Figure Captions

Fig.1 - General micromechanical measurement system diagram for
magnetometry. The instrument consists of three basic parts: (1) an AFM
cantilever detection system, (2) a chopping circuit for modulating
electromagnetic fields applied to sample attached to the cantilever, and
(3) a rf stripline resonator and tuning circuit for applying microwaves
to the sample for FMR spectroscopy measurements.

Fig. 2 - Laser spot on photodiode detector of AFM system. By taking the
appropriate difference signals it is possible to measure the cantilever
twist as well as deflection.

Fig. 3 -- Resonating torque microbalance system diagram for *in situ*
thin film magnetometry. The instrument is similar to that shown in Fig.
1, with the laser beam bounce detector replaced by an optic-fiber
interferometer. A pair of SmCo magnets applies a bias field in the plane
of the film deposited onto a mechanical oscillator. Force feedback is
used to cancel the magnetic torque applied at the end of the resonator
and thus linearize the response of the instrument.

Fig. 4 -- Photomicrographs of Si microcantilevers for magnetometry. (a)
A lever coated with a Permalloy film at the tip. (b) A cantilever
specially designed for *in situ* deposition magnetometry. The cantilever
is physically masked during deposition so that only the substrate is
coated. The cantilever is microfabricated from single-crystal silicon
and therefore has a very high mechanical Q allowing for better SNR when
operated at resonance.

Fig. 5 -- Vector diagram showing the orientations of the magnetic fields
and torque on a thin film magnetized in plane along the *z* direction.

Fig. 6. - Experimental configuration for measuring *M-H* loops with a
microcantilever torque magnetometer.

Fig. 7. - Hysteresis loops for 10 nm Fe films measured with (a) the
micro-torque magnetometer and (b) an alternating gradient magnetometer
(AGM).

Fig. 8 - Magnetic moment of a Fe film measured *in situ* with the
micro-torque magnetometer versus film thickness measured with a quartz
crystal microbalance.

Fig. 9 -- Force feedback signal as a function of torque field for a 30
nm thick NiFe Film. The inset shows the noise level at a fixed torque
field as a function of time.

Fig. 10 - Precession and relaxation of ***M*** in response to an applied
field ***H***.

Fig. 11 - Vector diagram showing the orientation of the applied fields
and mechanical torque generated in an FMR experiment.

Fig. 12. - Experimental configuration for FMR with a micro-torque
magnetometer.

Fig. 13 - Torque versus applied field measured with the micro-torque
magnetometer for a 30 nm thick Permalloy film.

Fig. 14. - Damping causes the precession of the magnetization *m* to lag
the oscillating microwave magnetic field *h~x~*. A component of *m~x~*
is out of phase with *h~x~* and results in absorption of energy from the
microwave field. The component of *m~y~* that is in phase with *h~x~* is
perpendicular to this field and results in a torque. The case shown here
is for a 90º lag, which occurs near resonance.

Fig. 15. - Experimental configuration for FMR by angular-momentum
absorption. In this configuration a static torque field is not required
for FMR detection. The microwave field itself provides a net
time-averaged torque to the sample that twists the cantilever.

Fig. 16. - Torque and absorbed power as a function of bias field at a
fixed microwave frequency of 9.15 GHz. The top plot is the signal
measured from the torsion of the cantilever. The sign of the torque
reverses for opposite directions of the bias field. The bottom plot is
the signal measured from the deflection of the cantilever.

Fig. 17. - The experimental configuration for FMR with a bimaterial
calorimeter.

Fig. 18. - Cantilever vibration versus applied field for several
thin-film samples measured with a bimaterial calorimeter. The offsets
from zero are due to eddy-current heating of the films.

Fig. 19. -- Magnetic moment sensitivity logarithmic scale showing
performance benchmarks and comparisons of various kinds of
magnetometers.