POP,000000004089,000000000570,000000003750,000000002372,000000030380,000000003377,000000003291,000000000680,000000013277,000000006623,000000001135,000000001039,000000011543,000000005610,000000002795,000000002495,000000003713,000000004252,000000001235,000000004860,000000005996,000000009368,000000004432,000000002592,000000005158,000000000808,000000001593,000000001284,000000001105,000000007760,000000001548,000000018058,000000006737,000000000635,000000010939,000000003175,000000002922,000000011961,000000001004,000000003560,000000000703,000000004953,000000017349,000000001770,000000000567,000000006286,000000005018,000000001801,000000004955,000000000460
I99,       60776,       11956,       58946,       33389,      619381,       62378,       83842,       13397,      241713,      110886,       22663,       15423,      233661,       93805,       47870,       45050,       55351,       61237,       21146,      104631,      135861,      171003,       82223,       33009,       89572,       12205,       27734,       23298,       23147,      192893,       21677,      397602,      108396,        9686,      190720,       48620,       49198,      222228,       18894,       53006,       10997,       77540,      285085,       24199,        9889,      122215,       92174,       24622,       86147,        7378
A01,           0,       53997,           0,           0,           0,           0,       18945,           0,           0,         458,      307776,          11,           0,           0,         385,           0,           0,           0,          93,       52400,      144947,         490,         757,           0,           0,          69,         783,           0,          48,           0,           0,       20915,           0,           0,           0,           0,           0,        8608,        6462,         148,           0,           0,           0,         363,           0,           0,           0,           0,           0,           0
A03,           0,       65732,           0,           0,           0,           0,         628,           0,           0,           0,           0,         152,           0,           0,        8039,           0,           0,           0,           0,        3023,           0,           0,           0,           0,           0,        2730,           0,           0,           0,           0,           0,           0,           0,      125513,        1608,           0,           0,           0,         930,           0,       33613,           0,           0,           0,           0,           0,           0,           0,           0,           0
A09,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       11950,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,         575,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
A10,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        3405,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
A12,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        6179,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           6,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
A16,      170039,       16398,      172662,       77593,      604178,      174520,      101346,       46772,      205114,      162675,       41420,       32314,      318001,      329772,      156089,      106910,      126191,      182785,       50204,      173195,      139734,      464533,      178463,      107153,      140548,       40846,       81901,       27343,       43516,      167662,       69099,      311498,      332055,       64968,      365652,      174991,      109326,      289447,       42078,      153726,       23114,      151009,      457347,       85214,       37146,      377044,      206416,       79796,      167897,       27250
A18,      357670,       52229,      287564,      233542,     1686655,      468959,      176371,      147383,      283247,      293548,       51151,       63536,      615306,      575743,      256262,      193477,      337531,      377984,       90104,      328084,      460266,      983683,      428814,      153828,      357400,       44811,      110007,       70020,      134883,      423256,      123527,      558684,      388432,       94031,     1219055,      245916,      169335,      651000,       90151,      305957,       57054,      322015,      983896,      202761,      135843,      565188,      434770,      164188,      531042,       21806
A21,       57609,         197,        2367,        6435,        3666,        9547,        1667,         670,        2118,       27132,        2286,         677,         653,       44872,          71,        1162,       14018,       12429,           0,        3859,         321,        7479,        1235,        1052,        1316,        4338,        2098,        1231,          20,        3541,       14873,       47669,        5695,         472,        2452,        4885,       10511,       49967,       14425,       10642,          19,        5167,        5838,        7091,         124,       15589,         150,         508,        1863,          13
A36,      510972,           0,           0,       99607,     1523167,       34882,      177741,       22850,       96551,      144596,       73649,        1305,      149697,      293294,      318386,      134821,      174049,      162187,        3525,       46646,      197169,      710249,      304564,      102790,      171860,        1795,      158357,        2995,        3164,      222396,      121457,      967326,      209705,       15256,      600251,      195243,      191778,      322518,        7124,      296713,        3169,      288108,      461829,      175243,        2043,      614284,      191112,       32698,      333183,        2906
A44,        1539,       12498,         322,       15453,       34382,        6196,         978,        1266,        2641,       11560,           0,        3766,        2575,        3259,        2152,        1068,        7034,         524,         460,        9407,        3810,        1112,       19622,        3483,        6903,         495,        2847,        8153,        6656,         240,        1418,           0,         492,        1034,        2062,           0,        2470,        1395,           2,       24958,         185,        2231,       11637,        1037,        1752,           0,        2602,         522,       11145,        1326
A45,           0,       40630,           0,           0,      126788,           0,        1150,       32154,      276788,        1194,           0,           0,      245734,       61387,           0,       39185,       17666,       30361,       44579,      123768,      150614,       13937,           0,           0,           0,           0,           0,           0,       47869,      405330,           0,      332703,        1400,           0,       92400,       57171,        2473,      220698,        8963,           0,           0,           0,       40508,           0,           0,       68821,       66609,       38600,           0,           0
A50,        1332,        6426,           0,         747,       17383,        2205,        3615,         418,        5718,         272,       34503,        2770,        9513,         975,         118,           0,        2432,          88,        1851,       11951,       14608,        6085,        1314,           0,        1537,          60,         403,        1673,        2760,       11443,         182,       10979,        1607,        1683,        7383,        3828,         822,        6074,        1897,        2288,           0,        1320,           0,         295,         828,        1660,        4656,        2273,         653,         289
A54,        6061,         543,       14096,        2783,      117791,        6279,          36,          43,        5831,       10259,        1183,        3031,        7859,       14494,        6929,       13060,       21344,        6278,        6780,        2737,           0,        7063,       11993,        8437,        7046,        3645,       10693,        1306,         682,         752,       13542,        9973,       17659,        6414,       15609,        2031,       11692,        4142,         457,        2741,        3472,        1214,        8922,        3094,          59,        4170,        4272,        2995,       16432,         669
A56,        2978,        7755,           0,         217,        1731,        1959,         620,         122,        5736,        3941,          25,       21954,           0,        3521,           0,           0,         793,        1306,        1295,        3564,         577,        9679,        5004,        1853,        1011,        1549,           0,         598,         165,           3,           0,           0,        2419,           0,         788,           0,       38879,        7587,           0,         846,         741,        1176,        1227,         479,         296,         361,      224075,         508,        2863,           0
A59,         357,       13367,        1034,         497,      379264,        3022,         236,         737,        2534,        3374,        3474,        9697,           0,         822,        2498,         373,          85,        3741,        1372,        1187,        5393,        3426,        7096,        1828,        8545,        4143,        1612,          89,         107,       27559,        2054,        1323,        1869,         153,        3439,        1178,        6037,       17804,         939,        1781,         775,        1970,        2931,        1495,         449,         163,         545,        1314,       11802,        1060
A61,       22395,           0,        1813,       10308,       63230,        1362,        3290,        3253,       16224,       79931,        5956,        2010,        1715,       12740,        1890,        2064,       37892,       26531,        2019,        3234,       24654,       15495,        7598,        5016,        1088,        1205,        2984,        1081,        6944,      217140,        2301,       79576,        4080,         726,        6119,       16157,        9075,        9704,        2745,       12004,        3108,       19722,        8929,        2932,        4081,        4239,        6463,       13590,        8899,          20
A80,           0,           0,           0,           0,         434,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,         433,       12917,           0,         820,           0,           0,         481,           0,           0,         172,         830,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
A81,           0,           0,           0,           0,           0,           0,      119341,       35011,       17746,        5071,           0,        1141,           0,           0,        4407,           0,         234,           0,        4223,           0,        6859,          16,           0,           0,           0,           0,           0,           0,           0,       23109,           0,           0,           0,           0,           0,         478,           0,           0,        3429,           0,           0,          97,           0,        1186,           0,           0,           0,         299,         198,           0
A87,       42669,           0,           0,           0,           0,           0,         433,           0,           0,       62772,       39053,           0,           0,        2713,           0,           0,           0,       35779,           0,       38109,       54188,        2299,           0,        4339,           0,           0,           0,           0,         364,       11362,           0,        4511,       27452,           0,           0,           0,           0,           0,         198,       48345,           0,           0,           0,           0,           0,        7749,           0,           0,           0,           0
A89,       49342,       15119,       52001,       20743,      413278,       62544,       40960,       42536,      278670,       61370,       26521,       15694,       23825,      103341,       25743,       34987,       57101,      140072,       15616,       48814,      133227,       90241,      135029,       53878,       45842,       27877,       33019,       37187,       18699,      364705,       19132,      357030,       90357,       10837,       66398,       50279,       58878,       73763,       16113,       56407,        9306,       85856,      256610,       21311,       23060,       99507,       37537,       49902,       56715,       16247
A90,      149658,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       34307,           0,           0,       81975,           0,           0,           0,       72974,           0,           0,      442668,           0,      116053,           0,       34580,           0,           0,      195577,           0,           0,           0,           0,           0,      372799,           0,      162031,      642161,           0,           0,           0,           0,           0,       67975,       28233,      258863,      247164,       70849,           0,       29384
A91,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       51974,           0,           0,           0,           0,           0,           0,       36853,         149,       21373,           0,           0,           0,           0,           0,        3464,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
A92,           0,       13072,       15457,           0,      161793,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       23493,           0,           0,           0,     1243975,           0,           0,           0,      204400,           0,           0,           0,      553980,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
A93,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        7286,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
A94,           0,           0,           0,           0,           0,           0,       17667,        4089,        4951,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       69621,           0,           0,           0,           0,           0,           0,           0,           0,           0,      347174,           0,      673146,           0,           0,           0,           0,           0,           0,        6442,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
B01,          93,       42441,         120,          92,         578,           0,           0,           0,           0,           0,       42755,          41,       88723,         216,           0,           0,         462,        1367,         128,        4950,        7921,       30858,       22140,           0,           0,          76,       10911,           0,        4922,           0,         163,        6024,       10368,           0,           0,           0,         576,       14899,        4119,         470,        5090,         136,           0,       12633,           0,           0,           0,           0,       23193,        8624
B21,      606047,      135832,      384065,      193523,     3183716,      361894,      206357,       51951,      974263,      662657,      146413,       91397,      979947,      495770,      316369,      239240,      363551,      469284,       96240,      458515,      463694,      913779,      464591,      379460,      339572,       72447,      145302,       91500,       76864,      546370,      251808,     1306323,      623928,       93126,      735820,      279859,      299367,      845116,       87755,      367466,       68232,      459571,     1690102,      287729,       71722,      619560,      599314,      197405,      501022,       41139
B22,       34045,       24188,       27269,       31928,      316416,       45684,       65903,        8458,       49097,       90959,       15287,       16722,      183734,       61774,       33568,       25322,       37843,       56939,       17048,       27532,      113300,      151275,       82190,       35647,       62678,        7958,       21832,       23670,       15777,       92221,       47422,      317435,       51875,        6180,      140396,       46344,       33993,      171315,       23217,       68072,       12418,       60915,      206579,       27294,        7277,       59050,       80082,       22217,       65695,       10570
B30,       58180,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        4835,           0,           0,           0,           0,          40,           0,       12083,           0,           0,           0,         300,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,      161236,           0,           0,           0,         569,           0,           0,           0,           0
B42,       75828,       20914,       64793,       44583,      458332,      106335,      158935,       21083,      314920,      177810,       35290,       36130,      292776,      139631,      136483,       62968,       81144,      143455,       31185,      126587,      120756,      215344,      114728,       76544,      143786,       32277,       38343,       26559,       10886,      189222,       56267,      358092,      137982,       19609,      247005,       53940,      171615,      362025,       31704,      109328,       30972,      117849,      315399,       53658,       26068,      103968,      225156,       44974,       85172,       22702
B46,      261559,      139535,      161929,      152400,     1448561,      274993,      546147,       65910,      405787,      399956,      150911,      106875,      473431,      323937,      192016,      165654,      180640,      287574,       70179,      311027,      278902,      366215,      227518,      174132,      308892,      107436,      101282,       73717,       59419,      506485,      117054,      624935,      340118,       68540,      529984,      203893,      149947,      687877,      146382,      171240,       98955,      257418,     1036186,       94578,       58964,      301578,      409186,      148503,      228516,      101476
B50,           0,       25674,           0,           0,       50727,       16010,       34828,       48648,       53285,       65880,       39441,           0,      174282,       38084,       21628,       15816,       29513,       21910,        9141,       40370,      120210,       42460,       13232,       28688,       45933,       14100,           0,        3033,        4837,      196741,           0,       67063,       58295,       17256,       35469,       12155,       23440,       42636,        8016,       12881,       30788,       45729,           0,        3534,       24616,       26518,           0,       15180,           0,        2314
B54,       22715,        2580,        4046,       11410,        2681,        5816,        4630,        1251,       37921,       27391,        3034,        4683,       18967,       22350,       14434,       17123,       15076,       18364,        4218,       10292,        6067,       18546,       16722,       24556,       18022,        4480,       14901,        2742,        3750,        7509,        9406,       19095,       50231,       12284,       22157,       19698,       10499,       21569,        2622,       14056,        7627,        2418,       25363,       10155,        4362,       18661,       14611,       10633,       16728,        5789
B59,       10327,       65974,       12334,       19554,       59179,       12854,        3618,        6947,       20207,       62099,        3529,       13859,       21609,        7581,       14121,           0,       38269,        9348,        4711,       10373,       15730,       39712,       17050,        9777,       16642,        9856,        6851,        5800,        6274,        7738,       19802,           0,       17196,        8808,       40656,       12322,       31643,       91627,        9762,       18491,        6804,        9259,       73632,       10973,        3976,       21993,       25122,       31097,       22480,        7280
B79,     1041602,      187253,      663224,      629494,     8829895,      638570,      975013,      115142,     2301967,     1759895,      259995,      194243,     2304137,     1388353,      628730,      489159,     1338937,     1654927,      483372,     1006896,     2748663,     3034457,     1324733,      874956,     1200950,      267068,      360753,      142266,      182397,     2214420,      391652,    10762683,     1598751,      219392,     3389515,      815967,      682352,     2994586,      372612,     1132271,      205055,     1488292,     3690232,      393174,      217342,     1018605,     1227621,      523878,     1496036,       99810
B80,           0,           0,           0,           0,      106588,           0,       58894,           0,       54887,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       44272,         114,           0,           0,        1969,           0,           0,           0,        2925,        2839,        1642,          80,           0,           0,       58344,           0,           0,           0,        3447,           0,           0,       10626,           0,           0,           0,        7757,           0,        3820,           0,           0
B89,      205739,       61864,      170931,      109708,     3112017,      108227,       74465,       40653,      362118,      129282,       34478,       72637,      261234,      102288,       89534,      116452,      124766,      177930,       37197,      149377,      116424,      384763,      202049,      209261,       94850,       93718,       48701,       55211,       73193,      266160,       26138,      582031,      171906,       45444,      349554,       64766,      416788,      339431,       30008,      155049,       35964,      114617,      550182,       82723,       36616,      178553,      188148,       77367,      198153,      261028
B91,           0,           0,           0,           0,           0,        6422,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,          40,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
B92,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
B93,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
B94,           0,           0,           0,           0,           0,           0,           0,        2234,        7277,        6967,           0,           0,       11565,        3240,        2517,           0,        3511,           0,           0,       77937,           0,        6377,           0,           0,           0,         881,           0,           0,           0,      188252,           0,      691679,           0,           0,           0,           0,        2419,           0,       20589,           0,           0,        3124,       17541,           0,           0,           0,           0,           0,        1731,           0
D21,        8113,        3174,        6826,        1486,       53619,       21937,         254,        2976,        1921,       11431,         343,         339,       20241,        2589,         322,        3169,        7423,        2917,         307,       16748,        4244,        9692,        1390,        4200,         318,        1185,        3126,         840,        1695,      103614,       42414,      111886,        6598,         493,       21166,       13153,        6961,       53117,         164,       19792,         108,        9828,       20438,       29303,        3338,       16094,       38416,        1185,        5578,       18796
D30,           0,           0,       13048,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
D42,         309,         177,       97353,         672,       32556,         188,           0,           0,       52268,           5,           0,        9809,           0,         327,       41089,           0,           5,        5324,           0,         629,        3808,       96651,        9764,        5878,          72,           0,        2221,         337,          11,        4348,       25156,           0,        2891,           0,       52358,         711,           0,           0,           0,        6987,        1479,        4778,        4412,          26,          17,       47455,         547,           0,         244,        1605
D46,       19040,           0,       11327,        2199,      402946,        9320,           0,           0,       31920,       45308,           0,        3221,       59894,       12618,        2615,       14416,         564,           0,        2834,           0,         261,       41972,       11524,         816,        4374,         979,        8156,        3695,        3010,       16522,        1949,           0,        5128,        8931,       36941,        5847,       13595,        6403,          63,        1647,        1019,       12373,           0,           0,           0,       77197,        5621,           0,       26397,        7724
D79,         399,           0,      170084,           0,         711,          40,           0,           0,      109544,           0,           0,        2630,       19569,       73903,       24694,           0,           0,           0,           0,        7019,      124000,        8350,       89740,         579,          13,       12035,        3856,        6266,       47805,       28826,         356,     2722241,      256175,        9087,           0,           0,       13339,           0,           0,       29296,           0,          78,           0,        2390,           0,           0,           0,           0,           0,           0
D80,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,      136453,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       22534,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
D89,       18164,        5786,        2157,         793,       92458,        2817,        3558,       10982,       37906,       16152,        2873,        1361,       13771,       12082,        1319,           0,        6159,        7439,         801,       25670,       23506,       52024,        4820,        4371,        5622,         530,        1372,        4899,        6075,       35888,         252,      697849,       22499,        2522,       96137,       26577,        1207,        2829,       20110,       26268,         780,       14041,        2202,        7727,           0,       22570,       28488,        7543,       54318,        1651
D91,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,          33,           0,           0,           0,           0,           0,           0,           0
D92,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
D93,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
D94,           0,           0,           0,           0,           0,           0,           0,           3,       11394,           0,           0,           0,           0,           4,           0,           0,          77,           0,           0,       10247,      127275,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,      937920,           0,           0,           0,           0,           0,           0,           0,           0,           0,         143,           0,           0,           0,           0,           0,           0,         108,           0
E01,         945,       30294,        2638,         298,         295,           0,       17961,           0,           0,        1439,       73422,         445,        6711,           0,         888,           0,         536,           0,         574,       35934,       82536,        4489,        1299,           0,          24,         632,        2325,           0,           1,           0,        1338,       14544,        1008,         245,         137,          29,           0,        8156,        6392,        2620,         551,         134,           0,        1019,          16,       14422,         989,         249,           0,           0
E03,           0,       43535,           0,           0,           0,           0,         542,           0,           0,           0,           0,        2551,           0,           0,        7130,           0,           0,           0,           0,        2006,           0,           0,           0,           0,           0,        5315,           0,           0,           0,           0,           0,           0,         318,      103135,        1011,        1170,           0,           0,        2023,           0,       25882,           0,           0,           0,           0,           0,           0,           0,           0,           0
E04,      134082,      110300,      259071,       88246,     1916769,      118007,      216955,       64384,      613115,      314216,       68027,       33661,      488444,      236634,       97975,       98284,      123213,      171309,       42953,      322265,      278565,      683715,      109069,       75243,      157308,       23524,       38082,       86022,       31766,      444058,       94714,     1361074,      389748,       13199,      459055,      113714,      102462,      429298,       79747,      243172,       19536,      194066,      682336,       64789,       22095,      365986,      191981,       26072,      195948,       19917
E05,       36198,       10741,       24005,        3574,      360474,       76664,       62455,       15525,      198538,      156645,       18528,       10084,       44292,        8404,        5718,       46102,       33973,       45519,       13521,      150573,       70826,      112662,       27780,       11605,       32551,        4250,       24986,       15463,        7138,       65071,       24993,      178514,       81497,        1174,       77679,       71554,       44965,       26986,       11765,       32773,        8164,       60220,      106616,       24966,        7667,       25624,       67234,        9041,       34396,        2397
E12,       29672,      181578,           0,           0,      131358,           0,           0,           0,           0,           0,      652911,           0,           0,           0,           0,           0,           0,       21046,        9369,      136723,           0,           0,           0,           0,           0,           0,           0,           0,           0,      208374,           0,           0,       28497,           0,           0,       11490,           0,        1234,           0,       28308,           0,           0,      128978,           0,           0,           0,           0,           0,           0,           0
