6991,        2698,      163281,       12076,      152090,        5783,          99,       24088,       17131,       11898,       41435,          93,       25984,         127,       15514,       67957,       30880,        1919,       28276,       20340,        2012,        2129,       12568
D30,           0,           0,       20640,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
D42,         530,         117,       36972,         894,        3595,           0,           0,           0,       51612,           0,           0,       23336,           0,        6238,       42931,           0,           0,        4669,           0,       29860,        3787,      214188,       14277,          39,         158,           0,        2938,         876,           0,        7741,       30757,           0,        1278,           0,       23249,         724,           0,           0,           0,        7315,        3102,        5245,        1809,         113,           0,       50983,           0,           0,       12321,        1033
D46,       12622,           0,       10383,        2273,      368929,       13712,           0,           0,        5090,       28021,           0,        5352,       46710,       22108,        4295,       25615,         451,           6,        3530,       15881,         140,       49347,       24998,        2213,       31590,        1260,        9096,        5465,        6161,        6433,           0,          50,       10639,       13468,       16827,       16870,        8759,        6340,           1,         115,        2519,       11448,        1012,        3100,         393,       35724,        4591,           0,       41378,        2680
D79,        1362,           0,      256300,           0,     1872611,           0,           0,           0,      209214,           0,           0,         239,      292875,       77290,       44989,           0,           0,           0,           0,        1116,        3239,       51461,      126559,       96437,          19,       12882,        3395,       21964,      118521,        5155,           0,     4169288,      386785,       13160,       42751,        1304,       35521,           0,           0,       49586,           0,       10141,      287222,        3818,           0,           0,           0,           0,         361,           0
D80,           0,           0,        3567,           0,         110,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,      271039,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       22993,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
D89,       19013,        1566,        9842,        2912,      119733,         739,        5369,        2251,       42418,       15678,       17703,         444,       41127,       16940,        1891,           0,        2077,       21504,         593,       31566,       33072,       49934,        5316,        3663,       11365,         252,        1627,       10119,        7007,       75721,         616,      213973,       25399,        4807,      119733,       32830,        6895,       19731,       28914,       32874,         870,        9328,        1008,        7880,           0,       63595,       28409,       12264,      164138,        1641
D91,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
D92,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
D93,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
D94,           0,           0,           0,           0,           0,           0,           0,           0,       21472,           0,           0,           0,           0,         311,           0,           0,           0,           0,           0,          73,      140700,           0,           0,           0,           0,           0,           0,           0,           0,       12314,           0,      699976,           0,           0,           0,           0,           0,           0,           0,           0,           0,        1017,           0,           0,           0,           0,           0,           0,         861,           0
E01,         680,       36894,        2132,         212,        2449,         447,       18897,           0,           0,        1463,       90073,        1199,        5962,           0,         126,           0,         442,           0,         725,       75053,      110205,        7108,        1209,           0,           0,         707,        2175,           0,          21,           0,        1242,       19355,        1353,         322,           0,         164,        2781,        9580,        8038,        3150,         630,           0,           0,        1234,         754,       12771,        1038,           0,        6417,           0
E03,           0,       45058,           0,           0,           0,           0,           0,           0,           0,           0,           0,        3674,           0,           0,           0,           0,           0,           0,           0,        2593,           0,           0,           0,           0,           0,        1032,           0,           0,           0,           0,           0,           0,         464,       90941,         817,         893,           0,           0,        2089,           0,       30440,           0,           0,           0,           0,           0,           0,           0,           0,           0
E04,      164341,      125227,      316518,      124369,     2786927,      176933,      355691,       80405,      798212,      491436,       90876,       56804,      642968,      291516,      126796,      140557,      153830,      224502,       48674,      372388,      355575,      944656,      154504,      100356,      213347,       30331,       45842,      108007,       46994,      538447,      115668,     1612860,      553584,       15140,      702502,      143287,      126341,      755144,      102373,      275481,       25630,      265274,     1529786,      101055,       35834,      531400,      300228,       64181,      291024,       21063
E05,       48390,       15463,       53272,       19047,      330495,       98723,       83920,       28592,      499094,      217211,       15167,       11684,       63923,       15838,        6129,       23205,       32133,       56431,       10574,      270304,       63668,      153894,       48319,       12777,       40109,       11532,       36815,       19343,       10072,      160551,       40747,      178754,      116450,        1958,      122184,       87378,       56417,       34303,        8198,       42192,       14062,       70597,      187597,       33164,        4615,       23903,      113792,        8074,       56145,        5642
E12,       13389,      212114,           0,           0,      151584,           0,          31,           0,           0,           0,      798225,           0,           0,           0,           0,           0,           0,       32528,        8391,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,      352249,           0,           0,       23108,           0,           0,       14422,           0,           0,       23036,       91019,           0,           0,       74255,           0,           0,           0,           0,           0,           0,          23
E16,      160843,       19088,      144400,       85013,      622479,      223988,       81482,       51985,      217168,      199663,       50336,       65220,      300827,      442513,      156545,       83627,      117329,      209247,       46056,      179049,      131458,      419466,      190775,      110614,      149406,       43946,       97046,       41827,       56541,      162669,       88084,      315659,      429822,       75478,      444415,      188265,      117864,      370005,       43208,      163581,       25113,      143652,      539278,      106136,       30284,      358441,      340593,       89661,      180607,       27875
E18,     1543741,      268257,     1004266,      590104,     6667350,     1322293,      797725,      381694,     1716424,     1672209,      507025,      289127,     2117486,     1853023,      919717,      727063,     1045447,     1172212,      283551,     1185462,     1225822,     2854664,     1528135,      612909,      975011,      246344,      471242,      358873,      263565,     1597283,      680199,     3794201,     1821703,      281952,     2724873,      885518,      734508,     2678793,      259390,     1111459,      179762,     1412314,     4461839,      859196,      241093,     1915289,     1847940,      486433,     1475531,      140728
E19,      108242,        5265,       95314,       64463,     1049052,      194982,       69278,       29055,      276266,      218020,        5447,       42648,      480413,      166289,      123495,       58361,      100249,       85241,       23516,      145019,      143951,      358204,      187071,       57605,      103328,       34008,       28511,       13160,       32174,      342765,       42683,      917586,      136129,       15389,      484327,       65361,       63852,      468776,       29332,       73422,        6892,       71856,      266046,       35310,       31985,      220363,      228500,       81370,      165146,       18685
E21,      257269,       61967,       98132,      225489,      785678,       65244,      134001,       68445,      334692,      310147,       16139,       43082,      374163,      156733,       88366,       81261,      272090,      206190,       53443,      150549,      281039,      259369,      148364,      119744,      138484,       64531,       47064,       28944,       16788,      170967,       72134,      401857,      288287,       33899,      191148,       93587,      126588,      688318,       69139,      151207,       34307,      147674,      321147,       69707,       34907,      237698,      170959,      113358,      155814,       20093
E22,       62889,       32149,       49624,       36688,      434006,       41313,       84044,        8420,       37865,      111481,       19241,       20684,      187647,       88370,       54921,       18672,       39446,       62485,       28277,       30435,       63700,      150558,       96747,       52908,       51525,        8579,       22849,       29397,       18893,       93902,       33279,      351838,       69755,        5466,      178142,       42185,       55023,      193082,       30896,       61989,       15491,       74147,      259787,       30082,        9619,       83458,      143939,       22808,       77045,       19443
E23,      113063,      112950,      185354,       95107,     1939346,      112999,      213387,       85136,      516463,      219273,       55309,       40551,      428384,      186970,      120790,      104588,      171731,      117453,       60988,      328129,      500292,      283468,      246836,       54860,      162127,       72800,       62843,      104348,       45750,      353910,       88053,     1000950,      160909,       28865,      591110,      150285,      406685,      556524,       55702,      131926,       37479,      109809,      750032,      105220,       37127,      321718,      253825,      125613,      179740,       30333
E25,      139764,      138684,       67587,       33899,      340308,      126510,      200756,       58731,      447807,       60592,      115348,       34488,      205714,       55151,      128117,       91527,      146661,       96337,       39211,      218692,      360931,      160855,      124593,       37721,      106494,       18926,       31511,       25225,       58831,      339850,       96215,     1105084,      301771,       20338,      135908,       95274,      150827,      210192,       76346,       35631,       20147,      109862,      285060,       79819,       27990,      176408,       58484,       61493,      155047,       22379
E26,       14823,       27264,       17492,       20458,      175141,       13662,       30177,        7962,      110426,       20890,       25389,        6537,       59470,       19651,       18599,       12084,       21177,       26356,       14121,       24304,       45213,       71313,       42471,       14361,       23281,        9222,       11137,       15391,        9283,       47718,       12466,      162690,       36378,        6274,       32063,       21471,       20895,      149238,       14594,       23706,        5474,       16377,       76764,        9122,        5645,       26015,       44043,       15437,       45310,        3143
E29,       12623,       10808,       18803,        5777,       50940,       19095,       25340,        6956,       54767,       27856,       16858,        4773,       12176,       15048,        9700,       10999,       11485,       59681,        7220,       22193,       18471,       96870,       38403,       11143,        8908,        7142,        8217,        8392,        6514,       57654,       10913,       97916,       38568,        2715,       21252,        7504,       30185,       47822,       16211,        9791,       11688,       20723,       36155,        5714,        5948,        9552,       22199,       13640,        6034,        4955
E31,        8799,       34741,        8191,        4617,        6038,        5125,        3166,       12693,       39469,       37134,       35923,        5787,       16044,       18108,        2965,        2553,         448,       11986,       13760,       34798,       18847,       48565,       10105,        7642,       28062,         599,        2620,           0,        1338,       20760,        9928,      135141,       17873,        2611,       59330,       12078,       31785,       27084,       16113,       19595,        3765,       10771,       43773,        3421,       21460,       70522,           0,        7750,        2549,        8418
E32,      466516,       84456,      384097,      238069,     2260738,      191704,      265838,      126145,     1758563,      262646,      262044,       75289,     1143504,      325645,      110097,      111134,      127146,      366369,      148779,      442612,     1245572,      553859,      295487,      152343,      468313,       97135,       73520,       65375,       62199,      543946,      264739,     1404502,      301966,       28006,      560522,      210747,      169636,      446795,      235165,      534348,       57403,      526671,      767714,       98566,       47354,      356525,      750389,      122563,      144629,       47161
E36,      793169,       31216,       46583,      329969,     2349390,      131846,      926576,       56427,      500886,      590367,      184865,       34677,      718412,      483645,      479624,      313161,      293999,     1145832,       62935,      302826,      739969,     1339704,      574201,      333898,      419849,       30486,      242972,       57767,       41988,      903960,      286825,     3159981,      692538,       52733,     1088865,      279512,      433513,     1439732,       91365,      549082,       48048,      497361,     1809670,      274315,        9403,     1008440,      496153,       81178,      420849,       32478
E38,           0,           0,        8582,           0,           0,        3686,           0,           0,           0,           0,        2668,           0,       26732,           0,           0,           0,       20269,           0,           0,           0,           0,           0,         758,           0,         963,           0,           0,           0,           0,       18739,           0,           0,           0,           0,           0,           0,           0,        4984,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
E44,      236641,      236830,      212842,      175060,     1531215,      226568,      156554,       39047,      642338,      138450,       50828,       47107,      534055,      255285,      160866,      194545,      213390,      237626,       95033,      340637,      140254,      226639,      198125,      123373,      265080,       83614,       70770,       53717,       69918,       96932,      519652,      443014,      684530,       68808,      348042,      125387,      196657,      992761,       30806,      205128,       63644,      144223,     1091635,       82142,       75760,      776725,      195781,      242683,      213898,       55109
E45,           0,       75325,           0,           0,       36563,           0,        3539,        9106,      189210,        5351,           0,           0,      101715,       29401,           0,       21370,        5316,       16108,       24775,       35325,       81315,       10977,           0,           0,           0,           0,           0,           0,       16469,      365766,           0,      197885,       17963,           0,       57593,       31881,           0,       99509,        2419,           0,           0,           0,       12633,           0,           0,       22870,      103356,       22056,           0,           0
E47,           0,           0,           0,           0,        7093,           0,       19933,         534,           0,           0,           0,           0,       13225,       12366,       18444,           0,           0,           0,           0,           0,           0,         207,        2020,           0,        1491,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       23865,           0,           0,           0,           0,           0,        1176,           0,           0,           0,           0,           0
E50,        3096,       39764,         947,        2681,       58930,       27363,       94053,       34254,      103023,       68321,       65229,        5611,       34987,       55864,        2693,        1186,       11138,        2483,       16267,       54316,      288950,       33073,       16475,        3744,       63180,       20012,        1709,       11495,       14444,      150008,        5819,      146712,       53854,       11585,       51382,        6668,       77106,       19165,       11738,       23143,        6420,       15044,       14179,       15491,       35291,       68038,       20274,       13962,       11345,        5227
E52,        3360,        5414,        4825,        3401,       16144,        1201,       10622,        1089,        4590,           0,       20365,        2531,       13275,        2459,        3355,        1751,        7293,        3609,        2851,        4211,        5052,        8626,           0,        4111,        2675,        1941,        2107,        2960,        2432,        9005,        3134,       22020,        4706,        1341,        7678,        3766,        2835,        7118,        3827,        3354,        2057,        4416,        6898,        3949,        2235,        8876,        7172,        1917,           0,        1523
E54,      104525,       16510,       77069,       70213,      625925,       39277,       13324,        3302,      307469,      153095,       48962,       36208,      124321,       66405,      116489,       95509,      104650,      121959,       33652,       61329,       13380,      113770,      122229,       87288,       79858,       25493,       87587,       12329,        4709,       53832,       44971,       86996,      169987,       56933,      104949,       65352,       83073,       84531,        4076,       68565,       31376,       72625,      217459,       36276,       16315,       41409,       84508,       25414,       74104,       19052
E55,       14749,      110778,       28379,       21521,      138396,       46529,       11014,        4855,       67833,       31405,        5504,       37545,       29047,       23518,       11686,       10863,       21894,       33287,       25017,       42230,       21035,       30955,       53462,       23539,       20228,       28708,       14054,       13291,       10390,       15259,       16416,       35769,       34842,        9064,       26373,       17841,       60847,       75753,        4242,       36588,       14259,       33414,       90439,       22812,        8435,       34074,       93627,       17062,       41312,       25838
E56,       23152,       34069,        1855,       11401,      367813,        7085,        7395,        2129,       34520,       33867,        4228,       19100,        8592,        7363,        2541,           0,        9332,       10559,        8981,        8268,         550,       18370,       31410,       25909,       11794,       32552,           0,        8770,        2052,        6497,        2694,       22734,       34529,         669,        9532,        1218,       72032,       29377,        1770,       18683,        2670,       27060,       17055,        4994,        4299,       20665,       51067,        5053,       29292,        1606
E59,       31733,       51288,       31340,        6272,      227699,       30398,       27806,       20195,      325601,       65202,       23895,       12816,       84700,       27835,       42805,       20748,       97660,       79441,       13062,       91803,       66787,      112448,       60029,       10164,       79966,       25508,        6718,        8902,       14892,       74177,       10837,      131790,       98241,        9023,       55853,       23679,       21113,      160613,       20773,       15398,       14136,       19941,      232667,       35934,       19733,       31309,      130592,       70509,      188992,       10104
E61,       10173,        9238,       13493,       32651,      168570,       24015,       25754,       12594,       81017,      132272,       29082,       12701,       66830,       22492,       16121,        8332,       72925,       89369,       13201,       54000,       53330,       42573,       62752,       26070,       21192,        4442,       17399,        9294,        9848,      269969,       26162,      237136,       42488,        5841,       55751,       41728,       23496,       85864,       23869,       32751,       11774,       77457,       41331,       17280,        7945,       51125,       36263,       32111,       39445,       12800
E62,       69004,       48124,       95151,       41571,      770940,       46426,       88328,       41838,      264022,      121267,        6708,       25168,      222492,      107737,       52120,       35137,       91002,      102301,       27098,      151026,      185304,      194574,       65590,       45548,       83459,       18880,       31217,       30433,       24322,      238182,       47606,      318511,      170429,        6373,      151057,       43071,       86944,      326749,       27178,       98827,       13975,       75539,      204879,       33302,       24859,      138786,       95551,       30710,       51158,        8717
E66,       33264,       32036,       66639,       40160,     1027486,       50000,       67285,       25928,      226118,       64040,       21399,       38236,      155858,       41303,       28235,       37450,       48792,       27492,       28794,       64928,       57410,       89642,      114335,       44721,       75356,       12415,       29148,       49794,       20776,      264840,       39591,      346535,       57035,       17886,      130714,       47683,       58915,      157119,       22198,       39168,        8089,       57311,      216568,       29635,       15464,       86250,      225756,       24968,      105970,        9443
E67,      195569,      138031,      302327,       55459,           0,           0,      476226,       37324,      793743,      431532,      170928,       42698,     1065704,       34614,      157550,      149422,      227250,      199370,      147637,      432329,      704383,      900539,      492712,       51182,      321723,       48633,       58321,       50888,       71277,           0,      165923,           0,      384976,       20576,     1225939,      157684,      233399,      977407,      138395,      113413,       29320,      202838,      909699,       81108,       63788,      484767,      593458,      111472,      348419,       21328
E68,           0,        3401,       32402,       29293,           0,           0,      100354,        3104,           0,           0,       48319,           0,       70612,           0,        1755,           0,           0,           0,        1049,           0,      131061,       38174,           0,           0,       15105,           0,         608,        2138,           0,           0,        6191,           0,      120516,           0,           0,        6649,           0,      259228,           0,       63827,           0,      122361,      280467,       14954,        4297,           0,       59766,        2521,        2393,        3218
E74,     1822605,      293197,     1218712,     1168889,    11235167,     1405437,     1809461,      230358,     4969556,     3488532,      547044,      328924,     5139291,     2358303,     1021474,      808283,     2030824,     3128072,      884625,     1994679,     3943956,     3550928,     2697005,     1189926,     2118236,      307951,      572159,      428489,      674933,     5033580,      510557,    15495801,     2670967,      271201,     5052717,     1049994,     1366192,     6408343,      549636,     1874841,      256623,     2490669,     7247892,      558353,      311724,     1919543,     2231615,     1272522,     2261034,      166040
E75,           0,        8039,           0,        1034,           0,       72595,       30381,          79,      164476,           0,        2289,        5549,       41440,       56097,          37,           0,       26348,           0,       64587,       21163,       24874,       97397,        1189,           0,       21293,           0,       34557,           0,           0,           0,           6,           0,       14729,           0,       24284,           0,           0,       78826,       14151,       28556,        5224,       30603,       10075,       49929,         252,           0,           0,           0,       33337,       13999
E77,           0,       32202,        4277,           0,       62603,       12139,       22773,       37048,           0,           0,           0,        9197,       37668,       23595,       35584,        3992,       10644,           0,         783,        4936,       30949,       36129,       31710,           0,       13712,        6991,       27523,           0,       11891,       42398,       17237,       17762,           0,        2719,       25352,       38660,           0,       48466,       11783,           0,        2686,           0,           0,           0,        8148,           0,       20276,        1285,       27981,        1751
E79,      254707,       63723,      450766,      258442,     1558123,      138860,      255302,      102975,      907592,      667475,      110141,       97655,     1808603,      335749,      364865,      231696,      460769,      467482,      144168,      498139,     1040797,     1443470,      143821,      249058,      361462,       62432,      207368,      104159,      115880,      735937,      177786,      617503,      338195,      139622,      416979,      308609,      467425,     1983783,      164424,      347091,       78596,      664241,     1666998,      204090,      110116,       83491,      771310,      185351,       86124,       39843
