POP,000000004219,000000000606,000000004075,000000002453,000000031431,000000003656,000000003275,000000000706,000000013953,000000007055,000000001179,000000001133,000000011752,000000005752,000000002829,000000002554,000000003827,000000004315,000000001240,000000005006,000000006041,000000009496,000000004567,000000002669,000000005315,000000000856,000000001623,000000001457,000000001137,000000007904,000000001654,000000018169,000000007070,000000000638,000000011102,000000003258,000000003086,000000012052,000000000997,000000003664,000000000721,000000005175,000000018378,000000001908,000000000580,000000006552,000000005343,000000001822,000000005082,000000000476
I99,       71620,       13785,       71317,       38776,      683002,       76581,       91625,       15220,      283297,      132832,       27389,       19279,      263591,      109465,       51564,       50295,       64237,       71252,       23271,      118759,      147148,      194687,       94942,       38869,      102369,       14617,       31754,       31593,       24947,      210622,       26402,      450754,      129790,       10872,      217693,       55047,       58962,      255921,       21204,       61236,       12860,       93894,      345009,       30010,       11193,      139831,      114422,       29392,       99860,        9275
A01,           0,       44805,           0,           0,           0,           0,       19318,           0,           0,         480,      255072,          19,           0,          73,           0,           0,           0,           0,          94,       82374,      202105,         762,         783,           0,           0,          65,         923,           0,          72,           0,         101,       22371,           0,           0,           0,           0,           0,        8643,       12513,         308,           0,           0,           0,         455,           0,           0,           1,           0,           0,         397
A03,           0,       59511,           0,           0,           0,           0,         733,           0,           0,           0,           0,          80,           0,           0,        5320,           0,           0,           0,           0,        3094,           0,           0,           0,           0,           0,        2371,           0,           0,           0,           0,           0,           0,           0,      110154,        1677,           0,           0,           0,        1540,           0,       41294,           0,           0,           0,           0,           0,           0,           0,           0,           0
A09,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       14716,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        1561,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
A10,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        2902,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
A12,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        7284,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           4,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
A16,      188138,       20092,      194030,       83069,      640287,      244856,       90187,       62987,      256807,      216854,       51553,       47315,      344687,      493055,      160971,       96352,      137167,      204734,       52443,      201496,      163930,      488392,      203276,      126517,      155614,       49189,       97797,       35747,       69870,      203344,       74204,      348045,      492078,       75654,      430642,      194158,      129299,      416266,       45347,      175459,       28630,      167915,      473472,      106145,       36622,      447957,      315540,       82084,      185733,       30014
A18,      500897,       68635,      351208,      192316,     2458305,      589838,      265201,      189352,      395554,      436742,       65459,       93853,      781396,      805053,      347108,      255659,      425762,      536820,      115289,      442935,      522307,     1269669,      462426,      197268,      463774,       89434,      138242,       92723,      158119,      545243,      162308,      822108,      456227,      116499,     1423160,      307179,      265731,     1301158,      120398,      396010,       76991,      327028,     1428900,      344147,      106180,      769706,      565715,      195649,      619627,       31905
A21,       33230,         180,        2170,        8827,        4143,        7728,        2570,         975,        5384,       35979,        2861,         639,        1393,        7221,         102,         609,       15287,       12480,           0,        4521,         368,         792,        2027,        3359,        1660,        6874,        2968,        6678,          79,        3856,       20040,       51798,       18198,         601,        6634,        3436,       13231,       59530,        9939,       18485,         157,        4493,        4756,       13278,         132,       23203,        1844,        5245,        4051,         130
A36,      650569,           0,           0,      262092,     1789823,       46257,      219232,       29408,      121897,      210542,      117029,        3678,      237126,      361318,      351778,      193190,      208692,      464162,        6116,      118972,      245307,      923526,      328140,      148703,      224501,        2001,      199074,        4073,        3385,      242307,      243771,     1398649,      294777,       24131,      848323,      191813,      292283,      741546,        6042,      510562,        3141,      316352,      619306,      238030,        1997,      813570,      228172,       33574,      407745,        3357
A44,        1349,        3273,        1397,       15646,       26975,         725,         789,        1107,        2867,       10790,           0,        4441,        3870,         573,        3792,        1311,        5994,         564,         586,       10806,        2886,         703,       19462,        2835,        6724,         685,        2823,       23626,        4580,        1389,        4051,           0,          97,        3431,         822,        4782,        7137,        1592,           0,        3042,         183,        2676,       11843,         494,          93,           0,        7055,           0,       13659,        1506
A45,           0,       40074,           0,           0,      134925,           0,         219,       41218,      317959,       12480,           0,           0,      264160,       71601,           0,       45671,       11004,       30446,       39637,      134383,      160809,       17347,           0,           0,           0,           0,           0,           0,       46959,      541404,           0,      346901,        1427,           0,       99227,       85399,        1343,      289590,        9347,           0,           0,           0,       45404,           0,           0,       43786,       72208,       44289,           0,           0
A50,        2295,        5904,           0,        3878,       35908,        8602,       12175,         260,        8285,           0,       39080,        1144,        9041,        2283,         633,           0,        1627,         922,        2886,       12133,       34373,       16021,        1149,           0,        2867,          35,         500,        2482,        5095,       16230,         969,       11403,         882,        1275,       10628,        5919,        2513,        9736,        2714,        2544,           0,        1683,        4870,         626,         903,        4177,        8339,        3134,         725,         804
A54,        5423,         780,       16575,        5326,      147638,        7871,          37,           3,        7561,       12886,        1612,        3796,        8564,       17668,        7930,       15800,       25082,        7938,        6369,        1831,        2162,       13407,       15448,       11677,        7846,        2829,       11848,         865,        3167,        1788,       14954,        8816,       18917,        4481,       17754,        3500,       13047,        3254,         564,        3173,        4068,       59990,        9539,        3838,         126,        7894,        2507,        4499,       23822,        1089
A56,        3588,        2970,           0,        1552,        4744,        1854,         568,          62,        5731,        4973,          18,       39395,           0,        2356,           0,           0,         641,        1627,        1859,        5012,           0,       13902,        7689,        2168,        1657,        1960,           0,         728,         219,          40,           0,           0,        3032,           0,         803,          95,       57613,       10366,           0,        2094,        1425,        1127,        2584,         629,         364,         388,      105163,         784,        2242,           3
A59,         311,        8162,        1802,        1185,      502970,        4688,         208,        3345,        5494,        8534,        8234,         919,           0,        5744,        2719,         312,         722,       14969,         502,        7048,       18473,        3149,        6583,         778,       13746,        4644,        2695,        1359,          91,       27492,        1247,        1437,        1443,         165,        4368,        1356,        6772,       22214,        1030,        1978,        1132,        1778,        7157,        1788,         520,         160,       15239,        3470,       12748,        1098
A61,       23926,           0,        2784,       12554,       41557,        3082,        3690,        3552,       17824,      140038,       10197,        1037,        4331,       10412,        1559,        2060,       41994,       41875,        2667,       12349,       16788,       16411,       11985,        5775,        1211,        1242,        4752,        1532,       10913,      204814,        1992,       61257,        3821,         974,        7888,       18640,       11003,       15282,        3160,       19341,        3963,       21535,       20813,        4855,        5127,        5264,         211,       18888,        6739,          30
A80,           0,           0,           0,           0,         794,           0,           0,           0,           0,           0,           0,           0,           0,        3417,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,         830,       19053,           0,         865,           0,           0,         787,           0,           0,           0,        6153,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
A81,           0,           0,        1518,           0,           0,           0,      144713,       46400,       51738,        3138,          28,        4362,           0,           2,        7295,           0,         213,           0,        3430,           0,       10167,          59,           0,           0,           0,           0,           0,        4453,           0,       71790,           0,           0,           0,           0,           0,         805,           0,           0,        2572,        6206,           0,           0,           1,        1575,           0,           0,        3884,         386,       10349,           0
A87,       47260,           0,           0,           0,           0,           0,           1,           0,           0,       71651,       54288,           0,           0,        3731,           0,           0,           0,       43880,           0,       41172,       66315,        1849,           0,       13520,           0,           0,           0,           0,         345,       12087,           0,        5026,       25342,           0,           0,           0,           0,           0,         220,       45674,           0,           0,           0,           0,           0,        2054,           0,           0,           0,           0
A89,       69430,       14467,       97739,       36781,      491925,       64086,       52064,       44755,      412609,       88576,       34084,       26255,       49014,      132584,       28407,       49406,       66451,      209180,       19608,      112449,      115308,      105937,      185478,       56982,       57947,       38265,       33612,       46715,       26406,      433397,       33402,      440858,      114906,       16135,      120790,       37927,      123266,       60775,       33932,       74581,       10911,      128656,      353998,       22053,       21288,      163763,       59879,      120678,       62787,       10436
A90,      129965,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       44841,           0,           0,       83861,           0,           0,           0,       71148,           0,           0,      452388,           0,      129343,           0,       37217,           0,           0,      211364,           0,           0,           0,           0,           0,      365920,           0,      174941,      667104,           0,           0,           0,           0,           0,       75500,       27635,      246124,      256307,       45904,           0,       32251
A91,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       65893,           0,           0,           0,           0,           0,           0,       45628,         102,       20463,           0,           0,           0,           0,           0,        3952,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
A92,           0,       28134,       18265,           0,      136116,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       31424,           0,           0,           0,     1392830,           0,           0,           0,      227371,           0,           0,           0,      589483,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
A93,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        6939,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
A94,           0,           0,           0,           0,           0,           0,       19772,        4847,        5441,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       89920,           0,           0,           0,           0,           0,           0,           0,           0,           0,      387556,           0,      702514,           0,           0,           0,           0,           0,           0,        7102,           0,           0,           0,           0,           0,           0,           0,           0,         611,           0,           0
B01,         220,       54757,         107,          14,         200,           0,           0,           0,           0,           0,       30290,          97,       88784,           0,           0,           0,          10,          92,        1141,        6723,       15472,       42172,       30801,           0,           0,         439,       14141,           0,       15984,           0,         148,        2045,       12731,           0,           0,           0,          26,        1748,       19619,          77,        4662,           0,           0,       30126,        3756,           0,         548,         450,       23105,        9561
B21,      649466,      153145,      518715,      298565,     4074148,      561750,      231928,       74003,     1322014,      826583,      184225,      118844,     1303945,      569443,      396075,      311994,      500756,      441689,      117731,      619915,      448126,     1171470,      541055,      432679,      509844,      106077,      181207,      117439,       98200,      657503,      324702,     1956430,      846660,      125891,      993443,      379881,      425172,     1209303,      110100,      483700,       89053,      545542,     2253926,      335033,       79962,      754910,      775971,      244252,      647682,       65747
B22,       60468,       29049,       39173,       37964,      463026,       44610,       83533,        9509,       69045,      107910,       22340,       24607,      214654,       74526,       38732,       26920,       42874,       65358,       24879,       32587,       99428,      177973,       97788,       49021,       77651,        5973,       26081,       32488,       18575,      115441,       26878,      375657,       65428,        6396,      173492,       44742,       55814,      242346,       28913,       92169,       21430,       72295,      267328,       31758,        9333,       73748,      108704,       21958,       82604,       10402
B30,       61373,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        4106,           0,           0,           0,           0,           0,           0,       11953,           0,           0,           0,         300,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,      163998,           0,           0,           0,         636,           0,           0,           0,           0
B42,       77089,       31035,       94854,       59927,     1154396,      151251,      161209,       40830,      437235,      242184,       60097,       44139,      349353,      122503,      178791,       95898,      120789,      160864,       30000,      204430,      512122,      286744,      114968,       87473,      213140,       40788,       49753,       31859,       10783,      240177,       89441,      533756,      201360,       20417,      269834,       74015,      290899,      450894,       58269,      141486,       35433,      146676,      539140,       86249,       39419,      130910,      303164,       55603,      120814,       15210
B46,      312481,      205280,      265048,      217750,     1869536,      278773,      432016,       79352,      796264,      378194,      213587,       97975,      680604,      396400,      219592,      203021,      252733,       65229,       93700,      278175,      866595,      500010,      272230,      208751,      435790,      150815,      143804,      136822,       86286,      426901,      186866,      839124,      665216,      119175,      637398,      220268,      174133,      822144,      131732,      243988,      134034,      297236,     1160707,      116234,       84218,      238014,      366461,      309628,      355690,      101291
B50,           0,       23008,           0,           0,      115487,       20353,       36429,       29611,       94254,       75167,       63438,           0,       61878,       33612,       32061,       20659,       35090,       26624,       11385,       42826,      244759,       70888,       20842,       24276,       67463,       21210,           0,        4688,        3987,      213435,           0,       77331,       71917,       13464,       47584,        8424,       56464,       65078,        7670,       15261,       22855,       27894,           0,        9764,       25983,       36220,           0,       17068,           0,        3421
B54,       24821,        4265,        4303,       12672,        3964,        4766,        5262,         680,       40494,       27292,        5279,        5234,       26330,       21375,       18659,       18113,       21223,       22346,        8423,        1911,        6950,       27150,       18278,       63033,       19284,        5218,       19080,        2876,        4231,       10155,        9397,       20011,       46973,       10118,       25748,       21304,        8519,       20956,        3038,       11452,       10618,       16696,       31544,       11140,        4094,       19886,       11199,       10043,       20523,        3569
B59,       13238,       47909,       18253,       28708,       54656,       15116,       26081,        9167,       33025,       54829,        3592,       14671,       17913,       11690,       19280,           0,       46452,       15209,       11485,       29360,       24866,       43028,       20440,       12739,       16493,       13976,        4630,        7271,        5818,        6746,       29469,          92,       46197,       12401,       49595,       27756,       38729,       68319,       11321,       21606,        8579,       13958,       57658,       10264,        4382,       27311,       32924,       53385,       76975,       31363
B79,     1589384,      313566,     1352157,     1118175,    14729358,      946834,     1519248,      198187,     3675104,     2700366,      447755,      299912,     3734828,     2703833,      854453,      768569,     1672469,     3686297,      731092,     1381516,     2457601,     4224978,     1821736,     1415639,     2109591,      377220,      529320,      287948,      520545,     2765722,      585648,    15394659,     2610858,      257486,     5240585,     1075083,     1067806,     4971827,      562223,     1587970,      281747,     2176899,     6429735,      579045,      296456,     1417278,     1794465,     1127835,     1977897,      153131
B80,           0,           0,        1183,           0,      124553,           0,       21911,           0,       57425,           0,           0,        8806,           0,        2031,           0,           0,           0,           0,           0,           0,       83351,         107,           0,           0,        4290,           0,           0,           0,        2480,        2144,       10070,           0,           0,           0,       98543,           0,           0,           0,           0,           0,           0,       34615,           0,       10635,           0,        8042,           0,           0,           0,           0
B89,      235783,       51784,      173300,      137479,     4419691,      129760,      105820,       43431,      548130,      142264,       62277,       84966,      364595,      177731,      193324,      244390,      141427,      191052,       64305,      174262,      252980,      310080,      260709,       88716,      230936,      100277,       85971,       52847,      133968,      316906,       28712,      723146,      299794,       64943,      395311,       67449,      450273,      440218,       44972,      125331,       44236,      177906,      635183,       94009,       67522,      219270,      202061,       71578,      212698,      398224
B91,           0,           0,           0,           0,           0,       10759,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,         672,           0,           0,           0,        5666,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
B92,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
B93,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
B94,           0,           0,           0,           0,           0,           0,           0,        2303,       11451,       10183,           0,           0,       14469,           0,        6626,           0,        4850,           0,           0,       83987,        3722,       11147,           0,           0,           0,        1822,           0,           0,           0,      226365,           0,      563824,           0,           0,           0,           0,           0,           0,        8625,           0,           0,        5026,       13335,           0,        2252,           0,           0,        4640,        7434,           0
D21,       11974,        3116,        6922,        1163,       78254,        1864,         634,        4822,        3932,       15267,         805,           2,       19536,        3361,         964,        3652,        7817,        2822,         248,       18473,        5893,       17136,        4591,        5418,         759,        1478,        5475,        6204,        3499,      164876,       10476,      159736,        4955,         352,       24554,       15958,       10038,       46448,          48,       24336,        1429,       14591,       59806,       26946,        1625,       16833,       48583,        1465,        5861,        8994
D30,           0,           0,       19737,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
D42,         492,         144,       59127,         834,        3981,           9,           0,           0,       51982,           0,           0,        4265,           0,        5802,       39185,           0,           0,        4967,           0,       27725,        3742,      160154,       13056,         415,         320,           0,        1270,         822,           0,         444,       29731,           0,        1018,           0,       54897,         437,           0,           0,           0,        7491,        3312,        3658,        4884,          11,           0,       49728,           0,           0,       10685,        1326
D46,       18046,           0,       26170,        1688,      400502,       17162,           0,           0,       13173,       13229,           0,        2355,       46080,       23352,        3345,       21339,        2306,           6,        4025,       16774,         151,       51202,       29293,        3734,       19595,        1129,       12528,       13779,        4651,       18485,           0,           0,       10872,       12962,       22046,       11815,        5397,        7841,         150,         321,        4528,       11025,        1005,           0,         216,       49744,        1292,           0,       40865,         962
D79,        1221,           0,      231432,           0,     2086180,           0,           0,           0,      204155,           0,           0,         166,      235396,       71104,       36853,           0,           0,           0,           0,       10043,        3085,        6451,      221403,       86052,          17,       12839,        3277,       18505,      111061,        3577,           0,     3863806,      384890,       10556,       77638,         829,       38130,           0,           0,       47051,           0,           2,      279906,        3745,           0,           0,           0,           0,         363,           0
D80,           0,           0,        3504,           0,           0,           0,           0,           0,           0,           0,           0,          42,           0,           0,           0,           0,           0,           0,           0,           0,      244354,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       24154,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
D89,       21028,        2429,       15905,        2431,      120469,         963,        4283,        3626,       37216,       20579,        2736,         879,       17061,       21612,         890,           0,        6487,       20363,         565,       31899,       26455,       38541,        5283,        4518,       13340,         325,        1717,        5277,        7240,       65153,         430,      524211,       29482,        3827,      107121,       30045,        4571,       16813,       21467,       27907,         369,        8622,        2861,       10160,           0,       49218,       27671,        9304,      115962,        1840
D91,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
D92,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
D93,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
D94,           0,           0,           0,           0,           0,           0,           0,           0,       11785,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        5454,      137248,           0,           0,           0,           0,           0,           0,           0,           0,       11982,           0,      691726,           0,           0,           0,           0,           0,           0,           0,           0,           0,         930,           0,           0,           0,           0,           0,           0,         450,           0
E01,         723,       36967,        1734,         213,        2505,         999,       22154,           0,           0,        1328,       96532,        1265,        5533,           0,         850,           0,         522,           0,         655,       44344,      103750,        5485,        1177,           0,         305,         605,        2302,           0,          76,           0,        1239,       17126,        1211,         397,         355,          29,        4068,        9004,        8459,        4350,         550,           0,           0,        1101,         118,       12419,        1712,         450,        6555,           0
E03,           0,       48505,           0,           0,           0,           0,           6,           0,           0,           0,           0,        3357,           0,           0,       17340,           0,           0,           0,           0,        2689,           0,           0,           0,           0,           0,        2202,           0,           0,           0,           0,           0,           0,         505,       87857,         599,         899,           0,           0,        2146,           0,       28949,           0,           0,           0,           0,           0,           0,           0,           0,           0
E04,      158310,      118649,      313766,      114582,     2569995,      168959,      324759,       66275,      725369,      415909,       85170,       46248,      609589,      272745,      118427,      132808,      135421,      218067,       44752,      350593,      332019,      851575,      145698,       82692,      170982,       28341,       43262,      100808,       42401,      498652,      104922,     1483154,      499935,       14333,      556610,      125234,      119532,      616481,       93513,      244684,       24378,      251166,     1159331,       86723,       21453,      469128,      289400,       49019,      257138,       23217
E05,       45868,       14446,       24434,        9420,      318949,       76434,       74898,       17031,      420648,      185643,       14930,       10261,       60182,       14558,        5248,       28135,       29502,       51771,       10332,      241050,       68732,      149067,       41129,       11291,       39491,       10748,       33138,       18887,        9223,       95071,       35406,      184065,      105898,        1873,      116410,       76931,       50413,       29704,        7733,       36187,       15633,       62489,      264714,       24614,        6404,       23845,       91064,        6991,       43121,        5450