E16,      132760,       15113,      163738,       75366,      616113,      140914,       66883,       38938,      171630,      138615,       39397,       42627,      270923,      262831,      120260,       97059,      109966,      169445,       44035,      147507,      125862,      378189,      168603,       95336,      125270,       33171,       74229,       25412,       35255,      126615,       66349,      267498,      259519,       58595,      290707,      157032,       95009,      246790,       38168,      143226,       21751,      125093,      476011,       77914,       30091,      306082,      207098,       85127,      149847,       28358
E18,     1129659,      241857,      862369,      529268,     6165073,     1015334,      612718,      297772,     1668347,     1221907,      372679,      220913,     1801447,     1550487,      749534,      582116,      886072,      912009,      262766,     1011632,     1030094,     2393911,     1301081,      433235,      819893,      156005,      407370,      248713,      202558,     1270983,      497215,     3131862,     1451894,      232467,     2348992,      665484,      573748,     1334743,      225027,      964062,      134233,     1099826,     3513297,      639555,      205529,     1587357,     1494658,      403021,     1283602,      110534
E19,       53873,        2506,       66893,       30411,      735287,       48183,       47889,       22846,      213590,       47410,        4017,        8829,      350295,      146078,       82033,       35126,       67386,       58543,       18907,      110395,      124704,      244043,      136945,       36997,       64887,       14207,       22871,        6586,        1712,      184519,       23795,      689423,       70069,       13088,      320966,       48629,       57267,      540403,       23830,       44770,        4348,       46080,      189849,       22380,       28602,      114477,      133604,       21678,      135342,       15603
E21,      350692,       50916,       65120,      149429,      660506,       34123,      128212,       51127,      458281,      265651,       13776,       35107,      280118,      132063,       64230,       63879,      230704,      187490,       40565,      131550,      152774,       88313,      114652,       95232,      106621,       52447,       45248,       24938,       26029,      113795,       46268,      384739,      181882,       22979,      130298,       83428,       70302,      525682,       64375,      152759,       25646,      220414,      253700,       58826,       28062,      191884,      175348,       72441,      126289,       14501
E22,       55107,       23293,       27269,       31269,      298072,       46833,       63201,        7810,       34979,       77900,       17826,       15060,      185197,       65064,       43799,       16920,       44145,       56533,       22520,       26970,       99935,      147008,       81142,       34838,       60099,       10344,       21745,       20634,       16524,       70556,       45134,      308792,       51061,        4409,      143974,       41702,       33982,      139592,       21589,       47549,       12469,       61670,      207876,       26928,        8928,       67500,       79259,       22217,       57767,       12434
E23,      100704,       89443,      159302,       66607,     1424483,      131859,      151202,       52582,      395320,      102684,       60555,       33504,      379979,      171439,       99296,       87103,      122029,       80104,       50098,      218929,      345887,      203735,      185784,       45262,      120357,       51220,       38463,       68144,       27091,      284495,       63236,      812331,      122409,       18565,      457115,      135317,      147463,      331359,       42525,      104732,       22217,      101492,      272098,       64006,       33243,      235431,      184299,       69500,      113240,       38924
E25,      107250,       89204,       65161,       24637,      293861,      100650,      172274,       43348,      412873,       56082,       88325,       21047,      172000,       46957,      104731,       80232,      122239,       76217,       35840,      165166,      293080,      141898,       72963,       29279,       91006,        8888,       24974,       13315,       53688,      225901,       73308,      986300,      210529,       14975,      100820,       67015,      107267,      144344,       58209,       30879,       13121,       75922,      170871,       45819,       24627,      140690,       44173,       40121,      110419,       16284
E26,       13168,       23150,       15768,       12491,      206041,       12034,       28308,        6039,       70860,       18792,       20805,        5004,       49081,       19797,       16495,       11576,       18123,       20595,       14182,       23666,       39696,       73651,       42065,       10246,       20258,        8976,        9860,       13512,        7697,       48422,       10573,      160780,       18865,        3472,       28041,       19333,       19819,      126824,       11663,       21604,        4342,       15625,       59373,        9603,        4578,       21540,       53296,        8922,       34736,        7599
E29,        9739,       11878,       18521,        5060,       51535,       15051,       17987,        4481,       40588,       22196,       21812,        2614,       20220,       11601,       11304,       12807,       11848,       39294,       11548,       27022,       16092,       59217,       23193,       12412,        7538,        4918,        4861,        6700,        5222,       44920,        8736,      128490,       24528,        3251,       23330,        7584,       10528,       34457,       15628,        7823,        5898,       14672,       19384,        4998,        5237,        8869,       27308,        6727,        5072,        6795
E31,        1240,       27175,       11238,        3851,        2507,        6958,        5220,        9271,       45138,       35178,       27531,         156,       14849,        8431,        4303,        2211,         362,        9661,        7276,       28142,        6395,       25724,        6769,        7526,       21780,         524,        2506,           0,        1434,       34886,        5508,      150020,       13798,        2853,       56067,       12712,           0,       21900,       11166,       15209,        3611,       10136,       42252,        2680,       19641,       19022,        3942,       10041,        2989,        4050
E32,      325767,       85692,      254313,       78523,      895499,      168446,      320207,       94663,     1312569,      199854,      185057,       49329,      810904,      257038,       74293,       79384,      109448,      293189,       98381,      286737,      751052,      739223,      227805,      117549,      294203,       67830,       37272,       53829,       98055,      403368,      157490,     1099111,      179877,       21270,      352234,      156367,       91646,      290839,      126790,      399302,       54764,      306687,      441282,       73546,       40855,      412960,      378581,       90337,       90460,       39962
E36,      653270,       31108,       58072,      163579,     2259767,      148213,      679454,       43360,      461586,      481745,      145388,       29247,      597230,      433825,      420406,      274378,      234570,      678038,       72195,      346870,      824016,     1030872,      514678,      220639,      388293,       33855,      200207,       48443,       43509,      749382,      199613,     3292759,      587807,       61451,      971130,      303433,      317554,      936261,      102160,      463886,       35788,      391002,     1251642,      204755,       22739,      854856,      414556,       86666,      348665,       33670
E38,           0,           0,       16877,         124,           0,        8137,         167,           0,        7815,           0,        3103,           0,       27474,           0,           0,           0,       17580,           0,           0,           0,           0,           0,        1068,           0,         871,           0,           0,           0,           0,       18073,           0,           0,           0,           0,           0,           0,           0,        4157,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
E44,      156063,      242138,      160646,      141285,     1261017,      127993,      178183,       27633,      455608,      143135,       61871,       30164,      464036,      199995,      137525,      164522,      198508,      192384,      107415,      253734,       99716,      167158,      157527,       95184,      273533,       72056,       65182,       51235,       67067,      122288,       75411,      336912,      584606,       50701,      299204,      123228,       84600,      841964,       21774,      159553,       59668,      127486,      798912,       90247,       84694,      575875,      145064,      245514,      111998,       65127
E45,           0,       65437,           0,           0,       44992,           0,        4141,        6418,      147333,         778,           0,           0,       73980,       19685,           0,       17708,        7202,       14982,       24945,       33045,       62419,        6569,           0,           0,           0,           0,           0,           0,       14075,      277938,           0,      166833,       19531,           0,       44206,       18727,         310,       75883,        2311,           0,           0,           0,        9158,           0,           0,       65100,       89586,       16581,           0,           0
E47,           0,           0,           0,           0,        1678,           0,       66624,        5081,           0,           0,           0,           0,        6149,       19801,        8841,           0,           0,           0,           0,        6363,           0,       43435,        2556,           0,        2792,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,         557,           0,       17023,           0,           0,           0,           0,           0,        2011,           0,           0,           0,           0,           0
E50,        4023,       23584,        1627,        2748,       69602,       25382,      127762,       25985,       37295,       41750,       52240,        4211,      167508,       35919,        2361,        1917,        5899,         724,       22873,       58807,      156313,       47941,       16663,         660,       34274,       13109,        2225,        6679,        6714,      125766,        2624,      146853,       33537,       18051,       33287,        7065,       27001,       10358,       20019,       18089,        7499,       37759,        7680,       24544,       28771,       26351,       68610,        8603,       17009,        8821
E52,        3146,        4211,        4140,        2649,       12036,        4732,        9642,         911,        5091,           0,       17120,        1861,       10861,        2804,        4418,        1505,        6992,        2957,        3664,        8392,        2713,       17320,           0,        2556,        1323,        1757,        2043,        1612,        2393,        5525,        2560,       22809,        4057,        1013,        7341,        3499,        2450,        8435,        3799,        3397,        1975,        3705,        6356,        3501,        2126,        6335,        8596,        3437,          77,        1354
E54,       87179,       13456,       69791,       57573,      551848,       33751,       14998,        3879,      279690,      144304,       47184,       32541,      120612,       68781,       98926,       99508,       96174,       98072,       30556,       50255,       10954,       97251,      106288,       74477,       67853,       25582,       73551,       14347,        4978,       41051,       40691,       83128,      149775,       49026,       95161,       59180,       67316,       79957,        3729,       61225,       24567,       53455,      190614,       32663,       13390,       77752,       88525,       34894,       74587,       17360
E55,       12677,      102539,       19288,       17537,       99208,       32855,       12789,        3197,       59031,       24425,        2739,       25283,       18188,       20834,        9302,       21025,       17835,       30206,       20216,        8688,       15634,       28093,       48583,       15460,       16239,       23896,       11953,       11660,        8582,       24461,       15756,       34005,       30143,        7820,       22627,       15350,       53170,       60004,        2969,       35680,       11831,       23720,       61211,       20037,        6898,       29659,       76881,       13246,       33300,       22222
E56,       25160,       48343,        1360,       11446,      321682,        4681,        9447,         700,       31745,       32493,        5006,       12142,        6238,        6328,        1818,           0,        6820,        9477,        8203,       10201,        3226,           0,       29454,       21439,        9638,       11437,           0,        4465,        1377,        5032,        2304,       23134,       31188,           0,        8660,         958,       47370,       29336,        1773,       24358,        3080,       15830,       13372,        5769,        3276,       17916,       76012,        3724,       23186,        1216
E59,       19898,       68893,       19271,        4008,      199046,       22668,       22354,       15545,       89433,       33797,       17359,       10176,       73292,       23982,       28802,       17082,       56027,       65403,       12370,       90802,       49873,       88700,       51444,        4141,       64863,       25128,        4366,        5437,       10566,       46809,        7910,      103321,       44432,        5809,       59691,        5917,       14103,      166489,       10879,       11194,       13145,        8862,       94403,       15921,       15963,       33235,       47317,       28510,       35363,       17819
E61,        9578,        8167,       12417,       25893,      150936,       14415,       25854,        9752,       78682,       93529,       24453,        7417,       78378,       22772,       12245,        1878,       74926,       53868,       10971,       33385,       65809,       56945,       53537,       25853,       18221,        3272,       13966,        7219,        8642,      239392,       23429,      223373,       17408,        3160,       39752,       39027,       23737,       60464,        5990,       25248,        8377,       46044,       43418,       13828,        8302,       43422,       37423,       34154,       20706,        7673
E62,       62628,       36179,       93930,       31682,      654771,       36847,       89278,       31413,      225136,       98603,        2627,       20209,      203654,       77301,       43450,       29326,       84369,       85485,       28148,      141448,      107617,      180246,       53977,       30400,       62272,       14112,       26785,       21522,       20138,      196965,       40787,      292294,      131884,        6653,      126228,       39546,       60892,      276224,       20417,       69094,       11843,       53884,      182733,       25978,       21939,      123331,       93008,       22535,       37668,       13144
E66,       25698,       27848,       62198,       32383,      829380,       28937,       48783,       21084,      193642,       49115,       20848,       24429,      152793,       35389,       26544,       26961,       36506,       20036,       24940,       70101,       37461,       99440,       75337,       38559,       39113,        8675,       28507,       38820,       18411,      179784,       34515,      311241,       53199,       11471,      123397,       49281,       70763,      105916,       18475,       38314,        5527,       49744,      190449,       17850,       11259,       87436,      155189,       15762,       51048,        8813
E67,      164197,       88653,      163027,       63009,           0,           0,      427622,       31154,      685972,      371177,       74062,       27432,      981004,        4244,      158606,      134548,      203228,      213136,      146053,      397882,      700671,     1141739,       47075,       66378,      224541,       40718,       62406,       30176,       49772,           0,       82927,           0,      298178,       18426,      977430,      151605,      165416,      857013,      120137,      109724,       24648,      191882,      707717,       85328,       56403,      378548,      510758,      111143,      395035,       24418
E68,           0,        3142,       25465,       26950,           0,           0,        2087,        2152,        2402,           0,       26760,           0,      212269,          11,           0,           0,           0,           0,        4018,           0,      165737,      219412,         409,           0,         281,           0,        1028,         180,           0,           0,        2488,           0,       67956,           0,           0,        3772,        7660,      313756,           0,       11546,           0,       31094,      166750,       15879,        4202,           0,       49017,        1992,        6954,         654
E74,      985812,      182802,      673719,      676995,     7295066,      594809,     1192340,      113015,     3293906,     1906441,      233719,      184461,     2399563,     1701370,      670641,      511241,     1257426,     1329739,      523863,     1283140,     3548775,     2255583,     1606972,      610083,     1196810,      207691,      330852,      164408,      204869,     2815325,      259874,     9605296,     1529097,      189481,     3363567,      777925,      627682,     2703900,      350517,     1104854,      142975,     1031221,     3411313,      311144,      186298,     1125598,     1290193,      463381,     1678042,       74340
E75,           0,        6131,           0,         916,           0,       33478,       35563,        2411,       19406,           0,         807,         864,       49849,       58138,       22475,           0,       20005,           0,       52949,       30976,       28796,       83863,        1111,           0,       24930,           0,       27399,           0,           0,           0,       34392,           0,       25837,        6681,       76341,           0,           0,      113657,       10756,           0,        6553,       36695,       47212,       14978,         193,           0,        2906,           0,       43981,        9822
E77,           0,       27247,        3607,           0,       45025,        9935,       19118,       32926,           0,           0,           0,        3161,       28561,       21837,       28400,        3407,           0,           0,         538,        2970,       25121,       27605,       20646,           0,       10808,        5047,       23281,           0,        7885,       33351,       14888,        8588,           0,        1197,       24106,       31915,           0,       24038,        9956,           0,        2068,           0,           0,           0,        6635,           0,       15649,        1580,       20634,        3940
E79,      195751,       44464,      163986,      182481,     1152077,      169303,      252958,       72991,      551847,      394803,      126749,       66654,     1006333,      222965,      255382,      158187,      443854,      242460,      127578,      383336,      851389,     1052066,       62394,      183057,      302358,       67450,      140875,       58299,       85984,      453839,      141806,      381458,      109220,       34400,      342216,      237953,      340035,     1097360,      111220,      301247,       34905,      242853,     1043978,      102189,       81294,       52806,      524540,      129506,       39259,       34745
E80,           0,           0,          23,        2233,       64457,           0,         137,           0,           0,           0,           0,        7718,       15111,        5481,           0,           0,           0,           0,         423,       22034,       87526,           0,        4077,           0,        5201,           0,           0,           0,        5258,        5539,          28,       17754,         129,           0,        2581,           0,         988,           0,       20140,           0,           0,        2105,           0,           0,           0,       60825,           0,        2242,        4388,           0
E81,           0,           0,          75,           0,      344977,        4380,       99558,       29282,       35738,        5067,           0,         135,       25471,        2301,        2189,           0,        6230,        8220,       19059,       12977,       17949,       30903,        5057,           0,        3475,           0,           0,           0,        5640,       57515,           0,       52054,        6868,           0,       10443,         244,        4642,       31800,       24074,           0,           0,        6605,       88732,        4281,        2290,        6338,       43630,        6356,        5731,       12867
E84,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,          66,           0,           0,           0,           0,           0,           0,           0,          24,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        2372,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
E85,        5404,         388,        1252,        2134,       29486,           0,           0,         162,        3707,        4747,        1210,         871,        6043,         905,           0,        1523,        1304,        5342,        1484,        2555,        2380,         652,        3370,        3135,        1687,         442,        1399,         583,         193,        2897,        1009,        5778,        2693,         353,         581,           0,       12836,           3,           0,         612,         573,        1656,        9509,          69,          75,        2350,        1674,         858,        6487,           0
E87,       27589,           0,           0,           0,           0,           0,         617,           0,        2902,       42765,       13996,           0,           0,        3065,           0,           0,           0,       29615,         170,       42607,       51383,         700,           0,        5719,           0,           0,           0,           0,         320,        7418,           0,       20143,       20504,           0,           0,           0,           0,        5043,         832,       28931,           0,           0,           0,           0,           0,       12346,           0,           0,           0,           0
E89,      135828,      716706,      178497,       41963,     4030915,       61320,      632062,       68187,      536511,      272320,      326803,       55770,      720785,      208924,       79464,       83905,      123054,      212495,       85661,      370944,      671575,      443502,      349898,      100906,      139459,       66003,       52330,       79907,       46596,     1509446,       54377,     1922762,      179462,       40371,      421018,       77980,      213684,     1253005,       83007,      171414,       25198,      205309,      645769,       68323,       70883,      105772,      233693,      218993,      291394,       14579
E90,      135563,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       31877,           0,           0,       57032,           0,           0,           0,       51540,           0,           0,      374541,           0,       92933,           0,       26213,           0,           0,      154267,           0,           0,           0,           0,           0,      286580,           0,      100496,      608977,           0,           0,           0,           0,           0,       50047,       27230,      206542,      206155,       48485,           0,       26230
E91,           0,           0,           0,           0,           0,         636,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       43194,           0,           0,           0,           0,           0,           0,       22947,         145,        7799,           0,           0,           0,           0,           0,        1450,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
E92,           0,       24149,       15540,           0,       67725,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       23240,           0,           0,           0,      943467,           0,           0,           0,      128332,           0,           0,           0,      337634,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
E93,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        4291,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
E94,           0,           0,           0,           0,           0,           0,       54312,       12955,       17814,           0,           0,           0,           0,           0,           0,           0,        3533,           0,           0,      170642,           0,           0,           0,           0,           0,           0,           0,           0,           0,      667778,           0,     1330847,           0,           0,           0,           0,           0,           0,       25080,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
F01,           0,       43826,         128,           0,           0,           0,       11843,           0,           0,        2185,      179346,           0,           0,           0,         250,           0,         492,        1431,           0,       26649,       62939,          69,           0,           0,         184,           6,         299,           0,          87,           0,           0,       11714,           0,           0,           0,           0,           0,        6393,        6581,         837,           0,           0,           0,         645,        1605,           0,           0,           0,       23481,           0
F03,           0,        1053,           0,           0,           0,           0,           0,           0,           0,           0,           0,           9,           0,           0,           0,           0,           0,           0,           0,         778,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        1440,        4048,         537,           0,           0,           0,           0,        1337,           0,           0,           0,           0,           0,           0,           0,           0,           0
F04,         224,        3269,       30508,        3302,      427938,       24493,      173477,        1251,      106504,       27319,        2732,        3243,       84920,       11851,        4065,       49234,       18623,        4317,       10921,       13784,      231249,        6271,        4918,           0,        3439,       17688,        1736,       21589,        3943,       42590,        2475,      398353,       33168,         180,       37316,        7853,       58823,       57981,         276,       35621,          12,       80284,      108471,         232,          15,        6117,       44380,           0,       28076,         601
F05,        1350,           0,           0,         162,           0,        3588,           0,           0,           0,      102141,           0,           1,        1558,           0,           0,           0,           0,          43,           0,        2333,           6,         431,           0,           0,           0,           0,         238,         393,           0,        3144,           0,        6820,           0,           0,        8335,          14,           1,           5,           0,           0,         123,           0,           2,           1,           0,           0,          64,        4445,           0,           0
F12,           0,        9041,           0,           0,           0,           0,           0,           0,           0,           0,      103273,           0,        8198,           0,           0,           0,           0,           0,          90,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        1658,           0,         713,       21287,           0,           0,           0,           0,       59617,           0,           0,           0,           0,           0,           0,           0,           0,      170402,           0,           0,           0
F16,        4568,        1387,        7942,         268,       67784,       48466,          19,         341,         536,        4932,         422,         322,       18184,       51250,        2867,        1776,        3701,        4016,         675,        1554,       22201,       23069,       17147,           0,        2611,          29,        8520,         777,           0,       16314,         180,       10087,       38653,        1074,       17774,        1249,       18695,        4961,        3389,           0,           0,          43,       10420,        3201,        2397,       28378,        9387,        1010,       13341,           0
F18,      103660,       12662,       66011,       35608,      157874,       36297,        2340,       22417,      114577,      105037,       27164,       27272,      105404,      110554,       34006,       18295,       68788,       14575,       11334,      116624,       11947,      166483,       34678,       28629,       19102,        2310,       12240,       18180,        1174,      163759,       27609,      218555,       62584,       20477,      145079,       26355,       81885,      104026,        2254,       47071,        5293,      151051,      131623,       40650,        4685,       72642,      113596,        1959,       44887,        1617
F21,          51,           3,        2662,         950,           0,         149,        4798,           0,        4518,       10324,         110,         404,       19527,         880,           0,           1,        6517,        1397,         149,        4784,          11,          95,       22054,           0,         702,       34454,         205,         137,        7036,         971,         341,       16480,         918,          24,       32527,         226,         134,        5702,         639,        2878,          32,        2809,         249,           5,           1,        2237,           0,           0,        2241,           0