E80,           0,           0,        1191,        7458,      205506,           0,         635,           0,           0,           0,           0,       15108,       20503,         237,           0,           0,           0,           0,         688,       31814,      132829,           0,        1611,           0,         676,           0,           0,           0,        5983,       14403,        5954,       18422,        1074,           0,        4474,          74,           0,           0,       25552,           0,           0,        1677,           0,           0,          15,      105533,           0,           0,        7497,           0
E81,        2782,           0,       27566,        7951,      402902,       17423,      148977,       35206,       10480,        2987,           0,         443,       17132,       14342,        3404,           0,        9649,       16103,       25617,       12522,       15427,      152926,       13849,           0,         727,           0,           0,        4475,        5808,      158935,         993,       53243,       10177,           0,       20046,        2758,        6967,       48764,       15318,        4845,           0,       17108,       50087,        5487,       11426,       17134,       45809,        5591,       36525,        5617
E84,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,          19,           0,           0,           0,           0,           0,           0,           0,          13,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        1596,          61,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
E85,        6586,       27369,        1345,        2736,       19981,           0,           0,         208,        7455,        5209,        1527,         965,        6029,         365,           0,        1711,        1149,        6715,        1014,        2420,        2804,           0,        2057,        4591,        1646,         538,        1384,         719,         206,        4172,        1323,        5333,        3130,         397,         697,           0,       10335,           3,           0,           0,         879,        2462,       18469,           0,           0,        2243,        3384,        3931,       10653,           0
E87,       36106,           0,           0,           0,           0,           0,         627,           0,        1253,       54483,       17161,           0,           0,        2884,           0,           0,           0,       44714,         252,       53877,       64824,         524,           0,        5458,           0,           0,           0,           0,         317,       13073,           0,        4967,       20354,           0,           0,           0,           0,        3708,         936,       36481,           0,           0,           0,           0,           0,       18026,           0,           0,          84,           0
E89,      112288,      780413,      205576,       80291,     4018791,       51434,      796703,       66337,      666856,      568209,      497354,       67125,      855565,      322511,      130054,       95519,      113117,      240986,       91217,      519515,      806098,      327298,      353026,      167443,      184612,       87219,       39613,       90777,       61401,     1982037,       59329,     2675356,      248184,       56196,      524469,       83978,      293049,     1640363,      102020,      296368,       45510,      193134,      857571,      151309,       66368,      145967,      301352,      140479,      435376,        5906
E90,      138885,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       35181,           0,           0,       57888,           0,           0,           0,       47356,           0,           0,      356116,           0,      105435,           0,       33398,           0,           0,      166656,           0,           0,           0,           0,           0,      262221,           0,      104457,      631546,           0,           0,           0,           0,           0,       60105,       26192,      204924,      216080,       38936,           0,       29377
E91,           0,           0,           0,           0,           0,         977,           9,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       60851,           0,           0,           0,           0,           0,           0,       31065,         148,       10438,           0,           0,           0,           0,           0,        2583,           0,           0,           0,           0,           0,        4010,           0,           0,           0,           0,           0,           0,           0,           0
E92,           0,       27813,       19261,           0,       62601,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       27451,           0,           0,           0,     1166327,           0,           0,           0,      135901,           0,           0,           0,      372455,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
E93,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        4320,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
E94,           0,           0,           0,           0,           0,           0,      112003,       22159,       23182,           0,           0,           0,           0,           0,           0,           0,        2132,           0,           0,      237417,           0,           0,           0,           0,           0,           0,           0,           0,           0,      803416,           0,     1411907,           0,           0,           0,           0,        8063,           0,       32616,           0,           0,           0,           0,           0,        1129,        3669,           0,        2574,           0,           0
F01,           0,       43620,         121,         110,           0,         204,        5846,           0,           0,        2185,       34998,           0,           0,           0,           0,           0,           7,         295,         291,       36698,       66070,           0,         114,           0,           0,           0,         826,           0,          57,           0,           0,       16298,           0,           0,         105,           0,           0,        5597,       64355,           0,           0,           0,           0,           0,        1615,         606,           0,           0,       23423,           0
F03,           0,        4855,           0,           0,           0,           0,           0,           0,           0,           0,           0,           6,           0,           0,           0,           0,           0,           0,           0,          36,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,          10,         500,           0,         411,           0,           0,           0,           0,       11027,           0,           0,           0,           0,           0,           0,           0,           0,           0
F04,        1035,        1202,        2663,         403,      392848,        3889,       32958,         119,      244225,       19158,        3365,        4175,       63693,        9855,           0,        7055,       10036,         711,        3580,        1005,        8752,       61768,        3120,        9267,        2481,        7348,         437,        7730,         525,       10585,        3056,      208628,      104137,         386,      105341,        5348,        1808,       72948,         352,       17430,         313,        4111,      558057,        1778,          26,       26850,       51143,          45,        2402,        2531
F05,       11758,           0,         108,        2784,           0,          84,           0,           0,       19086,         595,           0,           3,         126,          34,         333,           0,           0,          22,           0,       84667,           0,           0,           0,           0,           0,           0,         644,           7,           0,        9556,           0,        9291,          38,           0,       24684,         391,           0,           0,        2894,           0,           0,         195,        3549,        5547,           0,           0,          19,           0,       69410,           0
F12,           0,       10606,           0,           0,           0,           0,           0,           0,           0,           0,      125948,           0,         221,           0,           0,           0,           0,           0,          48,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        9558,           0,           0,           0,           0,           0,           0,           0,       28892,           0,           0,           0,           0,           0,           0,           0,           0,      117731,           0,           0,           0
F16,        8655,           0,       14367,         580,      101144,       15979,          30,           0,       18053,       11746,        3021,       10100,       14441,       34955,       10684,        1077,        2159,        1589,        1682,        2514,        1694,       16041,        5682,           0,       13574,         440,        6998,         155,        6187,       28785,         175,        6051,       25847,        5357,       20622,         838,       10175,        2578,           0,           0,         121,          90,        7362,       12278,          51,       25597,       33018,         259,        8616,           0
F18,       77457,           0,       42801,       45121,      565963,       76657,        2966,        2427,      312408,      371331,       71624,       33921,      269635,       70735,       16956,       65591,       88779,       27228,       19864,       71418,       18195,      394181,       93076,       29140,       28779,       41624,       36688,       42239,        8975,      124463,       24816,      258719,      121811,       16047,      229623,       67008,       54067,      262141,        7422,       82598,        6020,      283219,      227500,       77582,       14802,      106425,      199959,       12151,       75952,        9424
F21,           0,           0,         281,        4096,           0,         137,        7047,           4,        9201,       77131,         318,        5017,        9415,        1019,           0,        2949,        8850,       14757,           0,       28653,          44,         154,        9328,           0,         314,          12,         253,         121,        1056,        1319,          68,       12261,        1470,           0,       11716,         407,           0,        9820,        6602,        5309,           0,        1383,         241,         917,           0,        2307,       16888,           0,         937,           0
F22,           0,           0,           0,          17,        7761,           1,          31,           0,         625,           0,           0,           0,           0,           0,           0,           0,           0,           0,          70,           0,         260,           0,           0,           0,        2016,           0,          38,           0,           0,           6,         474,       25067,           0,           0,         188,           0,           0,        1646,           0,         202,           0,           0,        1167,           0,           0,        1284,           0,           0,          73,           0
F23,         248,        1289,          70,          39,        1963,         436,         192,         146,        1484,        3542,           2,           4,           3,           0,           0,           0,           0,           0,           0,          46,           0,           0,         353,           0,           0,          12,           0,           0,         146,         126,           0,       27736,        1754,         437,           2,          12,        1031,          20,           7,           0,           0,           0,         710,           0,           0,         100,           0,           0,           0,         165
F25,         218,       23938,          24,        1782,           0,          49,       23794,           0,         477,           0,         262,           2,         406,           0,           0,           0,           0,           0,          15,         547,       32963,           0,           0,           0,           0,           0,           6,         255,          14,           0,          51,       21665,           0,           0,        1209,           0,         237,           0,           0,           0,           0,           0,         123,        4690,        2909,           0,           0,           0,          16,           0
F26,         309,         154,         532,           7,           0,           9,         262,           0,        2822,           0,          15,           1,         222,          55,           0,           6,        1891,           0,           0,          44,           0,           0,           8,           0,           0,           0,           0,           0,           0,         522,           0,        8979,         699,           0,           0,           4,        1721,           0,           0,           0,           0,           0,          13,           0,           0,          14,           0,           0,           0,           0
F29,           0,           0,           1,          81,           0,          11,           0,         142,        4483,         500,           0,           3,           0,           0,           0,           0,           0,           1,           0,           0,          30,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        1456,           0,         223,           0,           0,         314,           0,           0,           0,           0,           0,         993,           2,           0,           0,           0,           0,           0,        2398
F31,         629,           0,        7298,        1115,       73534,        1528,       68275,       15158,       10821,       15454,       21213,         946,       14046,       27525,          45,        1292,           0,        2141,        3731,        9676,       25550,        5027,        4455,       47413,       25683,         553,         289,          84,        7071,       14326,        6073,       37465,        6398,           0,       44205,        2094,       16661,        1963,         580,       21574,         882,      106870,       24951,       26125,        7120,         369,       23093,           0,        1471,           0
F32,        4097,          52,        1839,         274,           0,         570,        9320,        2865,       17532,           0,       19102,          68,        2546,         341,           0,         474,        1765,       13345,         185,       10314,        3089,         359,         103,         145,          16,           0,          66,           0,         419,       30181,         110,      320116,         505,           0,           0,        1334,          97,        2749,        3695,        3431,           0,       30747,        1555,           0,           0,       11682,       25142,           0,        1123,        1305
F36,        4897,           0,           9,        5566,      105714,        1259,        9569,           0,        2615,       12898,       10583,        9882,       25290,        4502,       28121,        3940,        9297,       14223,          66,        1315,        6513,       85634,           0,        4638,        4772,        6829,        3788,           0,          69,       21244,        9756,      394779,       31110,         859,       60842,        2117,       20879,       39456,        1742,       23449,           0,           0,       18571,        3051,           0,        5477,        3275,           0,        1768,         711
F38,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
F44,      400687,      195448,      290584,      291311,     1423458,      305696,      547691,      171865,     1322505,     1010459,      217161,      211740,     1246947,      560899,      476437,      429928,      488723,      468939,      137497,      313582,     1297063,      512269,      364151,      336987,      577784,      194270,      330683,      303057,       78826,     1260445,      138626,     2005675,      937940,      147110,      985285,      300377,      312288,      787446,      227493,      357816,      154779,      735944,     1662191,      212537,       52353,      962518,      702843,      364886,      488308,      194503
F45,           0,       23347,           0,           0,       26179,           0,           0,        1431,      272608,           0,           0,           0,      190941,       21558,           0,           0,       75429,        9164,        5400,       41570,       14440,        4249,           0,           0,           0,           0,           0,           0,         645,      237833,           0,      256035,        4612,           0,       46831,       29673,           0,      156875,           0,           0,           0,           0,       22239,           0,           0,       45237,       82006,       17067,           0,           0
F50,           0,           0,           0,           0,           0,           0,           0,        2722,           0,           0,       71279,           0,           0,           0,           0,         301,           0,        2266,           0,       15626,           0,           0,           0,           0,           0,           0,           0,           0,           0,        3860,           9,        8135,           0,           0,           0,           0,           0,           0,         277,           0,           0,           0,           0,           0,           0,           7,       59701,           0,           0,           0
F52,           0,           0,           1,           0,           0,           2,           0,           0,          40,        7341,        6201,          21,           0,         384,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,         342,           0,         639,          31,         776,          16,           0,           0,          32,           0,           0,           0,          13,           0,           0,          34,           0,           0,           0,           0,           0,           0,           0
F54,           1,           7,        1872,           4,       11015,        3487,           0,           0,        9040,        4752,         621,          61,        6607,         508,        2365,         181,        1921,          20,           0,        4865,           2,           0,         122,         155,           0,         165,        3245,           0,           0,        2145,         494,        3250,       12207,         430,       10850,           1,          49,         819,           0,         196,         152,        3441,         286,           0,           0,         325,        2689,           0,        1594,           0
F55,         766,         805,        1131,         423,        5381,        6689,        2341,         512,        2235,        1248,         249,        2685,         957,        3710,        5540,        4110,        1169,        1452,        1239,           5,        2125,         195,         778,         176,       11796,        4911,        1901,         841,         186,        1842,         202,        1106,         474,         546,          10,         445,           0,        1931,          91,        1026,        2993,        1287,        6960,         923,          35,         934,       16919,        5109,          61,        2467
F56,         766,         116,           0,         118,         199,           0,           0,           0,        1037,         260,          60,         107,          80,         315,           0,           0,           0,           0,         149,           0,          12,           0,          37,          22,         417,          23,           0,           0,           0,          24,           0,          86,         496,           0,           4,          39,        1871,         507,           0,         437,           0,           0,           0,           0,           0,          10,         935,           0,           0,           0
F59,          47,       17050,           0,        1582,      306642,        1707,        4612,        2058,       24510,       47492,        5559,         424,       24753,       10764,        2261,        7782,        3170,       46317,         125,       55948,       43077,         656,        5302,           0,        5016,        1458,           3,          29,        1599,       32739,        7101,       18217,       11689,        5252,       28807,           1,           6,        7489,        1622,           0,           0,         326,        3247,          92,         191,           0,       21859,       23202,        7869,        3146
F61,          59,         847,        2666,        1372,       51896,        5542,       20692,        1700,        6875,       42277,       93587,        5276,       12982,        8645,           0,           0,        7250,        3561,         168,        2084,       29453,        5845,        2796,        2155,        3943,         613,         783,        4647,        2008,       52853,        1643,       21785,        7125,         841,        1144,         954,         463,        4739,        4413,        3298,        2954,        9395,        4497,       22058,         211,        7323,       33267,        3730,        8883,         430
F62,           0,          29,         544,        3833,        6721,           7,        8174,          72,        2291,        2644,        8857,         155,        3982,         982,         427,         172,         337,         625,         140,         239,        7124,           9,          12,           0,           0,           0,         298,         301,           0,        2660,         205,        5531,        5716,          32,        6658,          19,           7,          66,          16,        1201,           0,        2989,        4458,           0,           0,          14,        1307,         118,           5,         324
F66,         370,           0,         216,           7,        2103,          56,          25,          10,        3444,           0,           0,           0,           0,        1000,           0,           0,          86,          77,           0,           2,           1,           0,           0,           7,           0,           0,           0,           0,         414,         349,           0,       18000,           0,        2876,        1736,         107,           0,           0,           0,           0,           0,           0,         224,           0,           0,          24,        8237,           0,           5,           0
F77,           0,          55,           0,           0,       25084,           3,           0,           0,           0,           0,           0,        1032,          58,        2645,           0,          86,           0,           0,           0,           0,         565,           0,          23,           0,         306,        1729,         267,           0,         186,        1173,          29,          49,           0,          39,        1853,       13842,           0,        3000,         139,           0,           0,           0,           0,           0,           0,           0,        4389,           0,         110,           0
F79,           0,        1172,         678,         219,           0,         124,         944,         491,          31,           0,        1314,         101,        9582,           1,           0,         462,         807,          19,           0,           0,          13,         366,       20764,           0,         520,           0,         175,         751,           0,        2474,           0,         422,           0,         168,           0,        2036,         451,           0,          10,           0,           0,        4115,         109,         151,           0,           3,           8,           0,        9955,        1278
F80,           0,           0,           0,        5139,           0,           0,         348,           0,           0,           0,        3980,          36,           0,           0,           0,           0,           0,           0,           0,        3823,      597614,           0,           0,           0,          13,           0,           0,           0,        1615,         999,         153,         439,           0,           0,      132399,           0,           0,           0,       93510,           0,           0,           0,           0,           0,          14,           0,           0,           0,           0,           0
F81,           0,           0,           0,         587,           0,         387,        3645,       10932,         166,       51356,        3970,           0,        5868,           0,           0,           0,           0,           0,          10,         662,        1136,         270,           0,           0,           0,           0,           0,           0,         494,        7488,           0,       30409,        7697,           0,           0,           0,           0,        1522,        5511,           0,           0,           0,        7389,           7,           0,           0,        3299,           0,          23,       15148
F85,        5152,         189,           0,          17,           0,           0,           0,           0,         103,         243,        4314,           0,        3975,           0,           0,           0,           0,           0,           0,         979,           0,           0,           0,        4509,           0,           0,           0,           0,           0,         181,           0,         387,         375,          17,           0,           0,           0,           0,           0,           0,           0,           0,          45,           0,           0,           4,           0,           0,        1005,           0
F87,        3606,           0,           0,           0,           0,           0,        1171,           0,           0,        4625,       29677,           0,           0,        2189,           0,           0,           0,       46411,        1747,       24482,       29384,         928,           0,           0,          80,           0,           0,           0,         825,           0,           0,         318,        2146,           0,           0,           0,           0,        3439,         429,        8350,           0,           0,           0,           0,           0,        9871,           0,           0,         219,           0
F89,        6384,        2998,        3725,       11579,       19327,         428,       18756,          11,       18931,       22860,       57488,        2039,        8429,        7729,        5486,        8362,       34088,        6963,         156,      140060,       10714,       10018,       16431,        4181,         976,       16393,        4853,       25545,        5890,       50667,        3638,       38060,        6114,         918,       12734,        1204,       17289,       28881,         274,       10604,        1343,       11318,       20212,       92181,           0,        2291,       52086,         223,       60437,        2957
