# Presentation: 865833

## ALLIANCE MICROELECTRONICS WORKSHOPLBNL RESEARCH UPDATE

- Bill Tschudi
- wftschudi@lbl.gov

- Sponsored by: Public Interest Energy Research (PIER)California Energy Commission and administered by
- California Institute for Energy Efficiency (CIEE)

- Lawrence Berkeley National Laboratory

- ALLIANCE MICROELECTRONICS WORKSHOPLBNL RESEARCH UPDATE

- 9-16-04

## Energy Intensive High-tech Buildings

- Overview

## Update of Current Activities

- Cleanroom Activities
- Benchmarking and Best Practices
- Demand Controlled Filtration
- Fan-Filter Test Procedure
- Mini-Environments

- Overview

## Current Activities, cont.

- Laboratory Activities
- Benchmarking and Best Practices
- Berkeley Fume Hood Development
- Overcoming Barriers (CAL/OSHA)
- Side-by-Side Testing
- 3 Industrial Demonstrations
-  Labs 21

- Overview

## Current Activities, cont.

- Data Center Activities
-  Benchmarking and Best Practices
- Load intensity
- Performance Benchmarks
-  Self-benchmarking Protocol
-  Investigate UPS Efficiency Improvement
-  Investigate Power Supply Improvement

- Overview

## Current Activities, cont.

- Demonstration Projects
- 	LBNL role is to identify and scope possible demonstrations and arrange industry partners
- Technology Transfer
- 		Interaction with industry, e.g.:
-   ASHRAE
-   SEMATECH
-   IEST
-   Cleanrooms East/West
-   Public utilities – emerging technology

- Overview

## Cleanroom Benchmarking

-    	Expanding the Database
-   4-6 New Case Studies
-   Compare to Sematech Data
-   Adding Data on UPS and Standby Generation

- Benchmarking

## Recirculation Air Systems

- Average 3440

- Average 1953

- LBNL Data

- Sematech Data

- Benchmarking

## Baselines Based Upon Benchmark Data

- System Performance Target

- Benchmarking

## Make-up Air Systems

- Make-up Air Systems

- Average 972

- Average 946

- LBNL Data

- Sematech Data

- Benchmarking

## Cleanroom Benchmarking

- Benchmarking

- Air Change Rates

## Several Sources
Heaters
Battery chargers
Transfer switches
Fuel management systems
Heaters alone (many operation hours) use more electricity than produced by the generator (few operating hours)
May be possible to eliminate heaters, batteries, and chargers

- Standby Generation Loss

- Several Sources
- Heaters
- Battery chargers
- Transfer switches
- Fuel management systems
- Heaters alone (many operation hours) use more electricity than produced by the generator (few operating hours)
- May be possible to eliminate heaters, batteries, and chargers

- Benchmarking

## Case Study

-   	Recent case study demonstrated recirculation setback

- Benchmarking

## Recirculation Setback

- Benchmarking

- Based Solely on Time clock, 8:00 PM -6:00 AM setback
- No reported process problems or pushback
- 60% –  70% Power Reduction on turndown

## Recirculation Setback - Savings

- Benchmarking

- Annual Fan Savings from Daily and Weekend Setback:
- 1,000,000 kWh$130,000 - $150,000
- Cooling load reduction when setback:
- 120 kW35 tons

## Additional Savings Opportunities

- Benchmarking

- Currently using air cooled chiller at 1 kW/ton, partially to conserve water.  The RO system rejects 2,500 – 4,000 gallons per day to sewer; RO reject water can be used for tower makeup.
- Space humidity control exceeded design and process requirements in most spaces; energy intensive dehumidification/reheat could be reduced by resetting humidity setpoints to design.
- Actively control recirculation setback for further fan savings.
- Reduce air change rates further.

##  Controlling Air Flow to 

-  Controlling Air Flow to
- Maintain Cleanliness
-    	Save energy by reducing fan speeds without degrading 	conditions in cleanroom
-    	Reduction of recirculation fan speed during unoccupied periods 	or periods of no activity 	(potential for minienvironments also)
-  	 Demand filtration based on real-time particle concentration 	measurements
- 	Fan power proportional to the cube of the flow rate, so small 	changes can result in large savings

- Demand Controlled Filtration

## Demand Controlled Filtration

-    	Pilot study completed - showing promise
-  	Collaboration with Cornell University
-  	Informal survey of ASHRAE TC 9.11 members 	regarding control of recirculation fan speed
-   	Many members said that they use some form of 	demand controlled filtration now
-    	Some have set backs during unoccupied periods
-    	Manual override is provided
-   	Demonstration partner identified
-   	Tool Manufacturer

- Pilot Study
-    	ISO Class 5 cleanroom at LBNL – 	monitored particle concentrations
-    	Three particle sensors – 	controlling to various size 	particles
-    	Varied flow rate by controlling 	recirculation fan speed
-  	Room Pressurization not studied