F22,           0,           0,           0,         297,         401,           0,           0,           0,           0,           0,           0,           0,           0,         180,          72,           0,           0,           0,          16,           0,           0,         177,           0,           0,         780,           0,           8,           0,           0,           0,         327,       24823,           0,          50,          64,           0,           0,           0,         532,        1174,           0,           0,        1510,           3,           0,         528,          79,           0,           0,           0
F23,         468,          91,         740,         475,         414,         296,        2861,          35,         439,         491,           0,        1251,           3,          27,           0,           0,          51,           0,           0,           2,          41,           0,           0,           0,         169,          27,           0,          13,         960,       14161,           0,       23770,        4391,           0,           0,          24,        3972,           0,           0,           0,           0,           0,        3221,           0,           0,          17,         258,           0,           0,           0
F25,           0,         535,         221,          16,           0,         154,        2377,          22,        2104,           0,        2286,         128,        1551,           1,           0,          64,           0,         217,          22,         625,       19543,           0,        3791,           0,           0,           0,           0,       14451,        2809,         264,          56,       51326,        1327,           0,           0,           2,           0,           0,           0,           0,           0,           0,         125,         152,           0,           4,           0,           0,           0,           0
F26,           0,           5,          33,          17,           0,         325,         196,           0,           0,           0,           0,          65,          10,          30,           0,           4,           0,           0,           0,          79,           0,        1627,         215,           0,           0,           0,           0,        1080,           0,         395,           0,        9532,        6576,           0,           0,           0,         240,          57,           0,           0,           0,           0,           3,           0,           0,           4,           0,           0,           0,           0
F29,           0,           8,           0,           0,           0,           5,           0,          36,           0,           0,           0,           5,           0,         121,           0,           1,           0,           0,           4,           0,          33,         293,           0,           0,           0,           0,           0,           0,          19,           0,           0,        2268,        1824,          17,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
F31,        9048,         139,         136,          31,        1903,         847,       29769,        7619,       19668,       17575,       11432,         376,       37173,       64739,           0,        2280,           2,          12,       13017,         830,       38080,        3727,        9638,       40175,        9441,        3673,         596,        1387,        1852,        4522,       16710,       14654,       15898,         451,       49538,           1,       80012,       37559,         708,        6711,           0,        7374,       17756,          52,       12639,        4929,           0,          32,           0,        1457
F32,        2393,          16,         589,           5,         252,         660,        5130,        5110,       52276,           0,        2238,         837,         636,         653,           0,          14,        2834,         462,           0,       18093,        7106,       31436,         567,          12,          66,          10,          88,           0,          27,         157,           0,      190795,          90,         102,         660,         149,         230,          65,       11945,        1695,           0,        3332,          34,          15,           7,         885,       14356,           0,           0,           0
F36,       35576,           1,          16,         226,       86129,         779,        2060,          47,       19541,       25796,       21296,         619,       17399,       17386,       28431,        3000,       12710,        2968,         890,        3094,        6740,       57455,        8895,        3083,        9885,        6510,        4179,          48,         197,        5528,        4092,       85746,       12575,        1740,       49217,        1977,        7373,       56635,        9055,        9837,          20,         123,       31990,        2828,          25,        3730,       11101,           0,        2980,        1487
F38,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
F44,      359205,      123684,      481740,      210195,     1079306,      331617,      775965,      188718,      769139,      751169,      205094,      166159,     1170408,      453099,      420993,      305847,      469636,      543171,      110949,      517296,      438397,      506226,      483752,      298946,      416700,      185177,      246237,      145365,       70015,      847978,      227308,     1641467,      582281,       95933,      940665,      285732,      363387,      802005,      162547,      285580,      127465,      599711,     1506764,      148883,       53803,      903308,      502975,      210245,      330062,      205154
F45,           0,       14711,           0,           0,       47050,           0,           0,        6069,      194465,           0,           0,           0,       92169,        6517,           0,       11528,       10177,       11007,       13989,       28786,       49919,         329,           0,           0,           0,           0,           0,           0,        2810,       77219,           0,      190824,        2057,           0,       43707,      116134,           0,      282169,           0,           0,           0,           0,        8748,           0,           0,           0,       63020,       13740,           0,           0
F50,           0,        3057,           0,           0,           0,           0,           0,        3278,           0,           0,       19165,           0,           0,          13,         103,           0,           0,           0,           0,        6304,          10,           0,           0,           0,           0,           0,           0,           0,           0,         145,           0,        9414,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        8485,           0,           0,           0
F52,           0,          40,         537,           0,           0,           2,           1,           0,         741,           0,       14330,         130,        6057,           0,           0,           0,           0,          32,           0,           0,           0,           0,           0,           0,           0,           0,           0,        3551,           0,         154,           0,          19,         531,           0,         155,           0,          15,           0,          18,           0,           0,           0,           0,          53,           0,           0,           0,           0,           0,           0
F54,         101,          34,        6153,         121,       11360,         144,           6,           0,        4609,        4181,        3634,          48,       20016,        1166,         383,         520,        6757,           0,           1,       27598,           3,         475,         359,        3953,         544,          27,        1572,           0,           0,        2949,         190,        3061,        6419,         118,         704,           0,         105,        3911,           5,         539,         139,         383,         165,          52,           0,          59,         119,           0,         826,          51
F55,          41,         954,        4007,        1975,        1592,         365,           0,         640,        2248,         650,         723,         881,        1664,         145,        2655,         728,        1832,         565,         479,          27,         567,        3136,         460,           2,        4156,       16831,        5119,         859,         382,        1684,          22,        1974,          34,         635,         544,         375,        1833,         613,           3,        2858,         199,         469,        1641,         713,        3969,         840,       10898,         501,           0,        1614
F56,         434,           5,           0,           4,        1911,           0,           0,           0,           0,         126,         250,          60,         824,         102,           0,           0,           0,           0,         240,        5435,           0,           0,         310,           0,         321,          53,           0,        1967,           0,          71,           0,        3628,          24,           0,           0,           0,         847,         923,           0,         175,           3,           0,           0,           0,           0,          46,       20830,           0,           0,           0
F59,           0,          59,          64,        1325,      328052,        3558,        3533,         123,       84090,        2740,       11830,         586,       18397,        2366,        4997,           0,       14701,       12598,          95,       18406,       12663,          88,        1926,           0,       10714,        7102,           0,         284,         770,        5978,       10408,       17419,        8268,        4316,       33313,           0,          19,        1516,        1488,        2629,           0,        1780,        6803,           0,           0,        4720,         836,       25540,         303,         962
F61,         372,         978,          13,        1645,       24018,         840,        3275,        1120,       20987,       81270,       19906,        1948,       73279,        6210,         736,           0,        8376,       57240,         192,       23775,       25413,       19965,        1430,         117,       11690,         987,        2846,        1266,        2774,       18544,        2042,       41688,       21535,         234,         744,         707,         622,       10945,       10987,       12119,        1161,       13312,        1857,        1621,           9,        4257,       27795,        4378,        3815,        1655
F62,         172,           0,        1447,          44,         292,          13,         918,        1106,        1823,        2714,           0,         980,        1971,         261,         172,           8,         125,         540,          16,       34535,         465,         132,           0,           0,        1412,           0,         341,         260,         992,        1372,         579,        4344,           3,          26,        2730,         137,           7,           0,           0,        1798,          25,           1,        7484,        1499,           0,          89,        1933,           0,           0,           6
F66,         307,           1,         405,          96,           0,           1,           0,         643,        2142,           0,           0,        1501,           0,           0,           0,           2,          40,           0,           9,         100,           0,           1,           0,         150,           0,           0,           5,          20,           0,         993,           1,       19465,           0,         665,         368,          31,           0,          30,           0,           0,           0,           0,         401,          65,           0,        4956,           0,           0,           0,          13
F77,           0,          74,           0,           0,        3970,          27,           0,         574,           0,           0,           0,         359,           0,         733,           0,          56,           0,           0,           0,          40,         154,        1007,         690,           0,         668,          47,          32,           0,         927,        1039,           0,         628,           0,        2238,       14378,         113,           0,        8577,         110,           0,           0,           0,           0,           0,           0,           0,           4,           0,         805,         278
F79,           0,         608,           0,           0,           0,           0,         291,         170,           0,           0,           0,           0,         427,          15,         209,         146,           0,           0,           0,           0,           0,         366,        6942,           0,          67,           0,         328,         114,           0,          18,           0,         180,           0,         914,           0,           0,          54,           0,        5763,         128,           0,        3203,         364,           3,           5,          21,           0,           0,           0,           0
F80,           0,           0,           0,           0,           0,           0,           0,           0,       68435,           0,        6212,           0,           0,          19,           0,           0,           0,           0,           0,        6735,      241950,          14,           0,           0,         385,           0,           0,           0,        1088,           0,           0,          10,           0,           0,      118106,           0,           0,           0,       27425,           0,           0,           0,           0,           0,           0,         131,           0,           0,           0,           0
F81,           0,           0,           0,           0,           0,           0,       12117,        5626,           0,       21829,         420,           0,           0,           0,           0,           0,           0,           0,          22,           0,          87,          37,           0,           0,           0,           0,           0,           0,          44,          69,           0,       31835,        5491,           0,           0,          15,           0,           0,        5596,           0,           0,           0,        3886,           0,           0,           0,           0,           0,           0,       18940
F85,          17,           0,         602,           0,           0,           0,           0,           0,         275,          34,         905,           0,        1600,           0,           0,           0,           0,           0,          92,         980,           0,           0,           0,           0,           0,           0,           0,          83,           0,           0,           0,        7951,           0,          22,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,         404,        1280,           0,           0,           0
F87,        7954,           0,           0,           0,           0,           0,         236,           0,           0,       15468,       18304,           0,           0,         776,           0,           0,           0,       14752,        1267,        6091,        9178,         499,           0,           0,        1029,           0,           0,           0,          37,        5782,           0,        6901,        6391,           0,           0,           0,           0,          15,        2380,         183,           0,           0,           0,           0,           0,       27849,           0,           0,           0,           0
F89,        1405,        2506,       10203,        1586,       42841,       10998,       38998,        3490,       13197,       11454,       27059,        2313,        4708,        1185,        4899,         168,       49369,        4206,         684,       87928,        7970,       14983,        8294,           4,        1169,       17601,         611,        4311,         972,       27587,        3522,       25263,        5508,        3273,       37417,         403,        1271,       90254,        2949,        6572,         726,        1984,       29289,         155,         127,        1641,       48778,           0,       27513,         183
F90,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        1252,           0,           0,           0,           0,           0,           0,           0,           0,          13,           0,           0,           0,           0
F91,           0,           0,           0,           0,           0,        1396,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       14555,           0,           0,           0,           0,           0,           0,        1236,           0,       17172,           0,           0,           0,           0,           0,          59,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
F92,           0,       62096,         196,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,      240407,           0,           0,           0,       16835,           0,           0,           0,       85065,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
F93,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
F94,           0,           0,           0,           0,           0,           0,       77202,           0,        1948,           0,           0,           0,           0,           0,           0,           0,        1344,           0,           0,      198475,           0,           0,           0,           0,           0,           0,           0,           0,           0,       86403,           0,      780619,           0,           0,           0,           0,           0,           0,        5723,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
G01,          28,        5782,         102,          14,        1564,           0,          60,           0,           0,          12,       39034,          20,         129,           0,           0,           0,           0,         345,           2,        6170,        5557,          50,          24,           0,           2,          17,         382,           0,           0,           0,           0,           2,           0,          12,           0,           2,           0,         433,          22,          87,           4,           0,           0,          66,           0,         403,          35,           0,        2546,           0
G03,           0,       13928,           0,           0,           0,           0,           1,           0,           0,           0,           0,         680,           0,           0,         235,           0,           0,           0,           0,          60,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,          34,        3623,           3,           0,           0,           0,           0,           0,        1433,           0,           0,           0,           0,           0,           0,           0,           0,           0
G04,         934,        1342,        4413,        3049,       46410,       15278,        6767,         822,        5443,        4090,         970,        1089,        9546,       21249,         715,        1294,        3596,        3218,         592,        1534,       13679,        1479,        1727,         597,        2077,          77,          90,        1019,         152,        1826,         584,       34227,        6109,         590,       13537,        2599,        3896,        7161,         281,        2417,         263,        2350,       17352,        1622,         470,        6297,        3198,         231,        3774,         333
G05,         149,          26,          41,          40,        4268,       15407,         145,         725,         610,        6234,        1609,         567,         633,         316,          61,        3093,         381,         513,          22,        2715,         405,        3346,         684,          73,         705,          62,         966,          72,          17,        2429,         575,        1633,        6187,          38,        2297,        1453,        2852,         245,          17,         486,         122,         476,        1203,           0,          62,          93,        2341,         681,         110,           0
G12,           0,        5274,           0,           0,           0,           0,           0,           0,           0,           0,       26862,           0,           0,           0,           0,           0,           0,           0,         155,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        4323,           0,           0,       15945,           0,           0,           0,           0,         223,           0,          22,           0,           0,           0,           0,           0,           0,         784,           0,           0,           0
G16,        2010,          59,        3279,        1088,       19904,        6980,        1490,          37,        7542,        4313,         834,         563,        7250,       15896,        1405,        2630,        2102,        2551,         877,        2106,         390,        8308,        5469,        1294,        2709,         252,        6339,         724,           1,        3611,        1194,        3052,       10781,        1478,        8046,        7569,        1280,        5888,         633,         772,         466,        1255,       11439,        1329,         624,        8394,        8609,        2202,        2988,           0
G18,       63151,       10114,       31666,       25509,      207705,       47093,       14260,        5061,       68540,       66820,       26168,       18516,      118592,       84730,       53512,       34533,       57217,       62489,       11972,       41296,       36378,      108475,       52959,       24882,       30786,        8145,       17713,       28007,         568,       50546,       21870,       76095,       81005,        8970,      150567,       52882,       35787,       61798,        8764,       17707,        9543,       68590,      190069,       41696,        8113,       59814,       85232,       25142,       85147,        7701
G21,        5319,        1027,        1360,        3729,        2460,        1644,        3994,         186,        2837,        3210,        1250,        1084,        6081,        1484,         502,        1359,       13265,        2648,         106,        2289,        1499,         923,        7015,        2274,        1422,         749,        4908,         106,         140,         691,        5431,        3434,        3685,         441,        2056,        2411,        2224,        7348,         819,       11061,         713,        1621,        6742,         124,         399,        3823,       10724,        3234,        3079,          97
G22,         476,         261,           0,        1344,        5911,         307,        6913,         175,         818,        5973,         286,         647,        9685,        1002,         187,         726,        1011,           0,         473,          15,        8204,        5282,        1048,           5,         942,          47,         141,         705,         465,         348,          56,        3721,         281,         243,        3686,         229,         318,        1085,         716,        1065,         554,         109,        3847,       14785,         264,        2427,         879,         271,        1755,           0
G23,        3431,        3879,        3943,        1237,       21773,        3772,        1235,        1243,        5483,        2091,       17328,        1663,       10229,        1603,         607,        3049,        3422,        1448,         400,        3156,       14705,        3474,        4187,        1427,        2440,         913,         704,         925,         868,        2523,        2035,        7680,       10449,         166,       20790,        8315,        2108,        6338,         541,        8279,         675,         510,       12662,         251,         985,        2250,        6025,        1932,        1295,         341
G25,        2198,        1366,        1351,         448,        2561,        2291,        2389,         790,        3332,         249,        4411,         960,        1831,        1267,         656,        2205,        3176,         350,         294,        4102,        4483,        2115,        3325,         305,         718,          64,         355,          69,         642,        1932,        2479,        9435,        1333,         515,        1709,         443,        3619,        3616,         941,         451,         400,         465,        6830,       10666,         375,        2113,        5869,        1165,        3886,          73
G26,         383,         776,         630,         552,        8159,         400,         594,         266,        9910,          98,         402,         186,        2449,         616,         292,         634,         902,         887,          49,         657,         582,        1449,        1998,          14,         931,         332,         316,         601,          17,         358,         348,       18918,         857,          18,         503,         719,         617,        4358,          28,        1539,          26,         418,       10625,           0,          18,         779,        3409,         768,         292,         166
G29,         441,         242,         172,          15,         613,         646,         259,          84,        5765,         278,         495,         231,          82,         265,          28,         702,         296,         905,         500,         561,         719,        2354,        1185,         226,         176,         236,          58,          29,           7,         847,         141,        1396,         432,          27,        1177,         240,         700,        2877,          83,          43,         546,          40,         739,           0,          90,          69,        1691,         234,         346,         168
G31,         164,          73,          47,         553,           0,          34,          84,         180,        3064,          54,        2215,           0,        2050,          70,          12,         102,          38,          50,          27,         204,         309,          65,          70,        3642,         974,           0,          50,           0,           0,          56,          35,        2979,         109,          42,       13700,          12,        7183,         432,          13,         205,          33,        3059,       31488,       11342,        2361,        3739,         179,         172,           0,          54
G32,        4258,        2079,        4296,        2487,       40109,        5226,        1609,        2635,        7639,        1448,        3929,        1416,        6222,        1678,         258,        1722,        1408,        5410,         823,        1565,        3145,        4123,        3581,        1038,        2893,         383,         529,         516,         421,        2834,        1632,       19791,        2678,         473,        3231,        2963,        2015,        2801,        2943,        6079,         614,         485,       12629,        1295,         591,        3568,        8397,         910,         658,         418
G36,       17077,         246,         265,        1478,       32097,        5537,        6229,         189,        2108,        9880,        1823,         576,        9092,       10538,        8688,        7953,       12862,       16130,         468,        1079,       10255,        4444,       12013,        4998,        8359,         171,        8622,         186,         148,        7651,        6268,       53415,       12556,         311,       52356,        7880,        8447,       21325,        1729,       14250,         427,         263,       25072,        4590,         207,       22892,       12074,        1022,       12757,          64
G38,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
G44,       23656,       22882,      114828,       20485,      443875,       25601,       30255,       25512,       56834,      110665,        9655,       16414,      113922,       35901,       36087,       19903,       49990,       37694,        8461,       61518,       25061,       61365,       45503,       22276,       48287,         826,       14287,        9788,        3859,       22604,       30767,       12294,       83174,        8591,       46378,       38086,        4590,       52442,        7770,       51738,        8446,       81463,      281392,       10324,       10017,         548,       60121,       12861,       38803,       16157
G45,           0,         517,           0,           0,           0,           0,           0,           0,       10725,          33,           0,           0,        5159,         728,           0,        5753,           3,          99,         886,        4540,           0,         179,           0,           0,           0,           0,           0,           0,        1152,       18610,           0,       12366,         209,           0,        4386,       30406,           0,       17036,           0,           0,           0,           0,         786,           0,           0,           0,           0,        1963,           0,           0
G50,           0,          19,           7,          55,         400,        7089,        3683,         101,         263,           0,       12589,         408,           3,          16,          25,          12,         136,           0,           0,         494,         525,           0,         104,           0,          54,           3,           0,           5,         125,          15,          49,        1673,          50,          66,         104,          33,        4225,          23,         372,           0,         288,           4,           0,          21,         183,          69,           0,           1,         712,          30