F90,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,         630,           0,           0,           0,           0,           0,           0,           0,          31,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
F91,           0,           0,           0,           0,           0,         259,           0,           0,           0,           0,         559,           0,           0,           0,           0,           0,           0,           0,           0,           0,       19391,           0,           0,           0,           0,           0,           0,        1202,          85,         802,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
F92,           0,        1979,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       81133,           0,           0,           0,       16222,           0,           0,           0,      176018,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
F93,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
F94,           0,           0,           0,           0,           0,           0,      117228,           0,       10302,           0,           0,           0,           0,           0,           0,           0,        5704,           0,           0,      101740,           0,           0,           0,           0,           0,           0,           0,           0,           0,      448747,           0,      690123,           0,           0,           0,           0,           0,           0,         712,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
G01,           3,        6745,         280,           1,         126,          32,         115,           0,           0,          20,       28473,          19,         224,           0,           0,           0,           0,           0,          26,        6729,        4917,         797,         201,           0,           0,          31,          41,           0,           0,           0,           2,         572,           4,          46,           0,           2,          25,        1308,           0,         597,           6,           6,           0,           0,          85,         618,          12,           0,         466,           0
G03,           0,        8807,           0,           0,           0,           0,           0,           0,           0,           0,           0,        1253,           0,           0,           0,           0,           0,           0,           0,          88,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,          56,        2736,           0,           0,           0,           0,           0,           0,        2960,           0,           0,           0,           0,           0,           0,           0,           0,           0
G04,         369,         655,       11900,        2172,       40731,       16568,        7781,         302,       23683,        4751,         618,        2514,        5500,        5993,        1827,        2008,        4356,        3177,         259,        2915,        4822,        7138,        3218,        3434,        8488,         380,         329,         417,         481,        1948,         367,       16639,       27247,         154,       15017,        2836,         198,       12327,         547,       11693,         330,        1102,       45806,        2106,         680,       14599,       12678,        1563,        4978,         213
G05,         643,          38,        1157,         629,       10506,        1408,         916,         654,       14950,        6481,         212,         474,        1850,         983,          24,         923,        5638,        1137,          68,        2549,        1453,        5475,         884,         444,         817,          44,         920,          87,         228,        2549,         143,        2386,         341,           9,        3549,        3151,        1064,         503,           7,        1256,          53,        1151,         651,         676,           4,          19,        4896,          26,        2995,           0
G12,           0,        6187,           0,           0,           0,           0,           0,           0,           0,           0,       34139,           0,           0,           0,           0,           0,           0,           0,         237,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       18779,           0,           0,       40007,           0,           0,           0,           0,           0,           0,         516,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
G16,        4102,         197,        9648,        1210,       35744,        9201,         692,           0,       23273,        2847,        1248,         638,       14577,       30625,        4009,        2124,        2630,        2696,        1270,        4130,        1457,       13292,        4124,        1959,        5891,         596,        8870,         999,        1110,        5801,        1378,          53,       15688,        1923,        6194,        8366,        3326,        3585,         340,        2604,         466,         908,        6200,        2354,         959,       15108,        6314,        2194,        6990,        1670
G18,       81809,       10367,       71607,       34704,      221049,       51071,       15978,        1987,      103949,      126399,       31248,       18396,      120914,      127000,       53192,       43375,       59803,       68730,       19579,       42651,       34842,      124800,       69975,       37073,       67536,       15180,       29059,       21983,        8549,       85801,       49088,       89421,      107777,       13043,      158180,       56720,       42531,      124245,        8478,       67099,       10516,       88677,      212388,       51586,       10918,      102817,      118827,       29545,      102544,        6104
G21,        4966,        1098,        2861,        7962,        3133,        1048,        3555,        1629,        9535,       19917,         752,        1192,        3494,        1059,        1167,         949,       11474,        5323,         148,        2386,        1950,        1444,        1893,        4407,        4139,        1030,        2350,         424,         807,        3024,        2346,        2907,        5380,         797,        2568,        3959,         748,        9045,         656,       12753,        1266,        3345,       12834,        1888,         482,        9353,        2781,        7089,        1741,         244
G22,        1387,         523,           0,          13,        3471,         513,        2748,         206,        1464,        2924,         701,         160,        1629,        2179,         578,         331,         195,           0,        1115,         345,        1350,        5548,        4161,        1570,        3351,          63,         665,        1945,        1015,        2118,          44,        3380,        4455,         173,        6518,         616,        5663,        4772,         753,        5223,        1052,        2120,        4881,           0,          29,        2965,        7379,        1002,        1752,         851
G23,        6337,        2355,        8575,        1224,       25427,        2140,        1809,       11595,       10011,        3519,        3121,        1049,       12361,        6271,         648,        1987,        4886,         828,         693,        3747,       34509,        6230,        3574,        2060,        7678,        3843,         922,         460,         784,        3174,        1170,       23854,        6873,         251,       32326,        8308,        7499,       13367,         379,        5941,        1469,        1065,       49674,        3337,         459,        5920,       17546,        5299,        3050,         683
G25,        1820,        2651,        3230,         469,        4947,        5117,        3255,        1156,        9526,         346,        2929,        1494,         995,         901,        1608,        1115,        3708,        2046,         436,        9025,       14193,        6876,        3762,        2107,        1454,         328,         470,         381,         896,        5535,        3212,       21660,       14166,        1033,        4158,         789,        6229,        2858,        1031,        3308,         501,        2663,        4818,        4005,         783,        3853,        7467,        1208,        5604,         870
G26,         241,         810,         862,         388,        2530,         209,         816,         365,        5196,         610,         668,         264,        3166,        1714,         202,         379,        1877,        4708,         165,         477,        2583,        2462,        1005,         123,        1044,         487,         981,         664,         148,        1471,         356,        6995,         721,         660,        1347,         907,         107,        1590,         354,         930,         110,         170,        7100,         293,         291,        1423,        2404,        1340,        1140,         117
G29,         241,         285,         955,         199,        1085,         907,         450,         395,        1953,         451,         676,         483,          74,         182,          77,        1410,         351,         607,         267,         546,         540,        1113,         663,         417,         317,         121,         126,         376,          82,        1150,          61,        2157,         917,         138,        1025,         412,         634,        2867,         272,          62,         340,         189,         424,         292,          34,         165,        1287,         312,         128,         223
G31,          76,         155,        1248,          82,           0,        2481,        3720,        1498,        8084,         701,        1513,          48,         137,         877,           3,          49,          31,           0,          19,         409,         786,         331,          46,        1923,        5043,          28,          63,           0,         226,         109,         196,        2802,         384,           0,        3399,          58,         801,        1733,           1,         490,          94,        8001,        1754,        7623,        1834,        1416,          16,         249,          68,          84
G32,        3811,        2232,       10038,        1688,       15059,        1483,        3727,        2790,       30699,        1579,        2601,        1727,        8215,        5185,        1036,        2578,        2237,        6781,        1042,        3978,        8522,       10092,        7627,        4177,        8423,         747,        2116,         755,        2869,        6184,        2448,       38170,        5268,         350,        5302,        4847,        2109,        5807,        2361,       19388,         502,        2624,       28473,        2182,         717,        6761,        6275,        1198,        1069,         929
G36,       13367,         331,          38,        3134,       70401,        3213,        5141,         222,        3744,       12574,       19433,         566,       13036,         955,       16912,       11681,       12301,       26833,         140,        2845,        4515,       38538,        9542,       10503,       13552,         637,        5324,         200,          98,       19905,        5665,       64793,       13136,         536,       45759,        4573,        7726,       22310,         303,        9671,         760,        2150,       24382,        4273,          42,       27880,       14436,        2524,       10076,         367
G38,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
G44,      110845,       20097,       68826,       24861,      305528,       28239,       19338,       17215,      295294,      164167,       14250,       29820,       78350,       22069,       43454,       53300,       35445,       24038,        7968,       63105,       42271,       69838,       40434,       25889,       85333,        3707,       15404,       11926,       13857,       14647,       23664,       37059,        5973,        4004,       58538,       34379,       19050,       58919,        5362,       24175,       20342,       68373,      216507,        1881,        4515,           0,       71315,       15433,       10779,        9077
G45,           0,         366,           0,           0,           0,           0,           0,           0,       60415,           0,           0,           0,        6711,        2501,           0,           0,           0,          72,       17421,        3984,         296,         197,           0,           0,           0,           0,           0,           0,        2113,        7000,           0,       34078,         369,           0,       10214,        6323,           0,        5844,           0,           0,           0,           0,        3605,           0,           0,           0,        3096,         470,           0,           0
G50,           0,           0,          50,          47,         200,        2031,          63,         645,         473,           0,        9224,        1020,          27,          21,          39,          28,         795,           0,           7,         541,         399,          29,          66,          43,         207,           4,           0,          37,         193,         160,         777,        1046,         130,           0,         298,         278,         126,          41,          28,           0,           0,         154,         111,        1329,        1057,         161,          43,          12,         742,         532
G52,         254,         195,         398,          89,         190,          53,          41,           8,         245,           0,        3411,         123,          43,         450,           0,          29,         494,          48,           6,         134,         181,         494,           0,         115,         142,         177,         277,         194,          47,         140,         204,         731,         108,          58,         384,         116,         187,          60,          32,         432,         153,          60,         452,         127,          24,         910,        1533,         582,           0,          86
G54,        3483,         333,        2527,        1183,        4733,        4604,        3086,         236,        9545,        7093,        1290,        1075,        4288,        6411,        3478,        4938,        4612,        5067,        1053,        1784,        7697,         830,        3681,        6958,        3581,        1256,        3862,         366,          75,        2972,        1265,        1483,        9648,        2386,        3556,         868,        2576,       31351,         379,        3894,         765,         336,        7374,        1429,         375,         975,        1482,        1293,        2045,         429
G55,        1484,        3916,        3418,         650,       22940,        3998,         151,         355,       11469,        3508,          51,        3372,        2634,        3912,        1944,        1224,        3399,        3716,        1309,        2525,        5367,         636,        5408,        5352,        7565,        5391,        2448,         426,        1159,        2684,         594,        1115,        6416,         366,        2136,        4414,        2700,        8521,         938,        6810,        1027,        8013,        7180,         930,         741,        3475,        5249,         557,         728,        1246
G56,         457,         275,          60,        1239,       16265,         305,           5,          13,       23857,        3195,         825,         371,         259,         236,         129,           0,         265,           0,         303,         564,          91,         462,         513,        2240,        2522,         632,           0,          37,          12,         267,          97,         250,        2751,          20,         282,         504,        2098,         972,           1,         162,          24,         910,           0,         162,         264,        2474,         533,         135,         845,         126
G59,        2152,        3898,        1337,         321,       10301,         579,         627,         948,      262936,        6120,        3468,         648,       12188,        1325,        1198,         442,        3176,        8587,         429,       18552,       14976,        8044,       15160,         525,        5665,         538,         310,         923,        1291,       13517,        1309,       18069,        3925,         210,        6781,        3626,          91,       11724,         656,          44,         166,         346,        9619,         418,         875,         491,       52311,        2085,       20868,         352
G61,         413,         388,        1071,         775,        9329,        5139,        7062,        3880,        9144,        5180,        3874,        1502,        2856,        1214,         325,         625,        3277,         466,          80,        1785,        2884,         697,        1817,        1986,        1746,          18,        1048,          32,         330,        2654,         878,       13158,        9576,         610,        2195,        1212,          77,        3122,         450,        2646,         593,        4670,        3457,         892,         482,        5781,       14707,        1135,         937,         289
G62,        3875,         778,       10008,        4031,       33964,        2606,        9020,        3238,       12222,       10957,          95,        2585,        9876,        7390,        1269,        6119,       10024,        7246,        1287,       10304,       18221,        4812,        5211,        3272,       14866,        1914,        2580,        1944,        1669,        9037,        1161,       13165,       17204,         231,       20387,        4637,        2755,       14560,         580,       15118,        1720,        1894,       30321,        3241,        1983,        9914,       16175,        6332,        3351,        1297
G66,        1518,        1188,        5430,         596,       15087,        1046,         928,        1791,       14135,        1735,         274,        1260,        3678,        1814,        2553,         686,        2078,         733,         688,        2159,        1643,        1642,        3329,        4119,        4852,         657,        1430,         431,         370,        3138,         664,       11038,        3596,         281,        6207,        1666,         670,        3114,         193,         512,         201,         820,        4508,        1247,         333,        2779,       22440,        1006,        2280,         158
G77,           0,         215,        6695,           0,         260,          15,         223,         108,           0,           0,           0,         199,         193,         530,        1206,          56,         336,           0,           0,          76,         205,         499,         612,           0,         201,           0,         365,           0,          70,         315,         162,         117,           0,          60,         338,         916,           0,         778,          79,           0,          36,           0,           0,           0,          94,           0,         576,           5,         371,          27
G79,       10080,        1625,       15374,        4965,        8314,        2711,        1392,        1131,        4297,        1515,        1608,         977,       10292,        2302,        1358,       12773,        2979,        5320,         441,        4522,        5784,       13432,        6809,        2781,       12940,         685,        5511,        3933,         629,        3298,         886,        8747,        2909,        2310,       15500,       12267,        5627,       19910,        2137,        3313,         854,         793,       27390,        2808,        1069,        7540,       12183,        2896,        3223,         764
G80,           0,           0,          16,           0,        1158,           0,           0,           0,           0,           0,           0,         858,         469,          51,           0,           0,           0,           0,           2,        5013,        2175,           0,           2,           0,           0,           0,           0,           0,         289,         129,         246,         575,           0,           0,           0,           0,           0,           0,        1170,           0,           0,         214,           0,           0,           0,         759,           0,           0,         265,           0
G81,          31,           0,         392,         415,        2546,         114,        1599,        1079,         325,          11,           0,           1,        3285,         699,          99,           0,         280,         299,         362,         193,        1294,         423,         444,           0,           0,           0,           0,          83,          86,        2305,           0,        1536,         535,           0,        1235,         279,          16,        1074,        7030,         485,           0,         159,        2556,         238,         139,         123,        1933,          14,         545,         270
G85,          12,         448,        2263,          28,         200,           0,           0,           0,         424,         189,          22,          18,         154,           1,           0,           0,           4,         113,           8,          89,          68,           0,           1,          66,          90,          34,          33,          35,          18,          37,           3,           0,          48,          36,           0,           0,        2871,           0,           0,           0,          19,          10,        1151,           0,           0,          20,          95,           1,         176,           0
G87,       16525,           0,           0,           0,           0,           0,           3,           0,        4218,       12003,         750,           0,           0,          75,           0,           0,           0,        1706,           0,        1279,        5688,         131,           0,           0,           0,           0,           0,           0,          17,           0,           0,         256,         941,           0,           0,           0,           0,           7,           0,        9606,           0,           0,           0,           0,           0,         323,           0,           0,           3,           0
G89,        9725,        3947,       10689,        6974,       23660,         861,       28114,        3342,        8015,       30212,        4443,        1663,        2657,        1212,        9808,        3931,       13910,       13413,        5549,       11551,       19708,       13596,       32161,       10025,        9802,        2870,        2360,        1023,        4543,        5869,        2722,       13250,       42683,        2172,        7382,        5959,       18010,        7046,         479,       11920,        1098,        4266,       39527,        9033,        5038,        9221,       14155,         966,       10983,        5093
G90,         834,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           2,           0,           0,           0,           0,           0,           0,         118,           0,           0,           0,           0,           0,           0,          97,           0,           0,           0,           0,           0,         928,           0,         712,        2191,           0,           0,           0,           0,           0,          22,          79,        2017,           0,           0,           0,           5
G91,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        1393,           0,           0,           0,           0,           0,           0,        2037,           9,         305,           0,           0,           0,           0,           0,           4,           0,           0,           0,           0,           0,         120,           0,           0,           0,           0,           0,           0,           0,           0
G92,           0,          74,          16,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        1233,           0,           0,           0,           0,           0,           0,           0,         494,           0,           0,           0,        6142,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
G93,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
G94,           0,           0,           0,           0,           0,           0,        6011,        5180,         481,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       12982,           0,           0,           0,           0,           0,           0,           0,           0,           0,      128400,           0,      377549,           0,           0,           0,           0,          11,           0,        5574,           0,           0,           0,           0,           0,          33,          34,           0,        6093,           0,           0
I89,      193752,      275631,      180062,      117200,     2666374,      232736,      845796,      219388,      872588,      310114,      298791,       93300,     1381077,      285446,      116362,       70794,      357659,      599828,      174607,      502829,     1572622,      715459,      275101,      115636,      349921,      117866,       83476,       98839,      373340,     1168210,       97594,     3393373,      257932,       53982,      816419,      161613,      367305,     1234424,      304184,      180061,      106189,      185792,      751615,      119228,      100257,      510630,      492474,      147103,      492175,       48272
I91,           0,           0,           0,           0,           0,        3013,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       15035,           0,           0,           0,           0,           0,           0,       15101,           0,        8305,           0,           0,           0,           0,           0,          32,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
I92,           0,       17783,        4239,           0,       33930,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,      205904,           0,           0,           0,       83231,           0,           0,           0,      149282,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
I93,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,          99,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
I94,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,      236945,           0,           0,           0,           0,           0,           0,         208,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