E12,       10797,      215387,           0,           0,      119383,           0,           0,           0,           0,           0,      772713,           0,           0,           0,           0,           0,           0,       29530,        8149,           0,           0,           0,           0,           0,           0,           0,           0,           0,           6,      423576,           0,           0,       57300,           0,           0,       14263,           0,           0,       23153,       67809,           0,           0,      210177,           0,           0,           0,           0,           0,           0,          30
E16,      149064,       18518,      174718,       77888,      517845,      188996,       81019,       51168,      221696,      188013,       46745,       58140,      301455,      415725,      151251,       82348,      114620,      202476,       46453,      175166,      128143,      441206,      177569,      113215,      136666,       39622,       91845,       33337,       56242,      154507,       79584,      291011,      402729,       68385,      406424,      183320,      111071,      339465,       42217,      159594,       26781,      134864,      529726,       99776,       29640,      370401,      320820,       84591,      170827,       29140
E18,     1397583,      268626,      911270,      559869,     6392210,     1249074,      722860,      358554,     1628321,     1528575,      454193,      277680,     1935587,     1789147,      901384,      705751,      995611,     1073816,      293714,     1192371,     1178859,     2737851,     1386719,      533578,      952725,      220247,      465981,      336623,      255471,     1551804,      606687,     3570647,     1704604,      281950,     2553488,      857364,      685259,     2528228,      252343,     1048003,      181674,     1324630,     4314814,      787191,      233222,     1786053,     1724961,      480424,     1460319,      121934
E19,       84019,        5472,       87096,       58704,      959852,       68219,       64008,       26864,      235386,      118893,        5037,       13003,      431702,      172070,      115951,       54596,       87479,       75524,       23339,      136461,      127981,      296350,      193178,       54727,       90095,       23319,       28081,       10956,       29734,      245836,       43024,      862409,      133675,       14015,      423393,       63699,       61961,      405209,       26830,       55638,        7141,       64201,      260119,       31922,       30363,      170513,      201827,       29156,      152595,       17063
E21,      290765,       55982,       94179,      204109,      768701,       53099,      132461,       58713,      320147,      295381,       12790,       45397,      407071,      137448,       68097,       80264,      278488,      192015,       47354,      185727,      226357,       75434,      133512,      112872,      129833,       62255,       45295,       29128,       14949,      116820,       62595,      387642,      223121,       40987,      180434,       88209,      115259,      733377,       67986,      133579,       41398,      141384,      326279,       76960,       24947,      252681,      250567,      109411,      142245,       21230
E22,       65318,       31412,       46473,       37079,      448589,       39287,       84716,        7797,       56635,       98889,       20720,       18057,      219419,       85596,       49946,       19193,       39372,       67266,       26520,       59107,       88551,      140238,       93757,       48182,       74123,        8627,       24772,       29165,       18830,       92089,       28915,      368707,       68271,        5124,      184762,       41533,       43557,      173692,       31348,       63452,       15268,       73913,      325610,       31237,        9383,       79620,      119841,       23336,       76533,       14860
E23,      105923,      113968,      177868,       86479,     1803071,      107002,      202263,       65042,      436385,      207930,       54253,       39819,      403347,      185560,      105775,       96534,      160338,      119428,       61778,      229129,      447811,      269822,      209221,       43133,      136869,       70745,       53938,       95637,       38866,      315235,       77405,      933049,      151167,       24123,      554527,      144157,      343757,      466113,       53614,      133521,       32847,       83746,      526195,       85682,       37538,      249511,      237793,      107154,      171515,       30644
E25,      132267,      101685,       70684,       31746,      447635,      117527,      196804,       48937,      465580,       55643,      108707,       28627,      193196,       53377,      118453,       86014,      138357,       91001,       36818,      209369,      314456,      156255,      114961,       27674,      101758,       35747,       30146,       20131,       62454,      246104,       81254,     1032465,      283805,        7469,      127211,       91324,      141032,      191134,       73321,       33812,       19439,       98484,      275394,       54108,       26356,      163571,       53343,       55142,      152538,       21368
E26,       15856,       22707,       15734,       16262,      174892,       13350,       29311,        6489,      106325,       18315,       21290,        4041,       57315,       19121,       16389,       12955,       23367,       26468,       11641,       22612,       41886,       83661,       39778,       12510,       20786,        7184,       10440,        8181,        8750,       46251,       11461,      161378,       31316,        2949,       32452,       21203,       14590,      141294,       13881,       23073,        4989,       16184,       64883,       10882,        5629,       25775,       43039,       11990,       42685,        2306
E29,       11637,       12506,       17507,        5780,       42486,       18685,       23375,        5302,       53141,       25687,       16732,        3919,       11742,       14671,        9375,       13547,       10450,       48467,        6138,       22926,       17610,       88666,       33246,       10077,        7793,        5806,        7620,        7128,        5791,       55319,       10436,       86527,       28890,        2809,       29227,        8790,       15074,       42074,       13690,        7042,        9543,       19988,       39232,        7101,        3880,        9337,       19370,       10690,        5702,        5045
E31,        8327,       35609,       12990,        3108,        1311,        5179,        1853,        8456,       41480,       36235,       35810,         147,       15321,       15265,        4039,        2260,         442,       12203,       10355,       31796,       18917,       40872,       10165,        6618,       16448,         612,        2734,           0,        1328,       17083,        9508,      127480,       18921,        2767,       59703,       11896,           0,       24757,       15558,       15667,        3715,       10039,       39866,        2424,       19602,       28941,           0,       10069,        2631,        4085
E32,      449519,       94339,      353168,      132756,     1965605,      195419,      233718,      109509,     1684342,      250892,      262699,       65269,     1007856,      296876,       88184,      119189,      117399,      341455,      123483,      383769,     1081253,      732292,      279684,      147913,      415508,       89821,       63774,       58298,       55181,      461246,      228486,     1267937,      294756,       25238,      474013,      199263,      145663,      372779,      157176,      698884,       53366,      450772,      730760,       88352,       49176,      483765,      567570,      115774,      135120,       50887
E36,      800925,       32131,       60462,      301044,     2472485,      140541,      891540,       46851,      482957,      550492,      190432,       32138,      678254,      488264,      452087,      317172,      300404,     1044696,       56715,      313087,      773685,     1129487,      543102,      269255,      403386,       30136,      232768,       53312,       36225,      851104,      274871,     3197224,      672457,       53421,     1125818,      293980,      384292,     1294042,       60203,      560728,       45636,      463591,     1663010,      257541,       14355,      985320,      484806,       76935,      396553,       31891
E38,           0,           0,       28591,           0,           0,        3966,           0,           0,           0,           0,        2550,           0,       25515,           0,           0,           0,       20461,           0,           0,           0,           0,           0,         803,           0,         963,           0,           0,           0,           0,       21416,           0,           0,           0,           0,           0,           0,           0,        3908,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
E44,      236611,      237523,      226291,      175560,     1342334,      223912,      168157,       36446,      579928,      129142,       71428,       41303,      518054,      235976,      157021,      195541,      194696,      234734,       89672,      319762,      131855,       76996,      179800,      121331,      321599,       80811,       67141,       55564,       62512,       95330,      463451,      407053,      707434,       61966,      359394,      120900,      128391,      965822,       26794,      208282,       71381,      127784,      942133,       70641,       87466,      689849,      174355,      242038,      175994,       52295
E45,           0,       75324,           0,           0,       34316,           0,        4060,        8771,      176585,        5604,           0,           0,       91617,       36661,           0,       20969,        5298,       16896,       23337,       34558,       77601,        8438,           0,           0,           0,           0,           0,           0,       13983,      350117,           0,      184213,       16827,           0,       47248,       30425,         220,       98614,        2350,           0,           0,           0,       12093,           0,           0,       33884,      109646,       21581,           0,           0
E47,           0,           0,           0,           0,        2594,           0,       19818,           0,           0,           0,           0,           0,       10938,       13581,       14361,           0,           0,           0,           0,           0,           0,       24927,        3503,           0,        4210,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,         907,           0,       22714,           0,           0,           0,           0,           0,        1376,           0,           0,           0,           0,           0
E50,        2747,       33259,         371,        2465,       71861,       30450,      117987,       32948,       75400,       45306,       63529,        5168,       33041,       69872,        2738,        1018,        9324,        1511,       12837,       54279,      273840,       41226,        9514,        3043,       47553,       17997,        2324,        8971,        9638,      140767,        3545,      151857,       44600,       15625,       60695,        6741,       65987,       18564,       17027,       20918,        5688,       15232,       20690,       28298,       34984,       65626,       25728,       11092,       12938,        4921
E52,        3083,        5349,        4301,        3299,       12570,        5951,        9801,         989,        3150,           0,       20262,        1941,       10898,        2571,        3165,        1798,        7342,        3270,        2902,        4463,        5283,       20184,           0,        2751,        2148,        1890,        2102,        2396,        2301,        8838,        3022,       22245,        4817,        1248,        7212,        3412,        2493,        7881,        3221,        3063,        2579,        3869,        6729,        4164,        2239,        7152,        7248,        2277,           0,        1118
E54,       90860,       13555,       77108,       68953,      609575,       37268,       14381,        3845,      291458,      145678,       48336,       36783,      123605,       67963,      113974,       92047,      101086,      120907,       32172,       68950,       11210,      101532,      118324,       80232,       69363,       25058,       84343,       15263,        4530,       50158,       44797,       88285,      166520,       46710,      104191,       62952,       79826,       78814,        4344,       65324,       31942,       69202,      207761,       38677,       18416,       80877,       64948,       20053,       91606,       17635
E55,       14814,      103863,       27928,       21552,      132786,       42471,       11187,        3870,       57594,       28720,        4317,       34087,       25189,       21872,       10765,       12404,       17465,       32498,       22172,       40837,       18420,       31892,       51295,       18634,       18811,       27188,       13351,       13018,       10012,       22496,       15433,       35934,       33589,        9743,       27084,       18282,       61463,       68881,        3724,       35716,       14691,       31610,       88970,       22208,        8621,       31997,       87831,       15269,       40323,       26160
E56,       24449,       27517,        2040,       11001,      315475,        5693,        7398,        1038,       33264,       31937,        5502,       11781,        8299,        6840,        2454,           0,        7931,        9934,        8291,        7806,         284,          10,       29240,       24225,       11880,        9921,           0,        5460,        1576,        5575,        2495,       21558,       35722,         538,        9496,        1103,       49825,       26671,        1854,       20305,        4272,       23464,       17180,        5193,        4214,       17814,       40873,        4651,       27508,        1630
E59,       29783,       90230,       23408,        5449,      216364,       26213,       26377,       17559,      363386,       53932,       19814,       12001,       62341,       24022,       42626,       19192,       90973,       78804,       11053,       93844,       71400,       99750,       57034,       10249,       67894,       20268,        6256,        7650,       12696,       58150,        9089,      124861,       67317,        7369,       55756,       21023,       21559,      152388,       12161,       15342,       13927,       15004,      193456,       24113,       15529,       31000,      118045,       57885,      159082,       11029
E61,       11743,        9281,       14650,       31117,      150974,       20620,       15199,       10903,       63094,      125199,       26949,        8117,       63438,       20576,       15225,        6595,       68107,       74124,       10879,       40749,       51288,       52731,       60846,       25588,       18902,        4355,       16629,        7875,       10153,      234151,       26480,      224957,       42938,        6083,       52678,       39192,       20741,       74759,       12902,       30613,       11886,       67500,       40430,       16533,        7558,       47715,       28020,       36621,       37604,       12280
E62,       70063,       47675,       89598,       38677,      724970,       42261,       87133,       33965,      206199,      107678,        5783,       24259,      203261,      105052,       50227,       33863,       85438,       94422,       26575,      138267,      167549,      196041,       59733,       38578,       78956,       17598,       29069,       30427,       22683,      204802,       47225,      306781,      169023,        6597,      144283,       40395,       80279,      294084,       25026,       85616,       13890,       69837,      196743,       34649,       23080,      131538,      101446,       31734,       48845,        8411
E66,       31371,       31137,       63212,       38053,      893053,       42673,       60953,       23180,      209966,       58087,       20815,       31927,      150552,       38262,       28896,       34832,       45300,       26302,       25364,       63527,       50502,       92160,      110646,       37811,       56133,       12087,       25350,       47528,       19381,      224561,       37826,      334967,       52284,       15410,      138689,       45601,       73051,      129609,       22598,       34667,        8059,       51823,      218786,       19911,       17339,       82625,      214517,       24802,       84992,        9159
E67,      231325,      133640,      280059,       59638,           0,           0,      462174,       39423,     1124851,      445846,      157162,       40345,     1050904,        1916,      169165,      146215,      220051,      186453,      148706,      418842,      767838,     1032073,      522133,       90460,      323304,       48900,       68222,       46895,       72076,           0,      146507,           0,      385638,       23192,     1295654,      168938,      232513,      974092,      139313,      124786,       30590,      217066,      896513,       93133,       66356,      463318,      507710,      118412,      382088,       22589
E68,           0,        3889,       35226,       30766,           0,           0,       99665,        3068,           0,           0,       43084,           0,       80059,           0,        1753,           0,           0,           0,        1128,           0,      114472,       40645,           0,           0,       14003,           0,         668,        3130,           0,           0,        4445,           0,      108024,           0,           0,        5178,           4,      326688,           0,       66030,           0,      103879,      279712,       20002,        4361,           0,       56634,        2467,        2468,        3059
E74,     1675423,      284416,     1322411,     1062779,    11227001,     1026317,     1803207,      186880,     4453788,     3171761,      397980,      301969,     3982503,     3152501,      940843,      722039,     1853959,     2257810,      821465,     1851100,     3725816,     3959358,     2437068,     1104343,     1897327,      282819,      544939,      407781,      846110,     4094766,      568014,    14316051,     2334814,      219858,     5362323,      988300,     1006268,     7026807,      511403,     1796361,      238864,     2068259,     6306070,      535630,      263717,     1704007,     2173701,     1239494,     2220093,      144512
E75,           0,        6736,           0,         663,           0,       65230,       43573,         159,      136109,           0,        1983,        3951,       52946,       60692,          39,           0,       26170,           0,       53503,       29384,       19354,      103443,        1337,           0,       26314,           0,       34138,           0,           0,           0,           1,           0,       28878,        6379,       27004,           0,           0,       69451,       13419,       25013,        6864,       31722,       11090,       45227,         249,           0,           0,           0,       54560,       13659
E77,           0,       31334,        3945,           0,       52574,       11264,       21742,       31015,           0,           0,           0,        6849,       33159,       22483,       30605,        3891,           0,           0,         590,        3991,       27678,       35804,       27263,           0,       11849,        6617,       26971,           0,       10854,       39746,       12177,       11378,           0,        2638,       24387,       37866,           0,       36422,       10784,           0,        2699,           0,           0,           0,        7936,           0,       20136,        1561,       25448,        1766
E79,      244767,       62877,      386725,      225894,     1516290,       95811,      334362,       88943,      803768,      562806,      103280,       92961,     1546539,      300872,      316638,      200810,      403811,      352926,      132273,      441822,      922605,     1325328,       97630,      245218,      368182,       63953,      184707,       87114,       93818,      447922,      176853,      551453,      295556,      111881,      440879,      299675,      401021,     1887617,       92661,      313906,       77260,      607230,     1433639,      124173,       99892,       75630,      818349,      179827,       76504,       34736
E80,           0,           0,         244,        6095,      205607,           0,         294,           0,           0,           0,           0,       11840,       19164,        5587,           0,           0,           0,           0,         519,       29475,      117855,           0,        3354,           0,        1333,           0,           0,           0,        5387,       12845,        4886,       17989,        1012,           0,        4249,           0,           0,           0,       19485,           0,           0,        1488,           0,           0,           0,       68341,           0,           0,        7038,           0
E81,        2771,           0,       26844,        6497,      351315,       13377,      132394,       33449,        4628,        3245,           0,         241,       21123,        7675,        2780,           0,        8741,       14916,       21110,       11789,       13068,       27216,       11193,           0,         699,           0,           0,        4460,        5501,       95705,           0,       53986,        9289,           0,       14427,        1324,        5122,       44471,       15856,        4845,           0,       13313,       71707,        2178,        7802,       11082,       43557,        5464,       23326,        6330
E84,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,         234,           0,           0,           0,           0,           0,           0,           0,          14,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        1598,          33,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
E85,        6557,           0,         869,        2609,       19406,           0,           0,         185,        5739,        5143,         969,         761,        5458,         355,           0,        1667,        2190,        6134,         868,        2280,        3187,        3961,        1987,        3849,        1455,         537,        1368,         709,         196,        3441,        1198,        5530,        3404,         396,         624,           0,       12859,           9,           0,           0,        1153,        2292,       16626,           0,           0,        2253,        3321,        3014,       10014,           0
E87,       32231,           0,           0,           0,           0,           0,         542,           0,        1305,       49282,       16506,           0,           0,        4186,           0,           0,           0,       34493,         129,       46775,       59301,         729,           0,        3752,           0,           0,           0,           0,         329,       12447,           0,        4704,       20255,           0,           0,           0,           0,        2961,         907,       31061,           0,           0,           0,           0,           0,       15439,           0,           0,         193,           0
E89,      120722,      755430,      168718,       78778,     4007127,       79553,      767667,       57208,      620931,      384103,      526052,       63201,      875212,      321206,      145085,      106131,      108625,      294365,       75048,      387611,      806179,      385305,      339545,      156476,      160236,       81320,       36440,       84408,       60300,     1734563,       66627,     2230892,      223352,       47924,      455280,       81059,      187012,     1506065,      164167,      223935,       41276,      217616,      721508,       74976,       53393,      115724,      238091,      123360,      404423,       11977
E90,      129294,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       27568,           0,           0,       57881,           0,           0,           0,       48545,           0,           0,      353999,           0,      103960,           0,       33781,           0,           0,      166053,           0,           0,           0,           0,           0,      261794,           0,      105912,      617986,           0,           0,           0,           0,           0,       56496,       25244,      206840,      225689,       39040,           0,       28464
E91,           0,           0,           0,           0,           0,         836,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       57943,           0,           0,           0,           0,           0,           0,       29473,         117,        9210,           0,           0,           0,           0,           0,        2404,           0,           0,           0,           0,           0,        3034,           0,           0,           0,           0,           0,           0,           0,           0
E92,           0,       20633,       18692,           0,       54876,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       31287,           0,           0,           0,     1070606,           0,           0,           0,      127131,           0,           0,           0,      358049,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
E93,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        4477,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
E94,           0,           0,           0,           0,           0,           0,       98942,       18778,       22070,           0,           0,           0,           0,           0,           0,           0,         366,           0,           0,      218350,           0,           0,           0,           0,           0,           0,           0,           0,           0,      788006,           0,     1343509,           0,           0,           0,           0,           0,           0,       31082,           0,           0,           0,           0,           0,        1501,        2976,           0,        2133,           0,           0
F01,           0,       58280,        6717,          11,           0,         748,        5533,           0,           0,        2190,      109682,           0,           0,           0,           0,           0,         901,         247,        1188,       29985,       56736,           0,           0,           0,           0,           0,         455,           0,         586,           0,           0,       12818,           0,           0,           0,           0,           0,        2673,       51691,           0,           0,           0,           0,           2,           0,        1111,           0,           0,           0,           0
F03,           0,       15158,           0,           0,           0,           0,           0,           0,           0,           0,           0,          10,           0,           0,           0,           0,           0,           0,           0,          67,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        1148,           0,        1145,           0,           0,           0,           0,         903,           0,           0,           0,           0,           0,           0,           0,           0,           0
F04,         399,        3636,        2063,        1901,      377781,        8110,       55911,         501,       67350,       33233,        7197,        9890,       26921,       10754,          14,        4747,       20379,         130,         210,        7144,       18059,        3521,        8564,           0,        2881,         636,        1077,       15152,         975,       19458,        1954,      108982,       88339,         647,      122421,         702,        1043,       21709,         144,       23840,         254,       11995,      547801,         154,         525,        3482,       49102,           0,        2942,        1088
F05,        4553,           0,          47,         364,           0,         446,           0,           0,        8856,         675,         114,          57,         569,          57,           0,           1,           0,           0,           0,       68757,           0,           0,           0,           0,           0,           0,         384,           2,           0,       15817,           0,        8870,           0,           0,       15408,         356,          13,           0,        2589,           0,           0,         173,        4591,           0,           0,           0,          25,           0,        5014,           0
F12,           0,       10769,           0,           0,           0,           0,           0,           0,           0,           0,       86107,           0,        5041,           0,           0,           0,           0,           0,          33,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       15828,           0,           0,           0,           0,           0,           0,           0,           0,      176026,           0,           0,           0
F16,        1159,          68,        5243,        7522,      101158,        8824,          16,           0,       24427,        5623,         368,        3447,       54332,       21470,        3783,        3851,        3014,        1550,         489,        3495,        2354,       33149,       10018,         289,         586,         431,         996,        1416,        3693,       33823,         635,       16220,       26738,        2477,       26606,        3307,        5841,        5349,           0,           0,         577,        5063,        4064,        3441,        1498,       22219,       17581,         298,        9798,           0
F18,       55829,           0,       16896,       53933,      343225,       74646,        5038,        1150,      310704,      156106,       59675,       33968,      186791,       96841,       36807,       37564,      113798,       10985,       13790,       77413,       16659,      297846,       63958,       30909,       15518,       10433,       11841,       27682,        6275,      165146,       18741,      377979,       77292,       20044,      231605,       34738,       31726,      203034,        6408,       79036,       18185,      168032,      161186,       76093,        5292,       77157,      196569,        6653,       52024,       20247
