# Presentation: 532480

## SOMTC Coating Capabilities

- Dr. Alan P. Shapiro
- Coating Team Lead

**SPACE OPTICS MANUFACTURING TECHNOLOGY CENTER**

## SOMTC Coating Facilities

- Two SOMTC Coating Facilities:
- Large Aperture Coating Facility (Building 4707)
- 5.5 m Vacuum Coating System
- ~2500 square feet floor space
- Cleanroom, control room & mechanical room
- Optical Coating Lab (Building 4487)
- Balzers BAK 760 System
- CVC Belljar Coater
- Adjacent cleanroom area

## Large Aperture Coating Chamber

## Large Aperture Coating Chamber

## Large Aperture Coating Facility

- 5.5-Meter Vacuum System
- 4.57 m diameter x 2.64 m clear zone w/o platform
- Cryo-pumped + LN2-trapped roughing pumps
- Vacuum bake via quartz lamps
- Cooling via LN2-cooled shrouds
- Deposition Sources:
- Electron beam evaporation
- Resistive evaporation (filaments, boats & boxes)
- Chandra sputtering cathodes (in storage)
- HEPA-filtered room surrounding the chamber door

## Optical Coating Facility

- Balzers BAK-760, Ion-Enhanced e-Beam System
- Cryo-pumped, box-style chamber
- Rotating 711 mm diameter sample holder
- 4-pocket Temescal electron gun evaporation source
- Denton CC-105 broad, gridless ion source
- GSM-420 Optical Monitor
- 200 nm to 3200 nm wavelength
- In-situ witness chip changer (140 chip capacity)
- CVC Diffusion-Pumped Belljar System (18”)
- Resistive evaporation

## Balzers Coating System

## Coating Accessories

- FilmStar() Optical Thin Film Design Software
- Optimization for reflectivity, transmission, absorption, & reflected or transmitted phase
- Acton Spectrometer Equipment
- UV (~185 nm) to approximately 10 microns
-  Chandra Coating Hardware
- 1.5 m Sputtering sources & controllers (2 ea.)
- Rotatable Sputtering Sources
- Airco C-Mag design, 2 each
- 76 mm OD x 304 mm useable

## Sample of Recent Coating Activities

- Vacuum Evaporated Metals
- Mirrors on metal, glass & polymers
- Constellation-x mandrels
- Largest coated: 500 mm diameter x 600 mm length
- Evaporated Dielectric Multilayers
- Anti-reflection coatings (VIS, NIR)
- Cold mirrors
- w/ non-polarizing, high-efficiency reflecting region
- Beamsplitters
- Evaporated Metal-Dielectric Multilayers
- Protected metal reflectors & multi-bandpass filters

## Additional Interests

- Large Aperture Coatings (Large Aperture Coating Facility)
- For optics > 2.6 m diameter, two options:
- Orient optical face vertical and sputter coat
- Orient face horizontal w/ additional chamber extension
- Sputtering required for vertically-mounted optics & preferred for most large optics
- Can raster multiple targets across substrate w/ 2-axis motion control system
- Low-Stress Mirror Coatings
- May be required for thin substrates

## Other Potential Interests

- Unusual Bandpass/Multi-bandpass Filters
- Near-UV Dielectric Mirrors
- Multi-band-reflecting cold mirrors
- Exotic Coating Material R&D

## Design/Fabrication Example

**Design/Fabrication Example**

## MSFC Surface Metrology(Surface Morphology)

- Dr. Alan P. Shapiro
- Coating Team Lead
- MSFC/SD72
- Phone: 256-544-3488

**SPACE OPTICS MANUFACTURING TECHNOLOGY CENTER**

## Facilities/Major Equipment

- Taylor-Hobson Nanostep II, stylus-type profiler
- Very high-resolution vertical resolution
- 310 picometer vertical resolution w/ 20 m range
- 31 picometer vertical resolution w/ 2 m range
- 50 mm maximum scanlength
- 120,000 lateral data points per scan
- 0.05 m per step for < 6 mm scan length
- 0.50 m per step for  6 mm scan length
- Diamond stylus sizes:
- Conical w/ 1 m, 2m, & 5m radius tips
- Truncated pyramid, 0.1 x 2.0 m tip (high-resolution)

## Taylor Hobson NanoStep II

## Facilities/Major Equipment (cont.)

- Topometrix SPM System
- Atomic Force Microscope
- Scanning Tunneling Microscope
- Conductive samples only
- “Discoverer” unit for small parts ( 25 mm)
- Superior vibration isolation
- “Explorer” unit for large parts
- Can accommodate large optics by resting on the optical surface

## Topometrix SPM

## Surface Metrology Applications

- High-Resolution Surface Roughness Measurement
- Power spectral cross-comparisons
- WYKO
- 0.3 m to 9 mm, lateral dimension range*
- NanoStep
- 0.1 m to 50 mm, lateral dimension range*
- AFM and STM
- 1 nm to 75 m, lateral dimension range*
- Note: the listed lateral dimension range is the total integrated range covered by all available objectives, tips or scanners for the given instrument.

## Surface Metrology Applications (cont.)

- Film Thickness/Step Height
- Coating calibrations
- Diffraction grating analysis
- Surface Morphology Analysis
- Grain sizes and heights
- Porosity