K01,           3,        6133,         280,           1,         126,          32,         116,           0,           0,          20,        5123,          19,         224,           0,           0,           0,           0,           0,          26,        2322,        4917,         797,         201,           0,           0,          31,          41,           0,           0,           0,           2,         572,           4,          46,           0,           2,          22,        1307,           0,         597,           6,           0,           0,           0,           0,         618,           0,           0,         302,           0
K03,           0,        8807,           0,           0,           0,           0,           0,           0,           0,           0,           0,        1253,           0,           0,           0,           0,           0,           0,           0,          88,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,          56,        2736,           0,           0,           0,           0,           0,           0,        2254,           0,           0,           0,           0,           0,           0,           0,           0,           0
K04,         369,         655,       11900,        2172,       39751,        2420,        7781,         302,       23493,        4751,         618,        2479,        5500,        5993,        1827,        2008,        4356,        3177,         219,        2915,        4822,        7138,        3218,        3434,        8488,         380,         329,         417,         481,        1948,         364,       16612,       27233,         154,       15017,        2811,         198,        9561,         547,       11693,         330,        1102,       45682,        2096,         680,       14185,       12678,        1563,        4978,         213
K05,         643,          38,        1157,         629,       10506,        1405,         916,         654,       11200,        6481,         212,         474,        1850,         983,          24,         923,        5638,        1137,          68,        2549,        1453,        5475,         884,         444,         817,          44,         920,          87,         228,        2549,         143,        2386,         341,           9,        3549,        3151,        1017,         503,           7,        1256,          53,        1151,         651,         676,           4,          19,        4766,          26,        2995,           0
K12,           0,        6187,           0,           0,           0,           0,           0,           0,           0,           0,       33529,           0,           0,           0,           0,           0,           0,           0,         237,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        3557,           0,           0,       40007,           0,           0,           0,           0,           0,           0,         516,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
K16,        4102,         197,        9648,        1210,       23277,        7219,         692,           0,       23273,        2060,        1248,         597,       10854,       29558,        3946,        2102,        2630,        2696,        1270,        2592,        1457,       13292,        4124,        1959,        5891,         596,        8264,         999,        1110,        5801,        1378,          53,       15688,        1923,          84,        8366,        3326,        3585,         340,        2604,         466,         908,        6200,        2354,         959,       14992,        6309,        2194,        5745,        1670
K18,       73140,       10367,       69908,       33724,      212526,       50929,       15978,        1987,       93879,      122859,       31248,       18175,      115625,      125298,       52502,       42262,       56920,       67977,       19217,       41064,       33992,      123121,       69545,       36081,       64063,       15065,       22438,       21871,        8292,       83654,       47778,       75891,      104549,       13043,      150776,       54359,       42531,      121954,        8478,       59393,       10516,       84119,      210259,       50782,       10570,      102701,      116166,       28920,      100084,        6104
K21,        4966,        1098,        2861,        7962,        3133,        1044,        3555,        1629,        9535,       19717,         752,        1192,        3494,        1059,        1167,         949,       11473,        5323,         148,        2386,        1950,        1444,        1878,        4407,        4139,        1030,        2350,         424,         807,        3024,        1453,        2907,        5380,         797,        2568,        3959,         743,        9045,         656,       12606,        1266,        3345,       12832,        1888,         482,        9156,        2781,        7089,        1741,         244
K22,        1387,         523,           0,          13,        3471,         513,        2748,         206,        1464,        2924,         701,         160,        1629,        2179,         578,         331,         195,           0,        1115,         345,        1350,        5548,        4161,        1570,        3351,          63,         665,        1945,        1015,        2118,          44,        3380,        4455,         173,        6518,         616,        5663,        4772,         753,        5088,        1052,        2089,        4478,           0,          29,        2941,        7379,        1002,        1752,         851
K23,        6329,        2355,        8544,        1224,       25427,        2134,        1809,       11522,       10003,        3519,        3121,        1049,       12361,        6271,         648,        1987,        4886,         828,         693,        3747,       34509,        6230,        3574,        2054,        7678,        3843,         922,         460,         784,        3174,        1170,       23854,        6753,         251,       32326,        8022,        7499,       13367,         379,        5941,        1469,        1065,       49393,        3337,         459,        5920,       17546,        5299,        3050,         683
K25,        1820,        2651,        3230,         469,        4947,        5059,        3255,        1156,        9526,         346,        2919,        1494,         995,         901,        1608,        1115,        3708,        2046,         436,        9025,       12910,        6876,        3762,        2107,        1454,         328,         470,         381,         896,        5535,        3212,       21660,       14166,        1033,        4158,         789,        6229,        2858,        1031,        3308,         501,        2663,        4818,        4005,         485,        3850,        7467,        1208,        5604,         870
K26,         241,         810,         862,         388,        2530,         209,         816,         365,        5196,         610,         668,         264,        3166,        1714,         202,         379,        1877,        4708,         165,         477,        2583,        2462,        1005,         123,        1044,         487,         981,         664,         148,        1471,         356,        6995,         721,         660,        1347,         907,         107,        1590,         354,         930,         110,         170,        7075,         293,         291,        1423,        2404,        1340,        1140,         117
K29,         241,         285,         955,         199,        1085,         907,         450,         395,        1953,         451,         676,         483,          74,         182,          77,        1410,         351,         607,         267,         546,         540,        1113,         663,         417,         317,         121,         126,         376,          82,        1150,          61,        2157,         917,         137,        1025,         412,         634,        2867,         272,          62,         340,         189,         424,         292,          34,         165,        1287,         312,         128,         223
K31,          76,         155,         872,          82,           0,        2453,        3720,        1144,        5299,         701,        1513,          48,          90,          74,           3,          49,          31,           0,          19,         409,         786,         300,          46,        1791,        2359,          28,          63,           0,          25,         109,         185,        2802,         363,           0,        3399,          58,           0,        1733,           1,         490,          94,          58,         956,        3265,         868,        1416,          16,         116,          68,          84
K32,        3811,        2232,       10034,        1688,       15059,        1481,        3727,        2789,       30692,        1579,        2601,        1727,        8044,        5185,        1036,        2578,        2237,        6781,        1042,        3978,        8522,       10056,        7627,        4177,        7949,         747,        2116,         755,        2869,        6184,        2448,       32082,        5268,         350,        5302,        4847,        2109,        5807,        1176,       19388,         502,        2624,       28512,        2182,         717,        6761,        6275,        1198,        1069,         929
K36,       13367,         331,          38,        3134,       60180,        1285,        5141,         222,        3744,       12574,       19175,         566,       13036,         955,       16912,       11681,       12301,       26833,         140,        2845,        4515,       38538,        9542,       10438,       13552,         637,        5324,         200,          98,       19905,        5665,       39765,       13136,         536,       45759,        4573,        7705,       21558,         132,        9651,         760,        2150,       24514,        4273,          42,       27872,       14436,        2524,       10076,         367
K38,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
K44,        8961,       16307,       32652,       14154,       98236,        3459,       10689,        5024,       45716,       19482,        5028,       12156,       26760,       21231,       18293,       14472,       17375,           0,        5759,        2700,       24198,       11581,       15274,        8926,       25612,        3707,        7691,        8374,        2773,         352,       16725,       36993,        5664,        3509,       21939,       15383,        3612,       31440,         617,       19377,       13988,       10243,       88045,         252,        1927,           0,       42638,       15433,        7188,        7456
K45,           0,         328,           0,           0,           0,           0,           0,           0,         409,           0,           0,           0,        1582,        2501,           0,           0,           0,          72,        1421,        3965,         146,         197,           0,           0,           0,           0,           0,           0,        2104,        4186,           0,       34009,         369,           0,       10214,        6128,           0,        5844,           0,           0,           0,           0,        3605,           0,           0,           0,         386,         470,           0,           0
K50,           0,           0,          50,          47,         200,        2031,          63,         160,         452,           0,        6326,        1020,          27,          21,          39,          28,         795,           0,           7,         541,         399,          29,          66,          43,         207,           4,           0,          37,         193,         160,         777,        1046,         130,           0,         298,         278,          45,          41,          28,           0,           0,         154,         111,        1329,        1057,         161,          43,          12,         742,          11
K52,         254,         195,         398,          89,         190,          53,          41,           8,         245,           0,        3411,         123,          43,         450,           0,          29,         494,          48,           6,         134,         181,         494,           0,         115,         142,         177,         277,         194,          47,         140,         204,         731,         108,          58,         384,         116,         187,          60,          32,         432,         153,          60,         452,         127,          24,         910,        1533,         582,           0,          86
K54,        3415,         333,        2520,        1183,        4733,         988,         201,         236,        9545,        7011,        1290,        1075,        4288,        6411,        3478,        4938,        4483,        5067,        1053,        1784,         453,         830,        3436,        6958,        3581,        1256,        3535,         366,          75,         990,        1265,        1483,        9540,        2386,        3556,         868,        2576,        1286,         163,        3894,         765,         336,        7374,        1429,         375,         975,        1482,        1293,        2045,         429
K55,        1484,        3647,        3412,         309,        8035,        1821,         151,         283,        5521,        2708,          49,        2438,        1819,        3820,         534,        1159,        2041,        3716,         612,        2525,         825,         293,         839,        4762,        2381,         867,        1175,         216,         757,        1172,         575,        1115,        2946,         366,        2031,        2149,        2480,        6787,         111,        4478,        1027,        2092,        7108,         757,         548,        3475,        4610,         557,         728,        1221
K56,         450,         275,          60,        1239,       16265,         305,           5,          13,        5248,        3195,         233,         320,         195,         235,         129,           0,         265,           0,         303,         564,          91,         462,         461,        2063,        1414,         632,           0,          37,          12,         267,          92,         250,        2446,          20,         274,         504,        2095,         972,           1,         150,          24,         910,           0,         162,         264,        2473,         533,         135,         845,         126
K59,         827,         705,        1337,         321,        7075,         579,         424,         948,        8096,        5896,         454,         648,        7478,        1238,         965,         442,        2400,        6447,         429,        1206,        3476,        2289,        6663,         525,        5010,         379,         293,         123,        1166,         867,         401,        3918,        3716,         210,        1644,        1917,          91,       10268,         174,          44,         166,         346,        6789,         418,         715,         491,       11476,        2085,        6451,         352
K61,         115,         370,        1053,         744,        5430,        1777,        3237,         515,        2700,        4749,        1023,        1151,        2360,        1036,         325,         625,        2907,         466,          80,         633,        1953,         697,         905,        1855,        1124,          18,         995,          32,         330,        2654,         436,        7580,        2540,         214,        2195,        1176,          77,        2470,           0,        1051,         593,        2418,        2744,         892,         197,        2339,        1100,        1135,         931,         289
K62,        3875,         778,        9963,        4031,       33964,        2606,        9020,        3237,       11843,       10957,          95,        2585,        9876,        7390,         946,        6119,       10024,        7246,        1287,       10304,       18221,        4812,        5211,        3272,       14866,        1914,        2580,        1944,        1669,        9037,        1158,       13165,       17204,         231,       20367,        4637,        2755,       14560,         580,       15118,        1720,        1894,       28675,        3241,        1983,        9898,       16171,        6332,        3351,        1297
K66,        1517,        1188,        5430,         596,       15087,        1046,         928,        1791,       14135,        1735,         274,        1260,        3678,        1814,        2553,         686,        2078,         733,         688,        2159,        1643,        1642,        3329,        4119,        4852,         657,        1430,         431,         370,        2990,         664,       11038,        3596,         281,        6207,        1666,         670,        3114,         193,         512,         201,         820,        4504,        1247,         333,        2779,       22440,        1006,        2280,         158
K77,           0,         215,        6695,           0,         260,          14,         223,         108,           0,           0,           0,         199,         193,         530,        1206,          56,         336,           0,           0,          76,         205,         499,         612,           0,         201,           0,         365,           0,          70,         315,         162,         117,           0,          60,         338,         857,           0,         778,          79,           0,          36,           0,           0,           0,          94,           0,         576,           5,         371,          27
K79,       10080,        1625,       15374,        4965,        8314,        2650,        1392,        1131,        4297,        1515,        1607,         977,       10292,        2302,        1358,       12773,        2979,        5320,         441,        4522,        5784,       13432,        6809,        2781,       12932,         685,        5511,        3933,         629,        3298,         886,        8747,        2909,        2310,       15500,       12267,        5627,       19910,        2137,        3313,         854,         793,       27387,        2808,        1069,        7540,       12183,        2896,        3223,         764
K80,           0,           0,          16,           0,        1158,           0,           0,           0,           0,           0,           0,         858,         469,          51,           0,           0,           0,           0,           2,        5013,         915,           0,           2,           0,           0,           0,           0,           0,         289,         129,         246,         575,           0,           0,           0,           0,           0,           0,        1045,           0,           0,         214,           0,           0,           0,         759,           0,           0,         265,           0
K81,          31,           0,         392,         415,        2546,         100,        1599,        1040,         325,          11,           0,           1,        3285,         699,          99,           0,         280,         299,         332,         193,        1294,         423,         444,           0,           0,           0,           0,          83,          86,        2305,           0,        1536,         535,           0,        1235,         278,          16,        1074,        4930,         485,           0,         159,        2508,         238,         139,         123,        1933,          14,         545,         270
K85,          12,         448,        2263,          28,         200,           0,           0,           0,         424,         189,          22,          18,          98,           1,           0,           0,           4,         113,           8,          89,          68,           0,           1,          66,          90,          34,          33,          35,          18,          37,           3,           0,          41,          36,           0,           0,        2871,           0,           0,           0,          19,          10,         606,           0,           0,          20,          95,           1,         176,           0
K87,        8751,           0,           0,           0,           0,           0,           3,           0,         555,        4415,         750,           0,           0,          75,           0,           0,           0,        1706,           0,        1279,        5351,           4,           0,           0,           0,           0,           0,           0,          17,           0,           0,         159,         864,           0,           0,           0,           0,           7,           0,         962,           0,           0,           0,           0,           0,         147,           0,           0,           1,           0
K89,        9725,        3947,       10507,        6404,       23660,         841,       27718,        2609,        7812,       30212,        4021,        1633,        2657,        1212,        9808,        3461,       13777,       13413,        1340,        9730,       11426,       13590,       29835,        8053,        9545,        2863,        2360,        1023,        3753,        5454,        2660,       11538,       42636,        1438,        7382,        5561,       18010,        7002,         394,       11910,        1098,        4266,       39588,        6043,        3528,        9221,       13586,         966,       10604,        5093
K90,         834,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           2,           0,           0,           0,           0,           0,           0,         118,           0,           0,           0,           0,           0,           0,          97,           0,           0,           0,           0,           0,         928,           0,         712,        2191,           0,           0,           0,           0,           0,          22,          79,        2017,           0,           0,           0,           5
K91,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        1383,           0,           0,           0,           0,           0,           0,        2037,           9,         305,           0,           0,           0,           0,           0,           4,           0,           0,           0,           0,           0,         120,           0,           0,           0,           0,           0,           0,           0,           0
K92,           0,          74,          16,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,         494,           0,           0,           0,        6014,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
K93,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
K94,           0,           0,           0,           0,           0,           0,        4887,        5180,         481,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       12982,           0,           0,           0,           0,           0,           0,           0,           0,           0,      128400,           0,      377136,           0,           0,           0,           0,          11,           0,        5506,           0,           0,           0,           0,           0,          33,          34,           0,        6093,           0,           0
M01,         669,           0,           0,        1772,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        2137,           0,          91,           0,        1356,           0,       19271,           0,       13646,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        6333,           0,           0,           0,           0,           0,         590,           0,           0,           0
M05,           0,        4040,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,         591,           0,           0,           0,           0,           0,         328,           0,        1033,           0,           0,           0,           0,           0,           0,        5275,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
M12,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,      583154,           0,           0,           0,           0,        3769,           0,           0,           0,           0,      138202,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        1978,           0,           0,           0,           0,           0,           0,           0,           0
M18,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           3,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
M21,           0,           0,        4133,          27,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        1475,           0,           0,           0,           0,       12212,         935,           0,           0,        4529,           0,        1831,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        1494,           0,           0,           0,           0,           0,       13368,           0
M23,           0,         112,           0,           0,        1381,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        2937,          22,           0,           0,           0,           0,          96,           0,           0,           0,           0,           0,         362,           0,           0,           0,        7000,           0,           0,           0,         887,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,         501,          91
M25,           0,           0,        1929,           0,           0,           0,           0,           0,           0,           0,         948,           0,           0,           0,           0,        4459,           0,           0,         205,           0,           0,        1441,           0,           0,           0,           0,           0,           0,        2611,           0,           0,           0,           0,           0,           0,           0,           0,         546,           0,           0,         539,           0,           0,           0,           0,           0,           0,           0,        9563,           0
M29,           0,         112,         342,           0,        7023,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,         181,           0,           0,           0,           0,           0,         261,           0,           0,           0,         466,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,          19
M30,           0,         559,           0,           0,           0,           0,       65401,           0,           0,           0,           0,           0,           0,      862947,           0,           0,           0,           0,       76478,           0,           0,        6991,       32206,           0,           0,           0,       63234,           0,           0,           0,           0,           0,           0,         241,     1306830,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
M32,           0,       48943,       74656,           0,        5266,           0,        2328,           0,           0,           0,           0,           0,        8391,           0,       22217,       19884,           0,        2758,        4755,        8374,           0,           0,        7237,           0,           0,       10431,      116692,           0,       52341,        3982,           0,           0,           0,           0,           0,       56151,           0,           0,           0,           0,           0,           0,      360381,           0,           0,           0,           0,           0,      358887,         123
