# Presentation: 160880

## Sandia NM PPOA

- Microelectronics Development Laboratory
- June 5, 2007
- Morgan Gerard
- Pollution Prevention
- Sandia NM

- Sandia is a multiprogram laboratory operated by Sandia Corporation, a Lockheed Martin Company,for the United States Department of Energy under contract DE-AC04-94AL85000.

## Presentation Overview

- Brief Overview – PPOA
- Why Organization 1700
- Priority Waste Streams
- Ideas and Opportunities
- Outlook

## Management Structure

**President & Laboratories Director**
**Tom Hunter**

- orgchart.ppt:12651:jc04/04/07

- April 4, 2007

**VP 11000**
**Legal**
**Becky Krauss**

**VP 3000**
**Human Resources &**
**Communications**
**Pat Smith,**
**Acting**

**VP 2000**
**Weapons**
**Engineering &**
**Product Realization**
**Steve Rottler**

**VP 4000**
**Security &**
**Information**
**Joan Woodard,**
**Acting**

**VP 7000**
**Advanced Concepts**
**Gerry Yonas**

**VP 10000**
**Infrastructure**
**Operations &**
**Business**
**Management**
**John Stichman,**
**Acting**

- Counterintelligence
- Program
- Bruce Held

- 80
- Homeland
- Security
- Billy Marshall

**VP 1000**
**Science & **
**Technology and**
**Research **
**Foundations**
**Rick Stulen**

- 1600
- Pulsed Power
- Sciences
- Keith Matzen

- 2100
- NM Weapon Systems
- Engineering
- Bruce Walker

- 2500
- Energetic Component
- Realization
- Tom Blejwas

- 2600
- Surety Components &
- Instrumentation
- James Woodard

- 2800
- Stockpile & Weapon
- Product Realization
- Program
- Gary Sanders

- 2900
- Stockpile Resource
- David Corbett

- 3300
- Benefits &
- Health Services
- Larry Clevenger

- 4200
- Safeguards &
- Security
- Michael Hazen

- 5500
- Systems Mission
- Engineering
- Mike Vahle

- 5700
- Monitoring
- Systems
- Anthony Medina

- 5900
- Systems
-  Research
- Sid Gutierrez

- 6700
- Nuclear Energy &
- Global Security
- Technology
- Pablo Garcia

- 6200
- LOB Director,
- Fuel & Water
- Systems
- Margie Tatro

- 6800
- LOB Director,
- Nuclear Energy
- Dennis Berry

- 6900
- LOB Director
- Global Security
- Dori El lis

- 8001Office of
- Homeland
- Defense
- John Vitko

**VP 8000**
**California Laboratory**
**Paul Hommert**

- 8200
- National Security
- Engineering
- Corey Knapp

- 8300
- Biological &
- Energy Sciences
- Terry Michalske

- 8500
- Site Operations
- Linda Houston,
- Acting

- 8700
- Physical &
-  Engineering
- Sciences
- Bob Carling

- 8900
- Computer
- Sciences &
- Info Technology
- Leonard Napolitano

- 1500
- Engineering
- Sciences
- Art Ratzel

- 4300
- Computing &
- Network Services
- Robert Leland

- 4500
- Information
- Solutions & Services
- David Williams

- 200
- Nuclear Weapons
- Planning Ops. & Integration
- David Carlson

- 1900
- Weapon Simulation &
- Computing
- Vacant

- 4600
- CIO
- Art Hale

- 10200
- Supply ChainManagement
- Bonnie Apodaca

- 10700
- IES Support &
- Lab Management
- Systems
- Joe Polito

- 10800
- Facilities Management &
- Operations
- Jeffrey Quintez

- 2700
- Responsive NG
- Product Deployment
- Kathleen
- McCaughey

- 6300
- Energy, Res &
- Systems Analysis
- Stephen Roehrig

- 5400
- Integrated
- Military  Systems
- Development
- Bill Guyton

- 5200
- Emerging Techs
-  Industrial
- Communications
- Jerry McDowell,
- Acting