F21,          43,           2,          42,        2109,           0,         161,        4395,           6,        6320,       28693,        1127,        1229,       12456,          45,           0,          65,       10394,         858,           0,       34278,           0,        1585,       11643,           0,         409,         105,         227,         101,         118,         466,         312,       13468,        1904,           0,       19287,          24,          94,        4502,         662,        2558,          90,        2534,         337,          23,           0,         941,        7790,           0,         338,           0
F22,          11,           0,           0,          21,        4041,           4,         440,           0,         436,           0,           0,           0,           0,           0,           0,           0,           0,           0,          57,           0,         510,         170,           0,           0,        2490,           0,          20,           0,           0,           0,           8,       26594,           0,           0,        1354,           0,           0,           0,           0,          11,           0,           0,         912,           0,           0,        1427,           0,           0,           0,           0
F23,         225,         200,           1,          98,          62,         312,         370,           2,        1661,        1002,         128,           1,           0,           0,           0,           0,           0,           0,           0,           6,         238,           0,           0,           0,           0,         273,           1,          60,           0,         119,           0,       27336,        2606,         218,           0,           6,        1129,           0,         266,           0,           0,           0,        2530,          92,           0,         106,           0,           0,           0,        2157
F25,        2128,       10794,         253,          26,           0,         135,        6430,           0,         488,           0,         125,           0,         708,           0,           0,           0,           0,           0,           0,         548,       26473,           0,          15,           0,           0,           0,           2,         572,          80,          74,          32,       14841,           0,           2,           0,           0,          25,           0,           0,           0,           0,           0,         176,         900,        7031,           1,           0,           0,           7,          39
F26,          91,         268,          32,           2,           0,          12,           0,           0,        2121,           0,          13,           0,          72,           1,           0,           0,         327,           0,           0,         159,           0,          52,           4,           0,           0,           0,           0,           0,           0,           5,           0,        8775,         525,           0,           0,         350,         391,           0,           0,           0,           0,           0,         385,           0,           0,         207,           0,           0,           0,           0
F29,           0,           0,           2,           0,           0,           0,           0,          64,        5567,         500,           3,           0,           0,           0,           0,           0,           0,           0,           0,           0,          26,          11,          11,           0,           0,           0,           0,           0,           0,           0,           0,        1400,           0,          97,           0,          13,         172,           0,           0,           0,           0,           0,        1104,           0,           0,           0,           0,           0,           0,         124
F31,        7865,         275,       10979,          36,       24050,        8489,       26205,        5293,        9587,       14538,       17394,        1486,       14659,       27707,           0,        2286,           0,           0,        3229,         510,       18266,        1765,        2723,       47614,        4320,         254,         206,          16,        2169,        5846,        2144,       21948,        2184,           3,       14239,         508,       22077,        5271,         557,       14182,         622,       40762,       32186,         296,        8785,         592,       29114,           0,         330,           0
F32,       15590,          27,        2614,         371,           0,         211,        9224,        6508,       12519,           0,       25879,          56,        1699,         708,           0,           0,        5754,         307,           0,        7816,        5393,       29921,          19,         135,         220,           0,          46,           0,         118,        9442,           5,      288745,         269,           0,           0,          69,         192,       13414,        7998,        1728,           1,        9196,        1054,          12,           0,        6469,       22779,           0,         267,         270
F36,        4517,           0,           0,        5710,      156353,         349,       17586,          62,        2010,        3241,       10858,        5333,       34069,        5511,       27195,        4102,        3344,       15187,         141,          70,        5771,       76053,          13,         313,        2854,          11,        8406,           0,         228,        5114,         392,      364844,       21867,         458,       84034,        1456,        7604,       42924,        2152,       29712,           0,           0,       25555,        1817,           0,        7709,       22292,           0,        5245,         737
F38,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
F44,      374770,      170688,      379067,      285371,     1498018,      353040,      570281,      174843,     1190534,      718839,      259665,      169127,     1107994,      538216,      435850,      393295,      459020,      504355,      126172,      297090,     1080286,      706624,      427547,      309155,      518218,      198913,      310319,      287837,       97571,     1057748,      225866,     1631422,      820468,      123256,      977225,      270050,      326162,      654034,      176531,      366025,      167242,      656094,     1694892,      233962,       75847,      748537,      649098,      415714,      538691,      184572
F45,           0,       22484,           0,           0,       48943,           0,           0,        4786,      273777,           0,           0,           0,      170954,       17909,           0,           0,       79606,       27200,       10424,       27826,       56126,        1297,           0,           0,           0,           0,           0,           0,        2146,      227013,           0,      282344,        4585,           0,       35874,       18953,           0,      176991,           0,           0,           0,           0,       30041,           0,           0,           0,       46911,       11440,           0,           0
F50,           0,           0,           0,           0,           0,           0,           0,         352,          65,           0,       56387,           0,           0,           0,           0,           5,           0,           0,           0,       25372,           0,           0,           0,           0,           0,           0,           0,           0,           0,        3380,           4,        6056,           0,           0,           0,           0,           0,           0,         460,           0,           0,           0,           0,           0,           0,          29,       65025,           0,           0,           0
F52,           0,           0,         538,           6,           0,          23,           0,           0,           0,        4090,         942,           0,           0,           0,           0,           0,           2,           0,           0,           0,           0,           0,           0,           0,           0,           8,           0,         365,           0,         140,           1,         823,          60,           0,           0,           0,           0,           0,           0,          50,           0,           0,           6,           0,           0,           0,           0,           0,           0,           0
F54,         400,           2,        1384,           9,        9856,         515,           0,           0,       11390,        1430,         531,         335,       13780,         691,         777,         179,        8883,          47,           0,        8983,           0,          92,           0,         967,           0,          85,        1113,          91,           0,        1552,        2963,        1828,        4830,         573,        1100,           2,         192,         876,           0,        1929,           0,        3691,         581,           2,           0,         746,         146,           0,        2719,           0
F55,         298,        1036,        1780,        1307,        7393,        5657,         240,         319,        1087,        1994,          21,        2699,        1352,         955,        4104,        3256,         800,         600,         130,           2,        2195,         337,         433,          19,        2507,        3454,         750,         853,         740,         597,          80,        1333,        1150,         234,           0,         647,        1657,        1138,          15,        2542,        1301,        5915,        4567,         470,          45,         634,       10280,        3721,          89,        2013
F56,         259,         102,           0,           0,        1277,           0,           0,           0,         339,         305,         216,          89,          64,          21,           0,           0,           0,           0,           8,        2035,           0,           0,         177,           0,         189,          10,           0,           0,           0,          12,           0,         739,         343,           0,           7,           0,        1195,         186,           0,         240,           0,           0,           0,           0,           0,          20,         529,           0,           1,           0
F59,           2,       51723,          26,        2319,      275706,        1905,        2744,         581,       28725,       39891,        3772,         472,       15457,        4061,        2943,           0,        2171,       20432,         285,       14635,       19511,           0,        1793,           0,        3230,        1050,           0,         109,        1002,       10336,        6418,       22982,        6933,        7413,       12286,           1,           1,        6853,        2763,         335,           0,         608,        7665,           1,           0,          20,        6696,       24439,        7217,        2529
F61,         146,        1913,        3072,        2035,       22865,        4700,        9697,        1353,         583,       17037,       70015,        3516,       19600,        3296,          23,           0,        4547,        1642,         512,          25,       17417,       10412,        4047,         284,        2214,       18353,         388,        4757,        2730,       31318,         823,       23794,       11165,         723,          47,         532,         477,       11902,        8976,        6256,        2342,        2942,        2350,        1222,         270,        7393,       17554,        1738,        5662,         496
F62,           0,           0,         534,         107,       20918,          16,        5927,          10,        4488,         243,          64,        7787,        2437,        1399,           0,        3001,         338,         258,           6,         290,        6996,           0,          55,           0,          64,           0,         308,           3,         363,        1682,        1205,        4939,        2627,           0,        2420,         135,          24,          95,           0,        2578,         118,         895,        6955,        1530,           0,          92,        1718,           0,           1,         308
F66,         491,           7,           0,           9,           0,         555,           0,           1,        2827,           0,           0,           0,           3,          32,           0,           0,          56,         109,           0,           0,           9,           0,           0,          26,           0,           0,           0,           0,           7,         389,           0,       18485,           0,        1460,         202,           6,           0,           0,          52,           0,           0,           0,         198,          20,           0,           2,          20,           0,          77,           0
F77,           0,         120,           0,           0,        8608,          22,         611,          10,           0,           0,           0,        5554,          38,        3121,           0,          98,           0,           0,           0,         591,        1295,           0,         142,           0,        1378,        1440,        2042,           0,          62,         313,           4,         152,           0,          30,         786,        1992,           0,        3501,         412,           0,           0,           0,           0,           0,           0,           0,        1677,           0,        1120,           0
F79,           0,         241,         186,         594,           0,           0,         422,          30,         114,           0,        1357,          37,        9374,           3,           0,         336,        2726,          50,          25,           0,           0,           0,        5707,           0,          82,           0,         170,        3823,           0,        1313,           0,         341,           0,         420,           0,        1356,           0,          22,         347,           0,           0,         192,          41,           0,           0,          12,          16,           0,        4443,           0
F80,           0,           0,           0,        7495,           0,           0,         179,           0,           0,           0,        2800,           0,           0,           0,           0,           0,           0,           0,           0,        6032,      561881,           0,           0,           0,          54,           0,           0,           0,        2808,         280,          10,           0,          60,           0,      125856,           0,           0,           0,       33523,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
F81,           0,           0,           0,         838,           0,         420,       11371,        8863,         349,       35533,        1437,           0,        3684,           0,           0,           0,           0,           0,          71,         280,        1139,           0,           0,           0,           0,           0,           0,           0,         405,        2242,           0,       28885,       13831,           0,           0,           4,           0,          48,        2829,           0,           0,           0,        8220,           0,           0,           0,       15719,           0,           0,       10797
F85,       11665,           0,         498,           0,           0,           0,           0,           0,         113,           0,        2276,           0,        3190,           0,           0,           0,           0,           0,           0,        1330,           0,           0,           0,           0,           0,           0,           0,          46,           0,           0,           0,         871,          54,           8,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,          10,         140,           0,        2384,           0
F87,        7801,           0,           0,           0,           0,           0,        1173,           0,           0,       41066,       33506,           0,           0,          24,           0,           0,           0,       49140,        3074,        6807,       21399,        1799,           0,           0,           0,           0,           0,           0,        1350,        7357,           0,         644,        4465,           0,           0,           0,           0,        2690,        2024,        1791,           0,           0,           0,           0,           0,       15173,           0,           0,         772,           0
F89,         570,          72,        2892,        1876,       61346,         197,       18882,          77,       25837,       10185,       26067,        7158,        8647,        1034,       33498,        5099,       28123,       21956,          41,       37032,           0,        7141,       15566,          37,          29,        9567,        1235,       28570,        3699,       44137,        6315,       33876,        2682,         650,       13530,        1379,        1589,       59908,        1026,        7165,         543,        9219,       47915,         458,         111,        1662,       33904,         419,       22421,         121
F90,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,         130,           0,           0,           0,           0,           0,           0,           0,          46,           0,           0,           0,           0,           0,           0,           0,           0,           1,           0,           0,           0,           0
F91,           0,           0,           0,           0,           0,          46,           0,           0,           0,           0,         274,           0,           0,           0,           0,           0,           0,           0,           0,           0,       16995,           0,           0,           0,           0,           0,           0,        6524,          85,        1822,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
F92,           0,        3029,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,      142694,           0,           0,           0,       17636,           0,           0,           0,      232432,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
F93,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
F94,           0,           0,           0,           0,           0,           0,       79938,           0,       11733,           0,           0,           0,           0,           0,           0,           0,        4432,           0,           0,       89846,           0,           0,           0,           0,           0,           0,           0,           0,           0,      146427,           0,      648308,           0,           0,           0,           0,           0,           0,        1007,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
G01,          35,        9352,          25,           0,         125,           8,         163,           0,           0,          14,       13920,           5,         295,           0,           0,           0,           0,         414,          32,        2948,       14791,         252,        2897,           0,           4,          35,         279,           0,           0,           0,          11,         535,           1,           3,           0,           7,         210,         325,           0,         110,          18,          20,           0,          10,           0,         292,           4,           0,         336,           0
G03,           0,       12539,           0,           0,           0,           0,          69,           0,           0,           0,           0,         100,           0,           0,         152,           0,           0,           0,           0,          57,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        2480,           1,           0,           0,           0,           0,           0,        5237,           0,           0,           0,           0,           0,           0,           0,           0,           0
G04,        3363,        1379,        4731,        2672,       35599,       20535,        8962,         266,       18293,        5575,        1298,        2310,        5046,        6667,        1271,        1458,        2783,        1159,         379,        3657,        3701,        7471,        1494,        3728,        4278,         794,         154,         766,         597,         612,         324,       17671,       12784,         103,       10441,        1974,        1135,       10237,         158,        1934,         494,        1648,       29038,        2865,        1861,       10129,        9698,         799,        4737,        1017
G05,         510,          39,         415,         679,       10090,        1010,         763,         271,        5946,        7461,         499,         256,        1559,         677,          13,         544,        3545,         189,          20,        4780,        2578,        3275,        1128,         188,        2088,          67,        1003,          80,         113,        1445,         186,        2686,         707,          48,        2739,        2376,        1201,         326,          23,         674,         330,         686,         388,           6,           0,         112,        2781,           2,         414,           0
G12,           0,        6282,           0,           0,           0,           0,           0,           0,           0,           0,       28361,           0,           0,           0,           0,           0,           0,           0,         109,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       12422,           0,           0,       38974,           0,           0,           0,           0,           0,           0,        1720,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
G16,        3444,         261,        6373,        1142,       19438,        7640,         640,           0,       13761,        3199,         483,        1074,        7103,       27102,        1537,        1863,        1922,        3133,        1206,        3495,        1291,       12544,        6167,        2411,        2598,         594,        6980,         817,         819,        4526,        1143,          36,       16339,        2217,        5520,        6413,        1968,        6259,         587,        2779,         347,        1157,        5561,        1497,         311,       10829,        5699,        1821,        4336,         932
G18,      101615,       13024,       63778,       32827,      218846,       54675,       20990,        2194,       94633,      105012,       27935,       20664,      103439,       98095,       55618,       40745,       52211,       58625,       15369,       48228,       28991,      145095,       54993,       69251,       22960,       12163,       22837,        8492,       10968,       59487,       36624,      106737,       92754,       10925,      198016,       34397,       42016,      115704,        6335,       51159,        9701,       61366,      176981,       59624,        9076,      102481,       75606,       28318,       97526,        6027
G21,        7222,         856,        1011,        7181,        3119,        1548,        4415,         379,       11099,       26393,         458,         891,        2522,        1869,        2724,         991,        9831,        2985,          69,        3099,        1325,        1597,        1367,        3900,        3173,        1140,         778,         267,        1427,         515,        1603,        2432,        5700,         261,        2392,        2020,        1489,       10935,         286,        7673,        1970,        4602,       12510,        4645,         446,        7211,       10124,        5894,        1712,         522
G22,        1816,         521,           0,         137,        3997,         903,        5583,         360,        2990,        1605,         358,         312,        2712,        2673,         214,         288,         244,           0,        1027,          58,        3150,        4406,        4031,         871,        5454,          40,         911,        1197,         911,        2266,          51,        4884,        5168,         349,       10505,         377,         420,        3220,        1099,        2384,        1018,        1715,        6285,           0,         140,        5886,        2846,         557,        2773,         533
G23,        3330,        7028,        4342,        1549,       36047,        3704,        1622,        2333,       13492,        2005,        2219,        2388,       11943,        2520,        3798,        2330,        2955,         544,         991,        4393,       19688,        4319,        7213,        2593,        7703,        2456,         798,         514,         952,         770,        2024,       21221,        7070,         243,       35213,        9929,        2514,        8306,         564,        6199,        2132,        1688,       73216,        3687,        2605,       11096,        6756,        4866,        1841,        1000
G25,        2611,        1723,        3441,         454,        4499,        3574,        4730,         799,        9277,         529,        4413,         539,        2170,        1130,        1620,         606,        3233,        1689,         271,        9418,        6615,        3977,        2841,        1158,        2400,         371,         443,         471,        1426,        2753,        2199,       15894,        3714,         180,        4457,         525,        3586,        2951,        1494,        1334,         460,         714,        8184,        5503,        1182,        3921,        1879,        1252,        7906,         568
G26,        1603,         654,         844,         167,        1331,         221,         284,          87,        3684,         207,         280,         159,        2449,         917,         206,         216,         945,        2997,          54,         433,         473,        2955,        1129,         173,         946,         243,         292,         269,          58,         448,         500,        7918,         542,           6,        1462,         534,          14,        1508,          64,         684,         122,         857,        5753,           0,          26,        2313,         187,         611,         354,          70
G29,         317,         335,         573,         137,        1058,         495,         102,         140,        1470,         484,         877,         297,          86,         116,          45,         728,         211,         562,         208,         451,         403,        1024,        1278,         386,         265,         117,          45,         132,          31,         154,         174,        1534,         897,          48,         937,         352,          52,        3726,          80,         102,         793,         542,         382,           0,          45,         376,         392,         288,         724,          73
G31,          26,         142,         561,          80,           0,        2082,        6642,         314,        7790,         855,        1855,          13,          53,         152,          16,          81,          10,           0,          27,         182,         355,         284,         150,        3082,         990,           7,          19,           0,         119,          54,          53,        2485,         387,           0,        4383,         129,        1292,        1047,           3,         160,          46,       16735,        1642,       16205,         704,        1009,          11,         120,          33,          40
G32,        5851,        2271,        4237,        2601,       14902,        1909,        3168,        2678,       19923,        1623,        2870,        1983,        7779,        2271,         651,        1970,        1479,        6237,         528,        3370,        3360,        8959,        5719,        1723,        9039,         516,         949,         693,        2017,        2627,        2495,       35217,        5475,          76,        6795,        4408,         880,        5024,        1226,       11466,         976,        3798,       26184,         732,        1663,        5969,        3975,        1526,        1494,         770
G36,       17752,         351,          18,        4497,       77547,        2436,        4397,         273,        1625,       12307,        7589,         448,       13796,       36296,       12814,        6971,       10781,       21124,         176,        2727,        4529,       34663,        8984,        8516,       14066,         322,        9845,         438,         295,       21566,       11310,       52607,       17697,         381,       36428,        7414,       13566,       21729,         499,       25637,         611,        1740,       27243,       12258,          78,       37140,       10420,        2663,       13583,         439
G38,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
G44,       99986,       25728,       54563,       20597,      384669,       26100,       27479,       18924,      271383,      115728,       38888,       19237,       98921,       16935,       34010,       26362,       30178,       26313,        9361,       19153,       28826,       64416,       64035,       27704,       73537,        5348,       12096,       11911,       15613,       10364,       14560,       25713,        7470,        5363,       68483,       28341,        7601,       62798,        6274,       27264,        9532,       50797,      225677,        6410,        6395,           0,       41664,       11048,        7270,        8613