M38,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
M44,           0,           0,         169,           0,        4916,           0,        1711,           0,           0,           0,           0,       76907,       10660,           0,           0,           0,           0,           0,       19344,           0,           0,      191675,        2219,           0,       36444,           0,           0,           0,           0,           0,           0,           0,           0,           0,      168996,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        3354,           0
M50,           0,           0,        9284,        4820,           0,           0,       19713,           0,           0,       51043,           0,           0,        1166,           0,       46408,       29259,           0,           0,       14853,           0,       98904,       58696,        8542,           0,       76777,           0,           0,           0,           0,           0,         187,       47924,           0,           0,       56475,        1978,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,         741
M52,        1741,        1633,         161,           0,           0,           0,           0,           0,           0,           0,           0,           0,       53450,           0,        1612,        4184,           0,           0,           0,           0,           0,           0,        8410,           0,           0,         487,           0,          23,         153,           0,         444,           0,           0,          81,           0,        2717,           0,           0,        1866,           0,           0,        7640,           0,           0,           0,           0,           0,           0,           0,           0
M54,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,         359,           0,           0,           0,         497,           0,           0,           0,           0,         339,          10,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        1612,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        1701,         619
M55,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,         239,           0,         276,           0,           0,           0,           0,           0,           0,        1522,        1325,           0,           0,           0,           0,          15,           0,         394,           0,           0,           0,           0,         171,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        1944,         163
M56,           0,          77,        1122,         206,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,         741,           0,           0,           0,           0,           0,           0,           0,         449,           0,           0,           0,           0,        1002,         192,           0,         262,           0,           0,           0,           0,           0,           0,           0,           0,           0,          82,           0,           0,           0,           0,           0,           0,           0,        2336,           7
M59,           0,           0,        6112,           0,        3355,           0,           0,           0,           0,           0,           0,           0,         673,           0,        7479,         123,         346,          47,           0,       13908,        2693,           0,        9306,           0,        2938,           0,           0,         815,           0,       49743,         261,           0,           0,           0,         603,        2413,           0,       11648,           0,           0,           0,           0,        9096,           0,           0,           0,           0,           0,       26918,         399
M61,           0,         609,        3181,        1444,           0,           0,        3815,           0,           0,        2988,           0,           0,        3657,           0,          74,           0,           0,        1226,         269,           0,           0,           0,        6745,           0,           0,           0,         246,           0,        1185,        4317,           0,           0,           0,           0,           0,        4268,           0,        2020,           0,           0,           0,           0,         578,           0,           0,           0,           0,           0,       11318,         115
M62,           0,           0,         968,         823,           0,           0,           0,           0,           0,           0,        1989,           0,       34990,           0,           0,           0,           0,           0,           0,           0,           0,           0,        4196,           0,       12370,         418,        6447,           0,         149,           0,           0,           0,           0,           0,           0,           0,        3476,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        1469,           0
M66,           0,          13,          13,           0,           0,           0,           0,           0,           0,           0,           0,           0,         275,           0,           0,         778,       20487,          11,           0,           0,           0,           0,        3892,           0,         360,           0,          43,           0,           0,           0,           0,           0,           0,           0,          30,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,         771,           0
M67,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        1343,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,         713,           0,           0,           0,           0,           0,           0,           0,      491981,           0,           0,           0,           0,           0,        8257,           0
M68,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
M79,           0,           0,           0,           0,           0,           0,       16762,           0,           0,           0,           0,           0,      110743,           0,       31446,        5608,           0,       76057,           0,           0,           0,           0,        6324,           0,           0,        7316,           0,           0,       14372,           0,           0,           0,           0,           0,        5246,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,      168268,           0
M80,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,      105737,           0,         162,           0,           0,           0,        8415,       19681,        7932,           0,           0,           0,          73,           0,           0,           0,           0,           0,           0,           0,           0,           0,       81946,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        1371,           0
M81,           0,           0,           0,           0,       11830,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       18209,           0,          21,           0,          82,           0,        1113,           0,           0,           0,          10,           0,           0,           0,           0,           0,        1758,           0,           0,       18057,           0,           0,           0,           0,           0,           0,           0,           0,           0,         916,       38025,          32
M87,           0,           0,           0,           0,           0,           0,          11,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        1950,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
M89,           0,       19215,       36750,       48554,      835773,           0,       97559,           0,           0,        8238,       11675,           0,       74271,           0,      105608,       15644,       22226,       43260,        3026,         223,           0,       41686,       14565,        3761,      166145,        1410,       61410,           0,        1244,        2866,        8239,       10265,       10138,           0,        5279,           0,        1601,       97975,           0,        2235,         746,           0,       81882,        7299,           0,           0,       15384,        9278,      155376,        3888
M91,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       33234,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
M92,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
M93,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
M94,           0,           0,           0,           0,       22859,           0,           0,           0,           0,           0,           0,           0,        3889,           0,           0,           0,           0,           0,           0,           0,           0,        2177,           0,           0,       10901,        2281,        1137,           0,           0,           0,           0,           0,           0,           0,       50311,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,          75,           0,        9470,           0
N01,           0,        6151,        7025,           0,        5006,        6428,        2690,           0,       71801,           0,           0,           0,       56347,       10098,           0,           0,           0,           0,         997,         397,           0,       68304,       18215,          13,           0,         212,        1871,           0,        6159,           0,           0,        3371,       22503,         470,        1770,        1958,          39,        3986,           0,         399,           0,           0,           0,       43969,        1020,           0,           0,           0,        4991,        8428
N05,        4821,           0,       51161,       11474,      114301,       22081,           0,           0,           9,       24878,           0,         347,       37715,       26682,       41557,       17668,       15090,       67493,           0,       12821,      226003,       11597,       35625,       13217,           0,           0,           0,         396,           0,      101746,           0,      244329,       17835,         458,       78506,        4523,       95137,       74204,           0,           0,         290,       81999,      264959,           0,           0,      181715,           5,        3342,       82597,         121
N12,           0,      662843,           0,           0,     1161316,           0,     1681367,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        4985,     1896727,     1934434,           0,           0,        1953,           0,           0,           0,           0,           0,      895885,           0,     4526695,     4198118,           0,           0,         595,           0,           0,      410351,           0,           0,     2134685,           0,           0,           0,     2985313,           0,           0,           0,        1807
N18,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,      109862,           0,           0,           0,           0,           0,           0,           0,           0,           0,      112401,           0,      321504,      545918,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
N21,           0,           0,        7216,         779,       12133,         849,           0,         406,           0,           0,           0,         195,       17667,           0,           0,           0,         187,           0,           0,           0,           0,           0,        1562,           0,           0,           0,           0,           0,           0,           0,           0,      283125,           6,          97,           0,         433,          29,       79220,           0,        1066,           0,           0,         444,           0,           0,         578,       14444,           0,           0,           0
N23,          10,           0,           0,        4556,       28079,           0,           0,         611,           0,        3369,           0,           0,        1414,           0,           0,           0,       18803,           0,           0,           0,           2,           0,        3167,           0,       14300,        1556,           0,           0,           0,        1971,           0,        5014,         753,           0,           0,           0,         604,           0,           0,         680,           0,        1480,           0,           0,           0,       37511,           0,        4653,           0,           0
N25,           0,           0,        9427,        2808,      536251,           0,           0,        4251,         212,        2667,           0,          10,        8553,           0,        5165,           0,       15960,           0,           0,         135,       23822,       49795,       15665,           0,       15301,        4021,           0,         447,           0,       42385,           0,      137325,        3921,        1510,       20950,       12788,           0,       88550,           0,        8760,         679,        8623,       11928,        1190,           0,       81276,        4686,           0,           0,         577
N29,           0,           0,         623,         468,           0,           0,           0,          81,         384,           0,           0,         521,           0,         480,           0,         247,          25,           0,           0,          46,           0,           0,           0,         352,           0,           0,           0,           0,           0,          26,           0,           0,        1449,           0,           0,           0,           0,           0,           0,          72,           0,           0,           0,         719,           0,           0,           0,          33,           0,          88
N30,      107021,       74674,      782680,       50681,     2436401,       20136,       66707,           0,     1907711,           0,       88983,       97281,      852815,      189491,      135295,       97275,           0,      156325,           0,       54985,      927424,     1171975,      771201,      332886,        9101,       37827,       23698,      495286,       27452,     1066163,      503534,      740373,      474653,       42605,       11477,       23914,      141337,      152105,       40200,      341767,       24141,      286641,       53668,           0,        8355,       23636,      135549,       16659,     1291560,      138344
N32,       17224,        8499,       18859,         305,     2975866,       29697,       64481,       12338,      136360,      338828,       20624,        8268,       66579,       49834,       55450,       51450,      123148,           0,           0,      272406,           0,     1318105,      130803,       36361,       11197,        8161,           0,        3468,           0,       69276,           0,      641383,      538464,       20443,      559043,       17596,      199367,      815815,           0,       66302,         173,         508,       89789,       39349,           0,      157250,       72644,        7517,           0,       24471
N38,           0,         224,           0,           0,           0,        6446,           0,           0,         159,       21767,           0,           0,        1926,           0,           0,           0,        1403,         279,           0,           0,           0,           0,           0,           0,        2156,           0,           0,           0,           0,       75342,           0,           0,         874,           0,           0,         825,           0,      138146,           0,           0,           0,           0,        5789,           0,           0,         120,           0,           0,          48,           0
N44,      176238,       27628,      352937,      121805,     1493065,      210715,       20911,        7830,      213092,        7070,           0,         213,      481253,      506770,      297874,      129307,      103582,       42146,          16,      377090,      127400,      816252,      431465,       98552,      195048,       16787,      127652,       46658,       23452,      136409,       15631,       73066,      166649,       50383,      612788,      197749,      454405,      406616,           0,        7073,       19525,      271513,       24989,       57424,       24377,      175862,      378457,           0,      398476,       28583
N50,           0,           0,        4450,           0,       57638,       14421,        9120,           0,       88922,           0,           0,           0,       55732,          18,           0,           0,       31207,       43836,         210,       15645,           0,           0,       23727,       40053,           0,           0,           0,         883,        5831,       46619,           0,      110356,       39312,           0,           0,           0,       13296,      119677,           0,           0,        1631,       32313,           0,           0,           0,       26218,       24032,       16318,           0,        1772
N52,        4064,         224,        1580,        3028,       30269,           0,        1959,        1073,       32573,       22318,           0,         524,         131,         708,           0,           0,        6066,           0,           0,       21247,       25886,       22291,          30,        4069,        2882,           0,        1493,          32,           0,        9608,           0,       81283,       12640,         468,           0,           0,         990,       24645,           0,        3671,         158,         228,       11340,           0,           0,       12641,        1565,        7009,       11772,         484
N54,           0,         112,         810,         513,       22677,          54,          13,         100,        2077,           0,           0,           0,           0,           0,         762,           0,           0,           0,           0,           0,         100,        1459,           0,           0,           0,         761,           0,           0,           0,       10583,           0,           0,        1463,         386,        2968,         514,        1278,           0,           0,           0,         676,           0,          26,           0,           0,         595,        3371,           0,           0,         939
N55,           0,           0,           0,           0,         409,         432,           0,           0,           0,           0,           0,           0,           0,         296,         834,           0,           0,           0,           8,           0,           0,          49,        1147,          27,           0,           0,           0,         139,           0,           0,           0,           0,           0,          40,         165,           0,           0,         829,           0,        1823,           0,          19,         319,           0,          11,         804,         587,           0,           0,          95
N56,        1940,           0,          25,          10,       26715,           0,           0,          16,         698,        1519,           0,         121,        1731,         177,           0,           0,           0,           0,           0,         131,          74,          75,        1112,           0,           0,           0,           0,          23,           0,         756,           0,           0,        1094,           0,        1418,        1697,           0,        6024,           0,        1669,           0,         651,           0,           0,           0,         238,       32484,         949,           0,         398
N59,         648,        2348,        2047,           0,         109,       10714,           0,        1846,        9021,         100,           0,          44,        6626,         872,        2872,           0,         818,           0,           0,       11255,        4062,       19625,       21102,         565,         414,         265,           0,         173,         534,        5662,           0,        1427,        5214,         837,        1927,           0,         587,        2885,           0,         861,        9770,         243,       10257,        8814,        3034,         167,       10188,           0,           0,       22638
N61,           0,        3579,        5581,         207,       11303,        3525,           0,       23614,        9221,        1967,           0,        2625,        3254,        3738,        2712,           0,           0,           0,         683,       14459,       13783,       11240,        3638,       59720,          52,          31,           0,         312,           0,        2108,        1021,        9345,         125,          34,       15948,           0,        3155,           0,           0,        2401,         219,         372,        9953,          14,         193,         317,       15121,           0,           0,         284
N62,       10603,        6359,        3103,         369,       87256,           4,          61,        2171,        2391,        1844,        2214,         874,         255,        2509,           0,           0,       11926,       29207,           0,       67154,       36277,       20457,       39845,         973,       15425,        7188,           0,          66,         537,       45983,         428,       10348,         110,           0,       11386,          18,       21481,       11485,         898,        6386,          33,        5054,         337,           0,         236,      140394,       43567,           0,           0,        1920
N66,           0,           0,           0,           0,        2748,       11027,           0,          67,           0,         985,           0,           0,        1420,         212,           0,           0,           0,           0,           0,           0,          33,        5168,        2383,          54,           0,       22479,         208,         916,           0,        2832,           0,           0,           0,           0,          80,           0,        2668,           0,           0,           0,           0,           0,           0,           0,           0,       13043,           0,           0,           0,           0
N67,           0,           0,      436885,           0,     9099575,      153138,           0,           0,      206764,           0,           0,           0,      520072,      226338,           0,           0,           0,           0,           0,           0,      114071,           0,      207566,      135687,           0,           0,           0,           0,       48005,      686893,           0,     5757708,           0,           0,       42038,           0,           0,           0,           0,           0,           0,      266857,           0,           0,           0,       15496,           0,           0,           0,           0
N68,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        4472,           0,           0,           0,           0,           0,        5610,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,      928503,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       13610,           0
N79,        8303,           0,           0,         398,     4502695,      339122,      195732,         419,           0,           0,           0,         190,        1670,      152469,         533,           0,       16471,           0,           0,           0,           0,       30619,      312154,        2406,       22053,        5167,           0,       16788,        5690,      208187,           0,     2229589,      488064,        1193,      782029,       24985,         176,     1189856,        3096,       16216,        1173,       22411,         661,       12330,           0,      280453,        7201,           0,       74331,        3934
N80,           0,       45317,           0,           0,        9342,           0,        2245,           0,      107733,           0,           0,        1910,        1216,        2596,           0,           0,           0,           0,           0,        1082,           0,           0,         300,           0,       41326,           0,           0,           0,       20844,       24708,        1104,       74779,         928,           0,           0,       18429,           0,       26807,         516,           0,           0,       27476,           0,           0,        9819,          21,       47430,           0,           0,           0
N81,           0,           0,           0,           0,           0,        2272,           3,           0,       33605,           0,           0,          20,        1214,        1870,           0,           0,           0,           0,           0,          31,        4028,           0,       14110,           4,           0,           0,           0,        1121,         137,       15929,           0,       52274,        1727,           0,        7428,         373,           0,           0,         494,           0,           0,        3711,        2223,           0,        1015,           0,       26174,           0,           0,           0
N87,        1500,        3243,           0,           0,           0,           0,           0,           0,        4181,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        1269,           0,           0,          10,           0,           0,           0,          30,           0,           0,           0,           0,           0,           0,           0,           0,       11633,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,          50,           0
N89,      144492,       70291,       63278,       18305,      165170,      100465,      135846,       49610,      194635,       19008,        5844,       10727,      103952,      101517,           6,       15765,       44092,       98808,          20,       11856,       81561,      100916,      113557,       27481,        5727,       24878,           0,        7299,         213,      725829,       31848,      402876,      126032,       21214,       38105,       43138,       41928,      209923,         540,      129627,       20375,       57486,      198356,        9549,        4121,       60719,      137974,       16025,        1018,       24087
N91,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,         128,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
N92,           0,        7739,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
N93,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
N94,           0,           0,           0,           0,       66975,           0,          97,       22546,      102708,           0,           0,           0,       93764,           0,           0,           0,           0,           0,           0,      164373,           0,      128047,           0,           0,           0,           0,        1821,           0,           0,           0,           0,     1187593,           0,           0,           0,           0,           0,       97097,           0,           0,           0,       18395,        4968,           0,           0,       89714,         474,           0,       66510,           0
