July 22, 1994

Contract #TW0592

**SPECIAL SPECIFICATION**

**SECTION 13001**

**[CLEAN ROOM SYSTEMS]{.underline}**

[Page]{.underline}

**[PART 1 - GENERAL]{.underline}**

1.01 Contents.. 2

1.02 Work Included. 2

1.03 Related Sections 3

1.04 Clean Room Director. 3

1.05 Clean Construction Protocol. 5

1.06 Quality Assurance. 8

1.07 Submittals and Mockups. 9

1.08 Photographs. 13

1.09 Training and Badge Requirements. 14

**[PART 2 - PRODUCTS]{.underline}**

2.01 Packaging. 15

**[PART 3 - EXECUTION]{.underline}**

3.01 Installation. 16

3.02 Erection. 16

Attachment Table 1 - Clean Room Protocol

**SPECIAL SPECIFICATION**

**SECTION 13001**

**[CLEAN ROOM SYSTEMS]{.underline}**

**[PART 1 - GENERAL]{.underline}**

**1.01 [CONTENTS]{.underline}**

> A. Work included.
>
> B. Related work.
>
> C. Clean Room Director.
>
> D. Clean construction protocol.
>
> E. Quality assurance.
>
> F. Submittals and mockups.
>
> G. Photographs.
>
> H. Training and badge requirements.

**1.02 [WORK INCLUDED]{.underline}**

> A. This section specifies the requirements for the primary Clean Room
> contractor responsible for direction and coordination of all Clean
> Room activities.
>
> B. The requirements and authority are established for the Clean Room
> Director to be provided by the Contractor.
>
> C. The work of the following sections will be performed by other
> contractors, but the primary Clean Room Contractor responsible for
> this section shall be responsible for coordination of all related
> Clean Room construction activities.
>
> 1\. Section 13007 - Clean Room Cleaning Procedures.

**1.03 [RELATED SECTIONS]{.underline}**

> A. This section shall be used in conjunction with the following
> specifications and related Contract Documents to establish the total
> requirements for the referenced Clean Room work.
>
> 1\. Division 1 sections included in the project specifications.
>
> 2\. Section 10270 - Access Flooring System.
>
> 3\. Section 10615 - Clean Room Metal Wall Systems.
>
> 4\. Section 15055 - Clean Room Testing and Certification.
>
> 5\. Section 15175 - Clean Room Ceiling System.
>
> 6\. Section 15833 - Clean Room Recirculation Air-Handling Units.
>
> B. In the event of conflicting requirements for the work between this
> section and any other section, the provisions of this section shall
> govern.

**1.04 [CLEAN ROOM DIRECTOR]{.underline}**

> A. General:
>
> 1\. The Contractor shall provide a Clean Room Director, hereinafter
> referred to as the \"Director\" for the duration of all construction
> and startup activities covered by this Section.
>
> 2\. The Director shall act in SDR\'s best interests in successful
> completion of the project.
>
> 3\. The Director shall solicit advice from SDR on matters peculiar to
> the type of project being built.
>
> 4\. The Director shall attend all construction coordination meetings.
>
> 5\. The Director shall log and document all staged construction
> events, as well as decisions made in the course of their completion.
>
> 6\. The Director shall plan, organize, and lead the protocol training
> sessions required by all persons working in the Clean Room.
>
> B. Authority:
>
> 1\. The Director shall carry full authority over all construction
> personnel working within the Clean Room.
>
> 2\. His authority over the construction personnel shall include:
>
> a\. Ability to remove incompetent or uncooperative workers from the
> site for breach of Clean Room protocol.
>
> b\. Require full compliance with project requirements.
>
> c\. Stop construction on specific tasks of the project not being built
> in conformance with the construction documents where the ultimate
> function of the clean room or its support systems could be
> jeopardized.
>
> C. Qualifications:
>
> 1\. The Director shall have a minimum of 10 years\' experience
> constructing, testing, and qualifying clean rooms in the electronics
> industry.
>
> 2\. The most recent project completion shall have been with the
> previous 2 years.
>
> 3\. The Director shall have completed at least one project similar in
> design and style to the type being constructed of a multilevel
> fabrication area to perform submicron wafer technology under Class 10
> or better conditions.
>
> 4\. Previous projects supervised by the proposed Director shall not
> have been involved in litigation for reason of person integrity,
> building or utility system performance, or nonperformance or his
> employer.
>
> 5\. Comparable experience in design, construction, or operation of
> cleanrooms will be considered by the SDR.
>
> 6\. SDR reserves the right to accept or reject any proposed Clean Room
> Director candidate.
>
> D. References:
>
> 1\. A list shall be made available upon request to SDR of at least
> three projects completed within the last five years that involved the
> proposed Director.
>
> 2\. The project name, address, and phone number of responsible people
> from the previous project for which he served as Clean Room
> Supervisor, Superintendent, or equivalent position shall be provided
> to SDR.