G45,           0,         454,           0,           0,           0,           0,           0,           0,       32432,           0,           0,           0,       15494,        1443,           0,           0,           0,         100,         807,       10331,          61,          40,           0,           0,           0,           0,           0,           0,         346,       13483,           0,       90331,          74,           0,        2751,        5217,           0,        4374,           0,           0,           0,           0,         850,           0,           0,           0,        2146,         762,           0,           0
G50,           0,           0,          14,          37,         199,       13987,          51,          83,         118,           0,       10728,        4140,          64,           2,          19,         134,         891,           0,           0,         390,         327,           0,           0,          47,          83,          39,           0,          26,         174,          39,         101,        2014,          44,           3,         126,         145,         292,          50,          31,           0,           0,         248,          67,         134,         123,         193,          54,          17,         353,         330
G52,         230,         107,         271,          36,         188,         128,         106,           7,          79,           0,        4248,         214,         211,         341,           0,          51,         136,          10,          31,          46,          67,         931,           0,         157,         101,         161,         226,         134,          44,           4,         219,         491,         191,          20,         971,         243,          86,          19,          83,          42,         364,          58,         231,           0,           9,         869,          77,          55,           0,          76
G54,        3799,         822,        2470,        1163,        4236,        3106,        4899,         155,        9778,        6063,       14574,         508,        4079,        5882,        3732,        4536,        3660,        5565,        1093,        1682,        3904,         878,        2634,        8105,        2172,        1223,        2524,         400,          27,        2458,        1216,        1003,        8794,        1481,        2878,        2837,        1826,       34942,         574,        6351,        1110,         389,        7294,        1102,         288,        1842,        2992,         973,        1382,         642
G55,        1531,        3761,        5093,         728,       30999,        4514,         217,         688,       17808,        2290,         334,        4144,        2231,        2352,        2831,         815,        1757,        3476,         519,        2478,        8249,        1101,        3113,        4102,        5209,        2134,        2120,        2373,         847,         631,         686,         669,        2177,         501,        1240,        6086,         864,        9862,         896,        7841,        1629,        4090,        6442,         193,         706,        3732,       10075,         902,        1264,        1875
G56,         460,         319,         207,         462,       15490,         111,          29,          35,        1996,        3325,         330,         228,         221,         155,          74,           0,         305,           0,         290,         371,         200,           0,         536,        1475,        3359,         713,           0,          21,           7,         265,         164,         395,        3072,           6,         953,         708,        1614,         794,           3,         206,         151,         485,           0,           0,         312,         726,         360,         146,        1042,          75
G59,         643,       52249,         479,         355,       19182,         793,         393,         718,      231615,        3730,       15319,         172,        4404,        1107,         743,         198,        1928,       26645,         445,        6565,       16226,        4649,       10978,         503,        3820,         638,         246,         729,         745,       11795,        2803,       15224,        2259,          48,        3909,        1711,         278,        9224,        2035,         674,         215,         223,        6031,        1357,          98,        1335,        9105,        1358,       19349,         145
G61,         164,         215,        4542,        1428,       56348,        3274,        2414,       12153,        1001,        3656,      135442,        1121,        3670,        2030,         218,         460,        2571,       13567,          87,         539,        3424,       13119,        1090,        1721,        1999,         224,         793,        2221,         481,       10074,        2185,        7600,        7325,         226,        2567,        1275,         807,        1693,           7,        1012,         438,         949,        2203,        9569,         420,        5675,         401,        1392,         509,         208
G62,        5068,         830,        5735,        4431,       32503,        7941,        6747,        1645,        7722,        7207,          75,        2104,        7797,        6730,         991,        3828,        4057,        2223,         531,        8791,        3099,        5246,        8428,        2403,       11455,        1620,        3588,        2336,        1613,        7314,        2152,       11993,       17610,          71,       14089,        7228,       13195,       11999,         229,       14300,        1748,        2587,       27969,         301,        1448,       13580,       11524,        1722,        2655,        1230
G66,         997,        1003,        4073,         857,       14792,         887,        1578,        1792,        9119,        1505,         371,        3476,        3437,        1180,         128,         567,        1010,         803,         220,        3089,         972,        1913,        2716,        3264,        2316,         409,         925,         656,         788,        1637,        1746,       11042,        2158,         206,        4031,        1647,         410,        2168,         333,         766,         293,         729,        6628,           0,         250,        3227,       13986,         702,        1185,         120
G77,           0,         207,          11,           0,         258,         291,         483,         123,           0,           0,           0,         519,         302,         341,         197,         111,           0,           0,           0,          32,         224,         560,        1252,           0,        1096,          77,         412,           0,          50,         250,         107,         130,           0,         119,         178,         781,           0,        1564,          60,           0,         100,           0,           0,           0,         191,           0,         122,           4,         856,          30
G79,        6316,        2821,        7253,        6357,        8254,        1185,        7426,        1764,        2248,        1075,        1189,        1391,       10284,        1876,         913,       12169,        1141,        6417,         169,        5092,        6250,       13102,        3559,        2411,        4401,         914,        2523,         621,         166,        1630,         548,       11420,        2626,         455,        9223,        5907,        3875,       15725,        2284,        5506,         804,         859,       24416,         339,         829,        3743,        5418,        2154,        1100,         827
G80,           0,           0,           0,           0,        1147,           0,           5,           0,           0,           0,           0,         608,         469,         100,           0,           0,           0,           0,          25,        1839,       27476,           0,          56,           0,           0,           0,           0,           0,         169,           0,          88,         354,           0,           0,           0,           0,           0,           0,         834,           0,           0,          40,           0,           0,           0,           0,           0,           0,         187,           0
G81,          44,           0,          60,         501,        2521,         105,         954,         293,         138,          26,           0,           0,         454,         264,          77,           0,         576,         270,         443,         395,         934,         946,         203,           0,           0,           0,           0,          93,          54,         128,           0,        1701,         462,           0,         271,         131,           8,         637,         232,         484,           0,         271,        3297,           0,         315,           0,         741,           3,         534,         304
G85,          60,           0,        2219,          35,         199,           0,           0,           0,        1738,          90,          85,           0,          27,           2,           0,           0,           0,          55,           0,          65,           6,           4,           0,           3,          46,           1,           7,          30,           0,          60,           1,          23,         202,          34,           0,           0,        2887,           0,           0,           0,          10,          60,         686,           0,           0,         306,          78,          10,         781,           0
G87,        2323,           0,           0,           0,           0,           0,           0,           0,        4084,        5766,       10150,           0,           0,          35,           0,           0,           0,        4825,           0,        7462,       24206,        1086,           0,           0,           0,           0,           0,           0,          17,        2362,           0,         259,        1133,           0,           0,           0,           0,          68,           0,       31203,           0,           0,           0,           0,           0,         300,           0,           0,          10,           0
G89,        6408,        6132,        9798,        5095,       23426,        1456,       31738,        1276,       13528,       27899,        4105,        1528,        4685,        1933,        8835,        1849,       16483,       21937,        3522,       11025,       14123,        9239,       29876,        6532,        4903,        1666,        1327,         841,        1457,       20209,        6051,       22316,       22521,        2588,        5174,        5081,       12590,        7393,        1150,       19100,        3457,        1045,       17877,        6211,       10455,        8815,        2750,         703,        5384,        2758
G90,         764,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           1,           0,           0,           0,           0,           0,           0,          24,           0,           0,           0,           0,           0,           0,         275,           0,           0,           0,           0,           0,        1606,           0,         316,         905,           0,           0,           0,           0,           0,         498,         377,        1354,           0,           0,           0,          29
G91,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        2200,           0,           0,           0,           0,           0,           0,        1421,           1,           0,           0,           0,           0,           0,           0,        1486,           0,           0,           0,           0,           0,         637,           0,           0,           0,           0,           0,           0,           0,           0
G92,           0,          64,          52,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,         416,           0,           0,           0,       11228,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
G93,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
G94,           0,           0,           0,           0,           0,           0,       16541,         599,        5488,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        2744,           0,        4076,           0,           0,           0,           0,           0,           0,           0,      159900,           0,      506171,           0,           0,           0,           0,           0,           0,        3407,           0,           0,           0,           0,           0,          13,          74,           0,        3858,           0,           0
I89,      250642,      330229,      185615,      115728,     2401081,      248602,      756744,      223422,      863974,      375609,      276546,       91005,     1302461,      303681,      128150,       60017,      369661,      640359,      184287,      479519,     1441298,      619812,      267712,      119962,      392246,      100846,      107186,       88413,      359846,     1296825,       98956,     3268554,      241319,       57706,      760164,      162840,      372712,     1144616,      295953,      198929,      114258,      185148,      532298,      127660,       92644,      475815,      453355,      152933,      550847,       50997
I91,           0,           0,           0,           0,           0,        2744,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       14965,           0,           0,           0,           0,           0,           0,       15234,           7,        8939,           0,           0,           0,           0,           0,          33,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
I92,           0,       22225,        4523,           0,       34866,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,      213830,           0,           0,           0,       85747,           0,           0,           0,      149754,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
I93,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,         110,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
I94,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,      221254,           0,           0,           0,           0,           0,           0,         167,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
K01,          35,        7096,          25,           0,         125,           8,         163,           0,           0,          14,        1269,           5,         295,           0,           0,           0,           0,           0,          13,         950,        2691,         252,        2897,           0,           4,          35,         279,           0,           0,           0,          11,         535,           1,           3,           0,           7,          22,         325,           0,         110,          18,           0,           0,          10,           0,         292,           2,           0,         170,           0
K03,           0,       12539,           0,           0,           0,           0,          69,           0,           0,           0,           0,         100,           0,           0,         152,           0,           0,           0,           0,          57,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        2480,           1,           0,           0,           0,           0,           0,        4451,           0,           0,           0,           0,           0,           0,           0,           0,           0
K04,        3363,        1379,        4731,        2648,       31726,        3126,        8962,         266,       16565,        5575,        1298,        2310,        5046,        6666,        1271,        1458,        2783,        1159,         379,        3657,        3701,        7471,        1494,        3728,        4278,         794,         154,         766,         597,         612,         320,       17613,       12751,         103,        8773,        1971,        1135,        7471,         158,        1721,         494,        1648,       29035,        2865,        1861,       10105,        9698,         799,        4737,        1017
K05,         509,          39,         415,         679,       10090,         855,         763,         271,        5946,        7461,         499,         256,        1559,         677,          13,         544,        3545,         189,          20,        4780,        2578,        3275,        1128,         188,        2088,          67,        1003,          80,         113,        1435,         186,        2686,         707,          48,        2739,        2376,        1201,         326,          23,         674,         330,         686,         388,           6,           0,         112,        2781,           2,         414,           0
K12,           0,        6282,           0,           0,           0,           0,           0,           0,           0,           0,       26906,           0,           0,           0,           0,           0,           0,           0,         109,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       12422,           0,           0,       38974,           0,           0,           0,           0,           0,           0,        1720,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
K16,        3429,         261,        6373,        1142,       19138,        7154,         640,           0,       13761,        2623,         483,        1046,        6228,       26967,        1513,        1717,        1922,        3133,        1206,        2580,        1291,       12544,        6167,        2411,        2598,         594,        6806,         817,         819,        4526,        1143,          36,       14566,        2217,        5012,        6084,        1968,        6259,         587,        2779,         347,         592,        5561,        1497,         311,        9906,        5696,        1821,        3699,         932
K18,       97001,       12744,       62378,       31717,      217804,       53358,       18644,        1389,       90070,       99752,       27935,       20415,      103024,       95002,       54884,       40686,       50855,       57921,       15246,       47411,       28991,      143305,       54442,       34282,       22894,       11331,       20672,        8393,       10602,       57929,       35939,       91066,       92644,       10925,      186285,       31293,       42016,      113603,        6335,       44373,        9661,       57567,      173307,       56084,        8944,      102110,       72983,       28027,       97075,        5985
K21,        7153,         856,        1011,        6472,        3119,        1535,        4415,         379,       11099,       26393,         458,         891,        2522,        1869,        2724,         991,        9828,        2985,          69,        3099,        1325,        1597,        1361,        3900,        3173,        1027,         778,         267,        1427,         515,        1565,        2432,        5700,         261,        2392,        2020,        1489,       10934,         286,        7673,        1970,        4528,       12383,        4645,         446,        6908,       10124,        5894,        1712,         522
K22,        1816,         521,           0,         137,        3997,         903,        5583,         360,        2990,        1605,         358,         312,        2712,        2673,         214,         288,         244,           0,        1027,          58,        3150,        4406,        4031,         871,        5389,          40,         911,        1197,         407,        2266,          51,        4884,        5168,         349,       10505,         377,         420,        3220,        1099,        2263,        1018,        1577,        5951,           0,         140,        5886,        2846,         557,        2773,         533
K23,        3330,        7028,        4342,        1549,       36047,        3639,        1622,        1800,       13492,        2005,        2219,        2388,       11943,        2520,        3798,        2330,        2955,         544,         991,        4393,       19688,        4319,        7213,        2517,        7703,        2456,         798,         514,         952,         770,        2021,       21221,        7070,         237,       35213,        9613,        2514,        8306,         564,        2475,        2132,        1688,       73033,        3687,        2605,       11096,        6756,        4866,        1841,        1000
K25,        2611,        1723,        3441,         454,        4499,        3574,        4730,         799,        9277,         529,        4413,         539,        2170,        1130,        1620,         606,        3233,        1689,         271,        9418,        6615,        3977,        2841,        1158,        2400,         371,         443,         471,        1426,        2753,        2199,       15894,        3714,         180,        4457,         525,        3586,        2951,        1494,        1334,         460,         714,        8184,        5503,         492,        3921,        1879,        1252,        7906,         568
K26,        1603,         654,         844,         167,        1331,         221,         284,          87,        3684,         207,         280,         159,        2449,         917,         206,         216,         945,        2997,          54,         433,         473,        2955,        1129,         173,         946,         243,         292,         269,          58,         448,         500,        7918,         542,           6,        1462,         534,          14,        1508,          64,         684,         122,         857,        5753,           0,          26,        2313,         187,         611,         354,          70
K29,         317,         335,         573,         137,        1058,         495,         102,         138,        1470,         484,         877,         297,          86,         116,          45,         728,         211,         562,         208,         451,         403,        1024,        1278,         386,         265,         117,          45,         132,          31,         154,         174,        1534,         897,          48,         937,         352,          52,        3726,          80,         102,         793,         542,         382,           0,          45,         376,         392,         288,         724,          73
K31,          26,         142,         561,          80,           0,        2061,        6642,         312,        7790,         855,        1855,          13,          53,         146,          16,          25,          10,           0,          27,         182,         355,         284,         150,        2494,         770,           7,          19,           0,         119,          54,          53,        2484,         383,           0,         167,         129,         203,        1047,           3,         160,          46,          72,        1642,       16205,         682,        1009,          11,          84,          33,          40
K32,        5715,        2271,        4237,        2601,       14902,        1908,        3168,        2677,       19666,        1623,        2870,        1983,        7691,        2271,         651,        1970,        1477,        6237,         528,        3370,        3360,        8887,        5719,        1723,        7293,         516,         949,         693,        2017,        2627,        2495,       32916,        5475,          76,        6795,        4408,         880,        5024,        1226,       11466,         976,        2375,       26139,         732,        1663,        5969,        3975,        1526,        1494,         770
K36,        9560,         351,          18,        3621,       77391,        1168,        4397,         273,        1261,       12307,        7574,         448,       13773,       10303,       12814,        6971,        7473,       21124,         176,        2727,        4529,       34663,        8984,        6874,       14066,         322,        9845,         438,         295,       12996,       11309,       36407,       17697,         381,       36428,        7414,       13548,       21729,         328,       14453,         611,        1335,       26973,       12258,          78,       36416,       10420,        2663,       13103,         439
K38,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
K44,        9197,       19584,       13902,        9179,       64677,        2432,        7258,        3148,       31621,       15916,       13806,       12938,       20050,       16548,       14426,        9600,       12462,           0,        1150,         849,        3289,       13095,       19864,        9860,       19605,        5348,        5620,        8538,        9935,           1,       10231,       25695,        7444,        2962,       26625,       11495,        5396,       36886,        1007,       14382,        4786,        9766,       64717,        6410,        3217,           0,       20020,       11048,        3849,        7075
K45,           0,         259,           0,           0,           0,           0,           0,           0,        2110,           0,           0,           0,        2849,        1443,           0,           0,           0,         100,         807,        1674,          61,          40,           0,           0,           0,           0,           0,           0,         346,        3378,           0,       90326,          74,           0,        2751,        4742,           0,        4279,           0,           0,           0,           0,         850,           0,           0,           0,         356,         615,           0,           0
K50,           0,           0,          14,          37,         199,       13987,          51,          83,         114,           0,        6878,        4140,          64,           2,          19,          34,         891,           0,           0,         390,         327,           0,           0,          47,          83,          39,           0,          26,         174,          39,         101,        2014,          44,           3,         126,         145,          21,          50,          31,           0,           0,         248,          67,         134,         123,         193,          54,          17,         353,          20
K52,         230,         107,         271,          36,         188,         128,         106,           7,          79,           0,        4248,         214,         211,         341,           0,          51,         136,          10,          31,          46,          67,         931,           0,         157,         101,         161,         226,         134,          44,           4,         219,         491,         191,          20,         971,         243,          86,          19,          83,          42,         364,          58,         231,           0,           9,         869,          77,          55,           0,          76
K54,        3799,         822,        2470,        1163,        4236,        1121,         456,         155,        9723,        5907,        1574,         508,        4079,        5882,        3732,        4536,        3660,        5565,        1093,        1682,         354,         878,        2570,        8105,        2172,        1073,        2325,         400,          27,         892,        1216,        1003,        8254,        1481,        2878,        2837,        1826,        2624,          95,        6351,        1110,         389,        7294,        1102,         288,        1841,        2992,         973,        1334,         642
K55,        1445,        3671,        1365,         364,        7602,        2775,         217,         106,        4744,        2290,         125,        3034,        1924,        2246,         360,         641,        1703,        3476,         492,        2478,         632,         600,        1046,        4102,        2530,        1175,         827,         805,         710,         578,         574,         669,        2177,         501,        1084,        1608,         149,        7956,         101,        3122,        1291,        1429,        3970,         193,         221,        3217,        3368,         902,        1240,        1722
K56,         414,         319,         207,         462,       15490,          99,          29,          35,        1757,        3325,         328,         227,         191,         155,          74,           0,         305,           0,         290,         370,         200,           0,         433,        1475,        1029,         713,           0,          21,           7,         283,         164,         193,        3072,           6,         161,         708,        1583,         794,           3,         203,         151,         484,           0,           0,         312,         693,         360,         146,        1042,          75
K59,         643,         299,         479,         355,        8220,         791,         393,         718,        5089,        3496,         941,         172,        1434,        1014,         514,         198,        1910,       26645,         445,        2181,         552,        3074,        3864,         467,        3712,         385,         246,         261,         707,         250,         408,        3760,        2259,          46,        2563,         654,         225,        7671,         184,         674,         215,         221,        4724,        1357,          98,        1335,        4787,        1358,        6325,         145
K61,         157,         188,        1048,        1233,        5247,        1090,         613,         383,        1001,        3655,        2532,         971,        3500,        1840,         218,         460,        2371,         250,          71,         539,         455,        1224,         802,        1721,         885,         224,         637,         417,         479,       10074,        1673,        7122,        2375,         226,        2556,        1135,         807,        1680,           7,         452,         438,         759,        1792,        9569,          69,        2241,         401,        1384,         473,         208
