# Presentation: 208101

## SiGe Qualification – Vendor Perspective

***Chuck Tabbert***
***Director, Aerospace & Defense Services***
***505-823-1293***
***ctabbert@jazzsemi.com***

## Jazz Semiconductor Overview

_**A Leading Pure-Play Silicon Wafer Foundry With On-Shore Manufacturing **_
- Formed in 2002 from Conexant Systems (formerly part of Rockwell International)
- Private but announced plan to merge with Acquicor which will make the combined entity public
- 17k wpm 8-inch Si wafer Fab in Newport Beach with >15-Year Track Record, >$1B investment
- On-Shore foundry
- Revenue of ~200M/yr
- ITAR Registered, NSA Sponsorship for Trusted Foundry
- Focus on Specialty Technology
-  0.5-micron to 0.13-micron
-  Analog/RF: CMOS, SiGe BiCMOS, High Voltage
-  Other: High Q Passives, MEMs, Imager
-  A/D Specific: Stitching, foundry for Rad-Hard community

**Established as a Trusted Partner Throughout Commercial and DoD Markets**

## JAZZ Trusted Foundry Initiative

**Jazz is aggressively pursing trusted foundry status to serve CAT 1 program (classified & ITAR) needs**
- Jazz is first US semiconductor company to achieve ISO/IEC 27001:2005 certification for Information Security
**Three parallel efforts underway**
**Desktop accreditation  through TAPO and future accreditations through DMEA**
**Procedures provided to TAPO/DMEA for review**
**DSS Facilities Clearance In Progress**
**Employee Clearances In Progress**
**Accreditation probable within 3 months**

## Jazz Process Technology Spectrum

## Technology

**Technology**

- BiCMOS

## 0.35μm SiGe (SBC35: 62GHz)

**0.35μm SiGe (SBC35: 62GHz)**

**0.35μm SiGe BiCMOS**
**  **0.35μm CMOS with High Performance SiGe
-   High volume production (RF Transceivers, TV Tuners, Optical Network, Precision Analog)
-   MPW service available (scheduled every 2 months)

**SBC35 SiGe NPNs**

**SBC35 CMOS & Passives**

- BiCMOS

## 0.18μm SiGe (SBC18: 155 and 200GHz)

**0.18μm SiGe (SBC18: 155 and 200GHz)**

**0.18μm SiGe BiCMOS**
**  **0.18μm CMOS with High Performance SiGe (155GHz and 200GHz options)
-   High volume production (RF Transceivers, TV Tuners, Optical Network, Precision Analog)
-   MPW service available (scheduled every 2 months)

**SBC18 SiGe NPNs**

**SBC18 CMOS & Passives**

- BiCMOS

## 0.13μm SiGe (SBL13: 90GHz)

**0.13μm SiGe (SBL13: 90GHz)**

- BiCMOS

## 0.13μm SiGe (SBC13: 200GHz Ft)

**0.13μm SiGe BiCMOS: High Performance Version**
**  **0.13μm CMOS front-end with a low-cost Aluminum back-end
-   200GHz Ft/Fmax NPN transistors
-   Design Kit Availability Q1 ‘07

**SBC13 RF CMOS Specifications**

**SBC13H2 SiGe NPN Specifications**

**0.13μm SiGe (SBC13: 200GHz Ft)**

- BiCMOS

## Complementary BiCMOS – Vertical PNP

**Complementary BiCMOS – Vertical PNP**

**Markets**
- Push/Pull Amplifiers
- Hard Disk Drive (HDD) Pre-Amp and Driver ICs
- High-Performance Data Converters
**VPNP Module Integrated with**** **
- 0.35μm SiGe BiCMOS
- 0.18μm SiGe BiCMOS
- 0.18μm RF CMOS

|  | 0.35μm VPNP | 0.18μm VPNP |  |
| --- | --- | --- | --- |
| Peak Beta
Ft (Vce = -5V)
BVceo | 50
15
-7 | 50
17
-7 | 
GHz
V |

- BiCMOS

## SiGe – High Volume Production & Increasing

**Source: Semico Research Corp**

| $M, Units=M | 2002 | 2003 | 2004 | 2005 | 2006 | 2007 | CAGR 02-07 |
| --- | --- | --- | --- | --- | --- | --- | --- |
| Revenue | $448 | $783 | $1,311 | $1631 | $2,225 | $3,132 | 47.5% |
| Units Shipped | 407 | 675 | 1,162 | 1,550 | 2,397 | 3,648 | 55.1% |

**Between 2003 & 2007: **
**Industry shows a 5X increase in  units shipped**
**Jazz has seen a 15X increase in wafers shipped**

**Seems like SiGe is a worldwide accepted technology qualified for commercial & industrial use **
**The question here is – is this technology ready for use in the harsh environments of military and space applications -**
**Extended Temperature, Long Term Reliability, Radiation Effects?**

## SiGe – Where’s It Being Used Now?  Radios -  Of Course!

**Cell Phones - SiGe in the RF Transceiver front-end IC**
**Fiber optics components (receivers, transmitters, transceivers and amplifiers) **
**HDD -  SiGe technology has a benefit in the read/write channels and the preamplifiers in HDDs**
**WLAN - More range and higher frequencies for 802.11 modules means that more power will be needed and that the frequency capabilities of RF CMOS will be exceeded**
**GPS - SiGe can provide a cleaner signal and, most importantly, lower power consumption than other GPS integrated receiver solution**
**Cordless Phones:   frequency requirements and power levels are too low to force non-silicon solutions**
**Bluetooth -  modules are low power modules operating at a frequency low enough that silicon technology is adequate**
**Digital STB -Amplifier and VCO (Voltage Controlled Oscillator) – Lower noise & better gain**

**Notice: Two Generation Bump In Performance from RFCMOS to SiGe**

## SBC18HX Process Reliability Tests

**Standard Industry Process Tests  Completed and Passed**
- Electromigration
- Hot Carrier Injection
- Gate Oxide Integrity
- Threshold Voltage Stability
- BJT Reverse Stress
- Passivation Integrity
**Standard Industry Product Tests Completed and Passed**

## Jazz Specific Radiation / Temperature Data

**Proton Testing – 62.5MeV @1E12-2E13 fluences – 2006 tests by Univ of Wisconsin **
- DC results – slight degradation in base current
- Small-Signal AC results
- slight degradation in power gain
- Slight degradation in Fmax
- Linearity – better linearity – increased IIP3
- Large signal high-power - .0.3dB degradation in Pout, <2%PAE degradation
**Cryogenic (77K) & High Temperature (160C) Data showed minor fluxuation in RF Power Performance (Univ of Wisconsin/NASA-GRC)**

## RH SiGe Efforts at Jazz

**SHAR program developed Rad-Aware models for Jazz SBC18 process. **
- Design teams designing circuits and rad testing – 2007
**Thick-Film SOI process integration completed. **
-  Fabrication of 0.13 SiGe circuits (SBC13) on SOI proceeding- 2007
- CMOS library adding deep-trench isolation

## Summary	

**SiGe is a mainstream commercial technology**
**Industry push to integrated low power RF transceivers will require SiGe integration into Military & Space technology portfolio**
**Radiation effects and temperature effects seem very manageable due to robustness of base technology**
**Jazz is prepared to exploit this technology for Military & Space applications**