Q12,     2140439,           0,     2004172,     1292676,    15719882,     1712136,       20453,      381920,     7005591,     4331266,           0,      731005,     4451569,     2956308,     1659064,     1758668,     2353156,     2417867,           0,           0,      327024,     9196969,     3305452,     1402252,     2714273,      528780,      671072,      842706,       20961,     3494294,     1401940,     6564421,           0,      292918,     5545637,     1985487,     1779910,     4808653,       27123,     1774420,      250143,       12886,     9416864,     1265860,      245191,           0,     4175142,     1171559,     2842557,      355661
Q18,           0,           0,      101820,           0,     2930529,       16926,           0,           0,      818977,           0,           0,       10239,      330349,           0,      133997,       50544,           0,           0,           0,           0,           0,      250261,           0,      112484,       84309,        4125,       35892,           0,         272,           0,           0,           0,           0,         448,       71614,           0,      152093,      142858,           0,           0,           0,           0,      738062,           0,           0,           0,           0,           0,           0,       44005
R01,           0,           0,           0,           0,           0,         365,           0,           0,           0,           0,           0,           0,       58519,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        9676,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
R12,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
R18,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
R30,           0,           0,           0,           0,       64399,         745,           0,           0,           0,           0,           0,           0,       80911,           0,           0,        1853,           0,           0,           0,           0,           0,           0,           0,           0,        1105,           0,           0,           0,         155,           0,           0,           0,           0,           0,           0,           0,         388,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
R32,           0,           0,           0,           0,           0,        1211,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        2142,           0,        3540,           0,           0,           0,           0,           0,           0,           0,           0,       12238,           0,           0,           0,           0
R38,           0,           0,           0,           0,           0,           0,           0,           0,           0,         354,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
R44,           0,           0,           0,           0,           0,        8663,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        3775,           0,           0,           0,           0,           0,           0,           0
R50,           0,           0,           0,           0,       31120,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,         226,           0,           0,           0,           0,           0,           0,           0,           0
R52,           0,           0,           0,           0,        5457,           0,           0,           0,           0,           0,           0,         100,           0,        3901,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        4584,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
R54,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        1302,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
R55,           0,           0,           0,           0,           0,        1958,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        1328,           0,           0,           0,           0,           0,           0,           0,           0,           0,         404,           0,           0,           0,           0,           0,         125,           0,           0,           0,           0,           0,           0,           0
R56,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
R59,           0,           0,           0,       18686,           0,        1621,           0,           0,           0,           0,           0,           0,        3789,           0,           0,        2848,           0,           0,           0,           0,           0,           0,           0,           0,        6087,           0,        6512,           0,           0,           0,           0,           0,           0,         593,        6416,        5259,        1282,           0,           0,         368,           0,           0,        1927,           0,           0,           0,        3871,           0,           0,           0
R61,           0,           0,           0,           0,       16812,         109,           0,           0,           0,           0,           0,           1,      134996,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,          59,        1713,           0,          36,           0,           0,           0,           0,           0,           0,           0,           0,           0,         791,           0,           0,           0
R62,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
R66,           0,           0,           0,           0,           0,          12,           0,           0,           0,           0,           0,           0,        1000,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
R79,           0,           0,           0,           0,           0,          37,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
R80,           0,           0,           0,           0,        2791,           0,           0,           0,           0,           0,           0,         627,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,         885,           0,           0,           0,           0,           0,           0,           0,           0,        7446,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
R81,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,         777,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,         252,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
R87,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,         984,           0,           0,         286,           0,           0,           0,           0,           0,           0,           0,           0,           0,          20,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
R89,           0,           0,           0,           0,       25882,       20622,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       16045,           0,        2716,          91,           0,         195,           0,           0,         885,           0,       19079,           0,           0,           0,           0,          54,         378,           0,       10285
R91,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
R92,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        1253,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
R93,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
R94,           0,           0,           0,           0,      334876,           0,           0,           0,           0,        9666,           0,           0,      196696,           0,           0,           0,           0,           0,           0,           0,      601900,           0,       36291,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       57743,      334201,           0,           0,           0,           0,           0,           0,           0,           0,      157730,           0,           0,           0
S67,           0,      101012,           0,           0,     2018429,          65,           0,         820,           0,           0,       11868,           0,           0,       14232,       34346,           0,           0,           0,        8508,           0,      181493,       62079,           0,           0,           0,           0,        8603,        4041,           0,       56361,           0,      728699,           0,           0,           0,       40516,           0,      141160,       18439,           0,           9,           0,           0,           0,       11300,           0,       28872,           0,      122580,           0
S89,           0,           0,           0,         957,        4760,        6983,           0,           0,         908,           0,           0,           0,        2174,           0,         321,         150,           0,           0,          15,           0,           0,           0,           0,           0,           0,           0,           0,         795,           0,           0,           0,           0,           0,           0,        1974,          67,           0,           0,           0,           0,           0,         142,        1157,          21,           0,         414,        1216,           0,           0,        1345
T01,      118202,       57294,      331090,        6395,     3176874,        6614,          12,           0,      706021,       32893,           0,         111,      204886,        3174,           0,       38038,      398618,       36691,       42081,      239994,         173,     1488087,        8632,       22988,       14033,      229500,        3471,       57817,         130,        5606,       27422,           0,      128616,        1991,       13509,           0,         193,      228995,        8223,       14297,           0,           0,           0,           0,        9635,       19672,     1686091,        2336,       61537,       86363
T09,     1364911,           0,     2771856,     1301937,    17687262,     1230748,     2368000,           0,    10656548,     3538675,     1363262,      575752,     4958866,     2709816,     1462892,     1379070,     1680525,     1490235,      650210,     1951031,     2481300,     5865988,     2741603,     1691654,     2348110,           0,      781099,     1437820,           0,     4133278,     1218664,     6844960,     2794111,      283382,     4752099,     1143583,           0,     5550290,      456610,     1794120,      358879,     3360568,    10274777,     1066552,      173644,     1920623,     6047504,      793465,     2571854,      208026
T10,      103674,       11969,       42034,       26844,      273674,       23652,       36874,       11494,      514488,      115344,       38362,        4897,       56780,       32122,       12429,       59124,       58557,       53805,       32688,       23393,       61333,      123386,       54775,       36929,       23382,       14842,       15885,       13384,       11015,       76783,       33654,      209044,      160089,        5174,       78972,       57344,       24044,      146762,        8562,      113436,        9682,       65103,      406696,       18002,       13450,      107248,      127354,        7920,       39584,        1090
T11,         107,        2032,         902,         717,           0,        1264,      144538,           0,         398,           0,           0,           0,      272187,           0,       26321,        1076,         293,        1556,           0,        3514,        8193,           0,       64264,      191423,       61762,           0,       10636,      449098,        2758,      301760,        1153,         634,           0,       11012,           0,       12914,          68,         380,           0,       26531,          42,           0,       21462,           0,           0,          58,          11,           0,         566,           0
T12,      153661,       27949,      128889,       69547,     1022496,      114990,      167621,       51134,      419306,      195823,       65327,       51755,      140198,      135699,      102058,       95818,      270449,      232394,       38923,      156454,      292623,      213638,      149581,       97872,      182073,       33662,       38693,       83342,       39561,      319630,       43609,      633969,      226894,       19478,      324689,      146346,       32426,      422890,       34300,       72891,       31130,      209662,      633457,       42823,       18998,      208225,      205638,       71374,      103741,       13503
T13,      457582,       39601,      451089,      330110,     2703674,      418494,      417102,       91976,     1337144,      518143,       75529,      153193,     1133329,      605426,      362278,      286115,      397014,      487944,      153570,      599334,      577501,      817536,      503933,      348317,      547430,      162827,      259559,      180593,      101583,      466695,      190626,      487746,      914233,       90035,     1251920,      386705,      362219,      776477,      123517,      317267,       88619,      720409,     2236750,      202705,       57542,      679151,      661934,      207497,      656525,       43223
T14,        4693,           0,        8452,       10853,      109023,        8082,       16742,         166,       86740,           0,           0,        1599,       44387,        1643,        2177,        6403,       20632,        4509,        2775,        3189,       12686,       14753,        1426,           0,           0,         181,         853,           0,        6069,        2272,        1119,       57313,           0,           0,       13788,        3241,        2173,       20164,        7175,           0,         483,           0,       13182,           0,          28,           0,        3412,        6625,        6561,         244
T15,      377803,        2401,       87380,           0,       43671,        5543,      148177,       22933,      506841,           0,      100505,        1687,      765217,        4334,           0,         871,           0,       18122,         553,      142267,           0,           0,          52,           0,         300,       12710,        2297,        5474,       50222,     1201179,       10058,     1628110,      277433,       26616,      732635,       14670,        8573,      687492,       66793,       36009,        1536,        5567,      240746,           0,        8815,      107004,      214393,      209222,      285482,           0
T16,       69194,       17087,      109189,       94911,      715659,       65587,      123331,       21877,      451514,       92175,       35386,       19166,      423737,       86844,       98324,       54952,       18191,       88863,       46186,      137243,      234163,      619401,      171992,       56128,      113531,       14561,       48253,       50523,       44188,      256035,       24529,      723792,       44636,       24095,      293057,       75974,      117067,      343086,       51388,       30145,       15200,       85812,      638943,       28491,       14754,       15960,      218608,       34008,      183835,        6076
T19,      113780,           0,           0,       53915,       65082,       44233,      286410,       46233,      353967,           0,      116600,        6121,      634923,           0,           0,       11503,      481260,       29335,           0,      481442,       68825,       12433,      482061,           0,           0,       10325,       30134,       40137,      285320,      217680,       92523,     1188589,      443980,       88283,       34705,        9892,           0,      705844,       20311,       79991,       32145,      117060,     1970322,           0,      107142,      406922,      156482,      130056,           0,           0
T20,        2417,        1152,        3233,        1503,       24102,        3596,        5604,         869,       31895,        7314,           0,        1032,        4266,        7607,        8452,        2084,        2420,           0,        3062,         504,        1209,       11609,         788,        3061,        3409,        1527,         244,           0,        3039,        4991,        3405,       30581,        5506,         242,       24870,        3536,        1757,       14319,         247,       10777,         260,        1634,       24249,         756,         410,        6450,        8554,        9622,         265,           7
T21,           0,         103,          17,        1003,         117,        2028,         318,          69,        7820,           0,           0,           0,         798,        4240,        3182,         261,         471,        2238,         648,          16,         993,         710,         109,           0,        1225,       34743,           0,       76944,         512,       53635,         170,          30,        6689,         289,           0,        3743,        2019,          65,         245,       35325,         131,           0,        6531,           0,         140,           3,         151,           0,         164,           0
T22,      125569,        1095,        4524,        9452,       19276,        4012,        9611,      332004,      121887,       28903,        1642,         705,      102196,        4330,       31463,       17962,       97666,      271139,        2442,       14437,       18822,       20318,        2447,       61184,       77034,         962,        5398,       12167,        3909,      120496,        2160,       37497,      184382,           0,      403609,       37488,        4590,      959058,        9910,       33809,         791,      278658,     1479480,        3268,        1119,       25387,        9960,        5938,        9062,        4397
T23,       17011,       17145,       15297,       13545,       66334,       55240,        4364,         903,       14453,       20010,         283,       22631,       18819,       14644,       16704,       11704,       16029,       14497,       11392,       10174,        4442,       38587,       37242,       11308,       21499,       27257,        9049,        4819,        6356,       11790,       13428,       32046,       15229,        6853,       29033,       15335,       22043,       43001,        1539,       12924,       12350,       18138,       49635,       13179,        4918,       19244,       31219,       14724,       48049,       19004
T24,      182439,       24496,      246154,       91764,     1454043,      123295,      198301,       32206,      751821,      207837,       61277,       54158,      730669,      156784,      260191,      123211,      162329,       88115,       56249,      190977,      250921,      591029,      478082,      102809,      228433,       44777,       66690,       86833,       53444,      393759,      115612,      658242,      320167,       40197,      495860,      460841,      277265,      493305,       53991,       91619,       29344,      197450,      744547,       47826,       38614,      279192,      232684,       84448,      219004,       41014
T25,       16434,        2564,       10141,       12825,      112596,       12981,       26176,         124,       96635,       36279,         382,        4838,       42794,           0,       10277,        9201,        9282,       13472,       10127,       20625,       63952,       36853,       22560,       10504,       16733,        3260,        6257,        9598,        7748,       34335,        5750,      102789,       58569,        3108,       36354,        5764,       14947,       50952,         363,       13282,        1990,       36251,       69796,        9585,        3670,       22933,       22675,        3369,       20932,        2295
T27,        7815,         311,           0,        8447,       78092,           0,           0,        4127,       24396,           0,        7207,       29944,           0,           0,        8164,        3550,        4340,        5516,           0,           0,           0,       18168,           0,           0,       15303,        1273,           0,           0,        4349,        3993,         102,       50027,           0,           0,         696,           5,        8305,       42922,           0,           0,           0,        4939,        7905,           0,           0,           0,       14155,       12533,          14,        1783
T28,      128876,       28029,       39317,       54708,     1109449,       59910,       66578,      151034,      241050,       65387,       12537,       32211,       46402,       40297,       60767,       29060,       78278,       48853,       30425,      117667,       55156,      115168,      158908,       37546,      105942,       25915,       48491,      113862,       29869,       94516,       14588,       98549,      117518,       25274,      338184,       48034,      171158,      260903,       17884,       96396,       37581,       64290,      393055,       15568,       13534,       72335,      137533,       18111,      127658,        2659
T29,         137,         183,       24924,        3710,        6924,        6824,        5587,        3962,        9759,       36654,         339,        3741,        3202,         494,        3185,        2020,        2546,        1244,         665,        2734,       33554,       21017,       11339,          15,       11616,         835,       14455,        3691,        2805,        3055,         576,        3990,        2164,           0,        3942,         336,        2182,        8071,        1023,       32789,        5207,        1828,       15542,        8941,        2153,        4155,       25265,        1920,       11294,         394
T40,     1482662,           0,     1482749,     1047119,    18344342,     2101708,     2474355,      562371,           0,     3841595,      925714,      599724,     5312159,     3257299,     1617498,     1232989,     1964843,     1061606,      640472,     3400487,     5974201,     5473072,     3663517,      683247,     2535063,      372093,      740902,           0,       37758,     4540082,      591734,    17589489,     4699115,      142997,     5552503,     1416921,     2797575,     4929522,      530406,     1655954,           0,      101511,           0,     1024072,      250283,     4315545,           0,      709923,     3932948,           0
T41,      236279,      528005,      417481,      191600,     5747929,      190026,      698918,      193649,      944969,      653296,       47296,      129470,     1481460,      874305,      220675,      261408,      340912,      283076,       63290,      365759,     1205667,     2130395,      665756,      203339,      369424,       75520,      123924,           0,      166451,     1028947,      150343,     2814568,      906007,       69880,      713252,      166746,      312001,     1784579,       82160,      250214,       39914,      493072,           0,      147374,       48274,      367832,           0,      218686,      670891,           0
T50,       34705,        1158,       48771,       21667,      466214,       27628,      212853,       27971,      409253,       74762,       16438,        7350,      179513,      106055,       89224,       56604,       79512,       61232,       17124,       92218,      209281,       73372,       35415,       12264,       71923,       15382,        7409,       23389,       29065,      275824,        8962,      759377,      118457,        6394,       83362,       70666,       26014,      563093,       12155,       26980,       22427,       44482,      171606,       24956,        9748,       77676,       41972,        8513,       40784,        3282
T51,       16550,           0,           0,       10642,           0,           0,       62647,       39079,      804804,         775,        6410,           0,       33001,           0,        7167,           0,        3770,           0,        9692,       71737,       46140,           0,       70947,           0,           0,           0,        4453,        1862,       30390,       60609,           0,      343150,           0,           0,           0,        5968,       21572,      207519,        3477,       18341,         121,       76016,           0,           0,       13320,       84046,      252213,        4861,       28655,           0
T53,       63326,     1159882,           0,       12865,       42242,       24648,           0,           0,       72941,           0,           0,        2538,           0,         640,           0,       82464,      196686,      382527,           0,           0,           0,       27198,        2457,       28656,          21,       83241,        1573,       46990,           1,           0,      294297,           0,        1919,      113425,        9135,      309553,       77847,           0,           0,           0,        6205,         903,      890093,       21404,           0,        1800,       97776,      176756,        2255,      233365
T99,           0,           7,           0,       15706,           0,         263,           0,         637,           0,       20774,           0,       30497,           0,           0,           0,           0,           0,           0,           0,       35786,           0,       10776,           0,           0,        3713,       48759,           0,           0,        1919,           0,           0,           0,           0,           0,           0,       20858,           0,       22450,          61,           0,           0,       24368,           0,           0,       11185,       42478,           0,           0,        7828,           0
U01,           0,           0,           0,           0,       95598,           0,           0,           0,         802,           0,        2166,           0,           0,           0,           0,       18380,           0,           0,           0,           0,           0,        5576,           0,           0,           0,           0,           0,        7173,           0,       19690,           0,        7312,        5471,           0,        3264,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       14375,           0
U11,        6332,        3941,       47588,         378,       22485,        1193,        2959,           0,        9613,        2628,       12253,        6139,           0,        1264,        1797,        3757,        3571,        1270,        1166,        3995,           0,        3029,        4884,         191,        1521,          62,        1388,        5341,           0,        2040,        3006,        2088,           0,         246,         566,         173,        4621,        9271,       22611,        1167,        1255,           0,       10845,        7529,           0,        1145,        1736,           0,         157,        3405
U20,      382902,     2842589,      206270,      183445,     2156902,      344965,      442019,      232485,      813139,      267971,      213345,      179027,     1185003,      520797,      183033,      204328,      392456,      540649,      177989,      475572,     1057378,      782661,      429367,      147499,      510215,      215159,      155500,       93971,      369536,     1248178,      488253,     2446552,      469241,       70981,      598966,      241444,      498448,      828773,      282019,      295236,      144157,      211381,     1458772,      185189,       99402,      677127,      402356,      147065,      535819,      315866