- Demand Controlled Filtration

## Fan-Filter Unit Testing

- FFU Test Procedure

## FFU Goals 

- FFU Goals

-  	Develop a standard way to test and report 	performance of Fan-Filter Units (FFUs)
-  	Promote FFU energy efficiency through 	use of the standard

- FFU Test Procedure

## Test Procedure Development

- FFU Test Procedure

-  	A team of experts provided peer-reviews of the 	draft standard procedure prepared by LBNL
-  Project Advisors
-  ITRI/AMCA
-  FFU Manufacturers
-  End-users
-  Sematech

## On-going Development

- FFU Test Procedure

- LBNL continues to work with IEST to provide assistance to its more comprehensive recommended Practice (RP) which will include testing for other characteristics such as vibration and noise.
- Any input to the draft standard will be appreciated.

## Planned FFU Activities

- FFU Test Procedure

-   	Test Procedure will be “tested” at PG&E’s lab facility for 	small number of units
-  	Additional units to be tested depending upon funding 	available
-  	ITRI (Taiwan) test data may be useful
-  	PG&E intends to establish baselines based upon tests and 	use the baselines in incentive programs.  Other California 	public utilities can also use the baselines that PG&E 	develops.

## Minienvironment Tasks

-  	Understand the energy implications of 	using minienvironments – micro and 	macro level
-  	Case study on minienvironment 	performance – Asyst Technologies
- 	Work with IEST on Recommended 	Practice for minienvironments
-   	Identify and promote energy efficiency 	opportunities

- Minienvironments

## Planned Minienvironment Activities

- minienvironments

-  	Develop strategies to improve efficiency based 	upon case study findings and other best practices 	input. 	Consider input from:
- NEEA workshop attendees
- IEST
- Sematech
- Suppliers/Users/Utility
- A2C2/Cleanroom Magazines
-       Host a workshop on minienvironment efficiency

## Data Center Benchmarking

- Data Centers

- Both LBNL and Uptime Institute found average IT equipment loading at ~25 W/ft2

## Data Center Benchmarking

- Data Centers

## Power Supplies in IT Equipment

- Power Supplies

## Power Supplies in IT Equipment

- Power Supplies

## Power Supply Efficiency

- Developed loading guidelines and test protocol for testing AC/DC power supplies for 1U, 2U and pedestal servers.
- Calculation tool for evaluating impact of improving power conversion process efficiency at rack level.
- Coordination with Server System Infrastructure (SSI) members to adopt loading guidelines and recommend higher efficiency levels for server power supplies.
- Evaluate “real life” server PS loading level and processor usage activity for servers.

- Power Supplies

## Power Supply Efficiency

- Power Supplies

- Very Low Processor Activity...

- ...does not relate to very low power consumption

*Most of the time the GHz processor is doing activities that can be done by a MHz processor but the input power consumption is not changing much*

## UPS System Benchmarking

- UPS Systems

## UPS Measured Performance

***Sample of 12 field measurements.***

- UPS Systems

## Measuring UPS efficiency to show impact of “high efficiency” option.

- UPS Systems

- Measured Result

- Manufacturer Spec

***On average, existing high efficiency modes can make a 4 to 5 % difference in UPS efficiency.***

## Analyzing UPS performance in “high efficiency” option.

- UPS Systems

***In “high efficiency” mode, there can be one cycle ***
***(16.6 msec for 60 Hz) of voltage deviation on the output of the UPS.  Power supplies downstream of the UPS can ride through this.***

## Labeling

- Efficiency and Reliability
- Data collection protocol.
- Technical review of efficiency versus load (based on specification) for current generation static and inertial UPS.
- Simplified calculation tools for comparing AC powering versus DC powering and evaluation of cost savings for higher efficiency UPS.
- Testing of UPS to show impact of “high efficiency” option on static UPS
- Coordinating with International labeling effort for quality & efficiency.

- UPS Systems

- Possible UPS Efficiency Labeling Criteria

## LBNL’s role

-   	Scoping demonstrations of technologies or 	strategies to improve energy efficiency in high-	tech buildings
-  	Showcase New/Emerging or Under-utilized 	Technologies or Approaches

- Demonstrations

## Possible Demonstrations

- Demonstrations

-    	Follow-on from current research tasks:
-   Demand controlled filtration
-   Minienvironment efficiency improvement
-   Fan-filter test procedure
-   	Fume hood demonstrations currently are 	proceeding

##    	Additional potential 	demonstrations for 	Cleanroom/Lab/Data Centers:

- Demonstrations

-    	Additional potential 	demonstrations for 	Cleanroom/Lab/Data Centers:
-   	Airflow visualization 	via 	helium bubbles
-   	Combined Heat and Power
-   	UPS efficiency 	improvement
-  	Energy efficient vacuum pumps

## LBNL portal

- Technology Transfer

- Website:
- http://hightech.lbl.gov

## Thank youQuestions?

- Thank youQuestions?

- 9-16-04