K62,        5068,         830,        5735,        4431,       32503,        7941,        6747,        1645,        7531,        7207,          75,        2104,        7797,        6730,         991,        3828,        3924,        2223,         531,        8791,        3099,        5246,        8428,        2403,       11455,        1620,        3588,        2336,        1613,        7314,        2147,       11993,       17610,          71,       13950,        7228,       13195,       11999,         229,       14300,        1748,        2296,       26774,         301,        1448,       13452,       11523,        1722,        2655,        1230
K66,         772,        1003,        4073,         857,       14792,         884,        1578,        1792,        9119,        1505,         371,        3476,        3437,        1180,         128,         567,        1010,         803,         220,        3089,         972,        1913,        2716,        3264,        2316,         409,         925,         656,         788,        1637,         486,       11042,        2158,         206,        4031,        1647,         410,        2168,         333,         766,         293,         729,        6628,           0,         250,        3227,       13986,         702,        1185,         120
K77,           0,         207,          11,           0,         258,         128,         483,         123,           0,           0,           0,         519,         302,         341,         197,         111,           0,           0,           0,          32,         224,         560,        1252,           0,        1096,          77,         412,           0,          50,         250,         107,         130,           0,         119,         178,         781,           0,        1564,          60,           0,         100,           0,           0,           0,         191,           0,         122,           4,         856,          30
K79,        6316,        2821,        7253,        6357,        8254,        1185,        7426,        1764,        2248,        1075,        1189,        1391,       10284,        1876,         913,       12169,        1141,        6417,         169,        5092,        6250,       13102,        3559,        2411,        4401,         914,        2461,         621,         166,        1630,         548,       11420,        2626,         455,        9223,        5907,        3875,       15725,        2284,        5506,         804,         859,       24416,         339,         829,        3743,        5418,        2154,        1100,         827
K80,           0,           0,           0,           0,        1147,           0,           5,           0,           0,           0,           0,         608,         469,         100,           0,           0,           0,           0,          25,        1839,         811,           0,          56,           0,           0,           0,           0,           0,         169,           0,          88,         354,           0,           0,           0,           0,           0,           0,         577,           0,           0,          40,           0,           0,           0,           0,           0,           0,         187,           0
K81,          44,           0,          60,         501,        2521,          33,         954,         287,         138,          26,           0,           0,         454,         264,          77,           0,         576,         270,         443,         395,         934,         946,         203,           0,           0,           0,           0,          93,          54,         128,           0,        1701,         462,           0,         271,         118,           8,         637,         232,         484,           0,         271,        3297,           0,         315,           0,         741,           3,         534,         304
K85,          60,           0,        2219,          35,         199,           0,           0,           0,        1738,          90,          85,           0,          27,           2,           0,           0,           0,          55,           0,          65,           6,           4,           0,           3,          46,           1,           7,          30,           0,          60,           1,          23,         202,          34,           0,           0,        2887,           0,           0,           0,          10,          60,         388,           0,           0,         255,          78,          10,         781,           0
K87,        1991,           0,           0,           0,           0,           0,           0,           0,           0,        1933,         153,           0,           0,          35,           0,           0,           0,        4063,           0,        1161,       14339,          12,           0,           0,           0,           0,           0,           0,          17,         516,           0,         152,         918,           0,           0,           0,           0,          68,           0,           0,           0,           0,           0,           0,           0,          36,           0,           0,           5,           0
K89,        6408,        6132,        9784,        4279,       23426,         854,       31659,        1276,        7093,       27899,        3699,        1528,        4273,        1933,        8828,        1849,       14000,       17580,        2560,        8724,        4614,        9238,       29554,        5928,        4549,        1666,        1327,         818,        1457,        2086,        5959,       22315,       22521,        2588,        5174,        5081,       12577,        7320,         559,       19078,        3457,        1045,       16685,        6211,       10455,        8414,        2748,         703,        5322,        2758
K90,         764,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           1,           0,           0,           0,           0,           0,           0,          24,           0,           0,           0,           0,           0,           0,         275,           0,           0,           0,           0,           0,        1606,           0,         316,         905,           0,           0,           0,           0,           0,         498,         377,        1354,           0,           0,           0,          29
K91,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        1203,           0,           0,           0,           0,           0,           0,        1421,           1,           0,           0,           0,           0,           0,           0,        1486,           0,           0,           0,           0,           0,         637,           0,           0,           0,           0,           0,           0,           0,           0
K92,           0,          64,          52,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,         387,           0,           0,           0,       10631,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
K93,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
K94,           0,           0,           0,           0,           0,           0,       16362,         599,        5314,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        2740,           0,        4076,           0,           0,           0,           0,           0,           0,           0,      159900,           0,      506171,           0,           0,           0,           0,           0,           0,        3206,           0,           0,           0,           0,           0,          13,          74,           0,        3858,           0,           0
M01,         807,           0,           0,        2451,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,         369,           0,          87,           0,        1470,           0,       12077,           0,         984,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        5117,           0,           0,           0,           0,           0,         612,           0,           0,           0
M05,           0,        4025,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,         460,           0,           0,           0,           0,          18,         181,           0,         600,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,         101,           0
M12,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,      585854,           0,           0,           0,           0,        3142,           0,           0,           0,           0,      134912,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        2713,           0,           0,           0,           0,           0,           0,           0,           0
M18,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,          79,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
M21,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,         418,           0,           0,           0,           0,       14386,        1332,           0,           0,        4892,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        2644,           0,           0,           0,           0,           0,        9235,           0
M23,           0,         114,           0,           0,         216,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,          26,           0,           0,           0,           0,         305,           0,           0,           0,           0,           0,          12,           0,           0,           0,           0,           0,           0,           0,         169,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           1,         169
M25,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        2784,           0,           0,           0,           0,         122,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        2386,           0,           0,           0,           0,           0,           0,           0,           0,         346,           0,           0,         654,           0,           0,         155,           0,           0,           0,           0,       12059,           0
M29,           0,         114,           0,           0,        6348,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,          10,           0,           0,           0,           0,           0,         276,           0,           0,           0,         616,           0,           0,           0,           0,           0,           0,           0,           0,           0,           2,           0,           0,           0,           0,           0,           0,         317
M30,           0,         572,           0,           0,           0,           0,       59694,           0,           0,           0,           0,           0,           0,      673633,           0,           0,           0,           0,       72830,           0,           0,        8419,       30731,           0,           0,           0,       58585,           0,           0,           0,           0,           0,           0,         244,     1248466,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
M32,           0,       55243,       92515,           0,       37087,           0,         598,           0,           0,           0,           0,           0,        7568,           0,       21102,       17151,           0,        2957,        5842,        7624,           0,       20371,        8114,           0,           0,       10345,       95469,           0,       50164,        4551,          50,           0,           0,           0,           0,       48866,           0,           0,           0,           0,           0,           0,      337958,           0,           0,           0,           0,           0,      343525,         298
M38,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           1,           0,           0,           0,           0,           0,           0,           0
M44,           0,           0,           0,           0,        3809,           0,        2878,           0,           0,           0,           0,       74126,       10703,           0,           0,           0,           0,           0,       21043,           0,           0,      183531,        3646,           0,       28088,           0,           0,           0,           0,           0,           0,           0,           0,           0,      208000,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
M50,           0,           0,           0,        3455,           0,           0,        4213,           0,           0,       37050,           0,           0,        1492,           0,       25894,       25716,           0,           0,           0,           0,       72106,       48168,           0,           0,       35657,           0,           0,           0,           0,           0,         227,       49984,           0,           0,       48825,        9864,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,          81
M52,        1793,        3321,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       50515,           0,        1535,        4141,           0,           0,           0,           0,           0,           0,        8346,           0,           0,         479,           0,         353,         176,           0,         452,           0,           0,         138,           0,        1964,           0,           0,        1844,           0,           0,        7247,           0,           0,           0,           0,           0,           0,           0,           0
M54,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,         368,           0,           0,           0,         581,           0,           0,           0,           0,         275,           0,           0,           0,           6,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        1771,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,         969,         235
M55,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,         224,           0,         136,           0,           0,           0,           0,           0,           0,         220,         468,           0,           0,           0,           0,          64,           0,         204,           0,           0,           0,           0,         512,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        1801,         323
M56,           0,          77,           0,         166,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        1108,           0,           0,           0,           0,           0,           0,           0,         255,           0,           0,           0,           0,         225,         256,           0,         160,           0,           0,           0,           0,           0,           0,           0,           0,           0,         184,           0,           0,           0,           0,           0,           0,           0,        3004,          30
M59,           0,           0,           0,           0,        2146,           0,           0,           0,           0,           0,           0,           0,           0,           0,        6974,          94,         411,          51,           0,       11896,        4363,           0,       10222,         283,         860,           0,           0,         699,          14,       29178,         813,           0,           0,           0,        1102,        1648,           0,       12592,           0,           0,           0,           0,        7228,          50,           0,           0,           0,           0,       17539,         164
M61,           0,         972,           0,        1200,           0,           0,        4969,           0,           0,        2650,           0,           0,        5396,           0,          90,           0,           0,        1315,          70,           0,           0,           0,        3455,           0,           0,           0,         378,           0,        1156,        3850,           0,           0,           0,           0,           0,        4715,           0,        3627,           0,           0,           0,           0,         842,           0,           0,           0,           0,           0,        9240,         197
M62,           0,           0,         194,         872,           0,           0,           0,           0,           0,           0,        3026,           0,       31453,           0,           0,           0,           0,           0,           0,           0,           0,           0,        4711,           0,       12364,         592,        6109,           0,         179,           0,           0,           0,           0,           0,           0,           0,         337,           0,           0,           0,           0,           0,           0,         484,           0,           0,           0,           0,        1629,           0
M66,           0,         177,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,         274,           0,           0,         873,       19321,           0,           0,           0,           0,           0,        4172,           0,           0,           0,          31,           0,           0,           0,           0,           0,           0,           0,          23,           0,           0,           0,           0,           0,          27,           0,           0,           0,           0,           0,           0,           0,         764,           0
M67,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        1545,           0,           0,           0,           0,           0,           0,           0,           0,           0,          16,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        1391,           0,           0,           0,           0,           0,           0,           0,      521135,           0,           0,           0,           0,           0,        7014,           0
M68,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
M79,           0,           0,           0,           0,           0,           0,        7863,           0,           0,           0,           0,           0,       90899,           0,       42166,        9538,           0,       56553,           0,           0,           0,           0,        5710,           0,           0,        6631,         190,           0,           0,           0,           0,           0,           0,           0,        4536,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,      158066,           0
M80,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,      132937,           0,         134,           0,           0,           0,        5648,       14161,       11436,           0,           0,           0,          23,           0,           0,           0,         194,           0,           0,           0,           0,           0,       79981,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        1308,           0
M81,           0,           0,           0,           0,          12,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        6001,           0,          73,           0,        1515,           0,         340,           0,           0,           0,          25,           0,           0,           0,           0,           0,        2687,           0,           0,       24937,           0,           0,           0,           0,           0,           0,           0,           0,           0,         904,       37010,          16
M87,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,         300,           0,           0,           0,           0,           0,           0,           0,        5900,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
M89,           0,      112067,           0,       49804,      651957,           0,      102916,           0,           0,        4516,       12170,           0,       54823,           0,      122266,       31412,       19404,       30605,        9602,         221,           8,       36116,       15807,        6573,      237120,        1088,       61227,           0,        1045,        2497,        8347,        7317,        3885,           0,        9849,           0,        1068,      145718,           0,        3754,          44,           0,       75906,        7586,           0,           0,       13563,        8735,      149617,        3371
M91,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       28565,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
M92,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
M93,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
M94,           0,           0,           0,           0,       22672,           0,           0,           0,           0,           0,           0,           0,        1062,           0,           0,           0,           0,           0,           0,           0,           0,        2188,           0,           0,        9149,        2186,        1012,           0,           0,           0,           0,           0,           0,           0,       49926,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,          81,           0,        7534,           0
N01,           0,        6287,        5697,           0,         256,        6793,        3096,           0,       55613,           0,           0,           0,       44447,        2261,           0,           0,           0,           0,         501,         502,           0,       55175,       26809,          88,           0,         222,        3543,           0,       14012,           0,           0,         642,       19642,         364,        1253,        1981,          28,        6241,           0,         429,           0,           0,           0,       34981,        3005,           0,           0,           0,        4986,        7998
N05,        3688,           0,       38541,        2681,      186956,       13870,           0,           0,         145,       21963,           0,         801,       35918,       24205,       38217,       13419,       15197,       55382,           0,       13342,      207783,       14312,       35636,        5484,        1977,           0,           0,         179,           0,       71159,           0,      254585,       12751,         385,       61054,        4601,       44433,      121148,           0,           0,         777,       68290,      236886,           0,           0,      177397,           0,           0,       80135,           0
N12,           0,      682818,           0,           0,     1104693,           0,     1609096,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        5091,     1804676,     1633465,           0,           0,        2388,           0,           0,           0,           0,           0,      947767,           0,     4719215,     4364280,           0,      167202,           0,           0,           0,      359435,           0,           0,     1968320,           0,           0,           0,     2756933,           0,           0,           0,        1851
N18,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       94297,           0,           0,           0,           0,           0,           0,           0,           0,           0,      109973,           0,      299576,      524746,           0,           0,        2600,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
N21,           0,           0,           0,        1033,           0,         692,           0,        1071,           0,           0,           0,           0,       16336,           0,           0,           0,         335,           0,           0,           0,           0,           0,         522,           0,           0,           0,           0,           0,           0,           0,           0,      270754,          94,         181,           0,         238,           0,       71610,           0,        1135,           0,           0,        1226,           0,           0,        7442,        4121,           0,        9235,           0
N23,           3,           0,           0,         885,           0,           0,           0,         541,           0,        3132,           0,           0,        1039,         150,           0,           0,       17315,           0,           5,           0,           0,           7,         791,           0,       14718,        1443,           0,           0,           0,        1283,           0,        2928,         465,          27,           0,           0,         100,           0,           0,         684,           0,         808,           0,           0,           0,       38075,           0,        3556,           0,           0
N25,           0,           0,        6791,        2885,      542849,           0,           0,        3831,         145,        2159,           0,           0,        7161,           0,         285,           0,       13142,           0,           0,          86,       24531,       51503,       14647,           0,       14784,        3015,           0,         419,           0,       42398,           0,      148361,        2961,        1422,       19433,       12623,         116,       85328,           0,        4954,         940,        7951,       12571,         943,           0,       73105,        1541,           0,           0,         588
N29,           0,           0,         895,           0,           0,           0,           0,           0,           0,           0,           0,         275,           0,           0,           0,        3487,           1,           0,           0,          43,           0,           0,           2,         190,           0,           0,           0,           0,           0,           0,           0,           0,        1450,           0,           0,           0,           0,           0,           0,          72,           0,          61,           0,           0,           0,           0,           0,           3,           0,        1105
N30,      107679,      117138,      691331,       52173,     2441308,       18545,       65054,           0,     1775378,           0,       77476,       90653,      744993,      189183,      134071,       89827,           0,      167768,           0,       54527,      888177,     1114051,      738670,      316989,       10658,       40500,       25007,      411865,       31626,     1014573,      466288,      816773,      474357,       49717,       11180,       24636,      100417,      148921,       25352,      313383,       24306,      260111,       52410,           0,        8035,       23716,      124542,       12278,     1247986,      124916
N32,       16084,       17792,       15195,       75991,     2878552,       33831,       15290,       12933,      125351,      293010,       19207,        7275,       57016,       47115,       55390,       46808,      115091,           0,           0,      241235,           0,     1143896,      118877,       34341,       11153,        8125,           0,        2983,           0,       68648,           0,      639932,      400300,       22232,      474379,       18280,      181394,      749592,           0,       27566,         695,        2455,       86315,       57851,          50,        7066,       64798,        7032,           0,       22326
N38,           0,         228,           0,           0,           0,       11832,           0,           0,         240,       15671,           0,           0,        1719,           0,           0,           0,        1177,           0,           0,           0,           0,           0,           0,           0,        2080,           0,           0,           0,           0,       78460,           0,           0,         740,           0,           0,        1080,           0,           0,           0,           0,           0,           0,        5709,           0,           0,         120,           0,           0,          35,           0
N44,      172485,       32552,      394064,      117237,     1346312,      207047,       19919,        6209,      186351,        8658,           0,        8758,      460482,      500166,      285968,      127451,       98235,       51438,          29,      319669,      110302,      673903,      379157,      102094,      169125,       16787,      127686,       43830,       21935,       25617,       15421,       72475,      156634,       45732,      596680,      211196,      322264,      378890,           0,        1439,       18322,      262796,       12866,       56096,       24869,      166951,      310973,           0,      376361,       29924
N50,           0,           0,        5080,           0,       64687,       11240,       11284,           0,       73209,           0,           0,           0,       38692,          11,           0,           0,       29986,       26681,        8986,        8139,           0,           0,       18995,       26076,           0,           0,           0,           0,        4006,       21086,           0,       84498,       37930,           0,           0,           0,           0,      122979,           0,           0,        5870,       33944,           0,           0,           0,       18445,       24624,       16489,           0,        1701
N52,        4184,         228,        1968,        2828,       28249,          50,        2089,        1837,       29353,       23833,           0,         215,        3978,           0,           0,           0,        5513,           0,           0,       20299,       19898,        9813,           0,        3702,        2202,           0,        1346,           0,           0,        8906,           0,       72672,       13022,         473,           0,           0,         775,       24117,           0,        4432,         119,         380,        9634,         952,           0,       11787,        1501,        6254,       12670,          36