U30,       18623,        5112,       53481,        3051,      468830,       37147,       58940,        6283,       86141,       11101,       16687,        6268,       55848,       60129,       37176,       15734,       41903,           0,       24346,      101940,       54529,        8615,       37256,       17974,        7254,        4012,        1904,       10838,       21097,       47134,        7825,      184438,           0,        5216,       40718,       10563,       29575,      101568,        9140,       48417,        2985,       35275,      115859,        9529,        7637,       50952,       59137,         367,      117644,         343
U40,        6588,       37484,       27630,           3,       15978,       11965,        1584,        1417,        6726,        5652,       49244,        7152,        1417,        1100,        1902,        4376,        2235,       16193,       11895,         368,        1314,         862,        2531,       10462,           0,       15376,       20551,        8670,         654,       25886,      146202,       32823,       12626,        4966,           0,       14085,       29009,        3370,        3716,        4129,        4285,          23,       38069,        7817,         366,        1021,       42476,         430,         262,        9030
U41,       80302,      950128,           0,         619,       68588,       44854,        9715,           0,           0,           0,           0,        1396,           0,         173,         133,        1451,           0,      247916,           2,           0,        2010,       23108,        7697,         554,           0,        6748,        4027,           0,           0,           0,       95858,           0,           0,       13583,           0,       11635,           0,         204,           4,         458,          29,           0,       92954,       17109,           0,         131,           0,           0,           0,       24992
U50,      118385,        9058,      106933,       30717,      453221,      106673,       60695,       19243,      162395,      144750,       36222,       25339,      343134,      131525,       70941,       35291,       45708,       55104,       19890,       91113,       46984,      276696,      211628,       40271,       71100,       16504,       59177,       32317,       21472,      100430,       87593,      264392,      175039,       19310,      215518,       48671,       90081,      187574,        7431,       84350,        7710,       96354,      374598,       41922,       27047,      188966,      203525,       18803,      154383,       20501
U95,           0,           0,      118151,           0,      944142,      128876,      250202,       52439,      998056,      597330,           0,       35056,      608836,      213036,       73558,       70716,      176657,      127447,       64567,      439179,      691005,      572713,      121443,           0,      165401,       14805,       39692,           0,       47606,      691992,           0,     1303362,           0,           0,      812042,           0,      325165,      675196,       79115,           0,       64563,           0,     1048622,           0,       30140,      392577,      193289,       70367,      193376,           0
U99,       30337,      328701,       80306,       91180,      303570,      258217,      148098,      189988,      701405,       53427,       41063,       67683,      285380,      402866,      159509,       69964,       66272,       92906,      107410,      130035,      711209,      226303,      136743,       30819,      166854,       47835,       38838,       15254,       18612,     1082149,       14113,      772172,      133006,        8863,      262779,       56523,       20058,      373821,       21144,       55964,        4433,      131702,      971496,       49098,       27677,      292974,       99853,      129591,       66288,        7414
V34,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
V98,      808001,      410937,      622500,      478215,     4015816,      572892,     1014223,      274633,     3281512,     2139101,      967244,      363574,     2239337,     1006487,      696800,      686828,      932029,      853816,      238540,     1176550,     2462054,     1437985,      752978,      572363,      955731,      317778,      480105,      440657,      162089,     2713013,      297818,     5337458,     1639618,      216631,     2148551,      618402,      575682,     1800075,      462716,      939742,      228007,     1400739,     3329826,      564291,      113745,     1449166,     1879957,      519354,      964407,      268893
W01,     1801172,     2362323,      422162,     1498176,    17054437,     3091375,     6523271,     2208065,     5004244,     1557254,      984996,     1141560,    14673083,     3449529,     1328385,       30659,     2473844,     5078271,     2413069,     4950867,    14332596,     8208887,     2498397,      842538,     5474778,     1727384,     1181380,      685904,     4804436,    12171829,     1157041,    33611997,     3000338,      820891,     6122061,     1331272,     2994558,     6364144,     3171898,     1377435,     1440541,     1649548,     3331807,     1445643,     1083155,     6748692,     3028444,     1385538,     5064437,      687136
W31,      199641,       13252,      107045,       54521,     4819720,      402687,      431746,      101275,      667861,     1434716,      475880,       27538,      176820,      283794,       86151,      165459,     1048165,       57612,       50509,      156192,      307916,      122785,      155877,      371304,      274539,       60357,       12487,      407878,       41181,     1575201,      142386,     2570709,      212005,        4303,      743248,      314606,        3875,      685506,      271548,      206285,       25035,       67425,     2491024,      128948,       28819,      359039,      273208,      167592,       63118,       35312
W61,     1972361,    18907490,     2610968,     1254933,    16644161,     1848789,      778677,     1551693,     8529370,     2612284,     1755451,     1143429,     3507070,     5811672,     1319330,     2141337,     2080849,     3184609,      246882,     2598045,     1550911,     6218722,     4109138,     1887850,     2983584,     1246593,     1344284,      953425,      576391,     5301031,     7252472,     4513147,     5066094,      610595,     5195837,     3059984,     3841092,     7433320,      381469,     1490033,      573233,     1194884,    23885640,     1427605,      212644,     4579569,     3361068,     1543068,     1710555,     2876124
X01,      160071,           0,      153266,       33516,     1943637,      173167,      170231,         422,       16702,      195716,           0,       62980,      561338,      129851,      112875,      114466,      245456,      244720,       75243,        4722,      181419,      289246,      276112,      133457,      246273,       25563,       63550,       22186,       42023,      548891,      166738,      281132,           0,       22202,           0,           0,      184639,           0,           0,       70496,       31528,       30296,      976459,       23845,       16208,       47595,      339602,       60081,       12551,        7164
X02,      102440,       53117,       42872,        9174,      702450,      110926,       36531,       22625,           0,      107218,       65721,       35978,      315546,       56028,       28617,       40838,       91947,      136539,       31484,       85112,      228130,        5719,       91801,       94672,        1183,       58236,       14617,        6889,       27012,      170399,       34706,      152858,      182084,        9159,      338122,       27794,       92952,      201776,           0,      253866,       18910,       95936,      401602,        9288,        6135,        2799,      140428,           0,        7587,        2129
X05,       80520,      108711,      154573,      137390,     1857801,      328902,       22675,        2755,     2260902,      181779,           0,      116065,      645747,      152100,      170989,       34671,      121511,       70531,           0,       49977,         364,      393574,      339669,      180081,      278082,       65334,       60821,      293741,       16808,      309419,      175918,     1021048,      142506,       21955,     1946612,       88577,      299714,      434415,        4481,       84261,       28669,       37918,      344928,      158897,        3026,      601184,      234325,           0,      658167,       47098
X06,      335927,      107752,       44810,       96953,     1581072,      187614,      434038,       82814,      629906,      675344,      192537,       58166,      563905,      333063,       56014,       94706,      417532,      663686,      244106,      639366,      810845,      958538,      111314,      130711,      218723,       29398,       38100,       95628,       23226,      251992,       85836,      203530,      566743,       10225,      616362,      290007,      139786,      754886,      117399,      315641,       17769,      294700,     1187707,       78062,       38592,      248794,      591923,      247185,      258322,       35789
X08,      961484,      556733,     1176922,      424250,    10712973,      905049,      508592,      154807,     2820924,     1966340,      364926,      129480,     1869260,      589494,      485583,      431049,      762408,     1011474,      168765,     1288299,      365455,     1635110,     1575191,      437325,     1933089,      175040,      195286,      390358,      166472,     3251306,      419249,    12378630,     2083721,       71249,     5528138,      535197,     2235031,     2572916,      336866,     1026054,      219445,      709510,     5713417,      353295,       59351,     1336041,     3154707,      150654,           0,      135225
X09,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
X11,      560324,      302083,      576284,      247095,     6618362,      694538,      824365,      126413,     1266904,      880453,      324794,      142321,     2116455,      545854,      316899,      329349,      665578,     1008358,      273021,      844155,      837094,     1790564,      852362,      370673,      553309,      175481,       77473,      270290,      102200,     2107627,      343885,     3968820,     1044289,       56140,     3614471,      636897,      693698,     2205071,      239202,      596736,       74086,      368018,     2251173,      219626,       49054,      760980,     1013121,      296805,     1042936,       87775
X12,       40599,       15593,       38464,        6481,      343973,       32902,       12213,        1697,        2509,       38942,        8314,       14787,       79378,       35156,       21965,       23888,       25241,       63335,       13225,       18451,      129740,        9840,       36582,       41901,       32460,       13510,        5507,        8674,       11000,       65126,       39750,       89271,       96231,        5342,      135794,       37076,       37249,       24170,        6859,       52036,        6542,       20914,      273258,       10121,        1234,       63695,       53121,           0,       23966,        9806
X14,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
X21,     1570680,      111796,      897942,      439440,     7601497,      815477,      587936,      239432,     4533887,      704446,      434563,      212834,     2026569,      327197,      456769,       81205,     1094047,     1281806,      185434,      488775,      945929,     2995372,      206780,     1011174,      222340,       53711,      139325,      169246,      127270,         740,      227894,     1746160,     7856338,       19817,     2009413,      509875,      592311,     1328346,      391837,     3718046,      481001,        6105,     1704075,      380439,      110696,      912788,      436997,      142257,           0,       12304
X30,      426543,     1751274,     3773343,     1427381,    26965501,     1162801,       48134,           0,     3535627,    10692405,        5654,      819453,     3379536,     5456075,      180038,      366498,     2155878,     2840999,      333689,     2992559,      960226,     3425087,      371015,     2802373,     2356184,      289931,      906807,     1839877,      251714,       80002,     2055001,    19128847,     7053665,      159146,    36288679,     1828243,     2132241,     5437322,     1091140,     5434426,      310188,     2681712,    17952633,     1123527,           0,     1421168,     6400159,     2151248,     5092030,      433717
X40,     5170658,     1633490,      586598,     1031391,    25400711,     2805670,     2089580,      641436,     5774887,      128617,     1311311,           0,     3764439,     3042024,     1573937,      746794,     2072315,     2199670,      982269,     4157538,     2282293,     4600405,      297209,     1029796,     6919337,     1336301,      123885,      796120,      257671,    15167437,     1792031,    10409120,     6709758,      119109,    10810530,      603824,     1087817,     2931712,       95699,     3343278,      315103,     3070370,     7987057,      542048,      299318,     2322660,     2414710,       96378,     9878719,      911377
X41,     3965448,     2651366,     7804016,     2643265,    43995939,     5911822,     2437194,     1083348,    20808825,    10071421,     2489094,     1538376,     8414913,           0,      976749,     1415941,     4881523,     4054662,     1238833,     4099359,     1806286,     9030427,      581929,     3399629,     5260341,      576748,      949142,     1052639,     1095185,    12899458,     2129803,    35596579,     3440804,      301838,    20379012,     3096491,     1321827,    17807589,     1486672,           0,     1087623,     3568159,    16437652,     3375016,      652135,     4170103,     1145243,           0,    14057315,      660775
X42,      796591,        6552,      193000,      150264,     5589838,      492430,           0,           0,           0,        8686,      232898,      139464,       19391,         404,           0,           0,      373898,        1805,      303493,       32629,        6745,      961499,           0,           0,           5,      105751,           0,           0,          92,           0,       42491,     3871106,           0,          65,      406401,           0,      248055,      642265,           0,           0,           0,           0,     1115282,       12306,         699,       29524,      823281,        6613,      392155,           0
X44,      921121,      605724,           0,      451106,    22017475,           0,     2930277,           0,     1240403,       33284,      569515,           0,     6228827,         550,     4063862,     1703420,           0,     2489786,      987792,     3887178,     5506122,     1169496,    14095432,      672535,     3486624,        6141,      673159,     1302019,      370125,     1973387,      106619,     8275291,       90854,      748972,     3072404,      789716,     2204279,     7702803,           0,           0,      272754,     1565403,     5090824,       16702,           0,     5960814,     7564910,       37959,       32929,      228506
X47,           0,           0,       36282,        1275,     2435799,      372106,     1236082,      190825,      490767,       21702,      480249,      155141,     1610914,           0,      911645,       37325,           0,      214024,       16372,      556951,     1386008,      935524,     3914641,           0,       96424,      125127,           0,      593387,      221979,      585823,           0,     2754951,      358107,       17268,     3074780,      128503,     1695441,     1168865,      159128,           0,      149306,           0,       18123,      209332,           0,     1509407,     2445667,           0,           0,           0
Y01,      196864,      159579,      325306,      260968,     4326867,      300768,      764190,      101595,     1035517,      552471,      219987,      121362,     2056593,      349680,      216309,      131332,      341007,      320921,      180800,      741489,     1652866,     1924062,      659030,      208209,      594557,       94814,       63005,      253612,       92113,     1870881,      138930,     2946994,      331079,       42870,     1451325,      181182,      319782,     2635255,      278325,      281585,       15953,      413634,     1563631,      144634,       68292,      424142,     1000579,      186531,      657197,       40920
Y02,       65538,       20483,       54970,       20722,      264681,       52266,        8491,       29700,      202327,      156156,       28024,       28340,      152821,      135284,       81856,       84961,       51334,      105943,        8966,       54237,       31453,      122918,       41353,       59430,       12922,       12859,       22103,       31976,       25920,      225185,       37964,       37986,      181815,        6478,      149040,       57330,       98313,      193636,       12729,       61483,        5976,       90942,       67208,       49399,       23173,       81609,      180683,       19138,      142795,       16018
Y04,           6,        4637,          22,           5,        7884,        1833,           0,           0,         296,        1003,          43,         321,       17845,           5,         569,           1,           0,         178,        1370,          12,         294,         436,        1548,         655,        1000,           0,         152,         149,          42,        2292,         200,        2010,          74,           8,        1178,          62,        1994,         863,       14610,        2378,           1,          45,           0,           0,         111,         733,       26253,          41,        1157,          35
Y05,      311170,      175585,      260435,      285683,     5314154,      307922,      782827,      107931,     1128793,      462906,      309493,      158000,     1921622,      376427,      272122,      258925,      366248,      230263,      180493,      580919,     1323033,     1482938,      584622,      187322,      474327,       95259,       72953,      239453,       56262,     2179379,      111296,     3439385,      561361,       48015,     1183218,      180605,      577678,     2621125,      322821,      299919,       21651,      460424,     1642915,      107775,       81504,      340864,     1441232,      234169,      679889,       49458
Y06,         556,        8430,         315,         175,       11375,        1855,        1791,          57,        2393,        1006,          64,         319,       21478,           9,         566,         730,         354,         191,        1478,         981,        1579,         705,        1029,         663,        1137,         445,         149,         137,          41,        4446,         127,        1848,         162,          11,        1938,         115,        4846,        2876,       23864,        1562,          22,         650,         713,         189,         114,         389,       34244,          37,        1000,          84
Y07,      549955,      190618,      504835,      191403,     2319766,      455274,      128160,      262663,     1817142,     1385214,      209041,      226152,     1513453,     1181990,      684936,      713920,      450241,      936413,       78969,      555453,      380472,     1315000,      372136,      530697,        -112,      105538,      187670,      271341,      235338,     1894169,      333572,      490944,     1517837,       51985,     1431137,      493120,      898807,     1877186,       89292,      542035,       49895,      805447,      653554,      427429,      197355,      731056,     1432660,      164981,     1429751,      132903
Y08,       -1145,       -2433,        -298,       -1695,      -72960,       -2890,       -6199,        -793,      -18825,       -1872,         -35,      451197,       16358,       -3952,        -204,         516,        1048,     1872668,        4086,       -4109,       -3612,       -5427,       -2406,        -112,       -4164,          78,         466,       -1496,        -355,      -27393,       -2333,       -7914,          57,        -353,      -13737,       -2757,       -2410,       -8635,       -2863,        1350,        -395,       -4298,      -25052,     1236700,        -277,         279,       -8137,        -808,       -4689,          39
Y10,           0,           0,           0,        1340,       18603,           0,           0,           0,      241295,           0,           0,           0,           0,           0,           0,           0,        1384,         158,           0,       28853,           0,        5268,           0,           0,       33243,       50081,           0,       10918,       64464,           0,        9712,      265632,           0,        5605,       82155,       28995,           0,           0,           0,       42521,         896,           0,           0,        5044,           0,           0,           0,       13600,           0,      126533
Y11,           0,        2552,       34853,       12130,     1139000,      406476,      125233,        9468,           0,           0,           0,      136506,        6418,           0,         220,       42353,      147616,           0,           0,      159464,       29633,      234296,      130276,           0,        3406,      153765,           0,      440325,           0,      147001,           0,     1732421,           0,      115285,     2270169,      260950,      119777,      456463,       14894,       67032,        3494,           0,        2377,      176197,           1,           0,     1065209,      418202,        2100,        3896
Y12,           0,           0,      121712,        3222,      519777,       51711,         789,           0,        5472,           0,           0,       17570,          29,           0,          66,           0,           0,           0,           0,       48621,         408,       47436,        3883,           0,         147,       25404,         145,       61996,       14135,        3701,         594,      460532,           0,       16628,      988170,       36540,       19866,       71617,          77,        5657,           0,           0,         293,       25147,           0,           0,      416394,      121254,           0,        2882
Y13,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
Y14,           0,        2270,      191344,        5834,     1070694,      308794,      116180,        8035,      146637,           0,           0,       68395,        7452,         818,         750,       43619,      138732,       23604,           0,      205169,       23868,      153097,       97248,           0,       20664,      104840,         545,      266288,       40826,      101615,         975,     1395267,           0,       55024,     1662707,      325738,       94131,      274810,        3519,       80023,        2917,           0,         578,       93253,           0,           0,      887384,      264999,        1898,       65553
Y15,           0,         178,       55088,         283,      454929,       76836,        7485,           0,       40584,           0,           0,       14350,           0,         681,         157,        4934,        5446,         513,           0,       29333,         841,       53723,       24626,           0,        7480,       20845,           6,       68914,           0,       17996,        9008,      300137,           0,       10329,      471703,       24702,       69132,       81958,         331,        5128,         318,           0,           0,       18144,           0,           0,      157710,       38486,           0,        7071
Y21,           0,        1978,     1494692,       98308,     6300514,      867982,        4191,        1050,       80065,           0,           0,      338143,        2472,         488,         496,       31470,        4822,       15337,           0,      684270,       12649,      894353,       54525,           0,       55127,      482095,        2653,      768625,      246902,      118371,       15490,     6884364,           0,      329255,    10959836,      608648,      267967,     1518316,       32184,      100219,        1340,           0,        7181,      472311,          22,           0,     6184107,     1169126,       10201,       79741
Y50,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        8369,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
Y51,           0,           0,           0,           0,     2364605,       28837,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,      192111,           0,           0,           0,           0,           0,           0,           0,           0,           0,      368726,           0,           0,           0,           0,           0,           0,           0,           0,       97059,           0,           0,           0,           0,           0,           0,           0,           0,           0,        2974,           0
Y52,           0,           0,           0,           0,       74844,        3740,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       20491,           0,           0,           0,           0,           0,           0,           0,           0,           0,        6107,           0,           0,           0,           0,           0,           0,           0,           0,        3698,           0,           0,           0,           0,           0,           0,           0,           0,           0,        4681,           0
Y53,           0,           0,           0,           0,     1769461,       17944,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,      165158,           0,           0,           0,           0,           0,           0,           0,           0,           0,      308722,           0,           0,           0,           0,           0,           0,           0,           0,       85396,           0,           0,           0,           0,           0,           0,           0,           0,           0,        5769,           0
Y54,           0,           0,           0,           0,      141142,        2095,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       50773,           0,           0,           0,           0,           0,           0,           0,           0,           0,       28210,           0,           0,           0,           0,           0,           0,           0,           0,        5181,           0,           0,           0,           0,           0,           0,           0,           0,           0,         456,           0
Y55,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
Y61,           0,           0,           0,           0,     1580891,       70988,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,      322778,           0,           0,           0,           0,           0,           0,           0,           0,           0,      147960,           0,           0,           0,           0,           0,           0,           0,           0,       23687,           0,           0,           0,           0,           0,           0,           0,           0,           0,       57975,           0
Z00,     2441210,      893274,     1668427,     1348659,    13141094,     1771583,     2448513,      700639,     5946865,     2988906,     1694894,      556756,     4088797,     2389786,     1684189,     1367431,     2123807,     2889972,      610475,     2549352,     3048505,     4895533,     2561274,     1147840,     2120554,      467660,      930099,      717075,      543425,     4829141,     1202665,     9779925,     3189419,      408211,     4432636,     1632577,     1635100,     4782790,      712756,     2366167,      364672,     2249117,     6115608,     1236918,      385549,     3526187,     3343248,      824087,     2375982,      302582