G52,          44,         144,          91,          70,          28,         151,        1181,          32,          75,           0,        3653,         243,        1198,         376,           0,          32,        1235,          21,          45,          49,          60,         396,           0,         127,          45,          88,         174,         254,          43,           7,         152,         347,         312,          42,         131,         184,         230,          61,          95,          73,         594,           9,         365,           0,          43,         781,         493,         296,           0,           3
G54,        3772,         228,        3829,        2464,        3765,        1805,        9111,         340,        3815,        3368,        2537,        1659,        3452,        7982,        1295,        4873,        3594,        5606,         367,        1843,        6695,         937,        2815,        3201,        1835,         790,        2120,         349,         159,        4977,        1402,        1268,        6071,        2082,        2881,        4207,        2967,        8998,        3837,         229,         994,         350,        5487,        1365,         778,        1225,        1402,        1016,        2142,          26
G55,        1914,        3480,        1159,         918,       40588,        5479,          53,        1577,        6194,        2939,          79,        2640,        2307,         965,        1486,        2280,        1210,        6340,        2181,         205,         637,         790,        4589,        1489,        6528,         725,        2129,        1214,         979,         917,         930,        1579,        1723,         480,         673,        1250,        3728,        6531,        1768,        3343,        1554,        4888,        5211,        2873,         419,        1850,       10459,        1460,        1693,        1048
G56,         773,         406,          21,         178,       12284,         187,           0,          54,        1911,        2043,         374,         642,         162,         188,          26,           0,         548,         228,         469,         204,          83,           0,         597,        1259,        2248,         448,           0,         193,          30,         275,          57,         332,        1906,           0,         679,         494,        2012,         180,           2,        1287,         151,         247,           0,           0,         149,        1185,      104296,         102,         717,           0
G59,         544,        1107,         195,         182,       19412,        1404,        1111,         758,       63658,        1404,       17768,         605,        7071,         661,        4265,         140,        4095,        6524,         319,        6759,       20019,        3881,        9077,         504,        4815,        3341,         183,        5794,         528,        5483,         325,       47031,        1979,         217,        2360,        1854,         474,       10370,        1643,         337,         870,          21,        3262,         902,         959,        1379,        1674,         760,       11421,          24
G61,         107,         233,        1067,        1160,       20451,        5863,       18844,        6919,       13675,        4203,        3984,        1048,       13351,        4070,         119,         135,        4412,        6202,         465,         558,        5206,       13774,        2217,         475,        2433,         120,         931,         222,         394,         656,        1293,        8410,        3706,          97,        1963,        2328,         977,        1843,        5111,        2079,         461,        1822,        3760,        4122,         851,        3114,       23965,        1631,        2718,          52
G62,        2750,         534,        5668,        3558,       25312,        3276,        9060,        2142,       11634,        6897,        1217,        2675,       14729,       11027,        1623,         813,        7104,        6294,        1624,        5718,        3033,        6534,        3249,        1551,        8772,        1188,        1881,        1965,        1724,        9611,        2141,        9643,       10311,         229,       11723,        1790,        2381,       11693,         166,       12799,        1409,        3589,       16409,         875,         994,       10522,        5886,        2560,        2195,        1449
G66,         851,         754,         965,         620,       11335,         353,         384,        1089,       10309,         526,        1792,        1338,        5617,         576,         235,        1249,         985,         720,         436,         867,         545,         343,        1076,        2120,        1141,         134,         625,         507,         598,        4059,         953,        7683,        1193,         384,        3041,         874,        1471,        1196,         683,         816,         198,         311,       15510,          32,         303,        2585,       12911,         443,         795,          33
G77,           0,         458,          61,           0,         145,         479,         213,         310,           0,           0,           0,          85,         898,         158,          33,          58,           0,           0,          16,          27,         169,          21,         122,           0,         574,          23,        1676,           0,          68,         276,         156,          44,           0,          40,         629,         402,           0,         214,           4,           0,          15,           0,           0,           0,          89,           0,          64,          48,         396,           3
G79,        3694,        1742,        4575,        2665,        3165,        1139,         354,         369,        2311,         385,        5665,        2184,        5088,         846,         285,        8217,        5345,        9107,         809,        9365,        1979,        4778,        8319,        3291,        1154,         722,        1060,         360,         100,        1743,        1059,       37188,        1146,         977,       14234,        2319,        3250,        2356,        2009,        2108,         394,         184,       14231,         881,         233,        1257,       21735,         621,        1558,           0
G80,           0,           0,           0,          73,         327,           0,           0,           0,           0,           0,          45,         522,         307,           5,           0,           0,           0,           0,           0,        1192,       21087,           0,         132,           0,         139,           0,           0,           0,          72,           2,           0,         560,           9,           0,           0,           0,           0,           0,         239,           0,           0,          17,           0,           0,           0,        1004,           0,           2,          35,           0
G81,           0,           0,          35,           0,        1618,          92,        3200,        1406,           0,         115,           0,           7,         299,           0,          56,           0,         530,         639,         855,         598,         220,         664,          64,           0,         169,           0,           0,           0,          85,        1022,           0,        1868,         354,           0,         565,           0,           2,         453,       11424,           0,           0,           2,        1706,           0,          10,          93,        3160,         253,         320,         211
G85,          72,           0,          11,          17,         350,           0,           0,           0,        1357,          13,          12,           0,         599,           0,           0,           0,           0,          23,           0,         101,           0,          17,          70,          23,          21,           1,          12,           1,           1,           4,          14,          13,          18,           2,           0,           0,        5046,           0,           0,           8,          10,          23,         237,           0,           0,          31,          67,           1,          60,           0
G87,        1952,           0,           0,           0,           0,           0,           0,           0,        1675,       11284,         580,           0,           0,         372,           0,           0,           0,        1248,           4,         584,         705,           3,           0,           0,           0,           0,           0,           0,           2,        2071,           0,         288,         891,           0,           0,           0,           0,           0,          20,       21807,           0,           0,           0,           0,           0,        1797,           0,           0,           0,           0
G89,       10608,        3886,        2112,        6650,       14398,         122,       13357,        2227,       11172,       52280,      105513,        1222,        3252,        5956,        8654,        1961,       15500,       10302,       22363,       28988,        6067,        8062,       30278,        1213,        4063,         551,        1438,        1052,        8607,        8764,         650,       21049,       16554,        3125,       17609,        4459,        7060,        5736,        4407,       17548,        3626,        5928,       52106,        6812,         904,        8612,       38675,         947,       20353,        1666
G90,         808,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,         176,           0,           0,           0,           0,           0,           0,           0,           0,           0,           2,           0,           0,           0,           0,           0,           0,        2777,           0,           0,           0,           0,           0,         285,           0,          16,        9975,           0,           0,           0,           0,           0,          82,          86,         727,        3036,           0,           0,          18
G91,           0,           0,           0,           0,           0,          23,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,          53,           0,           0,           0,           0,           0,           0,          85,          35,           0,           0,           0,           0,           0,           0,         486,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
G92,           0,        1600,          28,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        2000,           0,           0,           0,        1647,           0,           0,           0,       10285,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
G93,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
G94,           0,           0,           0,           0,           0,           0,       37112,        4874,        4479,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        6080,           0,           0,           0,           0,           0,           0,           0,           0,           0,      132000,           0,      719848,           0,           0,           0,           0,           0,           0,        5924,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
I89,      275353,      483182,      187183,      130201,     2195669,      234943,      742603,      207242,      694414,      234536,      230308,       94574,     1292228,      320008,      146895,       31114,      378733,      830016,      171670,      463139,     1384585,      660449,      284496,       96407,      363602,       93512,      124148,      120761,      243699,     1403499,      116936,     3160473,      224668,       77812,      797471,      181693,      465565,      943134,      289175,      217178,      138066,      198556,      598499,      140594,      110966,      478340,      407388,      176898,      474970,       75325
I91,           0,           0,           0,           0,           0,         224,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        9507,           0,           0,           0,           0,           0,           0,       16858,          10,        8822,           0,           0,           0,           0,           0,         416,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
I92,           0,       22684,        6348,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,      272308,           0,           0,           0,       91480,           0,           0,           0,      150671,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
I93,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,         169,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
I94,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,      217053,           0,           0,           0,           0,           0,           0,          11,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
K01,          28,        4316,         102,          14,        1564,           0,          60,           0,           0,          12,        7977,           6,         129,           0,           0,           0,           0,           0,           2,         776,        4158,          50,          24,           0,           2,          17,         382,           0,           0,           0,           0,           2,           0,          12,           0,           2,           0,         433,          11,          87,           4,           0,           0,          66,           0,         399,          15,           0,         933,           0
K03,           0,       13928,           0,           0,           0,           0,           1,           0,           0,           0,           0,         680,           0,           0,         235,           0,           0,           0,           0,          60,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,          34,        3568,           3,           0,           0,           0,           0,           0,        1087,           0,           0,           0,           0,           0,           0,           0,           0,           0
K04,         934,        1342,        4413,        3047,       42058,         917,        6767,         459,        4691,        4090,         970,        1084,        9546,        7515,         715,        1294,        3596,        3218,         592,        1534,        8381,        1479,        1727,         597,        1558,          77,          90,        1019,         152,        1826,         584,       34206,        6087,         590,        2944,        2590,        3837,        4156,         281,        2189,         263,        2350,       16902,        1622,         470,        6297,        3114,         231,        3753,         333
K05,         149,          26,          41,          40,        4268,        4291,         145,         473,         610,        6234,        1609,         567,         633,         313,          61,        3093,         381,         513,          22,        2715,         405,        3346,         684,          73,         705,          62,         966,          72,          17,        2429,         575,        1633,        6187,          38,        2297,        1453,        2852,         245,          17,         486,         122,         476,        1203,           0,          62,          93,        2334,          54,         110,           0
K12,           0,        5274,           0,           0,           0,           0,           0,           0,           0,           0,       26085,           0,           0,           0,           0,           0,           0,           0,         155,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,         844,           0,           0,       15945,           0,           0,           0,           0,         223,           0,          22,           0,           0,           0,           0,           0,           0,         784,           0,           0,           0
K16,        2010,          59,        3279,        1088,       19904,        6484,        1490,          37,        7542,        2903,         834,         563,        6405,       15829,        1356,        2303,        2102,        2551,         877,        1578,         390,        8102,        2987,        1294,        2106,         252,        6159,         724,           1,        3611,        1194,        1952,       10781,        1478,        8033,        7411,        1280,        2922,         633,         772,         466,        1255,       11439,        1129,         459,        8253,        8609,        2202,        2823,           0
K18,       58949,        9452,       29976,       22778,      204013,       46965,       14260,        4996,       68155,       65408,       26168,       18413,      118018,       81765,       52388,       34464,       56237,       62343,       11827,       39960,       13946,      106636,       50370,       24671,       26909,        8090,       17176,       27780,         568,       44453,       20612,       68712,       78481,        8895,      143776,       51999,       35787,       57289,        8764,       17635,        9530,       65628,      189201,       40821,        7184,       58991,       83359,       25107,       84849,        7473
K21,        5319,        1027,        1192,        3720,        2460,         817,        3994,         186,        2837,        3210,        1250,        1084,        6081,        1484,         502,        1359,       13265,        2648,         106,        2289,        1499,         923,        2759,        2274,        1422,         749,        4862,         106,         140,         691,        5431,        3434,        3685,         441,        2056,        2411,        2224,        7348,         819,        8976,         713,        1621,        6741,         124,         399,        3741,       10724,        3234,        3079,          33
K22,         476,         261,           0,        1344,        5911,         307,        6913,         175,         818,        5973,         286,         647,        9685,         199,         187,         726,        1011,           0,         473,          15,        8204,        5282,        1048,           5,         942,          47,         141,         705,         465,         348,          56,        3721,         281,         243,        3686,         229,         318,        1085,         716,        1025,         554,         109,        2754,       14785,         264,        2427,         879,         271,        1546,           0
K23,        3389,        3879,        3943,        1237,       21773,        3155,        1235,        1243,        5483,        1611,       17328,        1565,       10229,        1599,         607,        3049,        3422,        1448,         400,        3156,       14705,        3474,        4187,        1427,        2440,         913,         704,         925,         868,        2523,        2035,        7680,       10449,         166,       20790,        8066,        2108,        6338,         541,        4393,         675,         510,       12662,         251,         985,        2250,        6025,        1932,        1295,         341
K25,        2194,        1366,        1351,         448,        2561,        2291,        2389,         790,        3332,         249,        4189,         960,        1831,        1267,         656,        2205,        3176,         350,         294,        4102,        4483,        2115,        3325,         305,         718,          64,         355,          69,         642,        1932,        2479,        9435,        1333,         515,        1709,         443,        3619,        3616,         941,         451,         400,         465,        6830,         566,         375,        2113,        5869,        1165,        3886,          73
K26,         383,         776,         630,         552,        8159,         400,         594,         266,        9910,          98,         402,         186,        2449,         616,         292,         634,         902,         887,          49,         657,         582,        1449,        1998,          14,         931,         332,         316,         422,          17,         358,         348,       18916,         857,          18,         503,         719,         617,        4358,          28,        1539,          26,         418,       10625,           0,          18,         779,        3409,         768,         292,         166
K29,         441,         242,         172,          15,         613,         592,         259,          83,        5765,         278,         495,         231,          82,         265,          28,         702,         296,         905,         500,         561,         719,        2354,        1185,         226,         176,         236,          58,          29,           7,         847,         141,        1396,         432,          26,        1177,         240,         700,        2877,          83,          43,         246,          40,         739,           0,          90,          69,        1691,         234,         346,         168
K31,         164,          73,          47,         189,           0,          33,          84,         170,        1583,          54,        2215,           0,          87,          70,          12,          29,          38,           0,          27,         204,         309,          65,          70,        2608,         834,           0,          50,           0,           0,          56,          35,        2726,         106,          42,         121,          12,        5451,         432,          13,         201,          33,         147,         485,       11342,         426,        1438,         179,         132,           0,          54
K32,        4258,        2079,        4296,        2487,       40109,        3672,        1609,        2628,        7639,        1448,        3929,        1416,        5870,        1627,         258,        1722,        1408,        5401,         823,        1565,        3145,        4123,        3581,        1038,        2893,         383,         529,         516,         421,        2834,        1632,       18096,        2678,         473,        3231,        2963,        2015,        2801,        1432,        6079,         614,         485,       12311,        1295,         591,        3568,        8397,         910,         658,         418
K36,       15098,         246,         263,        1478,       31366,        4417,        6229,         189,        2108,        9880,        1823,         576,        9092,       10509,        8688,        7867,       12548,       15845,         468,        1079,       10255,        4444,       11964,        4998,        8359,         171,        8622,         186,         148,        7651,        6268,       48472,       12556,         311,       52356,        7880,        8414,       16458,         619,       14049,         427,         263,       25072,        4590,         207,       22840,       12074,        1022,       12738,          64
K38,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
K44,           0,       14053,        6790,        8530,       64459,        3588,        6720,        2895,       39155,        8479,        3698,        7077,       22996,        8653,       14612,       17040,        9967,           0,        1402,         131,        2512,        9865,       18757,        8166,       22181,         826,        7178,        6481,        2217,        7990,       12426,       12079,        3915,        8058,       20408,       16863,        1998,       27387,          88,       15624,        5117,       12477,       44030,        7014,        4011,         548,       27664,       11042,       14355,       13244
K45,           0,         517,           0,           0,           0,           0,           0,           0,        1712,          33,           0,           0,        5159,         728,           0,        5753,           3,          99,         886,        4090,           0,         179,           0,           0,           0,           0,           0,           0,         602,        3373,           0,       12366,         209,           0,        4386,        1120,           0,       17036,           0,           0,           0,           0,         380,           0,           0,           0,           0,         698,           0,           0
K50,           0,          19,           7,          55,         400,        7089,        3683,         101,         263,           0,        6960,           0,           3,          16,          25,          12,         136,           0,           0,         494,         525,           0,         104,           0,          54,           3,           0,           5,         125,          15,          49,        1673,          50,          66,         104,          33,         106,          23,           5,           0,         288,           4,           0,          21,         183,          69,           0,           1,         712,          30
K52,          44,         144,          91,          70,          28,         149,        1181,          32,          75,           0,        3653,         243,        1198,         376,           0,          32,        1235,          21,          45,          49,          60,         396,           0,         127,          45,          88,         174,         254,          43,           7,         152,         347,         312,          42,         131,         184,         230,          61,          95,          73,         594,           9,         365,           0,          43,         781,         493,         296,           0,           3
K54,        3772,         228,        3058,        2464,        3765,        1230,         177,         340,        3815,        3190,        2537,        1659,        3452,        7526,        1295,        4873,        3594,        5525,         367,        1843,          40,         937,        2815,        3201,        1835,         790,        2120,         349,           0,        4977,        1402,        1261,        6071,        2082,        2881,        4207,        2847,        2046,          58,         229,         994,         350,        5487,        1340,         778,        1225,        1402,        1016,        1927,          26
K55,        1650,        3456,        1159,         626,        5969,        2672,          53,          92,        6194,        1179,          79,        1888,        1117,         521,         253,        1745,         874,        3112,        1436,         205,         637,         541,        1316,        1489,        1602,         579,        1114,         294,         548,         603,         856,        1579,        1154,         427,         673,        1250,        2703,        3595,          59,        2652,        1216,         428,        4067,         939,         269,        1698,        4837,         394,         331,        1048
K56,         756,         406,          21,         178,       11931,         187,           0,          54,        1823,        2043,         374,         642,         162,         135,          26,           0,         548,         228,         469,         204,          83,           0,         249,        1259,         984,         448,           0,         193,          30,         275,          57,         332,        1890,           0,         679,         494,        1961,         180,           2,        1283,         151,         247,           0,           0,         149,        1167,        4323,         102,         367,           0
K59,         472,        1107,         195,         182,        6382,         957,         892,         756,       21004,        1404,        1709,         605,        3821,         374,         324,         140,        3822,        6042,         319,        3078,         737,        3881,        4967,         504,        3838,         256,         183,          66,         454,         150,         325,        3002,         838,         214,        2360,         414,         474,        7844,          57,         337,         870,          21,        3262,         902,         596,        1379,        1674,         740,        3581,          24
K61,         107,         233,         342,         911,        3940,         478,          53,         378,        3580,        3608,        1288,         953,        2268,        2827,         101,         135,        4091,        6202,         290,         465,         947,         693,        1012,         475,        1629,         120,         931,         217,         394,         654,         902,        7896,        1492,          97,        1963,        1479,         767,        1363,          50,        1359,         442,        1596,        1313,        4122,         501,        1485,        3160,        1587,         297,          52
K62,        2750,         534,        5486,        3558,       22768,        3246,        9060,        2141,       11634,        6897,        1217,        2675,       14729,       10577,        1486,         813,        6873,        6294,        1624,        5718,        3033,        6534,        3249,        1551,        8772,        1188,        1881,        1965,        1724,        9611,        2141,        9643,       10311,         229,       11723,        1790,        2381,       11693,         166,       12799,        1409,        3589,       16397,         875,         994,       10522,        5178,        2560,        2195,        1449