- 3600
- Public Relations &
- Communications
- Bruce Fetzer

- 2400
- Manufacturing
- Science &
- Technology
- David Plummer

- 5600
- Information
-  Operations
- Marion Scott

**Deputy Director for the **
**Nuclear Weapons Program**
_**Joan Woodard**_

**Deputy Director**
_**John Stichman**_

**Deputy Director for Integrated**
**Technology Programs**
_**Al Romig**_

- 11100
- Legal Infrastructure
- Support
- Ellen Gallegos

- 11500
- Legal Intellectual
- Property
- Rusty Elliott

- 11600
- California
- Legal & Patent
- Kurt Olsen

- 11700
- Legal Business
- Development
- Rusty Elliott, Acting

**VP 5000**
**Defense Systems &**
**Assessments**
**Jerry McDowell**

**VP 6000**
**Energy, Security, &**
**Defense**
**Technologies**
**Les Shephard**

**Bold boxes indicate Member of Laboratory**
**Leadership Team**

- 5300
- Electronic
- Systems
- Carolyne Hart

**Management Structure**

- 1200
- Nuclear Weapons
- S&T Programs
- Tom Bickel

- 1100
- Physical, Chemical &
- Nano Sciences
- Julia Phillips

- 1400
- Computation,
- Computers & Math
- James Peery

- 10300
- ES&H &
- Emergency
- Management
- Philip Newman

- 10500
- Controller &
- Pension
- Operations
- Jennifer Crooks

- 3500
- Human Resources
- B. J. Jones

- 8100
- Homeland
- Security
- Systems &
- Development
- Jill Hruby

- 1700
- Microsystems
- S&T & Components
- Gil Herrera

- 1800
- Materials &
- Process Sciences
- Duane Dimos

- 1300
- RadiationSciences
- Jim Lee

- Division 12000

- 12800
- Independent Audit &Advisory Services
- David Palmer

- 12001
- Corporate Ombuds
- Gerry Hays/NM
- Reese Ramos/CA

- 12300
- Surety
- Assessment
- Michael Callahan

- 12900
- Weapon Engineering
- Program
- Michael Cieslak

- 12400
- Ethics &
- Business Conduct
- Carol Yarnall

- 12100
- Institutional
- Development
- Peter Davies

- 8800
- Directed Stock Pile
- Programs
- Doug Henson

**VP 9000**
**Enterprise**
**Transformation**
**Lenny Martinez**

- 9200
- Management
- Assurance
- Lenny Martinez,
- Acting

- 9100
- Strategic
- Relationships
- David Goldheim

- 6400
- Security Systems &
- Technology
- Dennis Miyoshi

- 500
- Systsems Integration
- Technical Support
- Doug Henson

## Slide 4

## Why Organization 1700?

- Division 1000 contributes ~30% of SNL/NM Hazardous and Chemical Waste
- Org. 1700 has 1⁄3 of Division 1000’s Waste
- More PPOA’s in the future

## Team Members

- Org. 1700 ES&H Coordinator (2)
- Div. 1000 ES&H Coordinator
- Process Technician
- EC Coordinator

- P2 Staff (2)
- Org. 1700 Process Engineer
- Hazardous Waste Tech

- Preparation Stage

## Priority Waste Streams

## Priority Waste Streams

- PRS-1000 is 30% of all Org. 1700’s waste (57% of Top 9 Waste Streams)

- Assessment Stage

## Chargeback

- $145,964

## Chargeback – Another Look

## Ideas and Opportunities

## Ideas

- Minimize PRS-1000 (recycle, optimize)
- Minimize EKC (recycle, optimize)
- Minimize HF Contaminated Waste Stream
- Recycle Wafer Containers
- Recycle Tyvek Suits
- Reduce Water Use
- Eliminate Acetone Wipes Waste Stream

- Assessment Stage -Still

## Opportunities

- PRS – 1000 Photoresist Stripper
- HF Contaminated Waste Stream
- Acetone Contaminated Waste Streams
- Water Reduction at Rinse Baths
- Recycling Wafer Containers

## PRS-1000 Photoresist Stripper

- Opportunities for evaluation
- Recycle – Vendors through HWMF
- Process Change – FEOL
- Process Change -  BEOL
- Process Life Extension - Titration

## PRS-1000 Photoresist Options

- Titration Unit Chemical Life Extension – 50% Reduction
- FEOL Piranha Solution – 20% Reduction
- BEOL Steps Reduction – 50%
- 100x50%=50x50%=25x20% = 20

- All Combined Reduces Waste by 80%

## Titration Unit Process

- Insert picture from PPOA

## BEOL & FEOL Opportunities

- BEOL
- 50 % Reduction in PRS-1000
- Requires Process Change
- Eliminates need for process steps (CMP, etc.)
- FEOL
- 20% Reduction in PRS-1000
- Requires Process Change
- PRS-1000 is a BEOL chemistry not FEOL
- Use Piranha strip – can also go to AWN

## PRS-1000 Photoresist Opportunity Savings

## PRS-1000 Photoresist Opportunity Savings

## Slide 20

## HF Contaminated Waste Stream

- Opportunity
-  Rinse Gloves and Place in Solid Waste Stream
-  Modified Procedure and Training Required
- Reduce  hazardous waste and costs by approximately 50% (420kg).

- Assessment Stage Continues...

- May require a study to eliminate “treatment” concern

## Why throw gloves in the solid waste?

- Hazardous Waste Costs $28/kg, Solid Waste $0
- Hazardous Waste must be managed
- Special Containers
- Waste Logs, WDDR’s
- Subject to Regulation
- Time
- Most HW is incinerated – more resources than landfill

## Acetone Contaminated Waste Stream

- Opportunity
- Eliminate 400kg of Hazardous Waste
- Modified Procedure and Training Required
- Use wipes until dry

## Water Reduction at Rinse Baths

- Water IS an Expensive Resource
- Excessive Bath Dumps Occur
- Ex. Sulfuric-Nitric rinse bath changes out 10 times. Industry standard is a conservative 4-5.
- Overall a 30% Reduction can be implemented
- Excessive Bypass Flow (Weeping)
- Applying Industry Standards – 50% reduction
- Overall Savings – 500,000+ Gal./Year
- Sandia’s Environmental Impact Statement Limits being reached (This facility uses ~ 15%)

## Please Recycle

- This container is for recycling “Polypropylene”
- End Lot Boxes & Cassettes
- Single Wafer Trays

*Look for this logo*

## At 100% Implementation

- PRS -1000
- 80% Reduction in Waste Stream
- Savings = $116,771 in Disposal Costs
- HF Contaminated Waste Stream
- 50% Reduction in Waste Stream
- Savings = $11,760 in Disposal Costs
- Acetone Contaminated Waste Stream
- 100% Reduction in Waste Stream
- Savings = $11,200 in Disposal Costs

## 100% Implementation Totals

- Costs Savings/Year
- Disposal Costs = $139,731
- Incoming Cost = $14,400
- Total = $154,131
- Cost of Titration System = $(130,000)
- ROI < 1 Year (equip., not time/labor)
- Hazardous Waste Reduction = 5000kg/year
- Water Savings = 500,000 Gallons/Year!

## Outlook

- Longevity – 6 Months
- Presented Information to Management
- Responses
- Titration Unit with End-of-the-year $
- Process Changes take time
- Why the “dirty laundry”?
- Information sterilization
- Division ES&H Coordinator has created a list of additional P2 Opportunities