**1.05 [CLEAN CONSTRUCTION PROTOCOL]{.underline}**

> A. Cleaning:
>
> 1\. Refer to Section 13007 for specific cleaning requirements.
>
> 2\. The Contractor shall provide a cleanup crew to perform the
> following:
>
> a\. Continuous cleanup of construction site and Clean Room to meet
> cleanliness levels of each specific construction stage.
>
> b\. Supervision of people and materials entering the Clean Room.
>
> 3\. Each Contractor working in the Clean Room is responsible for daily
> cleanup of his area.
>
> 4\. The Contractor is responsible for the overall cleaning of the
> Clean Room, including any residue from other contractor activities.
>
> a\. Use a sweeping compound that will be antidusting for Stages of 1
> and 2. Sweep until areas are visibly free of debris and fine dust.
> Excessive fine dust shall be wet mopped until removed.
>
> b\. Areas within the Clean Room during Stage 3 shall require
> 99.99 percent HEPA filtered vacuuming and wipedowns (course cleaning)
> as the only acceptable means of cleaning.
>
> c\. Prior commencement of Stage 3, the Director shall inspect the
> temporary staging and climate control facilities for compliance with
> the Contract Documents.
>
> d\. The Director will make reports of the clean levels with the Clean
> Room and provide a complete record of log tests on a weekly basis.
>
> B. Schedule: The Contractor shall be responsible for a schedule that
> will enhance the implementation of the clean protocols and scheduling
> the work of the cleanup crew.
>
> C. Preenclosure Meeting:
>
> 1\. Prior to completing the enclosure of Clean Room areas, the
> Contractor shall call a meeting to coordinate and explain cleaning
> procedures and requirements and to review the proposed staging areas.
>
> 2\. Attendees shall include, but not be limited to, representatives
> from SDR, superintendents for all contractor performing work, and
> component manufacturers\' representatives furnishing equipment and
> materials in the Clean Room.
>
> 3\. Provide 7 days\' prior notice of meeting to attendees. The meeting
> shall be scheduled for 30 days prior to scheduled completion of Clean
> Room enclosure.
>
> D. Staging Areas:
>
> 1\. Provide continuous and uninterrupted staging areas and enclosed
> access routes to Clean Room.
>
> a\. Changing area to change work garments, shoes, and headgear.
>
> b\. Equipment and product staging areas for precleaning and assembly
> of products prior to entry into the Clean Room.
>
> c\. Isolated storage area for cleaned and tested materials, separate
> from precleaning and assembly areas.
>
> d\. Portable filtered shoe cleaner at each entrance from staging into
> Clean Room.
>
> 2\. Provide shoe scrapers, grates, and cleanup mats at every entrance
> into the building to permit removal of mud and debris from shoes.
>
> 3\. Create removable semipermanent barricades to restrict all movement
> of personnel and materials to several controlled entry points into the
> Clean Room.
>
> 4\. Create a temporary contractors\' gowning area in these central
> entry points to be used by all personnel. Outfit this area with hooks
> for hanging outdoor protective garments for all anticipated workers,
> plus an area for storage of outdoor shoes. Future upgrade of these
> gowning areas will be required to permit better air cleanliness
> control and worker protocol.
>
> 5\. Provide benches in these gowning areas, strategically located to
> create a barrier to unobstructed walk-through traffic. The bench shall
> provide a convenient place to change from outdoor shoes to dedicated
> Clean Room shoes. Everyone entering the Clean Room will be required to
> change into comfortable Clean Room shoes of his choice whenever
> entering, and likewise to remove the shoes when departing.
>
> 6\. Remove all flammable and odoriferous materials so that they are
> applied/stored outside the Clean Room.
>
> 7\. Provide sufficient portable vertical laminar flow clean hoods over
> the storage racks for all Clean Room work garments. Units shall be
> fitted with HEPA absolute filters rated at 99.99 percent on 0.3 micron
> particles, served with air at nominal 100 fpm downflow laminar flow
> velocity.
>
> 8\. Install hanger rods or bar rods with hangers to be mounted
> underneath the vertical laminar flow hoods. Provide sufficient storage
> for one dedicated garment for each worker who has been trained and
> authorized to enter the Clean Room, plus a quantity of 25 extra to be
> used by inspectors and SDR personnel.
>
> E. Temporary Climate Control:
>
> 1\. Maintain positive pressure within the Clean Room of 0.05-inch WC
> continuously during working and off-hours throughout Stages 2 through
> 5, or until permanent makeup air system is activated and the building
> has reached Class 5,000.
>
> 2\. Provide temporary fans with 30 percent prefilters and 99.99
> percent HEPA filters operating with 100 percent outside air.
>
> a\. Provide sufficient fans for six air changes per hour.
>
> b\. Replace prefilters and HEPA filters every 30 days minimum.
>
> c\. Operate fewer fans during off-peak hours, providing cleanliness
> requirements are maintained.
>
> 3\. Provide emergency backup power to maintain climate control in the
> Clean Room.
>
> F. Temporary Flooring, Partitions, and Doors:
>
> 1\. Provide products that are water resistant, sealed against particle
> gathering or release, airtight, and suitable to maintain class
> requirements.
>
> 2\. Door Hardware: Provide automatic closure and self-latching key
> locks and National Guard Products, Inc. \"Wild Hairs\" seals at heads,
> jambs, and sills.
>
> 3\. Door Frames: 22 gauge knockdown, as manufactured by Timely.
>
> G. Temporary Signage:
>
> 1\. Post the following sign at the entrance to personnel gowning and
> equipment staging areas:
>
> a\. Controlled area.
>
> b\. Before entering, contact SDR.
>
> 2\. Material:
>
> a\. Sign: Painted sheet metal.
>
> b\. Sign background color: Safety yellow.
>
> c\. Lettering: Two inches high with colors indicated.
>
> 3\. Location: Temporary mounting to entry doors.