Z18,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
Z41,      129965,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       40509,           0,           0,       82002,           0,           0,           0,       68099,           0,           0,      452330,           0,      131181,           0,       37241,           0,           0,      208598,           0,           0,           0,           0,           0,      345777,           0,      175441,      676044,           0,           0,           0,           0,           0,       80138,       26756,      245701,      252333,       44987,           0,       32846
Z42,       86485,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       28759,           0,           0,       54082,           0,           0,           0,       40558,           0,           0,      330159,           0,      102245,           0,       27269,           0,           0,      149283,           0,           0,           0,           0,           0,      213668,           0,       85371,      430285,           0,           0,           0,           0,           0,       50000,       22218,      160699,      175996,       35351,           0,       26676
Z43,       28636,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        7864,           0,           0,        3806,           0,           0,           0,        7428,           0,           0,       29835,           0,        1551,           0,        6383,           0,           0,       19949,           0,           0,           0,           0,           0,       47280,           0,       20111,      194511,           0,           0,           0,           0,           0,       10127,        4504,       63273,       52364,        3585,           0,        1179
Z44,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,         358,           0,           0,        1568,           0,           0,           0,        1672,           0,           0,           0,           0,          25,           0,          65,           0,           0,        2665,           0,           0,           0,           0,           0,         876,           0,         195,        5401,           0,           0,           0,           0,           0,           0,        1108,         860,         203,          72,           0,           1
Z45,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
Z46,      130405,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       18449,           0,           0,       48373,           0,           0,           0,       21786,           0,           0,      224413,           0,       50460,           0,       17259,           0,           0,       56038,           0,           0,           0,           0,           0,      105816,           0,       79063,      239610,           0,           0,           0,           0,           0,       34690,        9416,      120043,      158209,        7300,           0,        5417
Z47,        8254,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        8510,           0,        1230,           0,         723,           0,           0,           0,           0,           0,           0,           0,           0,        8075,           0,        5121,       20621,           0,           0,           0,           0,           0,           0,        1074,        7432,        8091,        1319,           0,           0
Z48,       58206,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        4945,           0,           0,        6195,           0,           0,           0,        1658,           0,           0,      134299,           0,       24896,           0,       16370,           0,           0,       13963,           0,           0,           0,           0,           0,       27535,           0,       12919,      180618,           0,           0,           0,           0,           0,       15366,        9472,      107719,      137432,        1906,           0,        1117
Z51,           0,           0,      268772,           0,     2025415,      329665,      636294,      108770,     2126423,     1291509,           0,       87969,     1467854,      562934,      186121,      162791,      479884,      279473,      153204,      984180,     2628555,     1271655,      317527,           0,      387151,       30957,       79021,           0,      132477,     1490539,           0,     2773997,           0,           0,     2048888,           0,      885486,     1487887,      286542,           0,       83905,           0,     2743061,           0,       71696,      879926,      400926,      155366,      492194,           0
Z52,           0,           0,      150621,           0,     1081273,      200789,      386092,       56331,     1128367,      694179,           0,       52913,      859018,      349898,      112563,       92075,      303227,      152026,       88637,      545001,     1937550,      698942,      196084,           0,      221750,       16152,       39329,           0,       84871,      798547,           0,     1470635,           0,           0,     1236846,           0,      560321,      812691,      207427,           0,       19342,           0,     1694439,           0,       41556,      487349,      207637,       84999,      298818,           0
Z53,           0,           0,       27449,           0,      182063,       28000,       26342,        8535,      122002,       97074,           0,       16121,       59393,       29821,       24637,       19358,       29742,       18986,       16750,       41755,       71921,       49548,       58891,           0,       34627,        6354,       15990,           0,        5629,       46982,           0,       68198,           0,           0,       85748,           0,      190358,       55332,        4603,           0,        8722,           0,       52658,           0,        5262,       78652,       54505,       16168,       31874,           0
Z54,           0,           0,       90702,           0,      762079,      100876,      223860,       43904,      876054,     1000512,           0,       18935,      549443,      183215,       48921,       51358,      146915,      108461,       47817,      397424,      619084,      523165,       62552,           0,      130774,        8451,       23702,           0,       41977,      645010,           0,     1235164,           0,           0,      726294,           0,      134807,      619864,       74512,           0,       55841,           0,      995964,           0,       24878,      313925,      138784,       54199,      161502,           0
Z61,           0,           0,           0,           0,           0,           0,           0,       15082,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,      457126,           0,      393239,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
19H,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
19X,     3832214,     3582362,     3170472,     1810111,    44840409,     3262775,    13594043,     3387500,    14564482,     5173997,     5103614,     1280743,    20349663,     5566909,     1975142,     1102920,     6743654,     8779660,     2992749,     9129956,    26326612,    11500502,     4351489,     2066203,     6502070,     2099760,     1468202,     1682797,     5650805,    22885138,     1731464,    64723504,     4537505,      756667,    11999829,     3872497,     5645164,    13248389,     5535417,     4864162,     1680090,     2511296,     9377427,     2085610,     1569762,     7912014,     8264970,     2525138,     7747539,      702470
21A,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       34695,           0,           0,           0,           0,           0,           0,      170380,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
21B,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
21C,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
21D,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       19434,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
21F,           0,           0,           0,           0,      692025,           0,      157644,        8834,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        5550,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       11595,           0,           0,           0
21G,           0,           0,           0,           0,      357000,           0,       25000,        5825,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,      134907,           0,           0,           0,           0,           0,           0,           0,       13843,           0,       66265,           0,           0,           0,      286400,           0,       86500,           0,           0,        8075,           0,       16225,       65546,           0,           0,       12175,       22505,           0,           0,           0
21X,       10630,      130000,           0,           0,      459000,        2850,      987344,       30341,           0,      737385,      268000,           0,      784815,           0,           0,           0,           0,      217150,       61350,      335000,     1621212,      620400,      226371,      311900,      105000,       26505,           0,      173321,       98647,       59000,           0,      748221,      120000,           0,      110000,           0,       61510,      477284,       49670,       50000,           0,      111100,      829106,       94745,       90000,           0,      859763,           0,      331715,           0
24A,           0,           0,           0,           0,           0,       15140,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
24B,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,      150130,           0,           0,           0,        1635,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
24C,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,         976,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
24D,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,      375730,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
24F,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,      131910,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       76106,           0,           0,       35005,           0,           0,           0,           0,      254255,           0,      135600,           0,           0
24G,       69820,        3541,       28818,      137171,      365065,      102838,        3309,           0,     1139446,           0,           0,        6902,           0,      137481,       46268,       13933,       38648,        5370,        6356,       71036,           0,      198404,       68255,        9046,      256040,        7556,        4890,           0,           0,      151983,        4900,      675421,       57193,        2280,        9073,        9478,       11965,       12379,       36146,       98513,        2640,         820,      876004,       14064,        2214,       45738,       56676,           0,           0,           0
24T,      224940,      302845,        9515,      147385,     2052322,      297747,      856860,      187555,      315395,      167755,        3475,      295000,     2335022,      187990,      203850,           0,      140940,      295478,      358595,      385492,     1897071,      500728,      457325,      146201,     1119615,      271555,      205228,      203300,      244640,     1876351,      258535,     3382790,      156465,      163200,      477300,      154731,      279771,      682359,      312795,      152055,      259215,      280000,      171534,      316784,      148510,     1289215,      422801,       86546,      441746,      139087
24X,       68055,       24449,        2091,           0,           0,       61515,           0,       70000,      314180,           0,       54010,        3111,        4730,      435120,       62545,       51726,      550970,       41335,      121505,      140261,       83729,      418474,           0,           0,           0,           0,           0,           0,       50455,     1083962,      100100,     3302613,        3453,        9152,      319725,       17500,       30365,           0,       30799,           0,        7525,        4689,       42353,       30915,       30360,      203060,           0,       20175,      100000,       27396
31A,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       44833,           0,           0,           0,           0,           0,           0,       19210,           0,         375,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
31B,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
31C,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
31D,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       36240,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
31F,           0,           0,           0,           0,      349290,           0,       15092,        8931,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        7481,        5140,           0,           0,           0,           0,           0,           0,           0,           0,        4000,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       23370,        8000,           0,           0
31G,       64935,           0,           0,           0,       87845,           0,       10776,       10355,           0,           0,           0,           0,       15905,           0,           0,           0,           0,        7748,        1280,         420,      121380,           0,        1405,         689,           0,           0,           0,        4120,       11290,           0,       20465,        5800,           0,           0,      238995,           0,       51484,           0,           0,        4150,           0,        7672,       57405,           0,           0,       24784,       49465,           0,           0,           0
31X,       62735,       78901,       19625,        5843,      592570,          76,      636260,       43764,       61915,      360385,      205523,           0,      413436,           0,           0,           0,       15270,      442832,       73295,      219515,     1155456,       99400,      142461,      128227,       33690,       17740,           0,      149440,       49552,        3050,        4380,      615456,      117393,           0,      174333,       10580,      458701,      531057,      103419,       85900,           0,       62219,      237900,       58515,       33595,       11027,      480800,       38785,      313078,           0
34A,           0,           0,           0,           0,           0,        1340,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        2891,           0,        2995,           0,           0,           0,           0,           0,         256,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
34B,           0,        1707,        1115,           0,        8285,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       51415,           0,           0,           0,      120850,           0,           0,           0,       51388,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
34C,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,         670,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
34D,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       61955,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
34F,           0,           0,           0,           0,           0,           0,           0,           0,           0,        3655,           0,           0,           0,           0,           0,           0,       48300,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       40795,           0,           0,       46210,           0,           0,           0,           0,       83280,           0,        4150,           0,           0
34G,        3819,        2185,       25233,       18778,       93790,       51473,        5871,         401,      449352,           0,         796,        3216,       15959,      110419,       28991,       14260,       81826,        5423,        2791,       28032,           0,       30540,       45483,       22503,       38537,        3333,       15405,        3802,        2401,       96487,       14301,      629837,       38205,        2037,       50201,        7395,        5525,       27497,        6539,       21284,        1003,       14232,      702617,       12351,        8123,       30331,       29947,       13625,         466,        3120
34T,      313321,      707100,       89762,       97630,     1984485,      304194,     1122352,      132707,      371347,       90785,       29635,      247788,     1055018,      160006,      159126,           0,      109774,      308174,      349526,      302927,     1233772,      139794,      407221,      100105,     1068751,      129094,      146071,       56412,      171562,     1129429,      251494,     2437485,      168070,       68751,      503373,      241787,       93121,      215900,      307789,      109582,      240409,      147725,      267305,      420785,      100906,      762383,      235167,      106007,      384482,       77182
34X,       11449,       23042,       94910,        2320,      114005,       29895,       31438,       27669,       76055,        1962,       39518,       32213,       28375,      379942,        5777,       11527,      252293,      115372,       72315,       72796,      135827,      438361,           0,         130,        7540,       53192,      149547,          50,       42304,      472940,       56727,     1348173,         485,        5411,       60573,       88198,       22274,       16265,       60061,        1219,       33954,        3814,      221397,        3160,       30848,       88601,           0,       10920,       19080,         520
41A,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,      217046,           0,           0,           0,           0,           0,           0,      310095,           0,       89236,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
41B,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
41C,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
41D,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,      447504,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
41F,           0,           0,           0,           0,     6237904,           0,      628564,       86325,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,      533854,           0,           0,      113200,       19140,           0,           0,           0,           0,           0,           0,           0,           0,       12000,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,      295512,       50000,           0,           0
41G,      682973,           0,           0,           0,     1742375,           0,       73743,       98905,           0,           0,           0,           0,       93865,           0,           0,           0,           0,       24318,        8280,       75907,      268831,           0,        2415,        2165,           0,           0,           0,       60275,       78606,       15600,      181035,       44680,           0,           0,     2073205,           0,      331262,           0,           0,       44345,           0,      122187,      477142,           0,           0,      393813,      170882,           0,           0,           0
41X,      443104,      396011,      345615,      160635,     8094330,        5281,     9020053,      381378,      998235,     4143355,     2934965,           0,     6571424,           0,           0,           0,           0,     3028823,      507780,     2014103,    11815124,     1841400,     1737640,     1020888,      933745,      253211,           0,      768441,      721527,     3542055,       41350,     9905808,     1013167,           0,      996820,      344455,     3907898,     5023014,     1271415,      853439,           0,      697900,     4949679,      430555,      536625,       81621,     5184347,      183170,     2987710,           0
44A,           0,           0,           0,           0,           0,       57570,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,      181929,           0,      141329,           0,           0,           0,           0,           0,         347,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
44B,           0,      342491,       80295,           0,      395140,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,     3411015,           0,           0,           0,     1500040,           0,           0,           0,     2594353,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
44C,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        1499,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
44D,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,     7264970,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
44F,           0,           0,           0,           0,           0,           0,           0,           0,           0,        8215,           0,           0,           0,           0,           0,           0,     1176445,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,      316204,           0,           0,       72840,           0,           0,           0,           0,     1251305,           0,      458815,           0,           0
44G,      696848,       33026,      724475,      499908,     5028524,      838367,       73045,       94900,     8161524,           0,       23552,      105750,      484621,     1476546,      549492,       84265,     1195565,       79048,       34889,      546916,           0,     1806614,      663899,       54513,      939604,      115370,      119430,       58390,      109279,     1516928,      220232,     7460237,      587475,       65499,      745890,      123164,       39820,     1188571,      283111,      353209,       30089,      252046,     2251956,      115681,       46676,      340815,      238408,      306511,        2315,       41319
44T,     1592978,     2217806,      373508,     1295825,    16660701,     2253276,     5172796,     2118586,     2184102,     1158120,      593168,     1120901,    13602368,     2102188,     1235476,           0,     1686353,     3778980,     1554824,     4478511,    13921662,     6835275,     1976875,      826145,     4663399,     1657309,     1158975,      612383,     4217275,    10860467,     1034555,    22556554,     2925768,      630985,     5522153,      889241,      876798,     5881274,     2901063,      966287,     1385474,     1481465,     1240751,     1410921,      835714,     4902341,     2930282,     1123940,     4668426,      683159
44X,      342497,      240928,     1513173,       25795,     5977800,      213605,      484009,      739634,     4024880,      311972,     1601942,       75889,     1193259,     1862417,      308944,     1058527,     3039133,     1548275,      935575,     1788769,     1184295,     2047124,           0,        1200,      127595,      176127,       88892,        2360,      654594,     8185543,      336518,    16950584,        9131,      158866,     2834144,      876830,      325794,     1255940,     1031430,       89284,      174617,      134050,     1002028,       90150,      248359,     1746156,           0,      463536,      577540,       63654
52T,           0,        9825,           0,         951,           0,           0,           0,       18655,      114495,           0,       54010,           0,           0,           0,           0,           0,      237890,        5881,           0,           0,      963759,       27970,           0,       32670,           0,       40815,        1260,      153006,           0,      487536,       55600,     1420500,       38565,           0,       53610,           0,       68390,       27690,           0,       13895,       43995,       52720,      382428,       94745,           0,           0,      446605,           0,           0,       17500
53T,           0,        9825,           0,         951,           0,           0,           0,       18655,      114495,           0,       54010,           0,           0,           0,           0,           0,       98240,        5811,           0,           0,      979562,       14225,           0,       94661,           0,       44950,        1260,      166355,           0,      378151,       70445,     1339745,       24388,           0,       51742,           0,       55965,       20415,           0,       13895,       43995,       52720,      436330,       94745,           0,           0,      446605,           0,           0,       16941
61V,        2994,        2900,           0,          40,     3280520,         116,        5200,        9975,         788,           0,       42185,           0,        5642,       19047,       15153,         360,           0,        2293,           0,           0,      343948,        4823,           0,           0,        9500,        7782,         211,        1746,           0,        9041,       10068,      354000,           0,        5000,      117542,         106,           0,      422555,       38435,      108250,         397,      116100,         424,       17223,         125,           0,         669,           0,           0,           0
64V,         326,        2000,           0,         374,     4060543,          82,        4100,        4767,         868,           0,       42193,           0,        4763,       15600,       17062,        2701,           0,       60998,           0,           0,      327170,        4804,           0,           0,       50010,        7893,         518,        2263,           0,        6793,       10408,      424315,           0,           0,      123093,         106,           0,      628997,       28535,      118700,         479,      134300,         443,       13838,         275,           0,         687,           0,           0,           0
71W,       83098,        1425,           0,           0,      105728,           0,     1290491,       17688,      430999,       19036,        5458,           0,      417187,           0,           0,           0,        6081,      393905,        1019,       11970,      274874,           0,      294774,        4891,       93547,        8596,           0,       35504,      190783,           0,           0,     1608345,        1201,           0,      139850,           0,     2117760,        1061,           0,           0,           0,        4561,     1991429,       21484,           0,           0,       46890,        4946,           0,           0
74W,     1718074,     2360898,      422162,     1498176,    16948709,     3091375,     5232780,     2190377,     4573245,     1538218,      979538,     1141560,    14255896,     3449529,     1328385,       30659,     2467763,     4684366,     2412050,     4938897,    14057722,     8208887,     2203623,      837647,     5381231,     1718788,     1181380,      650400,     4613653,    12171829,     1157041,    32003652,     2999137,      820891,     5982211,     1331272,      876798,     6363083,     3171898,     1377435,     1440541,     1644987,     1340378,     1424159,     1083155,     6748692,     2981554,     1380592,     5064437,      687136