N54,           0,         114,           0,         909,       22509,          63,           4,           5,        2084,           0,          35,           0,           0,           0,         650,           0,           0,           0,           0,           0,           8,        9516,           0,           0,           0,        1632,           0,           0,           0,       13061,           0,           0,         784,         388,        2914,          15,        1664,           0,           0,           0,           0,         280,          10,          46,           0,         703,        3960,           0,           0,         998
N55,           0,           0,           0,           0,         888,         970,           0,         228,           0,           0,           0,           0,           0,         244,         559,           0,           0,           0,           0,           0,          10,         200,         854,           0,           0,           0,           0,         539,           0,           0,           0,           0,          75,         205,         125,           0,           0,         869,           0,         184,           0,         138,         501,           0,           0,         827,        1016,           0,           0,         134
N56,        1391,           0,           0,           0,       23750,           0,           0,          17,         703,        1771,           0,          89,        1210,         237,           0,           0,           0,           0,           0,         165,           0,         139,        1164,          53,           0,           0,           0,         166,           0,         551,           0,       52089,           0,           0,        1060,        1798,           0,        5131,           0,        1189,           0,         884,           0,         275,           0,         172,       32115,           0,           0,         232
N59,         330,        2401,         111,           0,         260,       19948,           0,        3350,       23662,         132,           0,         165,        2671,         645,        2851,           0,         673,           0,           0,         131,        1717,      187106,       35458,         464,       13210,         265,           0,         386,         445,        1825,           0,        3534,        4709,        2365,        2306,           0,         436,        1706,           0,           0,        2757,         259,        9174,        9366,        2540,         142,        4239,           0,           0,       17981
N61,           0,        3658,        6604,          48,        5247,        3517,           0,        3761,       13688,        1589,           0,        4616,        3281,        4251,         967,           0,           0,           0,         630,        9441,       13346,       13120,        3765,       31700,           0,          48,           0,           5,           0,         353,        1011,       28066,         516,           6,       14924,           0,        1730,           0,           0,        1989,         155,        2390,       10855,        1168,         107,         263,       17015,           0,           0,          64
N62,       11708,        6441,        2388,         405,       90159,          65,          47,        2011,        1488,        2012,        2179,        1039,         220,        2008,           0,           0,       14986,       24555,           0,       56435,       21060,       10460,       37137,        1033,       13406,        6738,           0,          70,         418,       65015,         433,       12580,         107,           0,       11554,          67,        7004,       13744,         679,        3707,           0,        4973,           0,        1144,         330,      135549,       46086,           0,           0,        2034
N66,           0,           0,           0,           0,         323,        9735,           0,           9,           0,         842,           0,           0,        1771,          58,           0,           0,           0,           0,           0,           0,           0,        5010,        2126,          62,           0,       21587,         523,        1195,           0,        2239,           0,           0,           0,           0,          80,           0,        1193,           0,           0,           0,           0,           0,           0,        1603,           0,       11822,           0,           0,           0,           0
N67,           0,           0,      282845,           0,     9110642,      146869,           0,           0,      204155,           0,           0,           0,      453335,      228066,           0,           0,           0,           0,           0,           0,      108845,           0,      240104,      145391,           0,           0,           0,           0,       53687,      742947,           0,     5452055,           0,           0,       76247,           0,           0,           0,           0,           0,           0,      223930,           0,           0,           0,       13809,           0,           0,           0,           0
N68,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        2775,           0,           0,           0,           0,           0,        7666,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,      763504,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       22927,           0
N79,        9968,           0,           0,         549,     4560791,      268894,      198522,         167,           0,           0,           0,           0,        6238,      124509,         533,           0,        9866,           0,           0,           0,           0,      286411,      276233,        5733,       17973,        5190,           0,       10583,        4693,      505371,           0,     2245767,      447674,         413,      709204,       23115,           0,     1314451,        7467,       12374,         634,       26102,        1138,         412,           0,      270860,        6710,           0,       69150,        3767
N80,           0,       55398,           0,           0,        5942,           0,         940,           0,       79337,           0,           0,        1869,        2446,        6684,           0,           0,           0,           0,           0,         326,           0,           0,         863,           0,       50817,           0,           0,           0,       23943,           0,        3611,       59519,         499,           0,           0,       13869,           0,       24349,         996,           0,           0,       37181,           0,           0,        9754,         300,       72443,           0,           0,           0
N81,           0,           0,           0,           0,         518,        2416,           3,           0,       32007,           0,           0,           0,        1529,           0,           0,           0,           0,           0,           0,         890,          76,           0,       13694,           1,           0,           0,           0,         873,         163,           0,           0,       49768,         500,           0,        6638,         170,           0,           0,         356,           0,           0,        2483,         977,          40,        1909,           0,       22172,           0,           0,           7
N87,        1500,        3314,           0,           0,           0,           0,         400,           0,        2213,           0,           0,           0,           0,           0,           0,           0,           0,           0,        1578,           0,           0,        2506,           0,           0,           0,           0,           0,           0,         913,           0,           0,           0,           0,           0,           0,           0,           0,       13989,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,         148,           0
N89,      149796,       28314,       87358,       15113,      859485,       98353,      128026,       34156,      171424,       17712,       13985,        9508,      107467,       83010,           0,       14272,       42464,      109587,          28,       23000,      140282,      130472,       98777,       26171,        7675,       23303,           0,        6484,          50,      659216,       16514,      406833,      121257,       13877,       19055,       33789,       24545,      130163,        2337,      117083,       10700,       44825,      184896,       19081,        5778,       56599,       88052,       11014,        1354,       18415
N91,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
N92,           0,        6234,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
N93,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
N94,           0,           0,           0,           0,       81450,           0,           0,       20602,       93667,           0,           0,           0,       77888,           0,           0,           0,           0,           0,           0,      123707,           0,       95932,           0,           0,           0,           0,        1373,           0,           0,           0,           0,     1104930,           0,           0,           0,           0,        2992,       85023,           0,           0,           0,       14323,        4913,           0,           0,       75547,         460,           0,       64039,           0
Q12,     1867737,           0,     1857255,     1210623,    14932212,     1633421,       19965,      328168,     6590028,     4027000,           0,      643848,     4192825,     2689576,     1561101,     1675563,     2177844,     2316182,           0,           0,      370725,     4479797,     3177053,     1263347,     2514967,      521385,      639138,      791216,       20630,     3750062,     1307504,     6352449,           0,      280568,     4583788,     1925136,     1434302,     4591232,       28627,     1708147,      228909,       11881,     8750746,     1110074,      234435,           0,     4026261,     1182776,     2549824,      393076
Q18,           0,           0,       88898,           0,     2633834,       16765,           0,           0,      774586,           0,           0,       12364,      310963,           0,      129993,       50077,           0,           0,           0,           0,           0,      218375,           0,       93532,       73127,        4211,       34702,           0,           0,       37511,           0,           0,           0,         345,       69087,           0,      126200,      139412,           0,           0,           0,           0,      749116,           0,           0,           0,           0,           0,           0,       42469
R01,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       46606,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       11426,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
R12,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
R18,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
R30,           0,           0,           0,           0,       63535,         566,           0,           0,           0,           0,           0,           0,       77992,           0,           0,        1699,           0,           0,           0,           0,           0,           0,           0,           0,        1320,           0,           0,           0,         109,           0,           0,           0,           0,           0,           0,           0,         354,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
R32,           0,           0,           0,           0,           0,        1112,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        6576,           0,        2825,           0,           0,           0,           0,           0,           0,           0,           0,       11511,           0,           0,           0,           0
R38,           0,           0,           0,           0,           0,           0,           0,           0,           0,         345,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
R44,           0,           0,           0,           0,           0,       10850,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        2820,           0,           0,           0,           0,           0,           0,           0
R50,           0,           0,           0,           0,       41438,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,         244,           0,           0,           0,           0,           0,           0,           0,           0
R52,           0,           0,           0,           0,        6736,           0,           0,           0,           0,           0,           0,         192,           0,        3972,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        4566,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
R54,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,         321,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
R55,           0,           0,           0,           0,           0,        1890,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,         431,           0,           0,           0,           0,           0,           0,           0,           0,           0,         169,           0,           0,           0,           0,           0,          90,           0,           0,           0,           0,           0,           0,           0
R56,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
R59,           0,           0,           0,        4249,           0,        2983,           0,           0,           0,           7,           0,        1168,        3504,           0,           0,        2418,           0,           0,           0,           0,           0,        1071,           0,           0,        5961,           0,        7074,           0,           0,           0,           0,           0,           0,         486,        5500,        4810,         629,           0,           0,         277,           0,           0,        1934,           0,           0,           0,        3786,           0,           0,           0
R61,           0,           0,           0,           0,        4612,           0,           0,           0,           0,           0,           0,         322,      140553,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,          54,         959,           0,           1,           0,           0,           0,           0,           0,           0,           0,           0,           0,        1122,           0,           0,           0
R62,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
R66,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        1491,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,          50,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
R79,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
R80,           0,           0,           0,           0,        1775,           0,           0,           0,           0,           0,           0,         647,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,         917,           0,           0,           0,           0,           0,           0,           0,           0,        5663,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
R81,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,         160,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
R87,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,         727,           0,           0,         286,           0,           0,           0,           0,           0,           0,           0,           0,           0,         163,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
R89,           0,           0,           0,           0,       20494,       21744,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       14391,           0,        2830,         154,           0,         122,           0,           0,         885,           0,       13862,           0,           0,           0,           0,          64,         399,           0,        7959
R91,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
R92,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
R93,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
R94,           0,           0,           0,           0,      232969,           0,           0,           0,           0,        9764,           0,           0,      174857,           0,           0,           0,           0,           0,           0,           0,      650841,           0,       32792,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        5404,      330415,           0,           0,           0,           0,          27,           0,           0,           0,      146485,           0,           0,           0
S67,           0,      107126,           0,           0,     2083010,          43,           0,         808,           0,           0,       11542,           0,           0,       14232,       29529,           0,           0,           0,        7396,          29,      170610,       61765,           0,           0,           0,           0,        7271,        3471,           0,       55627,           0,      656296,           0,           0,           0,       40337,           0,      129535,       17048,           0,          14,           0,           0,         487,       10812,           0,       29118,           0,      128615,           0
S89,           0,           0,           0,        1737,        1065,        9506,           0,           0,        1969,           0,           0,         820,        2194,           0,         314,         197,           0,           0,          74,           0,           0,           0,           0,           0,           0,           0,           0,        1794,           0,           0,           0,           0,           0,           0,        2128,          91,           0,           0,           0,           0,           0,           0,       10751,         170,           0,        2774,        1729,           0,           0,        1413
T01,      112596,       61612,      313841,        5708,     2999953,        8597,          15,           0,      681484,       33779,           0,         108,      217726,        3020,           0,       35759,      370782,       48815,       41625,      219142,         310,      692835,        8200,       22731,       13607,      226373,        3407,       55595,         743,       11332,       33269,           0,      127087,        1953,       13239,           0,          90,      230255,        7414,       12331,           0,           0,           0,           0,        9664,       15721,     1606396,        2038,       52678,       84278
T09,     1279245,           0,     2494391,     1211806,    16871660,     1125265,     2184089,           0,    10042360,     3266812,     1332248,      544145,     4660572,     2505874,     1388742,     1297170,     1560091,     1379112,      617008,     1814949,     2303139,     4538124,     2516191,     1586879,     2195890,           0,      746975,     1184850,           0,     3778427,     1430498,     6364937,     2589005,      256203,     4479907,     1090876,           0,     5134300,      412820,     1673303,      339039,     3081250,     9926287,      984287,      175974,     1780604,     5797770,      727192,     2427900,      199428
T10,      112043,       11956,       42263,       27618,      279556,       22915,       41747,       11892,      534793,      114371,       38997,        4561,       59457,       32367,       12478,       58217,       57007,       50056,       34656,       24094,       60998,      122503,       55930,       36453,       23372,       14853,       15693,       13143,       10920,       76316,       28246,      217962,      158015,        5197,       79695,       57736,       10577,      146278,        8403,      111862,        9670,       64704,      400466,       17609,       13330,      107046,      128602,        7855,       39396,        1000
T11,          91,        1685,         917,         989,           0,        1248,       51020,           0,         397,           0,           0,           0,      206892,           0,        8508,        1077,         240,        1862,           0,        5173,        8350,           0,       57507,      126941,           0,           0,       10821,      426694,        2480,      287154,         966,         662,           0,       11354,           0,       12399,          80,         361,           0,       18318,          37,           0,        7034,           0,           0,          61,          14,           0,         509,           0
T12,      166346,       26109,      134971,       62942,      977529,      103191,      167845,       50009,      378461,      198773,      174515,       48464,      141426,      132472,      103327,       95619,      260391,      246250,       40341,      147489,      290189,      201094,      150069,       97296,      195004,       32506,       40494,       77279,       40037,      257910,       34929,      688284,      225408,       17311,      325865,      134882,       64295,      433370,       36844,       69666,       29746,      171340,      754674,       39959,       17931,      196416,      146309,       66813,      103806,       13878
T13,      445279,       40507,      423061,      320905,     2526231,      405952,      405748,       75874,     1252347,      490883,       76374,      152231,     1096031,      599025,      354145,      284490,      380406,      465940,      149826,      587845,      562584,      794603,      486797,      340587,      472024,      157743,      256014,      171967,       97912,      446284,      196439,      490283,      908553,       83158,     1242480,      378255,      354578,      751182,      119641,      303918,       87326,      684479,     2171338,      187377,       59680,      670770,      632262,      204654,      634631,       39728
T14,        5180,           0,        8506,       14676,      119159,        8414,       40500,         118,       93376,           0,           0,        1549,       46896,           0,        1696,        8299,       15548,        5544,        1621,        2993,       13426,       17415,         217,           0,           0,         190,         854,           0,        6180,        4707,        1153,       67069,           0,           0,       14089,        3601,        2698,       15669,        7286,           0,         374,           0,           0,           0,         103,           0,        3790,        2500,        7964,         252
T15,      376822,        2609,      112214,           0,       39955,        5866,      147141,       24652,      459376,           0,       92292,        2125,      798604,        4139,           0,         806,           0,       19513,        1112,      137723,           0,           0,         788,           0,         346,       13457,        2233,        4930,       50390,     1612339,        8875,     1750317,      279467,       25961,      662691,       14637,        6435,      649913,       68944,       38827,         781,        5596,      263277,           0,       16074,      114236,      202422,      223738,      268238,           0
T16,       68116,       16788,       53076,       89134,      622313,       62490,      124795,       20669,      438864,       80620,       32658,       19269,      304800,       79653,       96202,       54097,       17151,       81910,       46132,      139767,      237307,      395792,      169681,       54204,       99091,       13825,       46292,       47943,       42850,      255568,       23899,      704853,       37925,       23966,      287042,       73067,      104699,      307679,       41125,       29166,       14248,       81420,      573337,       27649,       14227,       15039,      215284,       33596,      180171,        5651
T19,      106870,           0,           0,       57582,       29124,       40267,       99420,       27898,      351813,           0,      104714,        3503,      555227,         260,           0,       10688,      429693,       31209,           0,      413706,       62819,       11478,      391804,           0,           0,        9645,       29447,       41740,      234146,      223140,       78328,     1311447,      399315,       73583,       59336,        8420,           0,      680159,       27204,       77019,       30952,      412835,     1771199,           0,      103142,      368963,      111883,      119297,           0,           0
T20,        2698,        1883,        3037,        1391,       36746,        3493,        5888,         599,       38286,        4704,           0,        1000,        4283,        7564,        8332,        2724,        2125,           0,        2941,         493,        1127,       11797,         779,        2948,        3332,        1390,         241,           0,        3035,        4880,        3347,       27685,        5758,         240,       24680,        2354,        1738,       14072,         241,        9649,         257,        1677,       25705,         700,         408,        6193,        8371,        8051,         238,           7
T21,           0,          96,          28,        4494,           0,        2135,         250,          66,       10090,           0,           0,           0,         867,        3352,        2017,         207,         361,        2229,         506,          13,         938,         629,         351,           0,        1455,       33456,           0,       74535,         492,       49946,         170,         239,        5854,         320,           0,        4561,         786,          44,         180,       31186,         163,           0,        5365,           0,         176,           9,         681,           5,         965,           0
T22,       94207,        1001,        4415,        8670,       96538,        3508,       12050,      307008,      117592,       25065,        1475,         613,       90494,        4146,       37184,       17307,       82226,      260744,        2367,       13490,       18286,       18669,        2183,       50490,       69015,         928,        6617,       10486,        3848,      124061,        2143,       37514,      164406,           0,      310468,       34494,        7468,      893118,       10190,       28920,         748,      249682,     1228233,           0,        1837,       24814,        9170,        4484,        8631,        3879
T23,       17320,       16201,       14979,       17189,       67335,       55339,        4005,         871,       14454,       20552,         252,       20957,       18747,       13995,       14439,       10720,       15912,       12584,        9050,       10486,        4369,       38901,       37482,       11239,       20667,       26377,        8488,        4596,        6233,       12051,       11325,       35589,       14737,        6495,       23491,       14038,       30248,       42624,        1390,       12414,       10735,       22424,       46665,       13135,        5087,       18393,       28956,       14149,       45736,       22010
T24,      157861,       24289,      225722,       89632,     1422013,      112787,      184660,       20422,      762437,      203731,       57961,       60211,      711801,      137645,      249609,      113630,      156876,       95928,       53987,      185676,      236694,      576090,      449866,      102289,      217777,       42560,       65618,       82896,       49795,      314169,      105166,      612820,      307522,       33664,      529242,      446105,      265461,      464508,       54976,       88940,       25888,      177350,      744896,       49893,       41560,      267968,      222233,       86127,      219736,       37594
T25,       13877,        2352,        9580,       11418,      105722,        4114,       25036,         129,       95747,       37869,         272,        3547,       41638,           0,        6667,        7865,        9198,        9824,        9587,       19689,       60002,       32814,       22355,        7361,       15195,        3151,        4647,        9650,        7185,       26464,        5714,       91925,       52827,        2924,       27425,        6358,       14781,       47247,         424,       13020,        1670,       35964,       69218,        7746,        3253,       22363,       20616,        4230,       20623,        2152
T27,        8412,         322,           0,        8873,       81057,           0,           0,        2585,       23961,           0,        3293,       29670,           0,           0,        7622,        3715,        6353,        7562,           0,           0,           0,       17633,           0,           0,       15656,        1222,           0,           0,        4399,        3317,          72,       49641,           0,           0,         648,           4,        7622,       39928,           0,           0,           0,        5151,        8212,           0,           0,           0,       14188,        9527,          13,        1567
T28,       92241,       27641,       38141,       48594,      655188,       61071,       66379,      136492,      230785,       57923,       11464,       33895,       44055,       38445,       58198,       27667,       47991,       42744,       27532,      120389,       55912,       99696,      141019,       35901,      106454,       22844,       44775,      100763,       27879,       76951,       13267,       82209,       93601,       19989,      246249,       43899,      180798,      242528,       17890,       91326,       35374,       68721,      384103,        9695,       13260,       70089,      150701,       18275,      126742,        2697
T29,         155,           0,       25325,        3636,        6887,        7095,        5065,        1165,        7740,       41137,         175,        1707,        2765,         523,        1829,        2284,        2475,        1068,         528,        1747,       23771,       20406,       10022,         102,       10602,         696,       14292,        3783,        2384,        2584,         649,        3189,        2166,           0,        3787,         353,        2250,        8032,         663,       94619,        4963,        1878,       13669,         574,        2593,        4168,        3448,         425,       12681,         366