**1.06 [QUALITY ASSURANCE]{.underline}**

> A. The SDR shall review the procedures and work performed on a
> continuous basis to verify compliance with these requirements.
>
> 1\. Deviations to the specifications will be reported to SDR.
>
> 2\. Deviations shall be corrected to the satisfaction of SDR prior to
> further work in the affected area.
>
> 3\. Failure to achieve and maintain cleanliness levels shall require
> cleaning and retesting until specified Class is attained.
>
> B. Training shall be provided for new personnel during construction.
>
> C. Weekly reports shall be submitted to SDR that summarize the
> following activities:
>
> 1\. Cleanup crew operations for the previous week.
>
> 2\. Clean Room particle counts for each day of the previous week.
>
> 3\. Updated list of visitors entering the Clean Room for the previous
> week.
>
> 4\. Inventory list of tools, equipment, materials, and other items
> entering the Clean Room for the previous week.
>
> 5\. Updated list of construction workers authorized/cleared for entry
> into the Clean Room for the upcoming week.
>
> D. Factory test logs shall be submitted for all equipment and products
> used within the Clean Room to fully document the name of the quality
> control inspector, test date, original performance and test data logs,
> corrective action required, and final certified performance and test
> data logs.
>
> E. Test data logs shall be included with each shipment for every item
> that is included therein, enclosed inside waterproof clear plastic
> jackets suitable for placing in a standard three-ring binder.
>
> F. Every product shall include the final certified performance and
> test data information shown on a permanent nameplate, decal, or
> sticker located for easy viewing.
>
> G. A qualified technical supervisor shall be furnished by all
> manufacturers whose Clean Room products require field application,
> assembly, or installation by workers who are not direct employees or
> the manufacturer.
>
> H. Technical supervisor shall observe field conditions, qualify of
> surface finishes, and other field conditions essential to acceptance
> and use of the finished product.
>
> I. During subsequent work activities by the installing workers, the
> manufacturer\'s technical supervisor shall provide periodic, timely
> inspection and counseling to ensure system complies with factory
> requirements.
>
> J. Technical supervisor shall submit a written report to the SDR
> listing tasks performed, observations, and finished results.
>
> K. Take particle counts within the Clean Room on a random schedule at
> least twice each week. Maintain particle count records and submit as
> part of monthly status reports.