K66,         851,         754,         965,         620,       11335,         353,         384,        1089,       10309,         526,        1792,        1338,        5421,         576,         235,        1249,         985,         720,         436,         867,         545,         343,        1076,        2120,        1141,         134,         625,         507,         598,        4059,         953,        7683,        1193,         384,        3041,         874,        1471,        1196,         683,         816,         198,         311,       15504,          32,         303,        2585,       12911,         443,         795,          33
K77,           0,         458,          61,           0,         145,          36,         213,         310,           0,           0,           0,          85,         898,         150,          33,          58,           0,           0,          16,          27,         169,          21,         122,           0,         574,          23,        1676,           0,          68,         276,         156,          44,           0,          40,         629,         395,           0,         214,           4,           0,          15,           0,           0,           0,          58,           0,          64,          48,         385,           3
K79,        3694,        1742,        4575,        2665,        3165,        1139,         354,         369,        2311,         385,        3123,        2184,        5088,         846,         285,        8217,        5345,        9107,         809,        9365,        1979,        4778,        8101,        3291,        1154,         722,         756,         360,         100,        1743,        1059,       37188,        1146,         977,       14234,        2319,        3250,        2356,        2009,        2108,         394,         184,       14231,         881,         233,        1257,       21735,         621,        1558,           0
K80,           0,           0,           0,          73,         327,           0,           0,           0,           0,           0,           0,         522,         307,           5,           0,           0,           0,           0,           0,        1192,       21087,           0,         132,           0,         139,           0,           0,           0,          72,           2,           0,         560,           9,           0,           0,           0,           0,           0,         239,           0,           0,          17,           0,           0,           0,        1004,           0,           2,          35,           0
K81,           0,           0,          35,           0,        1618,          92,         797,        1406,           0,         115,           0,           7,         299,           0,          56,           0,         530,         639,         855,         598,         220,         664,          64,           0,         169,           0,           0,           0,          85,        1022,           0,        1868,         354,           0,         565,           0,           2,         453,           2,           0,           0,           2,        1706,           0,          10,          93,        3160,         253,         320,         211
K85,          72,           0,          11,          17,         350,           0,           0,           0,        1357,          13,          12,           0,         599,           0,           0,           0,           0,          23,           0,         101,           0,          17,          70,          23,          21,           1,          12,           1,           1,           4,          14,          13,          17,           2,           0,           0,        5046,           0,           0,           8,          10,          23,         237,           0,           0,          31,          67,           1,          60,           0
K87,        1952,           0,           0,           0,           0,           0,           0,           0,          15,        9303,         580,           0,           0,         372,           0,           0,           0,        1248,           4,         584,          11,           3,           0,           0,           0,           0,           0,           0,           2,         480,           0,         157,         291,           0,           0,           0,           0,           0,          20,         419,           0,           0,           0,           0,           0,        1523,           0,           0,           0,           0
K89,       10608,        3886,        1960,        5307,       13792,           0,       13357,        1484,       11172,       52280,        4306,        1220,        3188,        5904,        8461,        1961,       14159,        4159,        1420,       28988,        5893,        7935,       28955,        1213,        2641,         551,        1438,         752,         621,        8764,         279,       20760,       14908,        3035,       17609,        4440,        7028,        5716,         570,       16445,        3626,        5928,        4235,        6812,         904,        7808,        5767,         541,       17679,        1666
K90,         808,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,         176,           0,           0,           0,           0,           0,           0,           0,           0,           0,           2,           0,           0,           0,           0,           0,           0,        2777,           0,           0,           0,           0,           0,         285,           0,          16,        9975,           0,           0,           0,           0,           0,          82,          86,         727,        3036,           0,           0,          18
K91,           0,           0,           0,           0,           0,          23,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,          53,           0,           0,           0,           0,           0,           0,          85,          35,           0,           0,           0,           0,           0,           0,         486,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
K92,           0,        1600,          28,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        1507,           0,           0,           0,        3124,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
K93,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
K94,           0,           0,           0,           0,           0,           0,       36865,        4874,        4479,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        6079,           0,           0,           0,           0,           0,           0,           0,           0,           0,      132000,           0,      324436,           0,           0,           0,           0,           0,           0,        5392,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
M01,           0,           0,           0,        1490,           0,           0,           0,           0,       42361,           0,           0,           0,           0,           0,           0,           0,         920,           0,         196,           0,        1333,           0,       13594,           0,         107,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        6517,           0,           0,           0,           0,           0,         671,           0,        7274,        1601
M05,           0,        4149,           0,        1195,           0,           0,           0,           0,           0,           0,          11,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,         221,           0,           0,           0,           0,           0,         224,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,         496,           0,           0,           0
M12,           0,         380,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,      550779,           0,           0,           0,           0,        1594,           0,           0,           0,           0,      108942,       31260,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        2868,           0,           0,           0,           0,           0,           0,           0,           0
M18,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,          64,           0,        2313,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,          60,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
M21,           0,           0,           0,           0,           0,           3,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        1802,           0,           0,           0,          70,         154,           0,           0,        4978,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,          39,           0,           0,           0,           0,           0,           0,           0
M23,           0,         127,           0,           0,        4625,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,          16,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        2239,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,         425,         880,           0,           0
M25,           0,           0,           0,           0,           0,           0,           0,           0,        4674,           0,        4777,           0,           0,         251,           0,         161,           0,           0,           0,           0,           0,        6269,           0,           0,           0,           0,           0,           0,        1071,           0,        2490,           0,           0,           0,           0,        3012,           0,          23,           0,           0,           0,           0,           0,          78,           0,           0,           0,           0,         671,           0
M29,           0,         127,           0,           0,        5548,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,         132,           0,           0,           0,           0,           0,         337,           0,           0,           0,         103,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,          18
M30,           0,         633,           0,           0,           0,           0,       75011,           0,           0,           0,           0,           0,           0,      621661,           0,           0,           0,           0,       70760,           0,           0,       11558,       23192,           0,           0,           0,       59432,           0,           0,           0,           0,           0,           0,         204,     1021638,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
M32,           0,       39517,        9852,           4,       13024,          23,           0,           0,       84895,           0,           0,           0,        6861,           0,           0,       12028,           0,        1344,        5278,        4529,           0,        2691,        9643,           0,         375,        1194,       75090,           0,         305,        3841,           0,           0,        1544,           0,           0,       49015,           8,           0,           0,           0,           0,           0,      307387,           0,           0,           0,        4182,           0,      273140,        2890
M38,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,         150,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
M44,           0,           0,           0,           0,        3667,           0,           0,           0,         668,           0,           0,       55706,       15263,       28363,           0,           0,           0,           0,       20116,           0,           0,       88709,        3045,           0,       34848,           0,           0,           0,           0,        4120,           0,           0,           0,           0,       96909,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        8499,           0,          43,           0
M50,           0,           0,           0,           0,        1213,           0,           0,           0,           0,       29792,           0,           0,        1080,           0,       20761,       14672,           0,           0,           0,           0,      243099,       25137,         987,           0,       22099,           0,           0,           0,           0,           0,         583,       51977,           0,           0,       35176,       13458,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,          67
M52,        1879,        1854,           0,           0,           0,        1732,           0,           0,        2349,           0,           0,           0,       37564,           0,        2222,        2822,           0,           0,           0,           0,           0,           0,        6348,           0,           0,         404,           0,         682,         252,           0,         662,           0,           0,         348,           0,        2467,           0,           0,        1910,           0,           0,        7375,           0,           0,           0,           0,           0,           0,           0,           1
M54,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,         400,           0,           0,           0,         677,           0,           0,           0,           0,           8,           0,           0,           0,         175,           0,           0,        6201,           0,           0,           0,           0,           0,           0,           0,        1147,           0,           0,         351,           0,           0,           0,           0,           0,           0,           0,        2751,         363
M55,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        1969,          39,         256,           0,           0,          39,           0,           0,           0,          12,         452,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,         734,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        1135,         165
M56,           0,         144,           0,          49,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           3,           0,          46,           0,          22,           0,           0,           0,         261,           0,           0,           0,           0,         435,         182,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,         150,           0,           0,           0,           0,           0,           0,           0,        2932,           0
M59,           0,        1704,           0,           0,        6144,           0,           0,           0,          10,           0,           0,           0,           0,           1,        4468,          23,         393,          57,           0,        7290,       18440,           0,        4240,         377,         754,           0,           0,         608,          19,       18940,         277,           0,           0,           0,        7105,        5404,           0,        9289,         290,           0,           0,           0,           0,           0,           0,           0,        3667,         107,       15132,        1841
M61,           0,        1855,           0,        1241,           0,           0,        6310,           0,       13383,        2842,           0,           0,         137,           0,         358,           0,         100,         622,         130,           0,           0,         997,        8774,           0,          43,           0,         480,           0,         599,         212,           0,           0,           0,           0,           0,        3615,           3,         877,           0,           0,           0,           0,         108,           0,           0,           0,           0,           0,        5317,          11
M62,           0,           0,       10979,         873,           0,           0,           0,           0,        9666,           0,        2450,          13,       14267,         116,        1079,           0,           0,           0,         163,           0,           0,           0,        1527,           0,        8752,         380,        4603,           0,           0,        6190,           0,           0,           0,           0,           0,         496,           0,           0,        3830,           0,           0,           0,           0,         574,           0,           0,           0,           0,           0,           0
M66,           0,          64,           0,           0,         974,           0,           0,           0,           0,           0,           0,           0,         402,           0,          24,         670,       16499,           0,           0,           0,           0,           0,        1172,           0,           0,           0,          63,           0,           0,        4176,           0,           0,           0,           0,          21,           0,           0,           0,           0,           0,          27,           0,           0,           0,           0,           0,           0,           0,         660,           0
M67,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
M68,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
M79,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       56625,           0,       12851,         971,           0,       34672,           0,           0,           0,           0,        7775,           0,        4179,           0,        1471,           0,           0,           0,           0,           0,          10,           0,        7739,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
M80,           0,           0,           0,           0,           0,           0,           0,           0,        9456,           0,           0,          97,      157817,           0,          82,           0,           0,           0,       13866,       25983,       85793,           0,         287,           0,         613,           0,           0,           0,           0,           0,           0,           0,           0,           0,       23798,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       87592,           0
M81,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        5580,           0,        1017,           0,        2660,           0,         152,           0,           0,           0,         467,           0,           0,           0,           7,           0,        1081,           0,           0,       11663,           0,           0,           0,           0,           0,         270,           0,           0,           0,        1061,       18539,          60
M87,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,         767,           0,           0,         302,           0,           0,           0,           0,           0,           0,           0,        1746,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       12255,           0,           0,           0,           0,           0,           0,           0
M89,           0,       27733,           0,       52270,      168491,          19,       89239,           0,       31141,        3927,       10852,           0,       30936,           7,       51014,        4527,       17946,         575,        1817,         190,           0,       51697,       11194,        2759,       92793,         153,       27047,           0,        1713,       13408,        5427,       13613,        4024,           0,       14982,           0,        3542,      122434,         205,        4327,         110,           0,       90753,        5561,           0,           0,       20810,        9048,       91040,       12010
M91,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        9504,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
M92,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
M93,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
M94,           0,           0,           0,           0,       21606,           0,           0,           0,       45754,           0,           0,           0,        3507,           0,           0,           0,           0,           0,           0,           0,           0,        2884,         232,           0,        1354,        1206,        1109,           0,           0,           0,           0,           0,           0,           0,       48519,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,          80,           0,        1549,           0
N01,           0,        5694,        8543,           0,        6930,           0,          20,           0,           0,           0,           0,          67,       44971,        2140,        2690,           0,           0,           0,           0,         354,           0,       36416,       15541,          74,           0,         227,        1349,           0,        7527,           0,           0,         403,        9389,         653,        1251,         788,           0,        5852,           0,        1010,           0,          78,           0,       17881,         143,           0,           0,           0,           0,        8745
N05,        3875,           0,       29291,           0,      226854,        3530,           0,           2,           0,       17412,           0,        4043,       32589,       17488,       42281,       10639,       28798,       33753,           0,       13078,      113346,        7468,       22795,        3693,        1001,           0,           0,        1138,          17,       74280,           0,      223099,       10015,           0,       44765,        4620,       24257,       19393,           0,           0,          38,       56356,      148155,           0,          10,      163226,           0,           0,       45490,           0
N12,           0,      566145,           0,           0,      948367,           0,     1433464,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        5000,     1566503,     1533477,           0,           0,        2532,           0,         883,           0,           0,           0,      782849,           0,     4248476,     3601705,           0,      104507,           0,           0,           0,      319173,           0,           0,     1336459,           0,           0,           0,     2492818,           0,           0,           0,        1432
N18,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       80649,           0,           0,           0,           0,           0,           0,           0,           0,           0,      102481,           0,      319211,      429681,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
N21,           0,           0,           0,           0,           0,         212,           0,         164,           0,           0,           0,           0,           0,           0,           0,           0,         235,         597,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,      153766,           0,         184,           0,         520,         279,        1382,           0,           0,           0,           0,         819,           0,           1,         485,        2739,           0,           0,           0
N23,           0,           0,        1796,        2389,        2365,         538,           0,          37,        1955,        8098,           0,           0,        3216,           0,           0,           0,       18517,           0,           0,           0,           0,         165,         338,           0,       11152,        1240,           0,           0,           0,           0,         156,        1374,         399,          13,           0,           0,         447,           0,           0,        1331,           0,           0,        7300,           0,           0,       33925,           0,        3058,           0,           0
N25,           0,           0,        6805,        1807,      413298,           0,           0,        1532,           0,         271,           0,           0,        7483,           0,         136,           0,       12371,           0,           0,         174,       26213,       39757,       20021,           0,        3573,           0,           0,          75,           0,       40443,           0,       47408,           4,         505,       19838,        4489,        1302,       93941,           0,        5923,         530,        3822,       11076,         927,           0,       48995,         646,           0,           0,         508
N29,           0,           0,         242,           0,        3899,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        2825,          67,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        1444,           0,           0,           0,           0,           0,           0,          72,           0,        5283,         622,           0,          18,           0,           0,           0,           0,         135
N30,      100400,       60141,      580924,       45972,     2332649,       22420,      147028,           0,     1360958,        8058,       64923,       62942,      703839,      172733,      158031,       80488,           0,      164217,           0,      196070,     1066751,     1019289,      835835,      268039,        5179,       43875,       26141,      337608,       31327,      920280,      383562,     1033255,      476583,       55377,       11433,       22707,       81312,      104938,       30643,      221447,       24128,      226797,       48424,           0,       12656,       23462,       90173,       18245,     1154885,      119941
N32,       10432,       14966,       13131,       47538,     2478770,       22818,       14831,         819,           0,      282922,        6913,        5205,       53087,       42027,       43962,       43881,       81634,           0,           0,      233936,         720,      506927,      114922,       27527,        8605,        4669,           0,        2116,           0,       89809,        2513,      610914,      286954,        7826,      322190,       21092,      138555,      534487,           0,       22328,         449,        1598,       41531,       41898,           0,        3235,      142948,        9023,         696,       21843
N38,           0,         254,           0,           0,           0,       24414,           0,           0,         229,        5994,           0,           0,        1321,           0,           0,           0,         121,           0,           0,           0,           0,           0,           0,           0,        1605,           0,           0,           0,           0,       32522,           0,           0,         983,           0,           0,        3427,           0,           0,           0,           0,           0,           0,        3999,           0,           0,          29,           0,           0,         104,         404
N44,      140447,       32518,      336862,       87438,     1008984,      184071,       30514,        3000,      144078,       14100,           0,       10154,      440897,      299998,      272109,      107985,       90642,       43209,         208,      288151,       23583,      606240,      321918,       79820,      129286,       14220,      109235,       36187,       16370,        1374,       30989,      208448,      118078,       41183,      571302,      166360,      331002,      291227,           0,       14120,       13775,      251955,        5925,       50860,       21358,      152070,      235483,           0,      348212,       38319
N50,           0,           0,           0,           0,       30689,       12894,       17942,           0,       21527,           0,           0,           0,       19930,           0,           0,           0,       25083,       22327,           0,        6993,           0,           0,       41195,           0,           0,           0,           0,           0,        3741,       12704,           0,       90346,       38840,           0,           0,           0,           0,      122550,           0,           0,        5191,       27862,           0,           0,           0,       30339,       39640,       14784,           0,        2528
N52,        4384,         253,         979,        2828,       34610,           0,        2359,         883,       18055,       20104,           0,         352,        1250,           0,           0,           0,        4876,           0,           0,       20588,       27316,       13805,           0,        3389,        4615,           0,        1449,           0,           0,       13986,           0,       69225,       13058,         477,           0,           0,         766,       21235,           0,        4179,         151,         424,       11934,         499,           0,       12489,        1359,        5509,       10126,         133
N54,           0,         127,           0,         519,       37215,          78,           0,          75,           0,           0,           0,           0,           0,           7,        1340,           0,           0,           0,           0,           0,           0,       15385,         140,          93,           0,         949,           0,           0,           0,           0,           0,           0,        1476,         216,        2973,          53,           0,           0,           0,           0,          60,          85,          31,          52,           0,         926,        6262,           0,           0,         564
N55,           0,           0,           0,           0,           0,         617,           0,           0,           0,           0,           0,           0,          44,         148,         932,           0,           0,           0,           0,           0,           0,         191,        1094,           0,           0,           0,           0,         483,           0,        2518,           0,           0,           0,         139,          65,           0,           0,         845,           0,         416,           0,          19,         801,           0,           3,         823,         511,           0,          64,          66
N56,         103,           0,           0,           0,       24213,           0,           0,          41,         752,         155,           0,           0,         218,         265,           0,           0,           0,           0,          11,         256,           0,         352,        2894,          48,           0,           0,           0,          42,           0,           0,           0,       31167,           0,           0,         211,         730,           0,        3635,           0,         367,           0,         526,           0,          94,           8,         215,       37797,           0,           0,           0