T40,     1367622,           0,     1408535,      958302,    17547763,     1925168,     2236725,      546856,           0,     3580714,      962217,      563351,     5049815,     3015729,     1509125,     1194328,     1729182,      977593,      614442,     3225341,     5689768,     5553342,     3449331,      637637,     2141522,      345644,      715590,           0,       35980,     4475079,      577069,    16033524,     4288148,      136944,     5110016,     1315068,     2583527,     4735861,      528089,     1530996,           0,       99108,           0,      925004,      286108,     3811860,           0,      669694,     3638710,           0
T41,      218131,      176070,      303239,      184281,     4633449,      146042,      701942,      155070,      950235,      521399,       68429,       87933,     1229274,      606169,      174285,      254892,      269067,      219190,       91955,      320068,     1062930,     2174644,      551822,      167873,      252392,       68872,      113142,           0,      144157,     1085055,      122528,     3120034,      737260,       71461,      652543,      162214,      263682,     1486299,       79320,      219052,       36540,      421960,           0,      125191,       34932,      306667,           0,      184625,      541284,           0
T50,       30176,        1616,       40617,       11425,      530845,       33866,      223187,       23240,      347052,       87672,       28120,        6845,      155254,       98375,       88146,       87592,       76135,       52577,       10080,       81646,      277533,       56981,       43732,       10242,       54308,       10886,       11981,       23608,       33218,      304770,       12200,      799405,      119683,        3595,       86498,       59210,       45341,      593992,        9477,       27192,       23591,       44483,      152354,        8189,        8705,       82996,       35239,        9321,       53202,       26039
T51,       20928,           0,           0,       10479,           0,           0,       60985,       36723,      922210,         127,        7922,           0,       35157,           0,        7899,           0,        4259,           0,        9292,       73791,       46053,           0,      102152,           0,           0,           0,        4379,        2075,       30882,       61539,           0,      327031,           0,           0,           0,        6352,       17518,      208999,        3515,       20043,         116,       78824,           0,           0,       12723,      114296,      278481,        4657,       29301,           0
T53,       70892,      827522,           0,       12922,       46373,       15409,           0,           0,       54362,           0,           0,        2560,           0,         696,           0,      105663,      199261,      370439,           0,           0,           0,       33483,        2720,       34214,          61,       90893,        1628,       44176,           0,           0,      330669,           0,        1863,      110396,        9060,      372464,       74744,           0,           0,           0,        7007,         951,      919299,       18872,           0,        1678,       84031,      152945,        1881,      298869
T99,           0,          16,           0,       13310,           0,         218,           0,        1745,           0,       17934,           0,       28657,           0,           0,           0,           0,           0,           0,           0,       37024,           0,       10462,           0,           0,        2212,       43356,           0,           0,        1857,           0,           0,           0,           0,           0,           0,       21636,           0,       15580,          89,           0,           0,       23465,           0,           0,       11748,       36719,           0,           0,       12659,           0
U01,           0,           0,           0,           0,       78778,           0,           0,           0,         649,           0,        3640,           0,           0,           0,           0,       13932,           0,           0,           0,           0,           0,        5461,           0,           0,           0,           0,           0,        6990,           0,       18559,           0,        7213,        5521,           5,        3225,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       13565,           0
U11,        6207,        8315,       44261,         324,       27080,        1211,         344,           0,       10791,         870,       16111,        1921,          99,         545,       14023,         844,        6377,        1267,       15424,        2622,           0,        4725,        7628,         369,         860,         113,         726,         333,           0,         233,        5379,       10589,           0,        1189,         399,         195,        6571,        5328,         547,         298,        2135,          37,        3277,        3215,           0,         502,        2612,          14,         192,         238
U20,      360144,     2052171,      167860,      155618,     1901899,      323286,      420133,      218003,      720844,      211275,      164609,      168986,     1045067,      447525,      184179,      209089,      330917,      543266,      177775,      403583,      988162,      636039,      349652,      128220,      432468,      196906,      163634,       69747,      338460,     1080108,      499401,     2350260,      407013,       66403,      573008,      226506,      495362,      675632,      266174,      233012,      152900,      219308,     1373769,      182665,       86051,      545827,      401855,      135559,      481865,      318237
U30,       17530,        5647,       39202,        3768,      429138,       39237,       57586,        5949,       73335,        9307,       17499,        8686,       46679,       60632,       40541,       16084,       40377,           0,       26766,       84185,       42925,        6602,       31754,       15697,        7246,        4302,         879,       11301,       20935,      142487,        8242,      179848,           0,        3924,       38356,       10394,       46466,       97642,        3705,       47754,        4003,       29887,       95442,       12718,        7388,       44731,       55664,         564,      109893,        1374
U40,        5518,       39110,        5931,           0,       16482,       10464,        1203,        1629,        5824,        9307,       35009,        6217,        1338,         245,        1652,        3306,        1966,       13585,        8997,         254,        1144,        2940,        2291,       10840,           0,       16149,       19229,        7838,         742,       38668,      166391,       35435,       11434,        4837,           0,       13971,        9177,        9651,        3714,        3284,        2201,         403,       41459,        4899,         410,        1273,       44913,         617,         262,        9324
U41,      104901,      552049,        4268,         768,       44646,       48872,        9075,           0,           0,           0,           0,           0,           0,           0,          86,        1699,           0,      350808,           3,           0,        3134,       37046,        6437,         345,           0,        6428,        3897,           0,           0,           0,      101747,           0,           0,       10430,           0,       15014,           0,         162,          19,         170,         717,           0,      116035,        9335,           0,           0,           0,           0,           0,       26446
U50,      122276,        9307,       83866,       28303,      392572,       98305,       92469,       18369,      239044,      127922,       21244,       29217,      336189,      121116,       67926,       32092,       29412,       48797,       17975,       90428,       49731,      246612,      197366,       33971,       64474,       12994,       56740,       26746,       21104,       97502,       87379,      249856,      160588,       18018,      197847,       43215,       75746,      198498,        6752,       91395,        6957,       93877,      367330,       40356,       24523,      168798,      169380,       22056,      154394,       17270
U95,           0,           0,      109588,           0,      849970,      101606,      214674,       42481,      972500,      459664,           0,       31182,      578838,      215255,       69151,       65058,      157716,      149914,       65324,      424854,      646753,      565921,      119437,           0,      140682,       17268,       26171,           0,       43287,      644901,           0,     1068880,           0,           0,      688059,           0,      262779,      679452,       51572,           0,       74568,           0,      939148,           0,       20840,      389259,      146790,       55592,      196470,           0
U99,       27231,      184027,       95860,       77161,      337457,       93754,      262546,      174309,      636296,       59668,       44582,       48134,      236039,      201945,      154925,       70742,       38634,       83667,      107144,      125121,      593338,      114032,      129749,       28293,      133249,       64022,       38174,       16491,       30335,      940257,       20155,      623454,      126530,        8586,      171226,       62135,       26459,      349490,      126173,       52909,        4281,      112069,      909456,       46637,       17660,      255819,       80911,      124491,       32683,        6368
V34,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
V98,      767100,      502363,      622055,      470275,     3982609,      634161,      996203,      263081,     2930157,     1462043,     1107253,      323080,     2011593,      957049,      678442,      567756,      903458,      866917,      197894,      917809,     2167758,     1523926,      780302,      546155,      747704,      279055,      412106,      415928,      169947,     2145616,      359236,     5124042,     1381304,      188302,     2122026,      495462,      518642,     1588460,      333282,     1012402,      236284,     1078046,     3288347,      453641,      139770,     1140287,     1602582,      538948,      843192,      254751
W01,     1824135,     2764894,      492372,     1395928,    16966248,     2977686,     5081715,     2142771,     5770540,     1274598,      976879,     1104334,    12816605,     3811914,     1276120,       32887,     2463113,     5070146,     2426072,     4655888,    13667088,     7851877,     2473191,     1261224,     5359913,     1604025,     1118722,      529574,     4681461,    10775176,     1140753,    30472580,     3007686,      719814,     6133173,     1388886,     3105380,     5817877,     3137284,     1467826,     1437168,     1516502,     3118611,     1545666,     1024858,     5984527,     2853898,     1403191,     4750331,      623801
W31,      236716,       14891,      148127,       11964,     4648592,      288683,      528659,      111935,      748185,     1344615,      429871,       30552,      182980,      246187,       61536,      345495,      866471,       31789,       63870,      111871,      421738,      122485,      125878,      188236,       52555,       78315,       18078,      230459,       77909,     1881064,      142015,     2137773,      264146,        3599,      757042,      409013,        4038,      784234,      374306,      271811,       38731,      173791,     2803387,      147585,       45671,      296709,      207935,      238669,      110233,       32488
W61,     1849399,    17334991,     2098323,     1200673,    13388122,     1690602,      722875,     1218174,     7969647,     2149819,     2156450,     1019075,     3607461,     5359317,     1041600,     2337488,     1848916,     2750661,      270276,     2390776,     1888627,     4987761,     4190228,     1596133,     2007267,     1283059,     1354062,      810192,      457402,     5512417,     7058638,     6001927,     4154649,      596785,     3948866,     2934861,     3975440,     7094859,      336460,     1276314,      571115,     1237059,    18435119,     1290819,      204973,     4489087,     3131212,     1045316,     1154623,     2760586
X01,      144714,       76947,       78472,       33083,     1879731,      166380,      161569,         331,       24567,      214341,           0,       56736,      536967,      121647,      105824,      109737,      230228,      210324,       62781,        9676,      172259,      263872,      231359,      112818,      202050,       25987,       60060,       19900,       40317,      583968,      151858,      259663,      349330,       21470,     1142448,      168992,      190022,      404401,        9676,       64945,       27685,       28122,      926016,       22830,       16512,       47416,      323945,       30527,       11967,        7097
X02,       89999,       53461,       19738,        9232,      699939,      108811,       36716,       20238,           0,      108772,       63289,       27945,      308279,       53812,       26548,       39313,       84053,      131127,       26353,       78464,      202011,        7543,       83568,       77704,        1074,       58287,        1509,        6633,       25239,      135016,       31515,      144402,      170949,        8869,      331660,       25426,       97372,      198445,       78464,      242104,       18505,       89052,      336493,        9198,        4674,        2020,      136052,       69318,        7238,        2108
X05,       53494,      104903,       83257,      136875,     1831217,      298340,       23057,        2257,     2039902,      168698,           0,       97927,      516055,      142325,      160810,       30281,      113822,       59225,           0,        4694,       14516,      410826,      323763,      178046,      240070,       65106,       60357,      271873,       16760,       65655,      163150,     1007036,      127419,       21205,     1873968,       83059,      271508,      484061,        4694,       85144,       27126,       36592,      320076,      139966,        3065,      472557,      223782,       20374,      629274,       46547
X06,      296200,      108904,       26127,       91493,     1563466,      173880,      444413,       68768,      677335,      630869,      298724,       48838,      558700,      322958,       49859,       87301,      388816,      675721,      190180,      612493,      751858,      828957,      102834,      125777,      197068,       36916,        8182,       99588,       22036,      302239,       78046,       68904,      533232,        9877,      509846,      308467,      123565,      773681,      154080,      293913,       17088,      284388,     1128514,       76379,       42169,      235530,      568856,      236178,      246935,       35162
X08,      928249,      501757,     1139690,      461343,    11514675,     1038611,      489544,      286127,     2152190,     1708266,      424682,      314477,     2226510,      667559,      722723,      489027,      749548,      964466,      227475,     1498576,      409770,     1732964,     1691436,      387751,     1139518,      188548,      231368,      288390,       33148,     2823072,      438107,     7121187,     1972013,       65598,     5809808,      728190,     1044441,     3024765,      470935,      933766,      209435,     1229684,     4027895,      540385,      115620,     1315888,      391397,      197163,     3917469,      165799
X09,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
X11,      493261,      274405,      536507,      225843,     6083508,      638709,      760541,      120787,     1144595,      784302,      291608,      127333,     1820168,      484173,      283978,      280271,      539406,      869586,      234912,      785905,      753112,     1619966,      768261,      350399,      472973,      160553,       49169,      221046,       93071,     1902561,      310493,     3750104,      941824,       52305,     3360815,      565738,      585460,     2146682,      225878,      529912,       65241,      398213,     1982815,      194472,       45505,      689695,      968347,      213486,      958137,       80752
X12,       36490,       11842,       24820,        4645,      373291,       27553,       10325,        1798,        2424,       38848,       39785,       12385,       74552,       33465,       21158,       19924,       14665,       51016,       12879,      491361,      130756,       47355,       31830,       36976,       48694,       12897,        5153,        7664,        9306,       84669,       31990,       64654,       78502,        5503,      120779,       24937,       33479,       21157,        4944,       44897,        5622,       17636,      246823,        9462,        1035,       50121,       48803,       10131,       24225,       10398
X14,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
X21,     1320825,      236018,      809929,      406794,     2711973,      334606,      551064,      164842,     1596851,      666841,      408356,       45898,     1131961,     1106648,      422801,       51769,     1230036,     1291135,      180077,      496893,       98690,     4459297,      898765,     1889619,      824222,       51014,       75737,      215870,        2779,         693,      152732,     1071983,     7063858,       26269,     1316121,      686323,      767300,     1851254,        6958,     2992809,      414682,         683,     1658982,      348798,       85466,      970176,      936064,      134395,      148373,        9774
X30,      200214,     1510548,     3891631,     1907884,    23385194,     2132895,      814269,           0,     5946412,     6647453,     1107923,      749263,     2835935,     6160547,      173601,      547774,     2322088,     3686598,      136133,     3346000,      876908,     3513881,      334167,     2646484,     1981377,      308859,      489128,     1733931,           0,       92170,     2603886,    22318586,     6494116,      176960,    36336948,     1923616,     1956952,     8784090,     1644840,     8627898,      283625,     2305998,    15733392,      824684,       57599,     2664391,     5791991,     1963049,     5044680,      390003
X40,     5189845,     1141251,      645150,      886756,    24161241,     2341401,     1937328,      752921,     3214185,     2766070,      982568,           0,     5029584,     2775077,     1937381,      963516,     1704552,     1673139,      821500,     4968750,     1262729,     4022099,      267810,      935471,     6070121,     1054406,      313476,      584776,           0,    15392589,     1758817,    10282640,     6177491,       68471,     8719839,      215197,     1027260,     3910243,      172801,     2992811,      275098,     3120006,    11529562,      757063,      223470,     2000170,     2058879,      109038,     9792613,     1094721
X41,     3889152,     2352839,     5953826,     2630544,    38927829,     5455361,     2343766,      794596,    21066861,     9150112,     1662502,     1119273,     8239653,           0,      941757,     1295393,     4500764,     3732731,     1401600,     5580178,      993208,     7376960,      522722,     1944709,     4170353,      528242,      645267,      974818,           0,    12418742,     2079875,    33861597,     3167855,      222669,    17131371,     2734744,     1314544,    17227038,     1198162,           0,      855937,     2793286,    13222041,     2625540,      635910,     3952062,      975243,           0,    13947055,      525734
X42,     1140738,        9397,      208447,           0,     5405996,      578577,       69089,           0,           0,       11296,      270932,      134005,       26776,         469,           0,           0,      342039,          16,      279100,        8472,        4077,      778800,           0,           0,       18152,       99776,           0,           0,           0,           0,        4448,     3776384,           0,         161,       44052,           0,      295852,      894686,           0,           0,           0,           0,     1334937,       15921,        1018,       17218,      699862,        6881,      385770,           0
X44,           0,      832053,      753511,       11845,     5792702,     2012827,     2603807,      341389,      939767,      352554,     1081245,      349860,     5326390,        3050,     3346231,      412825,           0,     1371228,      821338,       95509,     2154413,      851898,    13058611,      772892,      284440,       99976,      137029,     1266328,      339048,      219856,           0,     4739019,       75939,      654092,      946741,      385056,     1921230,     3621904,           0,           0,      203124,      688805,     1725247,           0,           0,     4417738,     5237600,           0,       29675,      107953
X47,           0,           0,           0,         116,     1357863,      332457,      313110,      264832,      830979,       21704,      449095,           0,     1616132,           0,      897920,       45237,           0,      196737,       13613,      472084,      422422,      815942,     3603760,           0,       62239,      276059,           0,      482853,      123120,      683435,           0,     3755360,      314918,       14709,     2229119,      105897,     1504611,      949642,      157899,           0,       67220,           0,        4566,      165443,        2577,     1208298,     2082627,           0,           0,           0
Y01,      148048,       88730,      176337,      182734,     2773284,      192269,      411779,       59379,      685186,      359195,       74434,       65414,     1294424,      217506,      155586,      179259,      209911,      209120,      121836,      471724,     1083552,     1257461,      397717,      138203,      371965,       51423,       43638,      131840,       70346,      720571,       83106,     2066001,      240911,       27028,      928836,      109744,      266848,     1761645,      159429,      176558,        8949,      265682,      950076,       75952,       47939,      258153,      592961,      122196,      408173,       29489
Y02,       39792,       15147,       26147,        8462,      181364,       26404,          64,       15705,      106972,       74771,       22490,       16748,       58703,       70297,       44236,       45451,       27352,       47622,        2947,       14818,           0,       35007,       15501,       27642,         706,        6916,       11717,       16218,       11168,      104405,       18420,       17682,      103508,        3648,       55343,       30450,       74810,       37450,        7751,       32416,        3435,       46181,       35480,       24866,       12631,       37985,      121646,       10451,       84419,        8494
Y04,       50686,       52395,       60925,       53482,     1687525,       67248,     -534851,       15113,      303506,      100819,       55935,       24615,      354566,       54143,       41169,       54332,       70771,       56039,       50925,      124838,      -25288,      305836,       88375,       38237,       54505,       17340,       11012,       34176,       11700,      466143,       23378,      757849,      127588,        7661,      245727,       42900,      135040,      668361,       94342,       61482,        2256,       90060,      406384,       22270,       16327,       98288,      256141,       52404,       81412,        6803
Y05,      183313,      102868,      158842,      151678,     3245056,      173046,      513640,       63937,      681988,      258758,      157125,       72512,     1136262,      142197,      157299,      169134,      224272,      147596,       99121,      344008,      784851,      973498,      332154,       89724,      298922,       53108,       38178,      129086,       40839,     1188363,       59633,     2032111,      249537,       25551,      734701,      110987,      337560,     1510705,      171353,      176902,       10459,      238201,     1008656,       63683,       53212,      209677,      814538,      125596,      386623,       23159
Y06,       49747,       58182,       59345,       51755,     1676592,       67160,      171277,       15082,      301639,       98171,       55874,       24696,      351493,       50685,       40736,       54515,       70305,       54471,       56368,      118754,      241726,      296698,       85424,       38258,      119518,       17441,       11036,       34222,       11268,      494731,       21609,      772244,      127451,        7656,      240257,       42686,      135055,      660241,       88797,       60886,        2250,       87494,      404004,       22073,       15774,       98678,      307644,       52048,       81453,        6709
Y07,      555802,      199525,      414725,      145938,     2446015,      402826,       48735,      231714,     1645089,     1197995,      263024,      233300,     1083964,     1064050,      644992,      691708,      390518,      809174,       54348,      341398,       30520,      702000,      239518,      450910,       65631,       95970,      174876,      238735,      190448,     1799631,      287784,      398085,     1492417,       49919,     1007953,      449488,      998374,     1358886,      104813,      485917,       48403,      711786,      537624,      374585,      183967,      601877,     1574002,      153318,     1291130,      127186
Y08,        -775,       -1796,       -1931,       -1915,      -80327,       -3514,        -927,       -1054,      -21504,       -1208,          27,       -1416,       17960,       -4419,       -1304,         119,          23,        -255,        3975,       -6321,        9536,       -6843,       15907,        1736,       -7949,        -166,        2312,       -2002,          70,      -27984,       -2068,      -22644,         147,        -402,      -13950,       -2575,        1970,       -6289,       -1017,        -526,        -217,       -4120,      -24863,         849,          78,        1035,      -13803,       -1279,        2491,         -33
Y10,           0,           0,           0,         225,       18603,           0,           0,           0,      172486,           0,           0,        3493,           0,           0,           0,           0,         940,       26356,           0,       24076,           0,        4431,        3595,           0,       32785,       42169,           0,       16581,       87175,           0,        8397,      202738,           0,           0,       38881,       23600,           0,           0,           0,       30029,         977,           0,           0,        4494,           0,           0,           0,       15000,           0,      101270
Y11,           0,        2649,      315369,        1458,     1566157,      404454,       98450,        9017,           0,           0,           0,      114809,        6043,           0,         549,       63951,      145024,           0,           0,      158483,       29633,      235424,      135365,           0,        3643,      181626,           0,      395966,           0,      142167,           0,     1705805,           0,      104623,     2100791,      230603,      103174,      450880,       15895,       59061,        2756,           0,        1282,      165115,           1,           0,     1022783,      371371,        2750,        3130
Y12,           0,           0,      123563,         401,      542239,       51454,         760,           0,        3154,           0,           0,       19835,          22,           0,          64,           0,           0,           0,           0,       50225,         408,       63010,        2284,           0,         134,       15470,         136,       56995,       11625,        2589,         360,      439292,           0,       19281,      929998,       59014,       17027,       93456,          70,        3211,           0,           0,         279,       22379,           0,           0,      391994,       96149,           0,        1785
Y13,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        7378,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
Y14,           0,        2101,      189560,        1647,     1219157,      307258,      105618,        7653,      122436,           0,           0,       75142,        8100,         818,         566,       38396,      129150,       26894,           0,      207486,       23868,      147476,      108874,           0,       19032,      106886,         566,      322628,       60131,       96973,        1941,     1303658,           0,      106701,     1832500,      287541,       89235,      281118,        3678,       81835,        2974,           0,         481,       96682,           0,           0,      866257,      493491,        1961,       73056
Y15,           0,         120,       44976,          88,      439872,       76454,        6195,           0,       51179,           0,           0,       17094,           0,         681,         153,        5957,        5182,         470,           0,       27003,         841,       62142,       20657,           0,        7312,       20865,           6,        5700,           0,       15478,        7580,      263619,           0,        8382,      208331,       22596,       60569,       62987,         362,        4496,          17,           0,           0,       17206,           0,           0,      151236,       27783,           0,        5320
Y21,           0,        1803,     1323775,       14195,     6075507,      863637,         166,        1000,        5700,           0,           0,      255070,        1103,         488,           0,       37516,       11634,       13829,           0,      662004,       12649,      820335,       63657,           0,       58498,      369416,        3067,      607871,      209129,       90774,       15164,     5860695,           0,      246430,    10897010,      593565,      254645,     1320711,       29258,       75479,        1340,           0,        5452,      397203,          21,           0,     5516483,     1113437,        8460,       34468
Y50,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        4762,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