**1.07 [SUBMITTALS AND MOCKUPS]{.underline}**

> A. Shop Drawings: Provide shop drawing submittals in accordance with
> Section 01300, Descriptive Submittals.
>
> B. Performance and Method Statements:
>
> 1\. Written performance and method statements shall be prepared and
> submitted by all specialty firms that will perform supplementary tasks
> and services for this project, as well as the management firm
> responsible for supervision of these services.
>
> 2\. Statements shall outline the organization, manpower, procedures,
> sequence, products, and equipment to be used in performance of the
> service.
>
> 3\. Performance/method statements shall be prepared for each of the
> construction cleanliness stages for the following activities and
> services.
>
> a\. Development, monitoring, and enforcement of clean construction
> protocol.
>
> b\. Construction, monitoring, and security of personnel, equipment,
> and process tool staging and entry areas.
>
> c\. Placement, use, and monitoring of temporary wall partitions, tacky
> mats, particle counters, lighting, and environmental air handlers.
>
> d\. Contents, format, and instructor for each protocol training class.
>
> e\. Organization, supervision, and enforcement to comply with special
> off-gas criteria.
>
> f\. Location, schedule, and procedures to create mockups of cleanroom
> systems.
>
> g\. Procedures for continuous and special cleaning where it differs
> from the specifications.
>
> h\. Procedures for Clean Room testing and certification where it
> differs from the specifications.
>
> i\. Procedures for air and water system testing and balancing where it
> differs from the specifications.
>
> C. Mockups:
>
> 1\. Factory Mockup of First Constructed Unit:
>
> a\. The first production unit of each type shall be assembled at the
> manufacturer\'s factory to demonstrate that the unit design can be
> constructed, matches the quality, and performs in accordance with the
> Contract Documents. Factory test stand shall duplicate jobsite field
> conditions as closely as possible.
>
> b\. This demonstration unit must be complete with all components,
> accessories, and trim required by the finished installation. Fan/motor
> assemblies and movable devices must be operable.
>
> c\. This demonstration unit must be accepted by the SDR\'s review team
> prior to fabrication of the remainder of the units, unless waived by
> the SDR.
>
> d\. Modifications required by the SDR\'s review team must be
> incorporated into the design prior to fabrication of the remainder of
> the units.
>
> e\. Products and materials from the accepted mockup may be used in the
> completed work.
>
> f\. Factory mockup is required for the following:
>
> 1\) Recirculation Air Handler: One unit.
>
> 2\) Makeup Air Handler: One unit.
>
> 3\) Clean Room Wall System: Three panels.
>
> 4\) Clean Room Ceiling System: One module or 32 square feet.
>
> 5\) VLF Tunnel Module: One module.
>
> 6\) Raised Access Floor: 16 square feet.
>
> 7\) Clean Room Doors: One unit.
>
> 8\) Duct Discharge Plenum: One unit.
>
> g\. SDR reserves the right to substitute procedures for a field mockup
> in lieu of the factory mockup for any product that is identical to one
> already constructed and in service in the field.
>
> 2\. Field Mockup of Clean Room Systems:
>
> a\. A complete, full scale operable mockup of the proposed Clean Room
> shall be built at the jobsite to demonstrate the finished appearance,
> coordination, and operation of the assembled room components.
>
> b\. SDR will provide a dedicated area within the facility, completed
> with required services, where the mockup will be constructed. The
> manufacturer shall be responsible for final hookup to utility services
> to enable operation.
>
> c\. Products and materials from the accepted mockup may be used in the
> completed work.
>
> d\. The manufacturer shall be responsible for assembling the products
> used for the mockup. After inspection and approval, dismantle the
> mockup. Either relocate it to the proper place on the jobsite, or
> remove it from the jobsite as directed.
>
> e\. Full operable field mockup is required for the following Clean
> Room Scheme:
>
> 1\) Class 1 clean area incorporating at least 100 square feet, one
> zone of a recirculating air handler, or one packaged ceiling module,
> complete with:
>
> a\) Recirculation air handler.
>
> b\) Discharge plenum duct.
>
> c\) Ceiling grid with sealant.
>
> d\) ULPA filter modules with flexible ducts.
>
> e\) Blank and trim panels.
>
> f\) Light fixtures.
>
> g\) Sprinkler heads and escutcheons.
>
> h\) Wall panels.
>
> i\) One window of each type.
>
> j\) One door of each type.
>
> k\) Raised floor panels of each type.
>
> l\) Safety and emergency accessories.
>
> 2\) Class 1,000 clean area incorporating at least 100 square feet
> complete with:
>
> a\) Ceiling grid with sealant.
>
> b\) HEPA filter modules with flexible ducts.
>
> c\) Blank and trim panels.
>
> d\) Light fixtures.
>
> e\) Sprinkler heads and escutcheons.
>
> f\) Wall panels.
>
> g\) One window of each type.
>
> h\) One door of each type.
>
> i\) Raised floor panels of each type.
>
> j\) Safety and emergency accessories.
>
> f\. Full room performance will be evaluated, including filter airflow
> velocity profiles, fan noise levels, light levels, and all
> construction details and finishes.