N59,           0,        1013,        1646,           0,        1203,       12896,           0,        2031,        5989,        3400,           0,         144,         430,        1839,        3862,           0,         775,           0,           0,         173,        7551,       13617,        9086,         745,         355,         265,           0,        1475,         236,        2397,         801,        1588,        2768,         771,         758,           0,         240,        2876,           0,           0,        1490,         333,        1577,        7161,       14280,         455,          20,           0,           0,        8125
N61,           0,        4049,        2198,           0,       81501,         508,           0,        1387,        8692,        1170,           0,        2223,        3987,        1823,        2272,           0,          42,         197,         442,       20558,        9883,        3420,        2915,         350,           0,          10,           0,          35,           0,        1720,        1019,        6761,         521,         106,       14004,           0,        1327,           0,           0,        1139,          95,        2392,       12735,         290,          32,        1002,       11869,           0,        1571,          87
N62,       11103,        6354,        2957,         864,      151879,           0,           0,        1839,        3450,        2565,        1792,        1148,         173,        1020,           0,           0,       13495,       21895,           0,       90857,       10772,        4457,       29637,         545,       15925,        5466,           0,           4,        1325,       25000,        3632,       13296,          99,           0,        4518,           0,           0,       10890,        2617,          72,         203,        4665,           0,        1077,         231,      140681,       63470,           0,        2268,        1780
N66,           0,           0,           0,           0,           0,         478,           0,           0,           0,           0,           0,         134,         960,           0,           0,           0,           0,           0,           0,           0,           0,        5451,        3493,          63,           0,       14358,         493,         212,           2,           0,           0,       14798,           0,         294,           0,           0,        2514,           0,           0,           0,           0,           0,          35,          70,           0,        1945,           1,           0,           0,           0
N67,           0,           0,           0,           0,     5056341,      164245,           0,           0,           0,           0,           0,           0,           0,      159731,           0,           0,           0,           0,           0,           0,      313640,           0,      393402,           0,           0,           0,           0,           0,       46743,      619674,           0,     4188645,           0,           0,           0,           0,           0,           0,           0,           0,           0,      417366,           0,           0,           0,       14978,           0,           0,           0,           0
N68,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       46884,          58,           0,           0,           0,           0,       14429,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,      500402,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
N79,        7516,           0,           0,         577,     3131284,      157133,      138189,         149,         276,           0,           0,           0,       71133,       85800,        3521,           0,        6826,        2703,           0,           0,       11804,      264622,      219588,        5590,        5346,        8715,           0,        5922,        1951,      190678,           0,     1852318,      330458,        1400,      891468,       20393,           0,      911006,       28100,        8521,         548,       23034,        1840,        2363,          10,      241171,       13065,           0,      188652,        3907
N80,           0,       35794,           0,           0,       26180,           0,        3821,           0,           0,           0,           0,        6826,        6928,       14790,           0,           0,           0,           0,           0,         572,           0,         465,        7568,           0,       29427,           0,           0,           0,       11859,       13015,       11859,      122256,        4234,           0,           0,           0,           0,       17260,        4399,           0,           0,       13568,           0,           0,           0,        1965,           0,           0,           0,           0
N81,           0,           0,           0,           0,           0,          30,           0,           0,           0,           0,           0,           0,        2278,           0,           0,           0,           0,           0,           0,           0,           0,           0,         189,           0,           0,           0,           0,           0,           0,           0,           0,        7152,           0,           0,        7745,           0,           0,           0,        4367,           0,           0,           0,           0,           0,         237,           0,       43259,           0,           0,          40
N87,           0,        3796,           0,           0,           0,           0,           0,           0,        2828,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        1780,           0,        5017,           0,           0,           0,           0,           0,           0,          30,           0,           0,           0,           0,           0,           0,           0,           0,         105,           0,           0,           0,           0,           0,           0,           0,           0,         188,           0,           0,           0
N89,      128493,       36054,       32850,       16096,      133433,       49811,       16401,       36901,       35666,       12115,        2252,        6508,      107939,       71945,         603,       11525,       38083,      112347,         587,       40695,       25629,      137783,       75070,       49015,        2593,       40028,           0,        2171,         392,      292267,       20584,      512893,      115233,       10110,       23923,       26927,       42785,      155040,        1608,      111191,        8734,       33483,      177562,       10388,        6466,       39794,       41871,       10974,       84013,       24650
N91,           0,           0,           0,           0,           0,          65,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
N92,           0,        5242,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
N93,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
N94,           0,           0,           0,           0,       55328,           0,           0,       15851,           0,           0,           0,           0,       59208,           0,           0,           0,           0,           0,           0,       82813,           0,      102718,        7047,           0,           0,           0,        1218,           0,           0,           0,           0,      728239,           0,           0,           0,           0,        6602,       93541,           0,           0,           0,       12626,        3240,           0,           0,       76039,         384,           0,       48355,           0
Q12,     1633403,           0,     1447418,      989257,    14700801,     1259794,       18592,      319328,     5718882,     3331239,           0,      493245,     3975151,     2234966,     1382359,     1064662,     1863653,     2028006,           0,           0,      260183,     3340976,     2636791,     1109889,     2212531,      446976,      524008,      644207,       20928,     2731393,     1070661,     5057137,           0,      261471,     4392428,     1539731,      865670,     3871086,       37918,     1609258,      206979,       18086,     6836557,      918887,      231611,           0,     3336320,     1105236,     2101612,      314842
Q18,           0,           0,       88823,           0,     2804623,       14674,           0,           0,      667657,           0,           0,       13534,      245110,           0,       90423,       43971,           0,           0,           0,           0,           0,      195334,        3636,       70438,       67484,        3182,       32590,           0,           0,       36180,       17001,           0,           0,        1418,       64562,           0,       89665,      121347,           0,           0,           0,           0,      560550,           0,           0,           0,           0,           0,           0,       41029
R01,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       47144,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        9906,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           6,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
R12,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
R18,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
R30,           0,           0,           0,           0,       60357,        1184,           0,           0,           0,           0,           0,           0,       65961,           0,           0,        1519,           0,           0,           0,           0,           0,           0,           0,           0,        1370,           0,           0,           0,          90,           0,           0,           0,           0,           0,           0,           0,         326,           0,           0,           0,           0,           0,           0,           0,           0,           0,        6051,           0,           0,           0
R32,           0,           0,           0,           0,           0,         336,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,         339,           0,        8094,           0,           0,           0,           0,           0,           0,           0,           0,       10037,        2392,           0,           0,           0
R38,           0,           0,           0,           0,           0,           0,           0,           0,           0,        5835,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
R44,           0,           0,           0,           0,           0,        1430,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,          15,           0,           0,           0,           0,           0,         812,           0,           0,           0,           0,           0,           0,           0
R50,           0,           0,           0,           0,       19658,         365,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,         216,           0,           0,           0,           0,           0,           0,           0,           0
R52,           0,           0,           0,           0,        6968,           0,           0,           0,           0,           0,           0,          49,           0,        3720,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,          21,           0,           0,           0,           0,           0,           0,        4948,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
R54,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,         528,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
R55,           0,           0,           0,           0,           0,         603,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,         377,           0,           0,           0,           0,           0,           0,          78,           0,           0,         135,           0,           0,           0,           0,           0,          88,           0,           0,           0,           0,           0,           0,           0
R56,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
R59,           0,           0,           0,        5422,           0,        6495,           0,           0,       57353,         159,           0,         905,        5197,           0,           0,        3163,           0,           0,           0,           0,           0,        1249,           0,           0,        4837,           0,        6415,           0,          34,           0,           0,           0,           0,        2928,        3861,        4689,         236,           0,           0,         428,          41,           5,        1886,           0,           0,           0,           0,           0,           0,           0
R61,           0,           0,           0,           0,       13039,          80,           0,           0,           0,           0,           0,         127,       63952,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,          74,          31,           0,          72,           0,           0,           0,           0,        3273,           0,           0,           0,           0,         770,           0,          23,           0
R62,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,         656,           0,           0,           0,           0,           0,         423,           0,           0,           0,           0,           0,           0,           0,           0,           0
R66,           0,           0,           0,           0,           0,         138,           0,           0,           0,           0,           0,           0,        1420,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,         202,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
R79,           0,           0,           0,           0,           0,        1391,           0,           0,           0,           0,           0,           0,        1601,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
R80,           0,           0,           0,           0,       10029,           0,           0,           0,           0,           0,           0,         778,           0,           0,           0,           0,           0,           0,           0,           0,           0,          30,          89,           0,           0,           0,           0,           0,         405,           0,           0,           0,           0,           0,           0,           0,           0,       11745,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
R81,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
R87,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        1069,           0,           0,         294,           0,           0,           0,           0,           0,           0,           0,           0,           0,         747,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,          43,           0,           0,           0
R89,           0,           0,           0,          38,           0,       10666,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       12258,           0,        2656,         188,           0,           0,           0,           0,         980,           0,        9621,           0,           0,           0,           0,           0,         287,          34,           0
R91,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
R92,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,         145,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
R93,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
R94,           0,           0,           0,           0,       51613,           0,           0,           0,           0,        7708,           0,          63,      167351,           0,           0,           0,           0,           0,           0,           0,      580152,           0,       22176,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,         422,      273641,           0,           0,           0,           0,         540,           0,           0,        1856,      122223,        1008,           0,           0
S67,           0,       79640,           0,           0,     2303725,           1,           0,         671,           0,           0,       10249,           0,           0,       15819,       18889,           0,           0,           0,        7426,          35,      136439,       74167,           0,           0,           0,         706,        3990,        3000,           0,       69734,           0,      440500,           0,           0,           0,       36880,           0,       83188,       12757,           0,          14,           0,           0,         901,       10154,           0,       23886,           0,      105043,           0
S89,           0,           0,           0,        1412,        5718,         622,           0,           0,           0,           0,           0,        1473,        2354,           0,         344,         175,           0,           0,           0,           0,           0,          26,           0,           0,           0,           0,           0,         487,           0,           0,           0,           0,           0,           0,       11679,           0,           0,           0,           0,           0,           0,           0,           0,         759,           0,           0,        1216,           0,           0,         285
T01,       94215,       85007,      278945,        8854,     2233393,        7493,          12,           0,      430334,       26923,           0,          99,      228436,        4910,           0,       32961,      323373,       47394,       44558,      179901,         616,      327607,        7625,       22221,       12669,       77405,        2142,       34221,         335,       16722,       21118,           0,       92478,        2133,       10501,           0,         142,      157714,        9835,       11954,           0,           0,           0,         278,        9785,       17271,     1235137,        1694,       49225,       80115
T09,     1049526,           0,     2005801,      876900,    14339942,      844572,     2438653,           0,     8138690,     2656792,     1278737,      385367,     4163801,     2538335,      977056,      918211,     1299665,     1308090,      497069,     1540887,     1909438,     3190647,     1963433,     1120155,     1863374,           0,      624259,      826288,           0,     4042805,      939242,     5751832,     1689871,      235255,     3574539,      963548,           0,     4197700,      448402,     1437473,      247974,     2363252,     8294921,      739633,      125611,     1558873,     4758204,      817368,     2026711,      177779
T10,      109409,       12164,       39809,       24453,      128729,       19627,       46439,        8896,      542002,      115043,       40795,        4272,       63625,       33257,       12707,       52164,       52402,       41899,       34933,       26325,       67718,      124108,       55573,       33711,       23443,       13812,       15935,       12670,       12794,       81006,       17249,      236146,      152973,        6082,       65557,       55514,       10471,      142907,        9449,      114187,        9464,       63162,      377750,       16219,       13975,       85121,      116747,        8563,       39787,        1064
T11,         105,        1449,         865,           0,           0,         450,       19769,           0,        2652,           0,           0,           0,        8305,           0,           0,         843,         274,        2035,           0,        1665,        9387,           0,           0,         486,           0,           0,        6792,      355372,        1771,      247052,          51,         756,           0,        6172,           0,          12,          59,         587,         153,       16671,           0,           0,       11158,           0,           0,          48,          57,          37,         517,           0
T12,      147584,       24434,      104681,       51300,     1287740,       86250,      174122,       31446,      319567,      188844,       45422,       38599,      192876,      121809,       92288,       78701,      214688,      185805,       36952,      144910,      267795,      175973,      129618,       90612,      172931,       27400,       35523,       62209,       35286,      196833,       40883,      594889,      191063,       17659,      269929,      100581,       60811,      362473,       32333,       68773,       27060,      140618,      595446,       28988,       16910,      157677,      106959,       52377,       83278,       10240
T13,      290447,       39917,      362018,      224929,     2002287,      331515,      329815,       66216,      821776,      451169,       53188,      112305,     1024492,      581740,      330530,      234725,      350369,      443770,      130005,      443563,      464222,      733501,      457571,      305100,      364998,      110246,      222715,      120487,       90820,      400186,      175944,      506704,      825425,       75917,     1035492,      330819,      258969,      722713,       74602,      340112,       78686,      635248,     1509285,      131057,       52213,      617586,      584960,      205981,      546508,       36116
T14,        4619,           0,        7941,       18281,      131859,        8352,       58525,         108,       98290,           0,           0,        1004,       43257,           0,        7153,           0,        6436,       19257,        1330,        2992,       27477,       19940,        2403,           0,           0,         161,         573,           0,        9777,        7163,         554,       78026,           0,           0,       13933,        8344,        4051,       11235,       10776,           0,         519,           0,           0,           0,         207,           0,       10768,        9564,       10276,         157
T15,      284644,        1995,      104125,           0,       40267,        5477,      179896,       20498,      333569,           0,       74856,        1783,      702985,           0,           0,         430,           0,       11777,         642,      113445,           0,           0,       33502,           0,         242,       11066,        2048,        4155,       31919,     1088203,        6121,     1335069,      222096,       13521,      631926,       13889,        6710,      588374,       61095,       36028,         639,        6597,      248082,        4243,       12493,       94547,      176386,       10602,      236442,           0
T16,       68801,       16713,       51796,       62300,      755531,       61135,      114926,       17188,      428042,       85207,       26263,       15259,      319038,      110115,       86523,       54584,       14278,       84199,       43843,       61320,      144423,      259342,      153737,       50914,       78062,       12740,       38962,       50296,       39923,      275833,       17517,      603433,       15190,       16519,      211836,       69632,       83230,      213418,       37792,       30335,       13899,       79309,      637000,       23298,       12093,       15458,      140253,       31741,      141452,        5456
T19,       67518,           2,           0,           0,       35097,        9289,       44912,       26125,      200103,           0,       79229,        2084,      114128,           0,           0,        8461,      212359,       28973,           0,      306611,       55983,        9730,      241589,           0,           0,        7952,       12463,        5277,       89773,       24521,       52881,      579271,       29752,       48668,           0,      116409,           0,      305052,        2364,       49848,       22354,       11514,     1203609,           0,       79766,      261984,      100060,       99630,           0,           0
T20,        2480,        1545,        2210,         989,       33108,        3034,        5680,         844,       26897,        2540,           0,         907,        2847,        9901,        8169,        2617,        1806,        2034,        2050,         331,        1097,       11679,         399,        3425,        2414,        1329,         240,          21,        2738,        3788,         472,       27934,        2817,         243,       24613,        3181,        1549,       13511,         242,        8478,         226,        1490,       17751,         425,         357,        5779,        7818,        5427,         209,           0
T21,           0,         108,          28,         294,          60,         197,         521,         105,        8323,           0,           0,           0,        1077,           0,           0,         246,         612,           0,         446,          12,         713,         254,           0,           0,         952,       22353,           0,       66158,         481,       50105,         169,         839,        4584,         222,           0,        5112,        1379,          28,         174,       20467,         176,           0,        5434,           0,         195,          37,         193,           0,        1497,           0
T22,      108626,         912,        3987,        7574,       44987,        4000,       10122,      203868,       46538,       23500,        1130,         277,       84584,        3852,       28368,       12658,       81936,      246584,        2128,        5043,       15567,       12445,        2872,       47305,       64312,         783,        4856,        6323,        7424,      120507,        1356,       21034,      154700,         416,      197327,       32668,        4575,      593773,        5023,       27661,         631,      207166,      617587,           0,         587,       23408,        8447,        5702,        6397,        2170
T23,       12736,       16678,       12559,       15514,       59897,       44012,        3080,        1070,       15648,       16028,         259,       17592,       16418,       12264,       21318,        9591,       11701,       11317,       10596,        9063,        4635,       40866,       32985,        8653,       19915,       19994,        7803,        6529,        6187,        9301,        7923,       27386,       14595,        4861,       21895,       12272,       23605,       42643,        1185,       11004,        8260,       19293,       32666,       16432,        4430,       16680,       26877,       12796,       36924,       15613
T24,      141015,       20760,      209350,       74193,     1239599,       99353,      165318,       20508,      533113,       78734,       20935,       56402,      597981,      165706,      220730,      106728,      141080,       78273,       47904,      144195,      243568,      490222,      363922,       64248,      194014,       37007,       55175,       56982,       50457,      316855,      103468,      537935,      214325,       37866,      399016,      279644,      243259,      446355,       51934,       72463,       38174,      152357,      725608,       41497,       35353,      245912,      193546,       83676,      158643,       35994
T25,       11761,         670,        7517,        4895,       89129,        8815,       24563,        1500,       76500,       15000,           0,        2542,       40646,           0,        9105,        6502,        5038,        7649,        6905,        8717,       61636,       34211,       19203,        7078,       14264,        2115,        3535,        4909,        6621,       25321,        4466,       54200,       41428,        2806,       19558,        8500,       12443,       47807,         492,       13032,        1145,       21328,       59969,        7000,        3121,       21203,       19710,        3462,       16672,         794
T27,        1956,           0,           0,        6302,       63905,           0,           0,        3633,       22466,           0,        2715,        5404,           0,          42,        8406,        4386,        1995,        3552,           0,           0,           0,       16124,           0,        5710,        9424,        1291,           0,           0,        2840,        2593,          53,       62450,           0,           0,         601,           4,        7509,       34027,         167,           0,           0,        3047,        5641,           0,           0,           0,       14444,        9917,          12,        1367
T28,      103499,       41951,       29695,       40613,      594685,       53717,       55746,      126368,      185720,       33859,        8859,       21701,       71268,       22139,       24128,       26840,       25698,       34704,       21774,       70636,       59305,       70276,       93076,       22770,       60277,       11652,       26102,       30497,       19843,       53622,       14287,      199271,       76728,       11737,      158387,       29888,       80274,      185607,       12874,       66239,       15894,       47741,      173624,        9179,        8020,       60398,      158627,       17675,      102351,        1421
T29,           0,           0,       22447,         485,        5567,        8400,        4887,         614,       21927,       24667,         150,        1346,        2454,        1447,        2941,        1273,        2574,        1295,        1216,        1732,        2956,       20130,        8758,          87,        6181,          44,       12815,        2780,        2168,        3062,         457,        4594,        1472,           0,        3591,        3331,        2030,        5658,         651,       22758,         494,        1907,       19052,         528,        2166,        3142,        2656,         171,       10737,         327
T40,     1174230,           0,     1245645,      793880,    16817244,     1466285,      474609,      461723,           0,     2947681,      872734,      446148,     4538545,     2183972,     1343571,      880740,     1693339,      803592,      580748,     2931020,     5343387,     3787197,     2974554,      479602,     1829224,      282960,      603112,           0,       36949,     3391026,      369455,    14482059,     3534474,      114273,     4217200,     1218279,     1983705,     3274656,      429247,     1386648,           0,       97033,           0,      714915,      257517,     3236011,           0,      576340,     3003381,           0