Y51,           0,           0,           0,           0,     2635838,       34197,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,      188796,           0,           0,           0,           0,           0,           0,           0,           0,           0,      320958,           0,           0,           0,           0,           0,           0,           0,           0,       97982,           0,           0,           0,           0,           0,           0,           0,           0,           0,        2992,           0
Y52,           0,           0,           0,           0,       28004,        2378,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       20652,           0,           0,           0,           0,           0,           0,           0,           0,           0,        6593,           0,           0,           0,           0,           0,           0,           0,           0,        1933,           0,           0,           0,           0,           0,           0,           0,           0,           0,        4620,           0
Y53,           0,           0,           0,           0,     1766164,       33259,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,      144240,           0,           0,           0,           0,           0,           0,           0,           0,           0,      291760,           0,           0,           0,           0,           0,           0,           0,           0,       80175,           0,           0,           0,           0,           0,           0,           0,           0,           0,        6022,           0
Y54,           0,           0,           0,           0,      132013,        1433,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       48285,           0,           0,           0,           0,           0,           0,           0,           0,           0,       27689,           0,           0,           0,           0,           0,           0,           0,           0,        5392,           0,           0,           0,           0,           0,           0,           0,           0,           0,         403,           0
Y55,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
Y61,           0,           0,           0,           0,     1054709,       63014,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,      335368,           0,           0,           0,           0,           0,           0,           0,           0,           0,      129067,           0,           0,           0,           0,           0,           0,           0,           0,       54127,           0,           0,           0,           0,           0,           0,           0,           0,           0,       55818,           0
Z00,     2334706,      897081,     1515012,     1238798,    12351581,     1751510,     2387777,      627553,     5622214,     2722462,     1652092,      503023,     3908454,     2282401,     1873808,     1307038,     2022107,     2699930,      573658,     2289094,     2982413,     4693825,     2401961,     1049703,     1999395,      452796,      899423,      700971,      511456,     4365222,     1012932,     9888134,     2985696,      399318,     4909810,     1584458,     1577200,     4634621,      674363,     2268124,      351833,     2067260,     5835237,     1128000,      372472,     3367101,     3288220,      818731,     2241372,      309374
Z18,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
Z41,      129965,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       39021,           0,           0,       82121,           0,           0,           0,       71146,           0,           0,      545029,           0,      129343,           0,       37217,           0,           0,      208659,           0,           0,           0,           0,           0,      340658,           0,      174750,      667104,           0,           0,           0,           0,           0,       75500,       26808,      246151,      256113,       45452,           0,       32251
Z42,       86485,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       28327,           0,           0,       54111,           0,           0,           0,       42037,           0,           0,      452330,           0,      100852,           0,       27671,           0,           0,      148937,           0,           0,           0,           0,           0,      210296,           0,       85139,      420730,           0,           0,           0,           0,           0,       47063,       22501,      162674,      178802,       35719,           0,       25180
Z43,       28636,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        7812,           0,           0,        3770,           0,           0,           0,        7128,           0,           0,       27517,           0,        1525,           0,        6345,           0,           0,       18283,           0,           0,           0,           0,           0,       50257,           0,       19620,      190193,           0,           0,           0,           0,           0,        9784,        4592,       57705,       52311,        3321,           0,         974
Z44,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,         222,           0,           0,        1740,           0,           0,           0,           2,           0,           0,           0,           0,          23,           0,          77,           0,           0,        2705,           0,           0,           0,           0,           0,         726,           0,         191,        3155,           0,           0,           0,           0,           0,           0,         907,         822,         195,         453,           0,           6
Z45,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
Z46,      130405,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       26149,           0,           0,       47801,           0,           0,           0,       23750,           0,           0,      297364,           0,       49406,           0,       17091,           0,           0,       56890,           0,           0,           0,           0,           0,      104629,           0,       77116,      223988,           0,           0,           0,           0,           0,       31855,        9432,      121837,      160297,        8275,           0,        5466
Z47,        8254,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        8552,           0,        1209,           0,         714,           0,           0,           0,           0,           0,           0,           0,           0,        7936,           0,        5009,       21590,           0,           0,           0,           0,           0,           0,         979,        7706,        7565,        1148,           0,           0
Z48,      111192,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        5366,           0,           0,        6059,           0,           0,           0,        1772,           0,           0,      134299,           0,       24584,           0,       16245,           0,           0,       13817,           0,           0,           0,           0,           0,       27632,           0,       12865,      176988,           0,           0,           0,           0,           0,       14669,        9447,      107542,      138582,        1943,           0,        1128
Z51,           0,           0,      233355,           0,     1816321,      269355,      523746,       95890,     2043587,     1010159,           0,       72515,     1373554,      526800,      185653,      144448,      448982,      324655,      145197,      932327,     2306091,     1249917,      311691,           0,      329970,       35417,       52853,           0,      104423,     1353623,           0,     2176356,           0,           0,     1803079,           0,      703437,     1462426,      167711,           0,       92290,           0,     2471555,           0,       49856,      854889,      314580,      131452,      470160,           0
Z52,           0,           0,      123767,           0,      966351,      167749,      309072,       53409,     1071087,      550493,           0,       41333,      794716,      311545,      116502,       79390,      291266,      174741,       79873,      507473,     1659338,      683995,      192254,           0,      189288,       18149,       26682,           0,       61136,      708722,           0,     1107476,           0,           0,     1115020,           0,      440657,      782974,      109803,           0,       17722,           0,     1532407,           0,       29016,      465630,      167790,       75860,      273690,           0
Z53,           0,           0,       25710,           0,      163290,       27422,       23252,        7341,      118798,       89375,           0,       13981,       52963,       29415,       21929,       16985,       35023,       23502,       14282,       38523,       68621,       52108,       59149,           0,       28002,        7985,       12079,           0,        5700,       42465,           0,       64001,           0,           0,       95167,           0,      154234,       51344,        3168,           0,        6861,           0,       11814,           0,        4215,       84536,       44208,       14163,       31246,           0
Z54,           0,           0,       83878,           0,      686680,       74184,      191422,       35140,      853702,      740582,           0,       17201,      525875,      185840,       47222,       48073,      122693,      126412,       51042,      386331,      578132,      513814,       60288,           0,      112680,        9283,       14092,           0,       37587,      602436,           0,     1004879,           0,           0,      592892,           0,      108546,      628108,       54740,           0,       67707,           0,      927334,           0,       16625,      304723,      102582,       41429,      165224,           0
Z61,           0,           0,           0,           0,           0,           0,           0,       14383,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,      455523,           0,      415743,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
19H,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
19X,     4264285,     4423963,     3052565,     1883526,    39283973,     3116665,    12842496,     3479783,    13634262,     4518709,     4973212,     1289662,    19886049,     5446943,     1824807,      934920,     6820146,     9506589,     2999353,     8731054,    25047835,    11003764,     4143588,     1659010,     6440048,     1741302,     1587163,     1651726,     5242431,    21761618,     1595385,    58794591,     4001678,      834207,    12394120,     3918899,     5820850,    12590487,     5254497,     4780745,     1818217,     2506457,     8683216,     2178779,     1418787,     7438406,     7846425,     2683982,     7674173,      780701
21A,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       51236,           0,           0,           0,           0,           0,           0,       46805,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
21B,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
21C,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
21D,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        5900,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
21F,           0,           0,           0,           0,     1174073,           0,      129620,       14031,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       37320,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       40998,           0,           0,           0
21G,      100210,           0,           0,           0,      155800,           0,       10465,       10358,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       30300,       21177,           0,       38885,           0,           0,           0,      578800,           0,       43082,           0,           0,       17530,           0,       13355,       80943,           0,           0,      120770,       73940,           0,           0,           0
21X,           0,       65000,      108345,       20345,      715970,           5,     2543203,       55637,       95520,     1555600,      746150,           0,     1200018,           0,           0,           0,           0,      263495,       46795,      587755,     1987130,      257700,      338645,      299615,      287895,       58975,           0,      368465,       80792,           0,       50000,     2522078,      662240,           0,      382135,      100000,      105315,     1205762,      444188,      389016,           0,      161200,      875440,       70000,      177040,       24845,      960195,           0,      926700,           0
24A,           0,           0,           0,           0,           0,        6585,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
24B,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,      753210,           0,           0,           0,     1010583,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
24C,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
24D,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,     1584625,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
24F,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,      193007,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       36670,           0,           0,       16515,           0,           0,           0,           0,      219640,           0,           0,           0,           0
24G,       90429,        7740,       59827,       68510,     3718357,      188257,           0,           0,     1710990,           0,        6645,       30347,       74427,      324997,       44441,       27027,      410948,       27490,        2500,      124225,           0,      188385,      187552,       10431,      175595,       85186,       68560,           0,        7571,      408821,       69560,      638570,      134162,        7997,      116854,       18700,       10841,       17245,       69610,       27184,        7915,        1867,      282725,       24040,         249,       31554,       36394,           0,           0,        9715
24T,      282280,      229995,        2475,      149055,     1921930,      491514,     1100867,      133990,       61157,      210030,      288790,      143725,     1598647,      356315,      180022,           0,      410920,      561515,      270965,      959475,     1912058,      911765,      600320,      425824,      779263,      552945,       21270,       69395,      575655,     1161895,      200983,     3927886,      405685,       49000,      508983,       89795,      175530,     1236820,      627279,      130345,      234185,      389410,      190932,      364745,      118152,     1043740,      401007,      186341,      519696,      115480
24X,         475,       67713,      462845,           0,     1236445,       12075,       42507,      103080,      697400,         688,      236570,        4625,      401800,      787971,       54092,      231983,      452800,      225505,      417685,      561002,      396464,      613699,           0,           0,           0,        7500,        1237,           0,      153335,     1117776,       95317,     3894983,         111,       28008,      443214,      147785,      157678,      115635,      462227,       25000,        7074,       84942,      235772,       14390,       27096,      290970,           0,       33765,           0,           0
31A,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       21228,           0,           0,           0,           0,           0,           0,       48110,           0,         375,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
31B,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
31C,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
31D,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       36030,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
31F,           0,           0,           0,           0,      429090,           0,       41773,        9531,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       19566,       11040,           0,           0,           0,           0,           0,           0,           0,           0,        4000,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        7080,        8000,           0,           0
31G,       61855,           0,           0,           0,       86105,           0,       12637,        9537,           0,           0,           0,           0,       16558,           0,           0,           0,           0,        4373,        1300,         420,       11754,           0,        2705,        1262,           0,           0,           0,       30085,        5463,           0,       57592,        5800,           0,           0,      437960,           0,       20865,           0,           0,       20340,           0,        7672,       54065,           0,           0,      129379,      146995,           0,           0,           0
31X,       63762,      175588,       73465,       22259,      558885,       19989,      808458,       45526,      374270,      764420,      641353,           0,      845104,           0,           0,           0,       14750,      379795,       60915,      362721,     1564863,      112700,      295389,      135637,      264705,        7108,           0,      167645,       91711,        3150,        4270,     1810496,      216585,           0,      311097,        4670,      421744,     1102403,      317191,      340660,           0,       56974,      314335,       53965,       66315,       34730,      507915,       39730,      856792,           0
34A,           0,           0,           0,           0,           0,        6700,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        1049,           0,           0,           0,           0,           0,          20,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
34B,           0,       30460,           0,           0,       14420,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,      707485,           0,           0,           0,      934479,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
34C,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,         228,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
34D,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       67885,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
34F,           0,           0,           0,           0,           0,           0,           0,           0,           0,        5990,           0,           0,           0,           0,           0,           0,       83467,           0,         385,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,       59910,           0,           0,       47295,           0,           0,           0,           0,      112664,           0,        3675,           0,           0
34G,      110763,        8751,       45284,       14417,     1269335,       91191,        4747,         397,      364334,           0,        2345,       14022,       21137,      292340,       18217,        6715,      422789,        8661,        1876,      107991,           0,      114240,      110532,        9405,       89187,       42639,       66168,        2878,        2417,      248855,       18649,       23548,       47470,        2618,       90805,       14297,        3158,       33880,       11774,       21023,        4873,       18369,      152656,       13321,        4109,       26605,       15408,       13215,         458,       11228
34T,      646597,      920822,       52387,      305797,     2741403,      431435,     2143591,      235305,      540797,      342787,      223279,      170384,     1729792,      538055,       97887,           0,      531892,      567940,      306663,      761703,     1398425,      892438,      505240,      171206,      802219,      288873,      151260,      235131,      266731,      997501,      171930,     2657010,      397609,      145715,     1307684,      215688,      186645,     1135734,      751240,      206797,      339656,      518459,      229429,      427851,       83149,      853692,      383922,      259701,      515781,      191448
34X,       11235,       76428,      426145,        3568,      144975,        3010,       63909,      109082,      355446,        1195,      280776,        3210,      366006,      600083,       12116,       84295,      491269,      831560,      373410,      610455,       71841,      355432,           0,         125,        7255,        7528,           0,          45,       63834,      551876,       66225,     2044357,         707,       14212,      356107,      102326,       35720,        9915,      164020,        1967,       11993,       35758,      185527,        2215,       17989,       96082,       12880,       54481,           0,         750
41A,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,      227184,           0,           0,           0,           0,           0,           0,      158925,           0,       89611,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
41B,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
41C,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
41D,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,      464310,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
41F,           0,           0,           0,           0,     5895169,           0,      486012,       86422,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,      533854,           0,           0,      115131,       24280,           0,           0,           0,           0,           0,           0,           0,           0,       16000,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,      307287,       58000,           0,           0
41G,      747908,           0,           0,           0,     1473220,           0,       59519,      103435,           0,           0,           0,           0,      109770,           0,           0,           0,           0,       32066,        9560,       76327,      255304,           0,        3820,        2854,           0,           0,           0,       64395,       76053,       15600,      135235,       50480,           0,           0,     2025800,           0,      296246,           0,           0,       40420,           0,      113634,      469001,           0,           0,      406422,      197842,           0,           0,           0
41X,      495209,      344912,      365240,      166478,     8227900,        2507,     8668969,      394801,     1060150,     3766355,     2872488,           0,     6200045,           0,           0,           0,       15270,     3254505,      519725,     1898618,    11349368,     1320400,     1664640,      837215,      862435,      244446,           0,      744560,      672432,     3486105,       45730,     9773043,     1010560,           0,     1061153,      355035,     4305089,     5076787,     1325164,      889339,           0,      649019,     4358473,      394325,      480220,       92648,     4805384,      221955,     2969074,           0
44A,           0,           0,           0,           0,           0,       43770,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,      184820,           0,      144324,           0,           0,           0,           0,           0,         603,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
44B,           0,      344198,       81410,           0,      403425,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,     3462430,           0,           0,           0,     1470760,           0,           0,           0,     2644106,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
44C,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,        1193,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
44D,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,     6951195,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0
44F,           0,           0,           0,           0,           0,           0,           0,           0,           0,       11870,           0,           0,           0,           0,           0,           0,     1092835,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,           0,      280893,           0,           0,       84045,           0,           0,           0,           0,     1080330,           0,      327365,           0,           0
44G,      630847,       31670,      664075,      370963,     5972702,      774790,       63871,       41801,     7477523,           0,       24348,      102064,      500580,     1685466,      532214,       84592,     1239906,       79101,       31324,      503912,           0,     1638750,      641127,       67970,      722101,      111147,      129945,       62192,      111680,     1461432,      229840,     7414653,      567409,       65006,      789658,      121081,       35978,     1203689,      253504,      275980,       28331,      266278,     2032359,      113968,       52585,      325408,      211809,      320136,        2781,       44438
44T,     1681359,     2622061,      453755,     1244555,    16579333,     2259723,     3800225,     2063738,     2240054,     1081150,      619328,     1073689,    12322364,     2074204,     1190752,           0,     1655187,     3791676,     1545755,     4395941,    13258363,     6474341,     1926771,     1132554,     4782399,     1514848,     1099818,      465495,     4144197,    10113545,     1027514,    21611249,     2937373,      536536,     5548226,      976297,      690148,     5414815,     2896057,      923814,     1366668,     1349190,     1336522,     1514922,      788110,     4375509,     2742648,     1143401,     4775684,      621254
44X,      294891,      239521,     1605992,       28115,     6288660,      181985,      515447,      697303,     3786755,      314622,     1587450,      104990,     1216904,     1807239,      252176,     1018328,     2740456,     1622312,      886385,     1721304,     1236393,     2067011,           0,        1330,      135135,      229319,      238439,        2410,      646443,     7574521,      293145,    14996144,        6163,      155125,     2574992,      947528,      317703,     1272205,     1060692,       90503,      201046,      133175,     1181072,       62395,      248847,     1631697,           0,      454281,           0,       36778
52T,      145650,      155250,       31250,           0,     2458485,       27701,           0,      155070,      598235,      599820,      236570,       28890,      636850,           0,           0,      105865,           0,      261260,           0,     1092225,     1395295,      169550,           0,           0,      257895,      209010,       21095,      279765,       96660,      616398,       53373,     2645966,      296955,           0,      764863,      753210,       41900,      248696,      206635,      602965,       37660,      426076,      394910,       70000,       58415,      189955,      339270,       39595,           0,      115480
53T,      145650,      155250,       31815,           0,     2440952,       26535,           0,      144740,      698485,      539580,      236570,       28890,      636850,           0,           0,       73575,           0,      261260,           0,      884133,     1419404,      157450,           0,           0,      257895,      172833,       21095,      157550,       96660,      539593,       54792,     2174635,      184451,           0,     1139029,      753210,       48840,      281315,      206635,      600810,       37660,      426076,      365296,       70000,       50675,      200435,      335817,       33855,           0,      115480
61V,         558,        3000,           0,         718,     2008043,         148,        5600,       10609,         544,           0,       49964,          85,        6785,       11072,       12211,         577,           0,       62622,           0,           0,      367418,        4113,         945,           0,       76110,        8895,         154,        1526,           0,       17057,        2258,      424000,           0,           0,       91651,         254,           0,      398874,       38835,      121750,         322,      125954,         309,       14164,         182,           0,        1078,           0,           0,           0
64V,        3590,        2900,           0,        1895,     3280201,         116,        5200,        9975,         788,           0,       42185,           0,        5642,        5576,       15153,         360,           0,        2293,           0,           0,      353948,        4823,           0,           0,        9500,        7782,         211,        1746,           0,        9041,        3708,      354000,           0,           0,      117542,         106,           0,      422555,        8435,      108250,         397,      116100,         424,       17223,         125,           0,         669,           0,           0,           0
71W,       70737,        5953,           0,           0,       49511,           0,     1218149,       19325,      451495,       19064,        6988,           0,      360413,           0,           0,           0,           0,      400677,        2499,       19681,      257841,           0,      306684,      120293,       85250,        9611,           0,       26061,      155530,        1868,           0,     1645861,        2246,           0,           0,           0,     2415232,       28658,           0,           0,           0,        2937,     1703138,       18160,           0,           0,       52534,        4682,        7265,           0
74W,     1757403,     2758941,      492372,     1395928,    16916737,     2977686,     3863566,     2123446,     5319045,     1255534,      969891,     1104334,    12456192,     3811914,     1276120,       32887,     2463113,     4669469,     2423573,     4636207,    13409247,     7851877,     2166507,     1140931,     5274663,     1594414,     1118722,      503513,     4525931,    10773308,     1140753,    28826719,     3005440,      719814,     6133173,     1388886,      690148,     5789219,     3137284,     1467826,     1437168,     1513565,     1415473,     1527506,     1024858,     5984527,     2801364,     1398509,     4743066,      623801