**1.08 [PHOTOGRAPHS]{.underline}**

> A. Fixed-Position Still Photography:
>
> 1\. The Contractor shall place one camera on a fixed-position wall
> mounting bracket for the purpose of taking one still picture each work
> day. Area to be photographed will be selected by the SDR. Final
> pictures shall be 35-mm color prints.
>
> 2\. The camera can either be rigged with an automatic timing device to
> take a picture at the same time each day, or the picture can be taken
> manually during regular routines of the photographer designated by the
> Director.
>
> 3\. Pictures will commence at the beginning of Cleanliness Stage 2
> construction and terminate at completion of the ceiling ULPA filter
> installation.
>
> B. Mobile Video Camera Photography:
>
> 1\. The Contractor shall furnish one complete video camera assembly
> and cassette film to photograph specific construction activities.
>
> 2\. Pictures will be used for monitoring clean construction protocol,
> to record specific or special installation procedures, and to create
> general log of project construction completion.
>
> 3\. Total site and building construction completion shall be
> documented once every 2 weeks in all areas of work.
>
> 4\. Sections of the film shall be shown at each protocol training
> class as examples of good and bad construction practices among the
> workers.

**1.09 [TRAINING AND BADGE REQUIREMENTS]{.underline}**

> A. Training Sessions:
>
> 1\. Mandatory construction protocol training sessions shall be
> organized for all workers who will be assigned tasks within the Clean
> Room. Workers of all contractors shall undergo this training before
> they are permitted to work in the Clean Room. Training sessions will
> be developed and presented by the Director in the presence of the SDR.
>
> 2\. A system of Clean Room identification badges shall be implemented
> that permits the Director or any SDR\'s to know that the workers
> within the Clean Room have been properly trained in the three protocol
> training sessions and are permitted to work within the area.

**[PART 2 - PRODUCTS]{.underline}**

**2.01 [PACKAGING]{.underline}**

> A. All materials and equipment intended for Clean Room duty must be
> removed from the pallets and containers that have been protected
> during storage in the manner prescribed. All materials remaining in
> the storage container must remain covered as inventory is withdrawn in
> order to ensure all that remains stays in an enclosed, protected
> environment.
>
> B. Any material specified to be fully enclosed in protective covers
> may be rejected by the Director prior to installation if cover has
> been damaged or removed. If such material is deemed satisfactory to
> permit field cleanup, it shall be recleaned to match the condition in
> which it arrived on the jobsite. If not, it shall be rejected and
> returned to the manufacturer.
>
> C. No Clean Room materials shall be walked on or laid directly on the
> floor during the course of erection or assembly, or it shall be
> rejected by the Director until it has been recleaned to match stored
> material standards.

**[PART 3 - EXECUTION]{.underline}**

**3.01 [INSTALLATION]{.underline}**

> A. The nature of the completed facility demands special attention to
> maintaining an overall cleanliness in the project area. Methods of
> construction which minimize the generation of contaminants are
> essential to avoid major cleanup problems. The construction of the
> Clean Room represents a potential for surface contamination unless
> careful attention is paid to the manner in which the erection and
> placement is handled.
>
> B. All installation methods shall be in accordance with the latest
> recommendations of the component manufacturer.
>
> C. All installation procedures for Clean Room materials shall be done
> only by personnel who have received the Clean Room protocol training
> sessions.
>
> D. All finished materials directly exposed to Clean Room operating
> procedures, or to the airstreams serving the Clean Rooms, shall only
> be unwrapped and installed in the Clean Room during final clean
> erection phase.

**3.02 [ERECTION]{.underline}**

> A. Verify dimensions of building shell structure by field measurements
> so that Clean Room work will be accurately designed, fabricated, and
> fitted to the structure.
>
> B. Coordinate Clean Room work with the work of other sections and
> provide items to be placed during the installation of other work at
> the proper time to avoid delays in the work.
>
> END OF SECTION
>
> EXCEPT FOR ATTACHED TABLE