T41,      168253,      253649,      192325,      122240,     4440479,      114514,      515879,      122457,      582149,      416558,      116380,       59712,      940759,      310394,      201929,      212950,      319351,      326659,       76053,      255488,      719569,     1593109,      458271,      139823,      224759,       70784,       81948,           0,      122205,     1030620,       48989,     2030332,      499958,       50911,      630183,      137582,      149074,     1011966,       45966,      151433,       38578,      345542,           0,       82463,       27387,      285106,           0,      191214,      440918,           0
T50,       18265,        3266,       29001,        8550,      495270,       15306,      266868,       19403,      294531,       41262,       11860,        2364,      111476,       81723,       68977,       51185,       68727,       42179,       11713,       73447,      249516,      119581,       26665,        7754,       53286,        9340,        4531,       13477,       22354,      212826,        6604,      709923,       84466,        1778,       60039,       39450,       17842,      497565,       18422,       36058,       15914,       44056,      127226,        4811,        3452,       46883,       48946,        7563,       75657,        2299
T51,       11145,           0,           0,        6110,           0,           0,       48986,       31448,      563280,       15150,        5640,           0,       22519,           0,        3561,           0,        2886,           0,        7366,       56855,       34589,           0,       22730,           0,           0,           0,        2638,           0,       31835,       44702,           0,      455686,           0,           0,           0,        4256,       15063,      165575,        3425,       11592,          91,       46195,           0,           0,       10258,       70986,      208677,        3631,       18769,           0
T53,       71731,     1284746,           0,       16744,       35649,       10460,           0,           0,       71938,           0,           0,         652,           0,         803,           0,       99619,      212596,      578430,           0,           0,           0,       48895,        2212,       51182,          42,       82913,        3201,       23951,         127,           0,      256431,           0,        1648,      108015,        9461,      415528,       63079,           0,           0,           0,        8070,        1447,     1355104,       39851,           0,        1461,       70050,      173001,        1334,      266540
T99,           0,         165,           0,         705,           0,       11580,           0,        1474,           0,       15568,           0,        1696,           0,           0,           0,           0,           0,           0,           0,       23270,           0,       17314,           0,           0,        1605,       14332,           0,           0,           0,           0,           0,           0,           0,           0,           0,       13542,           0,           0,          49,           0,           0,       22271,           0,           0,        8623,       26794,           0,           0,        9037,           0
U01,           0,           0,           0,           0,       14026,           0,           0,           0,         568,           0,        4513,           0,           0,           0,           0,       11932,           0,           0,           0,           0,           0,        5669,           0,           0,           0,           0,           0,        6226,           0,       20039,           0,       15454,        4100,           0,        6733,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       13460,           0
U11,        5277,        4596,        9689,           0,       29151,        2142,        2243,       23639,        1172,           0,        5240,        6167,           5,        5042,         233,         283,        2779,        1130,         462,        2435,           0,        4225,        3812,         399,        1987,         293,        1196,        1169,           0,         527,        2285,        4110,         508,        2116,         832,         459,        4534,        1834,         727,         588,        1131,           0,         726,        1230,           3,         340,        2212,          57,        2523,        2560
U20,      478932,     1660772,      204212,      192585,     2576927,      342749,      573429,      246506,      986395,      241918,      298275,      152388,     1158879,      486450,      209001,      140702,      438126,      661021,      198468,      445018,      956279,      818629,      530953,      114492,      416492,      217717,      208812,      130106,      227715,     1221562,      585827,     2601997,      329656,      120702,      677923,      383592,      656319,      780993,      302567,      296890,      196012,      255353,     1737551,      205843,      113606,      575256,      359504,      165901,      519242,      364038
U30,       15233,        6241,       27661,        2173,      293240,       19930,       61269,        6042,       49116,         781,       20671,        5390,       38552,        8933,       29848,       15910,       42869,           0,       31208,       85861,       36182,        3613,       23174,       14574,        2041,        3217,         720,        8703,       20528,       93131,       11824,      118553,           0,        1943,       30025,        4952,       37462,       73687,        6730,       27155,        1990,       27565,       62511,       16957,        7497,       47093,       49889,        1844,       20412,        1519
U40,        4672,       37666,       16541,           2,       13220,       15611,           0,        1014,       13250,        5679,       15252,        4211,         570,          93,         502,        2697,        2814,       34898,        1599,         490,        1463,        1594,        2184,        6352,           0,       14286,       17942,        9872,         767,           0,      136423,       19688,       10086,        3251,           0,       14102,        9588,       26616,        4948,        1952,        1623,          53,       53050,        5768,         724,        1054,       25646,         525,         142,       13263
U41,        6953,     1126462,       16651,         536,      170082,       73535,        8976,           0,           0,           0,           0,           0,           0,         150,          50,        1447,           0,      242638,           2,           0,           0,       42530,        3290,         224,           0,        5662,         987,           0,           0,           0,      119737,           0,           0,       16861,           0,       17136,           0,         204,           0,           0,         831,           0,      232640,        6086,           0,           0,           0,           0,        1700,       32435
U50,      117156,        7258,       75545,       25399,      343173,       80963,       50816,       17269,      185170,       93994,        9813,       18913,      216679,      112976,       64746,       22985,       37593,       39077,       18546,       49819,       50890,      228439,      141273,       34183,       51018,       13966,       40892,       18659,       11286,       86213,       26162,      237872,      136025,       16422,      160200,       32432,       65752,       79434,        5876,       60885,        4841,       73188,      299921,       27371,       22715,      151951,      114725,       22505,      121206,        9899
U95,           0,           0,      106586,           0,      947872,       78321,      222547,       27876,      982390,           0,           0,       25648,      636436,      179689,       56281,       33749,       74689,           0,       44657,      363722,      528012,      474906,      123759,           0,       88347,       10925,           0,           0,       43552,      567646,           0,      999602,           0,           0,      726349,           0,       59449,      644027,       27593,           0,       33384,           0,           0,           0,       18767,      328069,      134521,       35243,      149177,           0
U99,       17341,       24073,       54590,       54160,      290460,       15999,       62830,       29439,       71878,       42750,       12249,       18288,      159417,      115003,       89928,       21626,       34383,      284812,       68885,      121828,      411358,      479874,       59627,       33277,      117635,       43482,        8848,       13428,        6923,      122890,        5197,      729233,      159650,        5883,       81697,       32761,       21381,      230412,        7355,       37019,        3726,       65781,      543329,       19668,       40358,      196302,       52136,      126516,      112410,       17697
V34,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
V98,      678910,      365307,      800570,      338986,     3274074,      622698,     1321359,      308538,     1807440,     1488340,      971210,      269563,     2047368,      940820,      496706,      499100,      870438,      861540,      221213,     1348939,     1393681,     1086024,      809563,      453375,      632646,      312625,      352889,      272119,      123699,     1725523,      378458,     5213995,     1119880,      167208,     1918688,      637464,      730252,     1788994,      333962,      692390,      171364,     1044358,     2603965,      316883,      109864,     1221245,     1487966,      324779,      680881,      264153
W01,     2421765,     4586255,      491448,     1482131,    18470973,     2368779,     6921926,     2336923,     5151079,     1160668,     1282909,      951510,    12004505,     2858508,     1226719,       76885,     2841366,     6142196,     2063930,     3795882,    10579907,     8032680,     2285024,      834871,     4777181,     1301627,     1227765,      777379,     3440351,    10462674,     1434096,    28189895,     2599122,      913097,     6652156,     1813843,     4418834,     4949870,     3079619,     1512172,     1501153,     1795842,     3561335,     1583854,     1033350,     5391523,     2468159,     1579517,     4069862,      856301
W31,      508733,      112543,      277313,        2807,     2912894,      307503,      669679,       20697,     1307565,      821251,      524700,        4530,      255002,      171771,       47345,       19284,      502148,       76533,      181483,      212447,      273864,       12501,      126210,      110353,       72311,       17758,       13376,      390688,       75823,     2362151,       73173,     2461393,      153504,        3369,      681362,      332415,       60120,      977476,      377121,      135265,        5404,        1996,     1041759,       85260,       87435,      320286,       61548,      353696,      105765,       22798
W61,     1259948,    14204209,     1250072,      999106,     8605702,     1012751,      801387,      861776,     5694384,     1205804,     2135710,      681094,     3789452,     3677964,      868839,     1072800,     2547436,     1691303,      129208,     1140236,      998441,     2728251,     3635507,     1111114,     1151118,     1107909,     1276091,      633143,      107657,     3480162,     5320553,     3330708,     2171822,      693048,     3581288,     2456343,     2809083,     3711844,      163570,     1482227,      471445,     1052170,    15866016,     1114640,      249494,     2337142,     2901813,      634735,     1450770,     2470430
X01,      135016,       63997,       78472,         793,     1675526,      146492,      122351,         264,       17242,      186580,       27238,       39478,      413768,      118190,       87675,       91609,      187116,      215633,       50532,           0,      145141,      188854,      192470,       97514,      175945,       20236,       43978,        7073,       29156,      465885,      126801,      202720,      301945,       34093,      963618,      152505,      138030,      338000,       42626,       50747,       19485,       23576,      756401,       30479,       10219,       60088,      256023,       61574,        8254,        6617
X02,       82958,       52445,       21158,       34028,      594842,       92018,       34553,       19296,           0,      105042,       37564,       20692,      285951,       37102,       23483,       31999,       72276,      104185,       21124,      114090,      202229,        7859,       77452,       68657,         727,       48043,         899,        1954,       25356,      118716,       26950,      118633,      150627,        9008,      291957,       25358,       68277,      182177,       32326,      212354,       14078,       77011,      270529,        8727,        1386,        2068,      106949,       22861,        3671,        1967
X05,       56153,       81473,       77548,       20574,     1640983,      265361,       22032,         973,     1601312,      148765,       33275,       68964,      277006,      119693,      123707,       27912,       76752,       70255,           0,       20863,        6655,      317557,      283382,      127475,      196489,       54334,       43740,      237329,       14168,      444647,      129357,      529341,      104096,       34280,     1546819,       49959,      261152,      587800,       50094,      187100,       20241,       29193,      245927,      124252,        2466,      448302,      168016,       21282,      500466,       43336
X06,      310584,       93046,       19844,      157286,     1269500,      140282,      434665,       75496,      532334,      613202,       59444,       37004,      509064,      346656,       39888,       71274,      331804,      487875,      168770,      611353,      617660,      638662,       98748,      252092,      191661,       21965,       11181,       68324,       29151,      897332,       66312,       11280,      532237,        8866,      532772,      266050,      129214,      987414,       38118,      145377,       13409,      256168,      997354,       37807,       32681,      248275,      461494,      132216,      208604,       32546
X08,      977959,      322978,      811422,      307361,     7995193,      620077,      468641,      119177,     1576674,     1187108,      352904,      103549,     1239983,      536173,      422240,      138071,      589337,      698708,       80859,     1098462,      153247,     1413064,     1018123,      331948,      740252,      160028,       76200,      290407,       68367,     1859428,      213674,     5312747,     1426913,       66075,     3998685,      420867,      662521,     1738988,      173834,      747736,      117716,      752983,     2914827,      223799,       52393,     1125298,     1026133,       97506,     1304144,      107050
X09,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
X11,      428725,      218080,      364429,      163893,     4177412,      434192,      542554,       80328,      809999,      540280,      225378,      111548,     1229169,      381542,      191224,      208078,      428597,      725692,      183335,      594485,      616180,     1264966,      529895,      243511,      340824,      122278,       30026,      144200,       59650,     1273483,      225092,     2816781,      707530,       34619,     2618584,      497484,      409744,     1547203,      194309,      395629,       48983,      309662,     1404249,      155072,       34994,      439201,      642933,      218752,      691576,       59529
X12,       29264,       15475,       38393,       10958,      240390,       36937,       14374,        1740,        3146,       38899,       49471,           0,       69971,       26801,       21760,       24568,       18673,       69893,       10439,      150626,      123220,        7345,       33341,       35997,       36981,       14505,        5949,       13686,       12638,       53049,       32759,       98817,       72702,        8296,      126154,       22016,       38776,       23331,        5125,       41613,           0,       19385,      248806,       19070,         719,       33521,       89319,       16628,       32501,        9871
X14,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
X21,     1127014,       46645,      834520,      717549,     4836037,      288734,      499461,      138525,     1793780,      697310,      263880,       65980,     1076859,      169737,       77130,      125921,     1612966,      825332,       79757,         220,       80562,     4079780,      169140,      789042,      709594,       59933,       68148,       57852,      116068,       61688,      222994,     1407310,     4850777,        9628,     1265135,      353667,      585691,      618406,      631360,      543295,      218029,      675545,      434610,      229525,       33671,     1362263,     2022202,      156224,       98784,        5380
X30,      158556,     1200378,     4296535,     1122553,    17404633,      791800,      718075,      249493,     5316729,     6634475,      737877,      622432,     1854054,     3683991,       14199,      760951,     1627232,     3061622,      217846,           0,       48879,     3431031,      224950,     2220723,     1846337,       67728,      312792,     1309712,      156887,     1341661,     1428052,    14900194,     5029594,         412,    26566196,     1740357,      859650,     8325997,      892261,     8265948,      349260,     2541353,    12270192,     1063382,       82144,     1431053,     2745019,      715549,     3358666,      203890
X40,     4982714,      948467,      395004,      899279,    18365279,     2743691,     1782173,      439302,     3337378,     1015590,      466768,           0,     5157735,     2280462,     2286910,      724167,     1544670,     1902679,      162611,           0,     1052559,     3120351,      190844,      651799,     4284898,     1142444,      147457,      430793,      160956,    12241993,     1569993,    13663204,     4784327,      255583,     4791672,      825848,     1324230,     5268057,       15387,     2400186,      198996,     2533592,     7166114,      495248,      153627,     2487794,     1099923,      188267,     6519763,      885662
X41,      904998,     1659491,     3483700,     1438216,    34448806,     3341371,     2211831,      580496,     9749249,     5706315,     1041751,      702550,     8144768,           0,      720351,     1083226,     2514653,     2022535,      879451,           0,      821211,     6694813,      380354,     1514280,     2488342,      259280,      404969,      678026,      598103,     9255744,     1046769,    26078855,     2453480,      189657,    11281151,     1901824,     5183522,    10879473,      920047,           0,      596278,     2257832,     9021429,     1515951,      371576,     2723017,      877850,           0,     9285722,      390982
X42,     2671004,      163536,      239771,       75514,     5825266,      443159,       60928,           0,           0,       14803,      414156,      147910,       30394,         636,           0,      419000,      322528,       10303,          34,           0,           0,      865475,           0,           0,       22215,      119573,           0,           0,       88994,           0,        2945,     4467551,           0,           0,     1299577,           0,      610748,      820675,           0,           0,           0,        1394,     2116849,       16539,        3376,       19993,      907112,       42434,      256839,           0
X44,           0,      286759,      497581,       17526,     7645134,     1814937,     2355943,       97019,      658104,       16932,      790590,        2046,      825332,       25020,     1113304,      612067,           0,      382860,      533388,      641171,     1681516,       42550,     9423205,        6800,       80892,       69272,       78290,      836232,      168429,     1124980,           0,     1571429,        7601,      409862,     1963858,           0,      774129,     1926231,           0,           0,       20399,      593430,      838320,           0,       36410,     3493160,     5208537,      109572,       19757,      101978
X47,           0,           0,           0,        1370,      642798,      225618,      172113,      251533,           0,       21704,      271503,           0,     1378621,           0,     1088300,       72753,           0,       95197,       12845,    10795901,     3254793,      616928,     2380779,           0,       51727,       94051,           0,      364306,       10365,       45951,           0,     2018532,      314246,       18465,     1017978,      142332,     1263578,     1114082,           0,           0,       25753,           0,       31712,      139360,       47993,       74259,     1009526,           0,           0,           0
Y01,      132330,      119953,      101128,      125421,     1698092,      168566,      197267,       46823,      283839,      274346,       80479,       58995,      934221,      178065,      147127,      169152,      175853,      225498,       68581,      138783,      598177,     1062479,      327096,       59459,      191527,       38590,       39243,       87053,       22157,      925949,       63276,      961124,      215044,       24141,      727163,      131481,      345774,     1077215,      100088,      163962,        8875,      208634,      638103,       83064,       40576,      127794,      525502,       92962,      406423,       37490
Y02,       54879,       19395,       43399,       11427,      481947,       24599,        9404,       19544,      176837,       92083,       33758,       20822,      122683,       73533,       47853,       45303,       35321,       36679,       15929,       46783,       43798,       27810,       32220,       41661,       27330,        7516,       12066,       29772,       16023,      123607,       17139,      211474,      129842,        4272,       73332,       33528,       81133,       35022,       23147,       41245,        4078,       58319,      107597,       23847,       17810,       62771,      133870,       10067,       73742,        6470
Y04,        5177,        7163,        5188,        2773,       34242,        4953,      147807,         605,       10101,        8773,        2273,        2400,       12153,        1580,        1936,        3545,        6581,        3256,       10315,        6214,       47636,     -127578,        3467,        2780,        5469,        2288,         505,        1189,         603,        6537,        3193,       26565,        6247,        1225,        9842,        3677,        5250,       19869,       12907,        2661,         631,        9841,       20283,        2667,        1774,        6296,       11621,        4496,        4315,         879
Y05,      205132,       91018,      165384,      155360,     2921065,      154034,      525320,       60961,      636780,      418074,       58476,       69280,     1134495,      170322,      163731,      169214,      246612,      132993,      155584,      392186,     1180898,     1405840,      372761,      115698,      362480,       44723,       37691,      129744,       73328,     1231616,       55825,     2183077,      442408,       24738,      911778,      114252,      314397,     1483650,      209748,      191461,        9492,      302862,      826395,       62261,       63095,      276171,      510208,      128540,      372624,       20613
Y06,        5177,       10559,        5188,        2774,       34242,        4922,        3429,         605,       10101,        8773,        2260,        2400,       12153,        1581,        1936,        3545,        6581,        3256,       18270,        6214,       79691,      107147,        3467,        2771,        5469,        2288,         505,        1189,         547,        6537,        3193,       26579,        6248,        1225,        9842,        3677,       16047,       20263,       21910,        2662,         631,        9841,       20286,        2667,        2988,        6296,       11621,        7503,        4200,         879
Y07,      598546,      226300,      475643,      116790,     4875172,      305660,         600,      224742,     1874256,      990643,      418480,      235319,     1307651,      871447,      557683,      550333,      367496,      519605,      105721,      351699,      100696,      416500,      309293,      363940,      196905,       81294,      142729,      313218,      146974,     2706804,      209724,     1936922,     1373277,       47000,      739442,      412356,      971100,     1424312,      181867,      471897,       47352,      628755,     1106525,      298427,      192284,      619245,     1579403,      130050,     1123635,       87651
Y08,       -2865,       -1553,       -1671,       -1923,      -62582,       -3778,       -7633,        -872,      -28601,       -1468,         375,        -463,        -971,         270,       -2684,          67,         534,       -2612,        2859,       -8188,      -17180,      -18225,         566,         322,       -6146,        -430,         604,         177,         181,       -9534,       -1335,      -44474,         745,        -311,      -21866,        -159,       -3912,       -7129,       -1599,        -483,        -292,       -5160,       -3963,         -62,         371,        2344,       19412,       -1820,       -1709,        -158
Y10,           0,           0,           0,           0,       16343,           0,           0,           0,       63551,           0,           0,        2170,           0,           0,           0,        3930,        1125,       13060,           0,       29626,           0,        3343,        2092,           0,       31500,       12765,           0,        9723,       25774,           0,        3163,       11235,           0,          64,       52243,       16385,           0,        4696,           0,       21571,        1412,           0,           0,        5174,           0,           0,           0,           0,           0,       56351
Y11,          13,        1111,      237088,           0,     1524043,      266371,       50061,        5323,           0,           0,           0,       69111,        5479,        1546,         307,       17255,      102158,           0,         231,      138277,       18785,      226074,      122776,           0,        3500,      102458,           0,      307913,           0,       78217,           0,     1195559,        3179,       57159,     1726511,      100213,      106529,      218229,        6482,       43294,         508,           0,         136,       97989,           2,           0,      795496,      281978,        3280,        1649
Y12,          50,           0,       81563,         746,      427375,       44573,        1033,           0,        3500,           0,           0,       11640,          66,           0,          18,           0,           0,           0,          67,       49778,          16,       52651,        1949,           0,          63,        4847,          99,       64934,       15255,        5171,           0,      305426,        1104,       12315,      632195,       31512,       16986,       91658,        1014,        2175,           0,           0,         327,       19029,           0,           0,      365362,       80609,         300,        1242
Y13,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        2242,           0,           0,           0,         185,           0,        1461,           0,           0,           0,           0,           0,           0,           0,         291,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        8459,           0,           0,        2091
Y14,         344,        2133,      158365,        1121,     1086833,      256973,       53497,        4969,       55075,           0,           0,       34485,        5404,         625,         614,       21857,       94867,       12958,          24,      168266,       16203,      127857,      102808,           0,       30310,      116297,         229,      525446,       82953,       80714,        6236,      772565,        2159,       70771,     1513168,      113283,       76115,      137100,        3031,       56843,        1220,           0,         356,      126842,           0,           0,     1032444,      324580,        1550,       58176
Y15,          64,           0,       39663,          47,      297134,       32472,           0,           0,           0,           0,           0,        8743,           0,           0,           0,        3094,        4535,         332,           1,       19105,         130,       50445,       16710,           0,        7009,        9313,           5,           0,         970,       10051,          96,      174602,           0,        4627,      153577,       16958,       43187,       25375,         796,        3571,         200,           0,           0,       15795,           0,           0,      134472,       17245,           0,        2742
Y21,           0,        1562,      850968,       12751,     4769569,      510760,       10410,         730,       63932,           0,           0,      150595,         593,         619,         429,       14391,        3881,        7490,         357,      518241,        5830,      610621,        8200,           0,        4690,       44963,        1141,      689086,      152966,       69684,           0,     3499306,       16812,      154746,     7636854,      446750,      148993,      930216,         606,       53441,         818,           0,        3960,      237625,          20,           0,     4294987,      991044,        5528,       13817
Y50,           0,           0,           0,           0,           0,       15794,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        4677,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
Y51,           0,           0,           0,           0,     1819772,        3086,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,      171922,           0,           0,           0,           0,           0,           0,           0,           0,           0,      277484,           0,           0,           0,           0,           0,           0,           0,           0,       60518,           0,           0,           0,           0,           0,           0,           0,           0,           0,        3045,           0
Y52,           0,           0,           0,           0,       54424,        1320,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       18972,           0,           0,           0,           0,           0,           0,           0,           0,           0,       13278,           0,           0,           0,           0,           0,           0,           0,           0,        2154,           0,           0,           0,           0,           0,           0,           0,           0,           0,        4496,           0
Y53,           0,           0,           0,           0,     2078912,       13523,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,      112832,           0,           0,           0,           0,           0,           0,           0,           0,           0,      286309,           0,           0,           0,           0,           0,           0,           0,           0,       67188,           0,           0,           0,           0,           0,           0,           0,           0,           0,        5597,           0
Y54,           0,           0,           0,           0,      100516,         725,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       37244,           0,           0,           0,           0,           0,           0,           0,           0,           0,       29088,           0,           0,           0,           0,           0,           0,           0,           0,        4543,           0,           0,           0,           0,           0,           0,           0,           0,           0,         325,           0
Y55,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
Y61,           0,           0,           0,           0,      531582,         617,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,      306597,           0,           0,           0,           0,           0,           0,           0,           0,           0,      152578,           0,           0,           0,           0,           0,           0,           0,           0,       15958,           0,           0,           0,           0,           0,           0,           0,           0,           0,       50618,           0
Z00,     1947162,      885466,     1204997,      997278,    11457630,     1449668,     2082785,      569423,     5099656,     2421367,     1385987,      364804,     3490889,     2052795,     1390328,     1153534,     1755572,     2190067,      562359,     2369448,     2704803,     4333048,     2460769,     1012197,     1911256,      387709,      801288,      548196,      447390,     4098293,      822362,     9849045,     2665523,      418618,     4317504,     1495726,     1463690,     3588010,      586657,     2012432,      291688,     1868810,     4822609,      884471,      348751,     3079501,     2568852,      736847,     1944613,      319941
Z18,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
Z41,      149658,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       34484,           0,           0,       81526,           0,           0,           0,       72854,           0,           0,      442574,           0,      116053,           0,       34587,           0,           0,      195577,           0,           0,           0,           0,           0,      353682,           0,      161708,      642160,           0,           0,           0,           0,           0,       67975,       28236,      256931,      246966,       70771,           0,       29384
Z42,      106218,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       24642,           0,           0,       53939,           0,           0,           0,       42597,           0,           0,      347929,           0,       89530,           0,       20594,           0,           0,      137354,           0,           0,           0,           0,           0,      216645,           0,       83075,      425256,           0,           0,           0,           0,           0,       41832,       22992,      167704,      171850,       37438,           0,       24431
Z43,       25942,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        6867,           0,           0,        3093,           0,           0,           0,        9891,           0,           0,       29711,           0,        1857,           0,        5802,           0,           0,       19567,           0,           0,           0,           0,           0,       53803,           0,       19245,      178600,           0,           0,           0,           0,           0,        8852,        4641,       55221,       50044,       11047,           0,         939
Z44,         884,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,         182,           0,           0,         449,           0,           0,           0,         118,           0,           0,           0,           0,          22,           0,          50,           0,           0,        3049,           0,           0,           0,           0,           0,         594,           0,         323,        3911,           0,           0,           0,           0,           0,           0,         332,         570,         198,          78,           0,           0
Z45,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
Z46,      121706,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       12268,           0,           0,       49542,           0,           0,           0,       34820,           0,           0,      196926,           0,       53404,           0,       20488,           0,           0,       54468,           0,           0,           0,           0,           0,       96758,           0,       60890,      206031,           0,           0,           0,           0,           0,       30298,        9721,      142263,      151450,       29997,           0,        5213
Z47,        7315,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,         166,           0,           0,        8954,           0,        1473,           0,         538,           0,           0,         962,           0,           0,           0,           0,           0,        7325,           0,        5037,       18911,           0,           0,           0,           0,           0,           0,         818,        7688,        6878,         344,           0,           0
Z48,      111920,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        4947,           0,           0,        5660,           0,           0,           0,       14515,           0,           0,      135787,           0,       20832,           0,       15143,           0,           0,       12794,           0,           0,           0,           0,           0,       20428,           0,       12655,      168031,           0,           0,           0,           0,           0,       13482,        9895,      108569,      126144,        1813,           0,        1195
Z51,           0,           0,      216622,           0,     2011781,      174350,      503844,       62151,     2043436,           0,           0,       51486,     1414348,      412257,      142663,       66549,      200267,           0,       96325,      771734,     1474155,     1040827,      303188,           0,      203630,       22584,           0,           0,       98585,     1174398,           0,     1949418,           0,           0,     1568969,           0,      138899,     1423284,       58589,           0,       43654,           0,           0,           0,       44107,      749076,      258768,       75822,      371201,           0
Z52,           0,           0,      110036,           0,     1063909,       96029,      281297,       34275,     1061046,           0,           0,       25838,      777912,      232568,       86382,       32800,      125578,           0,       51668,      408012,      946143,      565921,      179429,           0,      115283,       11659,           0,           0,       55033,      606752,           0,      949816,           0,           0,      842620,           0,       79450,      779257,       30996,           0,       10270,           0,           0,           0,       25340,      421007,      124247,       40579,      222024,           0
Z53,           0,           0,       20618,           0,      173251,       22030,       24769,        2617,      128212,           0,           0,        9470,       52529,       28514,       18018,       11606,       20296,           0,       10257,       28480,       57569,       45718,       57808,           0,       22938,        6466,           0,           0,        9663,       41303,           0,       55044,           0,           0,       90776,           0,       23174,       42369,        2740,           0,        3998,           0,           0,           0,        6154,       69188,       35827,       10467,       28164,           0
Z54,           0,           0,       85968,           0,      774621,       56291,      197778,       25259,      854178,           0,           0,       16178,      583907,      151175,       38263,       22143,       54393,           0,       34400,      335242,      470443,      429188,       65951,           0,       65409,        4459,           0,           0,       33889,      526343,           0,      944558,           0,           0,      635573,           0,       36275,      601658,       24853,           0,       29386,           0,           0,           0,       12613,      258881,       98694,       24776,      121013,           0
Z61,           0,           0,           0,           0,           0,           0,           0,        8783,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,      231700,           0,      331469,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
19H,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
19X,     3977926,     5542931,     2192956,     1796393,    28616306,     2421555,    10871565,     2966156,     9942816,     3117366,     3351137,      977171,    15262239,     4126220,     1585530,      305629,     5295370,    12626524,     2125121,     6643753,    18244158,     9157440,     3764071,     1342623,     5206936,     1385879,     1358722,     1586164,     3338970,    18906414,     1823199,    46242788,     3071211,      868707,    11147817,     3714191,     6460374,    10558980,     3543238,     3905317,     1787199,     2508434,     7313543,     1779390,     1258920,     6160016,     5685079,     2567168,     6119267,      938236
21A,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        6550,           0,       17500,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
21B,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
21C,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
21D,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        8100,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
21F,           0,           0,           0,           0,     1051000,           0,       76488,        6893,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       57000,           0,           0,       17000,       10000,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
21G,           0,           0,           0,           0,      558000,           0,           0,        4937,           0,           0,           0,           0,        3000,           0,           0,           0,           0,           0,           0,       17000,           0,        4400,           0,           0,           0,           0,           0,           0,       12701,           0,           0,           0,           0,           0,      230000,           0,       25419,           0,           0,       22775,           0,       52469,       29166,           0,           0,       57150,        2000,           0,           0,           0
21X,        5265,       80000,           0,       10000,     1347000,           0,     1534786,       73171,       46560,      612345,      400000,           0,      627000,           0,           0,           0,           0,      198910,      136125,      222794,     2392466,         500,      183000,       90310,           0,        3345,           0,       99190,      106634,      365063,           0,     1781733,       75000,           0,      104285,           0,       47200,      641255,       81371,       85000,           0,      121680,      359251,       20000,      149310,           0,      591785,           0,      433291,           0
24A,           0,           0,           0,           0,           0,       11845,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
24B,           0,         844,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,      353415,           0,           0,           0,           0,           0,           0,           0,       21174,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
24C,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
24D,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,      533045,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
24F,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,      252639,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       34969,           0,           0,       34770,           0,           0,           0,           0,      158190,           0,      181760,           0,           0
24G,       61680,        1985,       84030,       59489,           0,      122086,           0,        3175,      418612,           0,           0,        6929,       83907,      408851,       22661,        5001,      186460,         245,           0,       85854,           0,       30149,       68841,        4337,      175489,           0,       17100,         800,           0,       54335,        6230,     2479604,       32609,         678,       50609,           0,        6620,      149340,        7836,       44692,           0,        7735,      783096,        2639,           0,           0,       39072,           0,           0,           0
24T,      273208,      486618,       32255,      194200,     1833188,      211960,      821925,      164580,      155125,       95200,      119200,      169448,     1407060,      455710,      130573,           0,      299106,      172706,      224630,      414848,     1323178,     1014158,      197540,      169935,      577243,      326221,      223246,      123555,      871365,      957910,       79455,     1959061,      617044,      135198,      372690,      188323,      144515,      682383,      538460,      143505,       76225,      225975,       83569,      228046,      118455,      426247,      556658,      107786,      364402,      125000
24X,        3855,        9219,      254985,           0,           0,       24835,           0,      130000,     1021895,      200000,      484490,         240,        6755,      185670,           0,       53818,      286791,       47000,      141660,      416917,      137935,      288198,           0,         225,           0,        9625,        2317,           0,      155750,      250975,           0,     2138002,           0,       10035,      140280,           0,       79865,           0,      290838,           0,        5700,           0,      354272,           0,       25385,      102915,           0,      202200,           0,       14735
31A,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        2715,           0,           0,           0,           0,           0,           0,        4765,           0,        8455,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
31B,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
31C,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
31D,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       37040,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
31F,           0,           0,           0,           0,      126145,           0,       22145,        8725,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,         250,       95845,           0,           0,        2828,        5690,           0,           0,           0,           0,           0,           0,           0,           0,        7000,           0,           0,           0,           0,           0,         406,        2500,           0,           0,           0,           0,           0,           0,        3135,        8000,           0,           0
31G,       37950,           0,           0,           0,       41120,           0,        7360,        6988,           0,           0,           0,           0,       23493,           0,           0,           0,           0,        2385,        1330,        6385,        4901,        4700,        5090,        1232,           0,           0,           0,        2658,        6361,        7700,       13687,        5800,           0,           0,      125130,           0,       15103,           0,        1790,       22280,           0,       42189,       41440,           0,           0,       18029,       24050,           0,           0,           0
31X,       57220,      133501,           0,        9745,      253935,        2396,      222949,       45834,      108495,      274980,      151254,           0,      299715,           0,           0,           0,       12955,      296846,       45400,      146128,      447899,       33600,      122388,       34199,       21475,       11405,           0,       32585,       48833,      182075,           0,      433035,       66640,           0,      174170,       13990,      294833,      470535,       33545,       62250,           0,       72023,      100005,       40230,       25360,       10860,      133165,       41200,      185505,          25
34A,           0,           0,           0,           0,           0,        5995,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        2065,           0,        1565,           0,           0,           0,           0,           0,         394,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
34B,           0,      140294,        6085,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,      412075,           0,           0,           0,       18790,           0,           0,           0,       34360,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
34C,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,         490,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
34D,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,      105850,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
34F,           0,           0,           0,           0,           0,           0,           0,           0,           0,        8815,           0,           0,           0,           0,           0,           0,       64741,           0,         430,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       36669,           0,           0,       35405,           0,           0,           0,           0,       43724,           0,        2953,           0,           0
34G,       43131,        1297,       17620,       26127,       27766,       37524,         845,        3334,      188222,           0,         733,        5037,       14165,      226397,       20413,        4262,       65496,        5867,        1728,        7404,           0,       59202,       27655,         229,      107885,        4892,       23290,        1236,         126,       31770,        8589,     2080208,       30268,        2257,       35429,       18000,        3054,       53771,         572,       20996,         805,       13975,      725192,        7346,        2808,        8515,       38187,       10793,        2241,        1896
34T,      120660,      543709,       74801,      249923,      886245,       79213,      610319,       74369,      168494,       59964,       27656,       22818,      781530,      108117,      187886,        7690,       63020,      238741,       47001,      116786,      640850,      282217,      123968,      187898,      106051,      103428,       92205,       53985,      200682,     1004034,       95491,      748575,      201567,       37420,      435922,      135702,       80429,      242656,      237501,       45353,      105273,       63580,      159970,       83884,       50734,      269013,      155583,       74242,       88238,      145739
34X,       14411,       14829,       59976,        7881,       87625,        3350,       10294,        6217,       19540,        8961,       18378,        3188,        7800,      242756,           0,       15532,      157202,      605347,       52440,      108031,       45698,       80293,        8000,         585,       10600,       11405,       10340,          45,      102674,      294681,       49355,     1065493,         670,       14494,       41782,       10738,        9841,       16745,       37549,         285,        8846,        1882,      191955,        6575,       15796,       51705,        1200,      200022,       16400,        8684
41A,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,      131525,           0,           0,           0,           0,           0,           0,      151380,           0,      177018,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
41B,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
41C,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
41D,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,      551070,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
41F,           0,           0,           0,           0,     2819770,           0,      196157,       60926,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,      530120,           0,           0,       50608,       54400,           0,           0,           0,           0,           0,           0,           0,           0,       32000,           0,           0,           0,           0,           0,        1075,           0,           0,           0,           0,           0,           0,           0,       31430,       82000,           0,           0
41G,      458498,           0,           0,           0,     1018900,           0,       32850,       72464,           0,           0,           0,           0,      162933,           0,           0,           0,           0,       37159,       13490,       67024,      262989,        9400,        8475,        6635,           0,           0,           0,       49270,       63045,       44400,      105709,       67880,           0,           0,     1750740,           0,      275644,           0,        2595,       28560,           0,      157277,      351576,           0,           0,      351618,      313402,           0,           0,           0
41X,      607055,      606165,           0,       67085,     4101485,       28925,     5506009,      362034,     1291595,     2361120,     2274846,           0,     5225367,           0,           0,           0,       57705,     3431832,      381930,     1446096,     9343013,      657600,     1514973,      609486,      780115,       70050,           0,      548560,      577094,     2919198,           0,     5840754,      545545,           0,     1003300,       20945,     5128045,     4742428,      430409,      800278,           0,      531385,     3067927,      239295,      392300,      124818,     3638464,      338000,     2553545,         660
44A,           0,           0,           0,           0,           0,       12650,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,      190104,           0,      127733,           0,           0,           0,           0,           0,        6054,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
44B,           0,      378521,       46488,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,     3635940,           0,           0,           0,     1391305,           0,           0,           0,     1937721,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
44C,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        2207,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
44D,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,     3795245,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
44F,           0,           0,           0,           0,           0,           0,           0,           0,           0,       33910,           0,           0,           0,           0,           0,           0,      726388,           0,        1480,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,      254800,           0,           0,       49065,           0,           0,           0,           0,      697842,           0,      274902,           0,           0
44G,      569842,       21388,      666010,      264695,     1504215,      608148,       13310,       45414,     4787562,           0,        5255,       52079,      392965,     1435011,      478101,       43305,     1141934,       74503,       17348,      328601,           0,     1288628,      519675,       44948,      441550,       75878,      133468,       51144,        1586,     1018961,      135526,     6812572,      358377,       49904,      582877,       91207,       34825,      493776,      249389,      209092,       12308,      336047,     1847626,       72814,       44280,      286225,      181231,      204256,        5071,       33917
44T,     2269563,     4008072,      408064,     1392831,    18125763,     1923721,     6151116,     2222810,     2411226,     1035092,      611684,      933144,    11706387,     1823880,     1133134,       17790,     1997416,     4170135,     1315654,     3522966,    10386208,     6138064,     1842982,      694696,     4350827,     1242879,     1207614,      710887,     2925054,     9859724,     1243317,    18826338,     2532477,      761488,     5888799,     1347053,      720747,     4682170,     2737837,     1067995,     1446711,     1646020,     1620388,     1550018,      851853,     3914371,     2339407,     1266924,     4055552,      851184
44X,      308736,      273826,     1419123,       38402,     4385975,       85964,      531410,      439620,     2583917,      221524,     1265021,      137200,      745871,     1358847,           0,      275869,     2101043,     2915334,      758755,     1633041,      831939,     2014285,        4000,        2760,      146440,      205733,      254468,        2535,      559965,     4874881,      257035,    11077961,       21321,      149055,     2049989,      870358,      201317,     1073415,      721517,       25450,      245481,       51915,      798878,       38491,      194923,     1124979,       15340,      555622,       10370,       35866
52T,           0,           0,           0,           0,           0,        5995,           0,           0,      194155,           0,           0,           0,       37865,           0,           0,           0,           0,           0,        5270,           0,      184790,      319799,           0,           0,           0,           0,           0,           0,           0,      170732,           0,     1915780,           0,           0,           0,           0,       20430,        4125,           0,           0,       28390,       52325,      713546,           0,           0,           0,       55700,       43790,           0,       80000
53T,           0,           0,           0,           0,           0,        5995,           0,           0,      163300,           0,           0,           0,       37865,           0,           0,           0,           0,           0,        5270,           0,      184790,      319799,           0,           0,           0,           0,           0,           0,           0,      170732,           0,     1898510,           0,           0,           0,           0,       21865,        4125,           0,           0,       34990,       50000,      646359,           0,           0,           0,       53133,       43790,           0,       80000
61V,        1141,        3400,           0,         682,           0,           0,      116100,       11858,        7255,        7000,       44812,           0,        3074,       13818,      289653,           0,           0,      160447,           0,           0,      470546,         499,           0,           0,       42920,        9963,        2334,        1601,           0,        1185,        7129,     1079248,           0,        3452,       60714,           7,      100000,      367421,      201584,       50000,         164,       55164,      550014,       11104,          25,         548,         469,       92940,           0,           0
64V,         148,        3000,           0,        1437,           0,           0,      575300,       12107,        9342,           0,       44822,           0,        4926,        6255,        9021,           0,           0,       99716,       95989,           0,      146116,        1027,           0,           0,       56410,       16918,         188,        4147,           0,       17254,        9944,     1196400,           0,        3320,       91626,         527,       90000,      393760,      250153,      120000,         166,       67293,         109,       10877,        2518,         401,         444,       47940,           0,           0
71W,       51170,      395311,           0,           0,       56846,           0,      757500,        2003,      716729,       42938,       38168,           0,      253788,           0,           0,           0,       53534,      594863,        1573,        8938,      107726,           0,      265475,      132253,       93131,           0,           0,       16726,      134070,        4630,           0,     1898515,       12475,           0,           0,           0,     3738362,       37323,           0,      120878,           0,         553,     1849768,       24252,           0,           0,       45156,        9633,       64859,           0
74W,     2370595,     4190944,      491448,     1482131,    18414127,     2368779,     6164426,     2334920,     4434350,     1117730,     1244741,      951510,    11750717,     2858508,     1226719,       76885,     2787832,     5547333,     2062357,     3786944,    10472181,     8032680,     2019549,      702618,     4684050,     1301627,     1227765,      760653,     3306281,    10458044,     1434096,    26291380,     2586647,      913097,     6652156,     1813843,      680472,     4912547,     3079619,     1391294,     1501153,     1795289,     1711567,     1559602,     1033350,     5391523,     2423003,     1569884,     4005003,      856301